KA

<M5, M6> Tube O.D. (mm) Soft nylon Polyurethane A <M5, M6> P D L M Part No.

High Power Cylinder Series RHC

AS600 (258) AS420 (102) AS600 (258) AS600 (258) AS600 (258) AS800 (586) AS500 (123) 1-A 2-B 1-C 2-A 2-B 1-A 2-B 2-A 2-B 2-B 2-B 2-B 2-B 1-A 2-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 2-B 2-A 2-B 2-B 2-B 2-B 2-B 2-B 2-B 2-B 2-B 2-B 2-B 2-B 20 8, 10 1/4 500 9.5 0 1,000 2,000 3,000 Maximum speed Vmax (mm/s) 50 12, 16 1/4, 3/8 1000 19 63 Composed effective area So (mm2) Composed effective area So (mm2)

Flow sensor

ZS-36-A2 2 station: 2 L-type brackets With mounting screws (M3 x 25 L) 2 pcs. ZS-36-A3 3 station: 2 L-type brackets With mounting screws (M3 x 35 L) 2 pcs. ZS-36-A4 4 station: 2 L-type brackets With mounting screws (M3 x 45 L) 2 pcs. ZS-36-A5 5 station: 2 L-type brackets With mounting screws (M3 x 55 L) 2 pcs. -11No.

Dedicated Controller Series LC1 Uniaxial Type

N 3 Mounting bracket Number of axes 1 3 5 M3 M5 1 axis Actuator Classification Mounting Note 1) Series LJ1 (incremental) B N: T-nut mounting L: T-bracket mounting Adaptable actuators Compatible actuator models Symbol Motor capacity 50W 1H LJ1H101B LJ1H202A LJ1H202C LJ1H303D LJ1S101SC LJ1S202SC LJ1S303SE LJ1H101SC LJ1H202SC LJ1H303SC LJ1H102H-K LJ1H102B-K LJ1H202F-K LJ1H202A-K LJ1H303A-K Ball

VF1000-OMP0001

M5 M5 M5 1/61/4 11.5Nm ) Rc Rc Rc Rc Nm Rc1/8 79 Rc1/4 1214 Rc3/8 2224 6 VF1000-OMP0001 VF1000/3000/5000 VF1000/3000/5000 VF1000/3000/5000 VF1000/3000/5000 5 5 5 5 / / / / ( ( ( ( ) ) ) ) ( ( ( ( ) ) ) ) 3 5m 30 ( ) 1 ()ISO VG32 2 ()ISO VG32 7 VF1000-OMP0001 VF1000/3000/5000 VF1000/3000/5000 VF1000/3000/5000 VF1000/3000/5000 (E) (T) DIN (D) L (L) M (M) DC +DIN +-1 2 (G) A C S DIN

Speed Controller: Standard Type In-line Type AS Series

AS1000-M3 AS1000-M5 AS2000 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Flow rate L/min (ANR) Flow rate L/min (ANR) Flow rate L/min (ANR) AS-F TMH ASD AS AS Number of needle rotations Number of needle rotations Number of needle rotations AS-FE AS3000 AS4000 AS5000 Inlet pressure: 0.5 MPa KE Inlet pressure: 0.5 MPa Flow rate L/min (ANR) Inlet pressure: 0.5 MPa Flow

Safety Speed Control Valve (SSC Valve) Series ASS

min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Number of needle rotations Bore size (mm) Number of needle rotations Conditions : Supply pressure at 0.5 MPa, No load Primary speed of meter-in type can be controlled as likely as during normal operation.

IZx-OMR0035

Installation of Ionizer 1) Installation with bracket When installing the Ionizer with a bracket, secure it with M5 screws using the mounting holes on the bottom of the bracket (The screws need to be prepared by the user). Refer to "6. Dimensions" for details. The angle adjustment range of the bracket is 45 degrees in direction A, and 90 degrees in direction B.

HEC-OM-U015

Required flow rate 10 to 15 L/min Facility water 11 Temperature Alarm b contact 3.3.2 Heating Capacity Temperature range 10 to 35 C 5 (CLOSE During Alarm) system Only trained personnel should handle or operate the product.

