EXxx-OML0010CN

No.EX-OML0010CN-C / / EX600-HT1A 2 8 8 9 10 10 11 12 12 13 1. I/O monitor(I/O ) 15 2. Diagnosis Data() 24 3. Sys. Configuration() 27 4. Parameter Setting() 33 5.

lPSMt

" to 28'(10-85mm) (0.3" to 3.4" std.)5.9" max.)

lPSMt

" to 28'(10-85mm) (0.3" to 3.4" std.)5.9" max.)

XL-OMV0002

29 10.5 XLC-63 88 209 100 39 11 87 95 70 76.5 36 9 XLC-80 90 250 117 45.5 11 114 110 83 105 44 9 XLC-100 108 317.5 154 55 11 134 130 102 139 58 9 XLC-160 138 339 200 65 11 190 180 153 124 62 12.5 10 XL-OMV0002 5. 200 1680 100 100,160[ ]18 12 Assy O XLC-16,XLC-25,XLC-40,XLC-50,XLC-63,XLC-8 200 XLC-100,XLC-160 100 FKM 110 Pa 11 XL-OMV0002 . 6-1. 1 1 Assy Assy Assy 12 XL-OMV0002 6-2. 1

Pneumatic Positioner IP300/IP3100

Less Than 0.64 SCFM (18 Nl/min) at 70 psi (5 kgf/cm'Z) Supply Output Flow Rate 8.8 SCFM (250 Nl/min) at 70 psi (5 kgf/cm':) Supply Ambient Temperature and Temperature of Working Air 14" 140"F (-10 60"C) Range of Angular Adjustment 0'-90'CW or 0"-90" CCW (adjustable range 0 -60 to 0q95') Port Size 1/4" (all ports) Raw lvlaterial of l\4ain Parts Aluminum Die-cast, Stainless Steel, Brass, Nitrile

MHx-OMY0001

(Nm) L(mm) MHM-16D M3x0.5 0.63 6 MHM-25D M4x0.7 1.5 8 MHM-32D M5x0.8 3 10 MHM-50D M6x1 5.2 12 (N) MHM-16D 100 MHM-25D 200 MHM-32D 300 MHM-50D 500 -7- 2-3. 40 2-4. () 5 5 P-01-11 -8- 2-5. 1.52 2-6. 1 ()ISO VG320 (SDS) -9- 2-7. 1) 1) 2) 3) 12mm -10- 2 C3 C1 C2: C3 D-M9V D-M9WV D-M9AV D-M9 D-M9W D-M9A D-P3DWA A B E G A B E G L A B E G L D F H MHM-16D 9.1 9.1 5.6 4.6 8.1 12.8 11

Series 11-CRA1-Z Rack & Pinion Type Rotary Actuator Size: 30, 50

D-M9B D-M9N, D-M9P D-A93 Load voltage Load current range Indicator light Application 24 VDC (10 to 28 VDC) 28 VDC or less 24 VDC, 100 VAC 2.5 to 40 mA 40 mA or less 5 to 40 mA, 5 to 20 mA 24 VDC relay, PLC IC circuit, Relay, PLC Relay, PLC Solid state auto switch PLC: Programmable Logic Controller Refer to page 920 for the applicable auto switch list. 905 Rotary Actuator 11-CRA1-Z Rotation

PA3145/3165/3185

Pilot Pressure Range Vacuum/Low Ordinary pressure Pilot pressure (MPa) Operating pressure (MPa) 5-5-25 2 Flow Characteristics/Weight Flow characteristics Port size 1 2 (IN OUT) 2 3 (OUT EXH) Weight (kg) Valve model C [dm3/(sbar)] C [dm3/(sbar)] b Cv b Cv 19 0.43 5.5 18 0.47 5.4 23 0.32 6.2 42 0.39 10 28 0.36 7.6 26 0.35 7.0 1 (IN) , 2 (OUT) 3 (EXH) 3 8 1 2 3 4 VPA3145 3 4 1.0 Port size

