CNG

st or more 15 to 49 st 50 st or more 10 st or more 15 to 49 st 50 st or more D-H7/H7W D-H7BAL/H7NF 10 st or more 15 to 59 st 60 st or more 10 st or more 15 to 59 st 60 st or more D-C73C/C80C/H7C 10 st or more 15 to 64 st 15 to 74 st 65 st or more 10 st or more 15 to 64 st 15 to 74 st 65 st or more D-B5/B64/G5NTL 10 st or more 15 st or more 75 st or more 75 st or more 10 st or more 75 st

CNG

st or more 15 to 49 st 50 st or more 15 to 49 st 10 st or more 50 st or more D-H7/H7W D-H7BAL/H7NF 10 st or more 15 to 59 st 60 st or more 15 to 59 st 10 st or more 60 st or more D-C73C/C80C/H7C 10 st or more 15 to 64 st 15 to 74 st 65 st or more 15 to 64 st 15 to 74 st 10 st or more 65 st or more D-B5/B64/G5NTL 10 st or more 15 st or more 75 st or more 75 st or more 10 st or more 75 st

Multistage Ejector Series ZL112/212 1

: 0.4 MPa Supply pressure: 0.4 MPa 100 90 100 90 ZQ Vacuum pressure (kPa) Vacuum pressure (kPa) 80 80 70 70 ZF 60 60 50 50 ZP 40 40 30 30 ZCU 20 20 10 10 AMJ 0 0 10 20 30 40 50 60 70 80 90 100 110 120 20 60 100 140 180 220 260 300 130 Suction flow rate (/min(ANR)) Suction flow rate (/min(ANR)) Misc.

VCW

Note) Note) 10 is N.C.

CLK1

A B 3 5.5 7 7 15 60 65 + 45 (n-2) D-H7, D-H7W D-H7F 30.5 28.5 30 30 n-2 2 15 + 50 ( ) (n = 2, 4, 6...) Approx. Hs 30.5 35 40.5 47.5 D-H7C 15 65 10 65 + 50 (n-2) A B Approx. Hs 3 5.5 7 7 n-2 2 D-H7C 31.5 28.5 30 30 15 + 50 ( ) (n = 2, 4, 6...)

A_HEC-OM-K001

fluid Pressure loss (HED005/007) 9.5 Performance Chart 9-17 A_HEC-OM-K001-1.7 Chapter 9 Appendix 9.5.5 Facility water Pressure Loss Fluid: Water HED003 60 50 Pressure loss kPa HED003-HW13 HED003-HW19 40 30 20 10 0 0 1 2 3 4 5 6 7 8 9 10 Flow rate L/min Fig.9-15 Facility water Pressure Loss (HED003) HED005, HED007 60 HED005-HW13 HED005-HW19 HED007-HW13 HED007-HW19 50 Pressure loss kPa 40

RSQ

, Chamfered, Roller 0.74 0.80 0.86 Double acting with spring loaded REC 40 Model C 5 D 40 48 53 55 60 65 60 65 70 75 80 85 75 80 85 Mounting bolt M3 x 45l M3 x 55l M3 x 60l M5 x 55l M5 x 60l M5 x 65l M5 x 60l M5 x 65l M5 x 70l M5 x 75l M5 x 80l M5 x 85l M6 x 75l M6 x 80l M6 x 85l Lever with built-in shock absorber 0.97 1.01 1.05 RSQB12-10 RSQB16-10 -15 RSQB20-10 -15 -20 RSQB32-10 -15 -20

Ejector Valve Unit, Series ZYY/ZYX

-60 -60 -60 20 20 -40 -40 -40 -40 Suction flow rate Suction flow rate 10 10 -20 -20 -20 -20 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0 0 0 10 20 0 0 0 5 10 15 20 25 Supply pressure MPa Suction flow rate l/min (ANR) Supply pressure MPa Suction flow rate l/min (ANR) ZY -10S Max. vacuum pressure: 84KPa {630mmHg} Y3 X3 ZY -10L Max. vacuum pressure: 53KPa{400mmHg} Y3 X3 Exhaust

Vacuum System Peripherals:

8, R 10, R 10, R 10, R 6 8 10 4 6 KM11 6, 10 One-touch fitting One-touch fitting 1 4 3 8 KM12 6, 10 One-touch fitting Rc KM13 3 One-touch fitting One-touch fitting KM11 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 4 One-touch fitting R male thread KM12 KM14 3 One-touch fitting KM15 KM15 3 One-touch fitting One-touch fitting rod KM16 KM14 KM16 One-touch fitting 3 One-touch fitting KM13 Miniature fittings

Title not found

9/16 21/32 21/32 11/32 11/32 9/32 9/32 10-FB3 10-FB2 10-FB4 10-FB1 10-FLB1 (Short) 10-FLB2 10-FLB2 (Short) 10-FLB1 21 Page 5 Distributed by Power Aire, Inc.