MXU

Auto Switch Groove Position D-A, D-A9V W D-M9, D-F9W A D-M9V, D-F9WV W Bore size (mm) Application B B A W A B stroke 6 5 to 30 3.5 0 17 6.5 13 3.5 2.5(5) 17 4.5 5 to 20 17 13 17 10 25 7.5 3.5 20 16 2.5 7.5 20 1.5 0.5 30 19 15 19 (1) 5 27 23 27 10 22 18 22 15 27 23 27 16 8 4 2 8 2 0 B A 20 22 18 22 Bore (mm) 6 10 16 25 27 23 27 (0.5) 6.9 10 30 27 23 27 8.8 14 13.9 19 Note 1) Negative figures

MXU

MG Lateral Mounting (Body tapped) CX D-X Front Mounting l1 l Model MXU6 MXU10 MXU16 Bolt Maximum tightening torque (Nm) M4 x 0.7 2.5 12.7 9.4 20M5 x 0.8 5.1 15.6 11.2 M5 x 0.8 5.1 20.6 16.2 Data Vertical Mounting (Body tapped) l Model MXU6 MXU10 MXU16 Bolt Maximum tightening torque (Nm) M3 x 0.5 1.1 5 M4 x 0.7 2.5 7 M4 x 0.7 2.5 9.5 Top Mounting l Model MXU6 MXU10 MXU16 Bolt Maximum tightening

CJ2

Dd9 d L m t CJ2 l Applicable bore (mm) Applicable snap ring Part no.

AMPSeries

hole F Applicable screw M5 hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90

Exhaust Cleaner for Clean Rooms AMP Series

hole F Applicable screw M5 hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90

CUJ

Auto switch CUJ cylinder Cylinder B Cylinder A Auto switch Magnetic substance Non-magnetic spacer of 2.5 mm or more Without Shielding Plate d Bore (mm) 10 L 6 8 L d 19 6 19 6 19.5 6 The space can be reduced by attaching shielding plates (steel plates 0.2 to 0.3 mm thick) to the sides of the cylinders facing each other.

RHC

1-C 2-A 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 2-B Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 6 1/8, 1/4 500 1.5 0 1,000 2,000 3,000

High Power Cylinder Series RHC

1-C 2-A 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 2-B 6 1/8,1/4 500 1.5 0 1,000 2,000 3,000 6 1/4, 3/8 10 1/4, 3/8 Maximum speed Vmax [mm/s] 1000 3 25 20 1500 4.5 Composite effective area So [mm] Composite effective area So [mm] Composite effective area So [mm] 10

SYJ Series

On B side SY3000-37-80A-7 On A side 1 to 8stations SY3000-37-80A-3 On B side SY3000-37-80A-10 On A side 9 to 12stations SY3000-37-80A-6 On B side SS5YJ7-21,41SA SY3000-37-80A-12 On A side 13to16stations SY3000-37-80A-9 On B side Note 1) The above is for station addition or maintenance.

KS/KX

(mm) D2 L A M D1 Applicable tubing KXH04-M5 KXH04-M6 KXH04-01S KXH06-M5 KXH06-M6 KXH06-01S KXH06-02S KXH08-01S KXH08-02S KXH08-03S KXH10-02S KXH10-03S KXH10-04S KXH12-03S KXH12-04S M5 x 0.8 M6 x 1 38.5 11 13 39 35 8 10.4 16 2.5 4.0 4.0 4 40 39.5 40 42 45 46 49 50 58 59 62 60 63 16 36 1 8 M5 x 0.8 M6 x 1 12 2.5 3 4.0 4.0 5.6 5.6 15 8 36 6 12.8 15 17 1 8 1 4 1 8 38 39 42 43 44 20 26 28 34 42

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

AS121FG-M5-23 AS121FG-U10/32-01 9.6 25.8 28.6 12.3 8 7 12.7 17.3 22.1 8.4 8.4 3.2 M5 0.8 25 1/8" 22.2 12.3 17.3 22.1 12.7 AS221FG-01-23 AS121FG-U10/32-03 14.2 31.1 36.1 14.3 12 16 12.7 20.4 27.5 9.3 9.3 3.2 32.1 5/32" 27.1 R 1/8 8 10-32 UNF 28.6 25.8 25 22.2 7 9.6 AS121FG-M5-04 AS121FG-U10/32-05 21.3 26.1 12.3 12.7 17.3 22.1 9.3 11.4 4 3/16" 16.5 M5 0.8 11.7 9.6 25.8 28.6 8 7 25 22.2 AS121FG-M5