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th the regulalor a a a a a a a a a a a a a a a a a a o a a a r t a a a a a a a o a a AW With digital pressure switch with display fitf"r r.gut"t;f outDut specificalions (tsE30-01-!!

High Vacuum L Type Valve

Nut assembly (9) XL1A50-10-1 XL1A80-10-1 Suffix for seal materials Seal material EPDM Barrel Perfluoro R Kalrez R Chemraz R VMQ FKM for PLASMA Combination No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 Symbol -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 Note 1) Barrel Perfluoro R is a registered trademark of MATSUMURA OIL Co.,Ltd. Kalrez R is a registered trademark of E.

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

(mm) Applicable cylinder bore size (mm) 4 6 8 10 12 AS-FPG AS-FPQ Clean performance Resin: PP Metal: Brass (electroless nickel plated) Resin: PP Metal: Stainless steel (SUS304) M5 x 0.8 6, 10, 16, 20 AS121FP-M5 R 1/8 20, 25, 32 AS221FP-01 R 1/4 20, 25, 32, 40 AS221FP-02 R 3/8 40, 50, 63 AS321FP-03 10-AS-F 10-AS-FG R 1/2 63, 80, 100 AS421FP-04 Resin: PBT, POM Metal: Brass (electroless nickel

Series CJ5-S ø10, ø16 Stainless Steel Cylinder

HY C M A BA BB CA CB D F GA GB H LB LC LH LT LX LY LZ MM NN NA NB S X Y Z 10 16 D-X Individual -X Technical data Series CJ5-S Dimensions Rod side flange style (F): CJ5FS R V 0 0.3 0 0.3 CA BA BB Rod cover side GB Piping port 2 x M5 x 0.8 GA NN MM Piping port M5 x 0.8 Cover surface 0 0.3 BA CB D FY FB With head cover port in axial location (R) 2 x FC Mounting hole FX FZ NA F FT 0 0.3 BB

Floating Joint

JS20, 32, 40, 63 Center of sphere M M U U D J F B E G P A R H (mm) Max. thread depth P Center of sphere R Allowable eccentricity U Max. operating tension and compression force (N) Weight (kg) M A B C D E F G H J Model JS10-4-070 JS16-5-080 8.5 0.5 17 0.01 14.4 M4 x 0.7 9.5 12 4 7 4.7 80 4 1.5 26 12 0.5 23 19 0.02 M5 x 0.8 13.5 16 6 10 5.8 210 5 2 34.5 JS20-8-125 JS32-10-125 15.5 0.5 29.9

CHKD/CHKG

CHKGL--XC64 A C C B 293

modular-press-e

(except when the bowl material is metal) 221 Regulator / AR20K to AR60K Regulator with Backflow Function AR10 to AR60 Replacement Procedure is P.404 Construction AR10 AR20(K)/AR25(K) AR30(K)/AR40(K) AR50(K)/AR60(K) t e t t t IN OUT e e e IN OUT IN OUT r IN OUT r r r AR20K to AR60K (Regulator with Backflow Function) A-A y A 2 OUT 1 I N C SM A The numbers are the same as the "Construction"

Modular F.R.L. Pressure Control Equipment

(except when the bowl material is metal) 221 Regulator / AR20K to AR60K Regulator with Backflow Function AR10 to AR60 Replacement Procedure is P.404 Construction AR10 AR20(K)/AR25(K) AR30(K)/AR40(K) AR50(K)/AR60(K) t e t t t IN OUT e e e IN OUT IN OUT r IN OUT r r r AR20K to AR60K (Regulator with Backflow Function) A-A y A 2 OUT 1 I N C SM A The numbers are the same as the "Construction"

LJ1H

5 w e r t @0 !4 !3 !8 !6!7 i q A A !1 !2 u @1 Section AA Parts list Material Note No. Description No.

Compact Manifold Regulator Series ARM5

A ARP w y IR IRV r VEX1 i SRH SRP !

Modular Type Regulator Series AR

A y OUT 2 I N 1 SMC A t e IN OUT r q w Parts list Material Note Description No.

