10

03MNote 1) 32 20 30 M10 x 1.25 10 16 10 +0.058 0 14 +0.30 +0.10 28 0.10 0.30 Y-04MNote 1) 40 22 40 M14 x 1.5 11 19 10 +0.058 0 14 +0.30 +0.10 28 0.10 0.30 Y-05MNote 1) 50, 63 28 50 M18 x 1.5 14 24 14 +0.070 0 20 +0.30 +0.10 40 0.10 0.30 Y-08MNote 1) 80 40 65 M22 x 1.5 20 34 22 +0.084 0 30 +0.30 +0.10 60 0.10 0.30 Y-10MNote 1) 100 40 65 M26 x 1.5 20 34 22 +0.084 0 30 +0.30 +0.10 60 0.10 0.30

energy saving effect

Description Size 1 Valve Rc1/2 2 Valve Rc1 3 Y-strainer (#40) (Accessory) Rc1 4 Flow meter Prepare a flow meter with an appropriate flow range. 5 Valve (Part of thermo-chiller) Rc3/4 6 Y-strainer (#40) Rc1/2 7 Pressure gauge 0 to 1.0 MPa 8 Y-strainer (#40) Rc1 Cable Specifications Power supply and signal cable should be prepared by user.

HRX-OM-X071

Model number Serial number Type and quantity of refrigerant How to read the serial number y T 001 Jun 2020 y T 001 Year Symbol Remarks Month Symbol Remarks Serial no. 4 R Repeated from O to Z in alphabetical order, with O for January and Z for December 2020 y Repeated from A to Z in alphabetical order 2021 Z 5 S 2022 A 6 T Fig 1-1 Position of product label HRR Series 1.4 Product Label 1-3

53

Description Size 1 Valve Rc1/2 2 Valve Rc1 3 Y-strainer (#40) (Accessory)* Rc1 4 Flow meter Prepare a flow meter with an appropriate flow range. 5 Valve (Part of thermo-chiller) Rc1/4 6 Pressure gauge 0 to 1 MPa 7 Y-strainer (#40) or filter Rc1/2 8 Valve Rc3/8 9 Y-strainer (#40) or filter Rc3/8 * If foreign objects of 20 m or larger may enter, install a particle filter separately.

PF2A/PF2W

Z directions for 2 hrs. each 490 m/s2 in X, Y, Z directions 3 times each 1000 Vp-p, Pulse width 1 s, Rise time 1 ns Resistance Note 1) In the case of PF2W711, 3% of F .S. or less (15C to 35C, based on 25C).

100

0 t y i !2 !3 !

Digital Flow Switches, Series PF2A, Series PF2W

Z directions for 2 hrs. each 490m/s2 in X, Y, Z directions 3 times each 1000Vp-p, Pulse width 1s, Rise time 1ns Resistance Note 1) In the case of PF2W711, 3% of F.S. or less (15C to 35C, based on 25C).

Digital Flow Switches

Z directions for 2 hrs. each 490m/s2 in X, Y, Z directions 3 times each 1000Vp-p, Pulse width 1s, Rise time 1ns Resistance Note 1) In the case of PF2W711, 3% of F.S. or less (15C to 35C, based on 25C).

Clean Air Module

IDH Component Parts ID Threaded type Threaded type IDG Manual operation valve (with lever lock) IDK AMG Lead wire with L-type connector AFF With flow adjuster With differential pressure indicator AM PB AMD One-touch fitting One-touch fitting PA AMH AME u t q w e r y AMF No. Description Individual part no.

Speed Controller with Pilot Check Valve with One-touch Fitting Series ASP 1

3 @5 q @3 t r u e o y @1 i !7 !1 Component Parts Material NBR NBR Stainless steel Stainless steel POM, Stainless steel (1) Note Description DY seal DY seal Spring Spring Cassette Seal Spacer O-ring O-ring O-ring O-ring Ring Description No. !4 !5 !6 !7 !8 !9 @0 @1 @2 @3 @4 @5 Note Material PBT PBT PBT Brass Brass Brass Brass Brass Brass Brass No. q w e r t y u i o !0 !1 !2 !

