Pressure Relief 3 Port Valve With Locking Holes

Dimensions (1) Single action type VHS40~50 VHS30 VHS20 Unit (mm) Model Standard Specifications P1 P2 A B C D E F G H I J K L M VHS20 1/8, 1/4 1/8 66.4 22.3 40 37.5 14 46.6 33.6 28 43 24 4.5 14.8 9 VHS30 1/4, 3/8 1/4 80.3 29.4 53 49 19 52 38 30 49 30 4.5 19 9 VHS40 1/4, 3/8, 1/2 3/8 104.9 38.5 70 63 22 58 44 36 63 38 5.5 24 10 VHS40-06 3/4 1/2 110.4 42 75 63 22 58 44 44 63 43 5.5 26 10 VHS50

4 Port Direct Operated Poppet Solenoid Valve Series VQ D1000

Dimensions n L 2 39 31 3 50 42 4 61 53 5 72 64 6 83 75 7 94 86 8 105 97 9 116 108 10 127 119 11 138 130 12 149 141 13 160 152 14 171 163 15 182 174 16 193 185 17 204 196 18 215 207 19 226 218 20 237 229 L1 L2 1.13-11

Lubricator Series AL10 to 60

Body size 10 20 30 40 50 60 AV Thread type AU Metric thread (M5) Rc NPT G Nil AF N F AL20 Port size AR Body size Symbol Port size M5 1/8 1/4 3/8 1/2 3/4 1 10 20 30 40 50 60 (2) IR M5 01 02 03 04 06 10 Accessory When more than one specification is required, indicate in alphanumeric order. Note 2) For M5 and NPT thread types.

Rotary Clamp Cylinder: Standard ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63 Series MK

Auto switches are included, (but not assembled). 1 Rotary Clamp Cylinder: Standard Series MK Specifications 63 12 16 20 25 32 40 50 Bore size (mm) Double acting 90 10 Clockwise, Counterclockwise Action Rotation angle Note 1) Rotary direction Note 2) Rotary stroke (mm) Clamp stroke (mm) Theoretical clamp force (N) Note 3) 7.5 9.5 15 19 10, 20 20, 50 1400 525 825 40 75 100 185 300 Air 1.5 MPa

Standard Combinations

SUP 1/8 11 (0.60) 10 (0.54) VHS20 1/8 1/4 16 (0.87) 14 (0.76) 1/4 14 (0.76) 16 (0.87) VHS30 OUT IN 1/4 3/8 29 (1.57) 31 (1.68) 1/4 36 (1.95) 27 (1.46) B 3/8 VHS40 3/8 40 (2.17) 38 (2.06) 1/2 42 (2.28) 55 (2.98) Note) Use an air filter on the IN side for operating protection. EXH.

Smooth Cylinder Series CG1Y ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the low friction, double acting, single rod type of Series CG1  Q .

7.5 Up to 300 16.5 17 10 19.5 2 22 14 8 40 12 38 12 6 5.5 M10 x 1.25 M5 x 0.8 depth 8 Up to 300 20 17 12 19.5 2 22 18 10 50 13 47 13 8 6 M14 x 1.5 M6 x 1 depth 12 Up to 300 26 19 16 27 2 30 25 14 58 14 58 14 11 7 M18 x 1.5 M8 x 1.25 depth 16 Up to 300 32 27 20 32 2 35 30 18 58 14 72 14 11 7 M18 x 1.5 M10 x 1.5 depth 16 Up to 300 38 27 20 32 2 35 32 18 71 20 89 20 13 10 M22 x 1.5 M10 x 1.5

60

90 37.5 49 63 63 76 14 19 22 22 26 46.6 52 58 58 76 33.6 38 44 44 61 28 30 36 44 53 37.5 49 63 63 81 24 30 38 43 50 4.5 4.5 5.5 5.5 6.5 14.8 19 24 26 31 9 9 10 10 12 VHS20 VHS30 VHS40 VHS40-06 VHS50 1/4, 3/8, 1/2 3/4 3/4, 1 Options specifications Model Built-in silencer With bracket N Q R S T U V W X Y AA BB 5.4 6.5 8.5 8.5 11 8.4 10 19 19 27.5 27 36.5 43.5 43.5 49.5 40 53 70 70 90 75.4

XLDV Series

x 10-10 for the standard material (FKM) at ambient temperature, excluding gas permeation Leakage Pam3/s External 1.3 x 10-11 for the standard material (FKM) at ambient temperature, excluding gas permeation Flange type KF(NW) KF(NW),K(DN) Main material Body: aluminum alloy, Bellows: SUS316L, Main part: SUS304 and FKM (standard sealing material) Note 2 Surface treatment for body Outside: hard

Electro-Pneumatic Positioner

IP8000 IP8100 Type Item Lever type lever feedback Rotary type cam feedback Single action Double action Single action Double action Input current Input resistance Supply air pressure Standard stroke Sensitivity Linearity Hysteresis Repeatability Coefficient of temperature 4 to 20mADC Note 1) 23515 (4 to 20mADC) 0.14 to 0.7MPa 10 to 85mm (Deflection angle 10 to 30) 60 to 100 Note 2) Within

FQ1

Fiber element (PP) Part number Dimensions Filtration accuracy (m) Element symbol FQ1 0 1 0 M005N B 04 N 0.5 1 5 10 20 50 75 100 EHM10AX3 EHM39R10AYX3 EHM23R10AYX3 EHM19R10AYX3 EHM15R10AX3 EHM11R10AX3 EHM10R10AX3 EHM8R10AX3 QX50 Q001 Q005 Q010 Q020 Q050 Q075 Q100 Element type Select from tables on the right.