Single Axis Electric Actuator Series LJ1H

Vertical Vertical m a a = 3000 a = 2000 200 L1 Mep 0 2 4 6 8 10 Transfer load m (kg) 600 a = 1000 a = 2000 L3 (mm) 400 a = 3000 a 200 L3 Mey 0 2 4 6 8 10 Transfer load m (kg) Refer to page 145 for deflection data. 26 Standard Motor/Vertical Mount Specification Series LJ1H10 Dimensions/LJ1H102PB Scale: 15% 10 6 Work piece mounting reference plane 80 5H10 depth 8 8-M5 x 0.8 thread depth 8

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

In the graph, find where the lines repres-enting a load weight of 10 kg and a stroke of 300 mm intersect. A 50 bore size is selected.

Lubrication Equipment

Through the use of a booster, a pressure that is higher than that of the main air passage can be supplied.

MHF2

dimension table Unit: mm A B Model A C D B 25 MHF2-8DR 11 M3 x 0.5 37 5.5 MHF2-8D1R 61 MHF2-8D2R C 38 MHF2-12DR 14.8 M5 x 0.8 54 7 MHF2-12D1R 90 MHF2-12D2R 54 MHF2-16DR D D 19 M5 x 0.8 76 9 MHF2-16D1R (Finger closing port) (Finger opening port) 124 MHF2-16D2R 66 MHF2-20DR For dimensions not given above, please refer to the table of dimensions on pages 9 through 20. 94 M5 x 0.8 23 10 MHF2

VDW

Model C [dm3/(sbar)] Av x 106(m2) Cv converted b Cv N.C. 0.04 0.40 0.14 0.96 1 0.04 VDW10 M5 0.07 0.25 0.30 1.7 1.6 0.07 0.09 0.45 0.31 1.9 1.6 0.08 M5 1/8 (6A) VDW20 0.18 0.45 0.58 4.3 2.3 0.18 0.33 0.38 1.2 7.2 3.2 0.30 0.16 0.52 0.52 3.8 2 0.16 1/8 (6A) 1/4 (8A) VDW30 0.30 0.52 1.0 6.7 3 0.28 0.46 0.49 1.5 11 4 0.44 17-2-65 6 Series VDW10/20/30 Construction VDW11 VDW21 i i w w e e r r

Series CJ2Y ø 10, ø 16 Smooth Cylinder Double Acting, Single Rod

0 0.3 B 0 0.3 A F NA H S + Stroke NB B Z + Stroke Piping port M5 x 0.8 Head cover port location Axial location (R) * The overall cylinder length does not change.

New

Body material Port size Orifice diameter e VXZ2 3 A w A 0 Body material Aluminum e Port size 1/8 A 10 Orifice diameter Select electrical specification. Step 3 Item Selection item Symbol Voltage 24 VDC VXZ2 3 0 A A r Select electrical specification. r A Electrical entry Grommet For other special options, refer to pages 20 and 21.

Plug-in Unit

) A B A B A B A B A A A B 143 9 9 10 143 (32) (98.8) 10 163 101 Mounting hole for 2-M5, with input block only Input block SI unit n 1 2 3 4 5 6 7 Stations D-side 8 U-side Formulas: L1 = 25n + 106, L2 = 25n + 241 (For 1 input block.

Low Profile Air Gripper Series MHF2

switch mounting D25 144 467 Series MHF2 Body Option: Side Piping Type MHF2-DR Body Option Dimension (mm) B A Model A B C D 25 MHF2-8DR 5.5 37 11 M3 x 0.5 MHF2-8D1R Axial piping port side 61 MHF2-8D2R C 38 MHF2-12DR 7 54 14.8 M5 x 0.8 MHF2-12D1R 90 MHF2-12D2R 54 MHF2-16DR D D 9 76 19 M5 x 0.8 MHF2-16D1R ( Finger closing port) ( Finger opening port) 124 MHF2-16D2R 66 MHF2-20DR For dimensions