HEC-OM-S008

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0=Pump stop 1=Normal operation (Run) 2=Auto tuning start 3=Learning control 4=External tune control 0-2 Operation mode 3-15 Unused The operation mode with Modbus communication is displayed as the figure on the right (Mode 0 = Operation stopped).

Compact Guide Cylinder

25.5 27 9.5 9.5 11 29.5 31 25 11.5 14 16.5 26 28.5 7.5 10 12.5 30 32.5 32 12 13 15.5 25 27.5 8 9 11.5 29 31.5 40 15 20 20 32 32 11 16 16 36 36 50 14.5 21 21 33 33 10.5 17 17 37 37 The value of W in the table means the amount of auto switch protrusion from the body end surface.

MHL2

Depth 2.5 Rc(PT) 1/8 (Finger opening port) Rc(PT) 1/8 (Finger closing port) G Auto switch mounting groove (4 locations) 82 32.2 4-M10 X 1.5 (Piston rod and rack screw) 11 H 14.5 1 16 32.5 26 Width across flats 17 A 30 68 (4 locations) (100) 26 40 32 32 32 50 15 Closed E 15 15 70 Open F 24 24 4-M10 X 1.5 through (Thread for mounting attachment) B C D E F G H 110 158 202 J 202 282 366 Model

Rotary Table/Vane Style Series MSU

MSUA3 MSUA3-S/SE 8 x M4 x 0.7 depth 7 C 58 36 44 B 27 30 4 x M4 x 0.7 depth 5.5 22.5 5 +0.025 0 41h9 0 0.062 3H9 A +0.052 0 21H9 Long groove depth 5 (Positioning pin hole) 22.5 29 2.5 3 3 x 3H9 depth 3 +0.025 0 2 x 4.5 through ( A , B , C ) 15.5 45 9 42h9 0 0.062 2 36 3 8 11 8 1.5 5 5 18.3 29 11 Angle adjustment bolt 2 x 4.5 through 6 2 x M5 x 0.8 Adjustment: Max. 8.2 6 B port A port 0.5

Rubber Seal 5 Port Solenoid Valve Series SY3000/5000

171 13.5 248 237.5 219 14.5 173 162.5 139 17 Stations L1 L2 L3 L4 11 298 287.5 267 15.5 12 310.5 300 283 13.5 13 14 15 16 360.5 350 331 14.5 373 362.5 347 13 323 312.5 299 12 348 337.5 315 16.5 50

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

Note 3) Through-hole in case of 5 to 15 mm stroke.

Nozzle Type Ionizer

saving static neutralization nozzle IZN10E-01 wHigh flow rate nozzle IZN10E-02 0.7 0.7 0.6 0.6 Supply pressure [MPa] Supply pressure [MPa] 0.5 0.5 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 0 0 0 20 25 10 15 5 0 200 100 150 50 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] eFemale threads for piping IZN10E-11 With Stainless steel 316 One-touch fitting + Anti-static tubing Pressure gauge 0.30 O.D.

Fluoropolymer Fittings Hyper Fitting / Flare Type Series LQ3

H1 1/4 3 4 3 8 6 6 4 10 8 12 10 19 12 4 LQ3E11-R1 LQ3E21-R1 LQ3E21-R2 LQ3E31-R1 LQ3E31-R2 LQ3E32-R1 LQ3E32-R2 LQ3E41-R1 LQ3E41-R2 LQ3E51-R1 LQ3E51-R2 LQ3E61-R1 LQ3E61-R2 3.5 4.8 11 28.5 14 27.5 10 11 27.5 28.5 14 9 9 10 M (E1,E1) 6 4 6 16 34.5 20 29.5 17 11 33.5 30.5 14 16 9 10 H 44.5 21 16 16 11 47.5 25 20 20 14 19.5 22.5 A side 10 5 9 21 47.5 25 22.5 44.5 19.5 37 38 16 17 KK 37 38 16 17

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N.O. 2-port 7 MPa 59 14 19 63 19 61 3 MPa 7 MPa 3 MPa 7 MPa 52 59 52 59 71 56 59 56 59 71 79 55 17 14 17 14 7 7 14 7 14 7 9 9 22 19 22 19 12 12 19 12 19 12 15 15 56 63 56 63 75 60 63 60 63 75 83 59 22 19 22 19 12 12 19 12 19 12 15 15 54 61 54 61 73 58 61 58 61 73 81 57 SGH200 3-port 3-port dual pressure type N.C.