Rotary Clamp Cylinder: Standard ø 12, ø 16, ø 20, ø 25, ø 32, ø 40, ø 50, ø 63 MK Series

-X 389 MK Series Specifications 12 16 20 25 32 40 50 63 Bore size (mm) Double acting 90 10 Clockwise, Counterclockwise Action Rotary angle Note 1) Rotary direction Note 2) Rotary stroke (mm) Clamp stroke (mm) Theoretical clamp force (N) Note 3) 7.5 9.5 15 19 10, 20, 30 10, 20, 30, 50 40 75 100 185 300 525 825 1400 Air 1.5 MPa Fluid Proof pressure Note 4) 0.1 to 0.6 MPa Operating pressure

Clean Room Regulator/Fluoro Resin Type Series SRF30

100 50 0 1 0 5 10 15 20 25 30 0 5 10 15 20 25 30 Time of water flow (min) Measuring time Test method and conditions The liquid contact portions were filled with sulphuric acid and left untouched for half an hour.

ITVH

100 0 25 50 75 100 Input signal [% F.S.]

Magnetic Separator FHM Series

0 1 5 10 50 100 100 90 80 100 90 80 70 60 50 40 30 20 10 0 100 200 300 400 500 100 200 300 400 500 100 200 300 400 500 Elimination ratio (%) Elimination ratio (%) Elimination ratio (%) 75 70 60 50 40 30 20 10 0 1 5 10 50 30 100 1 5 10 50 100 Flow-back count Flow-back count Flow-back count Explanation of graph Explanation of graph Example: Elimination ratio and concentration after using the

XLA Series

Vale specifications Model XLA-16 XLA-25 XLA-40 XLA-50 XLA-63 XLA-80 XLA-100 XLA-160 Flange (valve) size 16 25 40 50 63 80 100 160 Actuating type Normally closed Fluid Vacuum of inert gas Operating temperature oC 5 to 60 (5 to 150 for high temperature type) Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-6 Conductance l/s Note 1 5 14 45 80 160 200 300 800 Internal 1.3 x 10-10 for

XLA- ∗ -F7NJ ∗ - ∗ Series

Model XLA-16 XLA-25 XLA-40 XLA-50 XLA-63 XLA-80 XLA-100 XLA-160 Flange (valve) size 16 25 40 50 63 80 100 160 Actuating type Normally closed Fluid Vacuum of inert gas Operating temperature oC 5 to 150 Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-6 Conductance l/s Note 1 5 14 45 80 160 200 300 800 Internal 1.3 x 10-10 for the standard material (FKM) at ambient temperatures , excluding

XLG Series

1.3 x 10-10 for the standard material (FKM) at ambient temperature, excluding gas permeation Leakage Pam3/s External 1.3 x 10-10 for the standard material (FKM) at ambient temperature, excluding gas permeation Flange type KF(NW) KF(NW),K(DN) Main material Body : Aluminum alloy, critical part : SUS304, FKM (standard seal material) Note 2 Surface treatment for body Outside: hard anodized Inside

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Range Back Pressure SMC 10 1.9 -750mmHg~72.5psi 0~100C 0~45psi (60psi) 79 109 45.5 Height Width Operator Dia. 1/2 LVQ40 Brand X 12.7 3.0 -737mmHg~71psi 2~65C 0~40psi 107.2 133.9 73.2 SMC 16 5.0 -750mmHg~72.5psi 0~100C 0~45psi (60psi) 126.5 141 75 Manufacturer Orifice Size Cv Factor Operating Press. Range Operating Temp. Range Back Pressure Height Width Operator Dia.

For Dry Air, Pilot Operated Series VQ20/30 2 Port Solenoid Valve

Port size Body style Port size One-touch fitting for 6 One-touch fitting for 8 One-touch fitting for 10 One-touch fitting for 12 VQ20 VQ30 Symbol C6 C8 C10 C12 A: Single unit Manual override None M: For manifold B(1) Locking style (Slotted) Note 1) Only normally closed DIN connector in-line style is possible.

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Optional accessory Blank plate ass'y: DXT199-22-1A EXH Relocation Spacerl DXT199-29-2TA SUP Relocation Spacar: (only for type 41, 42, 43): DXTl99-35-1TA 20 stations NVVsZs41-168'1.OlT --TStations a lf there are mof6 than 10 stations, supply 6ir and exhaust frctn both sid6s of manitold. NVV5Z5-4 2-( 05 ) 1 -r87T) Y -r.Stationsa asize ot A, B port E-?