SMC high purity series LVA valve has three types of body materials (SUS/PPS/PFA) that can be selected based on the customers application. Special diaphragm construction insures gentle opening and closing that prevents the formation of micro-bubbles. A unique guide ring on the piston rod eliminates lateral motion of the poppet, greatly increasing seal life and reducing particle formation.
SMC high purity series LVA valve has three types of body materials (SUS/PPS/PFA) that can be selected based on the customers application. Special diaphragm construction insures gentle opening and closing that prevents the formation of micro-bubbles. A unique guide ring on the piston rod eliminates lateral motion of the poppet, greatly increasing seal life and reducing particle formation.
Vacuum Inlet Direction: T (Vertical), Pad Diameter: 40 (ø40), Pad Form: B (Bellows Type), Pad Material: FS (FS61), Mesh Filter: MF (w/Mesh Filter), Connection Thread: A10 (Male Thread; M10 x 1; Direct Mounting)
Vacuum Inlet Direction: T (Vertical), Pad Diameter: 50 (ø50), Pad Form: B (Bellows Type), Pad Material: FS (FS61), Mesh Filter: MF (w/Mesh Filter), Connection Thread: A10 (Male Thread; M10 x 1; Direct Mounting)
Pad Diameter: 20 (Flat+Flat with Ribs+Bellows), Pad Styles: B (Bellows), Material: N (NBR), Rotating or Non-rotating: J (Rotating), Stroke: 10mm, Vacuum Entry: U6 (Barb Ø6 Urethane Tubing), Mounting Thread: A10 (M10X1)
Pad Diameter: 20 (Flat+Flat with Ribs+Bellows), Pad Styles: B (Bellows), Material: N (NBR), Rotating or Non-rotating: J (Rotating), Stroke: 10mm, Vacuum Entry: 04 (One-touch Fitting Ø4), Mounting Thread: A10 (M10X1)
Pad Diameter: 20 (Flat+Flat with Ribs+Bellows), Pad Styles: B (Bellows), Material: N (NBR), Rotating or Non-rotating: J (Rotating), Stroke: 20mm, Vacuum Entry: U6 (Barb Ø6 Urethane Tubing), Mounting Thread: A10 (M10X1)
Pad Diameter: 20 (Flat+Flat with Ribs+Bellows), Pad Styles: U (Flat Style), Material: N (NBR), Rotating or Non-rotating: J (Rotating), Stroke: 40mm, Vacuum Entry: B5 (Female Thread M5X0.8), Mounting Thread: A10 (M10X1)
Pad Diameter: 13 (Flat+Flat with Ribs+Bellows), Pad Styles: B (Bellows), Material: U (Urethane Rubber), Rotating or Non-rotating: J (Rotating), Stroke: 20mm, Vacuum Entry: B5 (Female Thread M5X0.8), Mounting Thread: A10 (M10X1)
Pad Diameter: 20 (Flat+Flat with Ribs+Bellows), Pad Styles: B (Bellows), Material: U (Urethane Rubber), Rotating or Non-rotating: J (Rotating), Stroke: 30mm, Vacuum Entry: B5 (Female Thread M5X0.8), Mounting Thread: A10 (M10X1)
Pad Diameter: 13 (Flat+Flat with Ribs+Bellows), Pad Styles: B (Bellows), Material: GN (Conductive NBR), Rotating or Non-rotating: J (Rotating), Stroke: 30mm, Vacuum Entry: B5 (Female Thread M5X0.8), Mounting Thread: A10 (M10X1)
Pad Diameter: 32 (Flat+Flat with Ribs+Bellows), Pad Styles: B (Bellows), Material: S (Silicon Rubber), Rotating or Non-rotating: J (Rotating), Stroke: 40mm, Vacuum Entry: B5 (Female Thread M5X0.8), Mounting Thread: A10 (M10X1)
Pad Diameter: 20 (Flat+Flat with Ribs+Bellows), Pad Styles: B (Bellows), Material: U (Urethane Rubber), Rotating or Non-rotating: J (Rotating), Stroke: 40mm, Vacuum Entry: B5 (Female Thread M5X0.8), Mounting Thread: A10 (M10X1)
Pad Diameter: 13 (Flat+Flat with Ribs+Bellows), Pad Styles: B (Bellows), Material: F (Fluoro Rubber), Rotating or Non-rotating: J (Rotating), Stroke: 20mm, Vacuum Entry: B5 (Female Thread M5X0.8), Mounting Thread: A10 (M10X1)
Pad Diameter: 13 (Flat+Flat with Ribs+Bellows), Pad Styles: B (Bellows), Material: F (Fluoro Rubber), Rotating or Non-rotating: J (Rotating), Stroke: 50mm, Vacuum Entry: B5 (Female Thread M5X0.8), Mounting Thread: A10 (M10X1)
Pad Diameter: 13 (Flat+Flat with Ribs+Bellows), Pad Styles: B (Bellows), Material: GN (Conductive NBR), Rotating or Non-rotating: J (Rotating), Stroke: 10mm, Vacuum Entry: B5 (Female Thread M5X0.8), Mounting Thread: A10 (M10X1)
Pad Diameter: 13 (Flat+Flat with Ribs+Bellows), Pad Styles: B (Bellows), Material: GN (Conductive NBR), Rotating or Non-rotating: J (Rotating), Stroke: 20mm, Vacuum Entry: B5 (Female Thread M5X0.8), Mounting Thread: A10 (M10X1)
Pad Diameter: 13 (Flat+Flat with Ribs+Bellows), Pad Styles: B (Bellows), Material: N (NBR), Rotating or Non-rotating: J (Rotating), Stroke: 10mm, Vacuum Entry: 04 (One-touch Fitting Ø4), Mounting Thread: A10 (M10X1)
Pad Diameter: 13 (Flat+Flat with Ribs+Bellows), Pad Styles: B (Bellows), Material: N (NBR), Rotating or Non-rotating: J (Rotating), Stroke: 10mm, Vacuum Entry: 06 (One-touch Fitting Ø6), Mounting Thread: A10 (M10X1)
Pad Diameter: 13 (Flat+Flat with Ribs+Bellows), Pad Styles: B (Bellows), Material: N (NBR), Rotating or Non-rotating: J (Rotating), Stroke: 10mm, Vacuum Entry: N6 (Barb Ø6 Nylon Tubing), Mounting Thread: A10 (M10X1)