SFOD-OMT0011CN

b) (Print) (1-1-1-2) Alarm save CSV 10 No.SFOD-OMT0011CN-A (1-1-1-3) Software Exit [] a) Software Exit b) (Y) (1-1-2) View (V) /StatusTeachingParameter Step DataAlarmTest Drive [] 4.1 (2) JOG 4.1 (3) 4.1 (4) 4.1 (5) 4.1 (6) , 4.1 (7) 11 No.SFOD-OMT0011CN-A (1-1-3) Window (W) All Close Position Init All Close Position Init (1-1-4) Help (H) Version LanguagePassword (1-1-4-

Drain Separator for Vacuum Series AMJ 1

16 53 14 169 (171) 53 1/4, 3/8 AMJ3000 194 (195) 2.3 70 10.5 8.5 26 54 50 17 70 18 205 (206) 70 3/8, 1/2 AMJ4000 273 (274) 3.2 90 13 11 35 66 70 23 90 24 284 (285) 90 3/4, 1 AMJ5000 Note) ( ) is the case for metal bowl. 13-13-5

3 Port Air Operated Valve VPA3145/3165/3185 Series

3 Port Air Operated Valve VPA3145/3165/3185 Series How to Order 04 4 5 1 VPA3 Thread type VPA Air operated valve Nil Rc G NPT NPTF F N T Port size (IN, OUT port) Number of pilot 1 Single Symbol Port size Rc size VPA3145 VPA3165 VPA3185 Body size 03 04 (10A) 3 8 (15A) 1 2 (20A) 3 4 (25A) 1 1 4 6 1 2 06 10 12 14 20 8 1 2 1 Valve option Nil For ordinary pressure For vacuum and low pressure

PF3W7x.eng

Temperature lower limit under The fluid temperature is below -10 oC. Rise the fluid temperature. [ dtH2] Delay time setting at ON [ 0.00] 0.00 s The function number is increased and decreased by the UP and DOWN buttons.

PF3WBCSR.eng

Otherwise it can cause failure or malfunction of the system. 1 L+ Brown 18 to 30 VDC 2 N.C.

PF3W7x-X445.eng

Set value Sets the ON or OFF point of the switch output. 50% of rated flow 1 L+ Brown 18 to 30 VDC SET button Hysteresis Setting of hysteresis can prevent chattering. 5% of rated flow 2 N.C.

ARX Series

(82) .39 (10) 1.24 (31.5) OUT OUT m35 Options Bracket Panel nut Material 1348110A POM, NBR (gasket) Material 1348112 SPCC (black zinc chromated) Part No.

Note 3)o0.085450/20BeltLinear guide5 to 4090 or less (No condensation)200 W/;60AC servo motor (100/200 VAC)Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev)41?2?725Non-magnetizing lock547.924 VDC 0 10%

Note 3)o0.085450/20BeltLinear guide5 to 4090 or less (No condensation)200 W/;60AC servo motor (100/200 VAC)Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev)41?2?725Non-magnetizing lock547.924 VDC 0 10%

Note 3)o0.085450/20BeltLinear guide5 to 4090 or less (No condensation)200 W/;60AC servo motor (100/200 VAC)Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev)41?2?725Non-magnetizing lock547.924 VDC 0 10%

Note 3)o0.085450/20BeltLinear guide5 to 4090 or less (No condensation)200 W/;60AC servo motor (100/200 VAC)Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev)41?2?725Non-magnetizing lock547.924 VDC 0 10%

Note 3)o0.085450/20BeltLinear guide5 to 4090 or less (No condensation)200 W/;60AC servo motor (100/200 VAC)Motor type S2, S3, S4: Incremental 17-bit encoder (Resolution: 131072 p/rev) Motor type S6, S7, S8: Absolute 18-bit encoder (Resolution: 262144 p/rev)41?2?725Non-magnetizing lock547.924 VDC 0 10%