ML1

Model PP SS VV OO Gasket QQ RR TT UU ML1C25 ML1C32 ML1C40 C11.2 10 14 37 24 8 27 20 8 16.5 C11.2 18 46 30 12 32 22 8 17 23.5 12.5 10 C14 53 40 34 26 Model A B C D E F G H I J K L M N P Q S T O R U W Z V Y ML1C25 ML1C32 ML1C40 274 260 137 140 88 108 87 85.5 60 74 97 100 42.5 26 34 206 28 24 5.6 9 5.5 8.5 9.5 M5 X 0.8 M6 X 1 11 322 306 161 160 108 131 101 99.5 64 92 118 120 53.5 28 40 242 36.5

Mechanical Valves Series NVM, NVFM, NVZNI

. @ w B" ** rr', ,& Y: ACTUATOR TRAVEL INOEX NVM 830 MOUNTING METHOD Not Recommended Recommended Avoid Sudden Movement of Cam & Lever Floom lor limit to oDerale Protect Acluato6 TERMS O.P. = Operating Position Position Valve is shifted when force is applied to actuator to begin operation. F.O,F. Whole Stroke Force -Force required to move actuator.

1 Blow Gun Series VMG K
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MS Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com T
VMG Pressure loss is less than 1%. (nozz

2 u r e q w No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

VCA

M5 M5 VCA21 VCA31 1/4 1/4, 3/8 3/8, 1/2 3/4 VCA41 4 Series VCA How to Order Manifolds (VCA20) VV2C A 2 02 02 How to Order Manifold Assemblies (Example) Enter the valve and option models to be mounted under the manifold base part number.

IIIIIII

. @ w B" ** rr', ,& Y: ACTUATOR TRAVEL INOEX NVM 830 MOUNTING METHOD Not Recommended Recommended Avoid Sudden Movement of Cam & Lever Floom lor limit to oDerale Protect Acluato6 TERMS O.P. = Operating Position Position Valve is shifted when force is applied to actuator to begin operation. F.O,F. Whole Stroke Force -Force required to move actuator.

HRX-OM-S004

Y strainer (40 meshes) 20A 1pc. Barrel nipple 20A 1pc. Drain pan for the pump 1pc.

Digital Flow Switches Series PF2A

Cable wire color Terminal 1 Brown DC+ q 2 Not used N.C. w 3 Blue DC e 4 White IN: 1 to 5 V r Power supply / Output connector (8P) Power supply / Output connector (accessory) i u y t r e w q Pin no. Pin no. Terminal 7 Green CH4_OUT1 8 Yellow N.C.

HRX-OM-W032

Connection port Sealant Note: When using the Y strainer of the accessory, fasten it on the return port. Clean the filer of the strainer after the trial operation before starting the proper operation Sealant Barrel nipple 25A Y strainer 25A Arrow direction of Y strainer Connect the strainer so that the screen faces downward.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

L NZ RR1 NX E1 L1 MM U1 ND A1 Cotter pin Polishing ball 12 Y-04C 40 16 +0.3 +0.1 38 M14 X 1.5 12 22 24 55 13 25 55.5 3 X 18l Polishing ball 12 Y-05C 50, 63 +0.3 +0.1 16 38 M18 X 1.5 12 27 28 60 15 27 55.5 3 X 18l Polishing ball 18 Y-08C 80 +0.3 +0.1 28 55 M22 X 1.5 18 37 36 71 19 28 76.5 4 X 25l Polishing ball 20 Y-10C 100 +0.3 +0.1 30 61 M26 X 1.5 20 37 40 83 21 38 4 X 30l 83 Knuckle pins

2/3 Port Valve

Then valve element B y connected to the valve element A t is open. When the pilot operated solenoid valve !2 is energized, the pilot air supplied to the bottom of the piston u moves upward to open the valve element A t and closes the valve element B y. Because rod !0 is connected to valve element A t by parallel pin !1.