ML2B

12 12 LB 9.5 16 15 LD 5.5 6.5 8.5 MC M5 x 0.8 M6 x 1 M8 x 1.25 PA Rc 1/8 Rc 1/8 Rc 1/4 MD 9 11 14 KK 15 16 17.5 MB M6 x 1 M8 x 1.25 M10 x 1.5 ND 5.6 6.8 8.6 LL 28 30.5 37.5 PB Rc 1/16 Rc 1/16 Rc 1/8 OO 9 10 23 PP 56 62.5 77 QQ 34.5 42 51 RR 37.5 45 54 LA 11 12 14 Model ML2B25 ML2B32 ML2B40 10-13-14 Stroke Reading Rodless Cylinder with Brake Series ML2B With stroke sensor: With brake: ML2B

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

M1 M2 M3 m1 m2 m3 16 25 40 16 25 40 16 25 40 5 4 3.5 18 16 14 MY2H 13 14 10 35 35 30 45 33 28 68 66 57 7 6 7 15 13 13 MY2H 28 26 26 32 30 30 60 50 60 62 62 62 46 55 46 20 18 18 MY2HT 100 120 100 38 35 35 200 220 200 80 80 80 The above values are the maximum allowable values for moment and load.

Vacuum Module Series ZX

VJ100M1.7 x 15 VJ300M1.7 x 22 869 Series ZX Ejector Unit Specifications ZX1-W05 1 2 ZX1-W07 1 2 ZX1-W10 1 2 Nozzle dia.

3 Position Cylinder Series RZQ

15 15 20 15 1 pc.

Digital Flow Switch (Integrated display type) ( compatible)

(For the 100 L/min types, the piping length should be 11 cm or longer.)

Pressure Gauge Guide

The installation torque is 0.3 to 0.5 Nm. 14-11-15

MIW/MIS

HC HD HE JA JB KA KB LA LB LC MA MB MC NB NAB 6 8.5 6 9 M2.6 x 0.45 M3 x 0.5 M4 x 0.7 M6 x 1 25 35.5 MD 34 43.5 ME 37 54 19 28.5 Model MIW12-12 MIW20-20 +0.030 0 4 5 3.5 5 19 28.5 11 15 7.6 14.5 2.2 2.8 37 53 7.5 9.5 12.5 16.5 2.5H9 4H9 +0.025 0 8 Series MIW/MIS Finger options Tapped on upper and lower faces Tapped on all faces Attachment mounting thread 8-FE through Attachment mounting

Escapements Series MIW/MIS

HC HD HE JA JB KA KB LA LB LC MA MB MC NB NAB 6 8.5 6 9 M2.6 x 0.45 M3 x 0.5 M4 x 0.7 M6 x 1 25 35.5 MD 34 43.5 ME 37 54 19 28.5 Model MIW12-12 MIW20-20 +0.030 0 4 5 3.5 5 19 28.5 11 15 7.6 14.5 2.2 2.8 37 53 7.5 9.5 12.5 16.5 +0.025 0 2.5H9 4H9 8 Series MIW/MIS Finger options Tapped on upper and lower faces Tapped on all faces Attachment mounting thread 8-FE through Attachment mounting

Air Cylinder

M6 x 1 7 16 11 M18 x 1.5 18 1/8 63 129 56 Up to 400 35 32 65 27 50 18 38 10 9 55 11 M6 x 1 7 16 11 M18 x 1.5 18 1/8 63 129 63 Up to 400 35 32 70 27 55 18 38 6 11 51 11 M6 x 1 7 16 11 M18 x 1.5 22 1/4 73 135 67 Up to 400 35 32 75 27 58 18 38 6 11 51 11 M8 x 1.25 7 16 11 M18 x 1.5 22 1/4 73 135 80 Up to 500 40 37 88 32 69 22 45 12 13 62 13 M8 x 1.25 7 19 13 M22 x 1.5 26 1/4 83 158 85 Up to

Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

Reed switch Auto switch A90 Solid state M9B, M9N, F8B, F8N Size: 10, 20, 30, 50 11 Vacuum suction type Clean series 10 Size 20 30 50 11 MSQ B 10 A M9B 22 MSQ B 10 A M9B Number of auto switches A High precision type B Basic type Nil S n 2 pcs. 1 pc. n pcs.

CU

(mm) D-A9, D-A9V D-F9, D-F9W D-F9V, D-F9WV Bore size (mm) A A W B W B W A B 20 25 32 22 22 13 (10.5) 19 18 9 19 11 15 24.5 24.5 9 (6.5) 15 20 5 15 7 11 26.5 26.5 11.5 (9) 17.5 22.5 7.5 17.5 9.5 13.5 Values in ( ) are dimensions for D-A93 type.