Angular Style Air Gripper Series MHC2/MHCA2/MHCM2

A part z1 m1 = 20 x 3 x 4 x 2.7 x 10-6 = 6.48 x 10-4 (kg) Mass calculation m1 = a x b x c x Relative density Z1 Inertial moment around Z1 axis Z1 = {m1 (a2 + b2) / 12} x 10-6 = {6.48 x 10-4 x (202 + 32)/12} x 10-6 = 2.21 x 10-8 (kg.m2) = 2.21 x 10-8 + 6.48 x 10-4 x 16.42 x 10-6 = 0.20 x 10-6 (kg.m2) A Inertial moment around Z axis A = Z1 + m1r12 x 10-6 z f2 z2 B part r2 = 23.5(mm) Mass

MGC

(Including band and screw) Operating Range Bore size (mm) Bore size (mm) Auto switch model Auto switch model 20 25 32 40 50 20 25 32 40 50 D-C7/C8 D-H7 D-B5/B6 D-G5/K5 D-B7/B8 D-G7/K7 D-B7/B80 BMA2 -025 BMA2 -032 BMA2 -040 BMA2 -050 BMA2 -020 10 8 10 9 10 D-B73C/B80C D-C7/C80 BA -32 BA -04 BA -05 BA -01 BA -02 10 8 10 9 10 D-C73C/C80C D-B5/B64 BM1 -01 BM1 -02 BM1 -32 BM1 -04 BM1 -05 10 8

MHC2

A part z1 m1 = 20 x 3 x 4 x 2.7 x 10-6 = 6.48 x 10-4 (kg) Weight calculation m1 = a x b x c x Relative density IZ1 Inertial moment around Z1 axis IZ1 = {m1 (a2 + b2) / 12} x 10-6 = {6.48 x 10-4 x (202 + 32)/12} x 10-6 = 2.21 x 10-8 (kg.m2) = 2.21 x 10-8 + 6.48 x 10-4 x 16.42 x 10-6 = 0.20 x 10-6 (kg.m2) IA Inertial moment around Z axis IA =IZ1 + m1r12 x 10-6 z f2 z2 B part r2 = 23.5(mm)

MHC2

A part z1 m1 = 20 x 3 x 4 x 2.7 x 10-6 = 6.48 x 10-4 (kg) Weight calculation m1 = a x b x c x Relative density IZ1 Inertial moment around Z1 axis IZ1 = {m1 (a2 + b2) / 12} x 10-6 = {6.48 x 10-4 x (202 + 32)/12} x 10-6 = 2.21 x 10-8 (kg.m2) = 2.21 x 10-8 + 6.48 x 10-4 x 16.42 x 10-6 = 0.20 x 10-6 (kg.m2) IA Inertial moment around Z axis IA =IZ1 + m1r12 x 10-6 z f2 z2 B part r2 = 23.5(mm)

Series CXS 10-/11-/12- Dual rod cylinder 21-/22- ø6, ø10, ø15, ø20, ø25, ø32

(mm) Model CXS20-10 S SS ZZ Z 10 92 116 30 20 102 126 40 30 112 136 40 40 122 146 40 21-/2210-/11-/12CXS20-20 CXS20-30 CXS20-40 CXS20-50 21-/2210-/11-/1221-/2210-/11-/1221-/2210-/11-/1250 132 156 60 21-/2210-/11-/12100 182 206 80 CXS20-75 CXS20-100 21-/2210-/11-/1275 157 181 60 21-/2210-/11-/1285 Dual rod cylinder CXSL 1221CXS / 10-/1122Basic style / CXS25, CXSL25 10-/11221221S ZZ 12 12 SS

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

ZFB100 ZFB101 ZFB200 ZFB201 ZFB300 ZFB301 ZFB401 16 x 14 x L60 I-34S-A 10 x 6 x L33 10 pcs. 10 pcs. I-35S-A 10 pcs. 10 pcs. 12 x 8 x L42 O-ring, Seal Wiping with alcohol, etc., may cause damage. I-36S-A 10 pcs. 10 pcs. 14 x 10 x L45 I-39S-A 10 pcs. 10 pcs.

VCW

) 10 is available only for N.C.

Series VC, Direct Operated, 2 Port Solenoid Valve for Water, Series VCW

) 10 is N.C.

Angular Air Gripper Series MHC2/MHCA2/MHCM2

A part z1 m1 = 20 x 3 x 4 x 2.7 x 10-6 = 6.48 x 10-4 (kg) Weight calculation m1 = a x b x c x Relative density IZ1 Inertial moment around Z1 axis IZ1 = {m1 (a2 + b2) / 12} x 10-6 = {6.48 x 10-4 x (202 + 32)/12} x 10-6 = 2.21 x 10-8 (kg.m2) = 2.21 x 10-8 + 6.48 x 10-4 x 16.42 x 10-6 = 0.20 x 10-6 (kg.m2) IA Inertial moment around Z axis IA =IZ1 + m1r12 x 10-6 z f2 z2 B part r2 = 23.5(mm)

2-Color Display Digital Flow Switch Series PFM

, 525 / For 25 (l/min) 30 15 750 (kPa) 300 (kPa) 300 (kPa) Flow rate (l/min) Flow rate (l/min) 100 (kPa) 750 (kPa) 20 10 100 (kPa) 5 10 0 5 10 15 5 10 15 0 Number of needle rotations Number of needle rotations PFM750, 550 / For 50 (l/min) PFM711, 511 / For 100 (l/min) 60 120 300 (kPa) 100 300 (kPa) Flow rate (l/min) Flow rate (l/min) 750 (kPa) 100 (kPa) 40 80 750 (kPa) 60 100 (kPa) 20 40