Rated Flow Range: 01 (0.01 to 1 L/min), Flow Adjustment Valve: None (Straight), Port Size: 01 (Rc1/8), Output Specification: E (Out 1: PNP; Out 2: Analog 1 to 5 V - Analog 0 to 10 V), Lead Wire: Lead Wire w/Connector, Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: R (Bracket, w/o Flow Adjustment Valve), Calibration Certificate: A (Calibration Certificate)

Subplate ISO sizes: 1-01, 1-02; Single station; Side ported

Subplate ISO sizes: 1-01, 1-02; Single station; Side ported

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

01-01 ZH07BS-01-01 ZH07BL-01-01 ZH10BS-01-01 ZH10BL-01-01 ZH13BS-01-02 ZH13BL-01-02 I J K L M N O P Model 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 ZH05BS-01-01 ZH05BL-01-01 ZH07BS-01-01 ZH07BL-01-01 ZH10BS-01-01 ZH10BL-01-01 ZH13BS-01-02 ZH13BL-01-02 57 12 3.2 31.5 Rc 5.8 2 38.5 57 12 3.2 31.5 5.8 2 38.5 57 12 3.2 31.5 5.8 2 38.5 57 12 3.2 31.5 5.8 2 38.5 60 12 3.2 33.5 5.8 2

Base Mounted Wiring: 01 (Plug-in, Insert Plug w/Lead Wire), Pilot Type: Internal Pilot or None, Junction Cover: Separate Junction Cover or None, Stations: 6 Stations, Passage: 2 (P and EA,EB: Common, Port A,B: Bottom), Port Size: 01 (1/8), Thread: T (NPTF)

Base Mounted Wiring: 01 (Plug-in, Insert Plug w/Lead Wire), Pilot Type: Internal Pilot or None, Junction Cover: Separate Junction Cover or None, Stations: 4 Stations, Passage: 2 (P and EA,EB: Common, Port A,B: Bottom), Port Size: 01 (1/8), Thread: N (NPT)

Base Mounted Wiring: 01 (Plug-in, Insert Plug w/Lead Wire), Pilot Type: Internal Pilot or None, Junction Cover: Separate Junction Cover or None, Stations: 4 Stations, Passage: 2 (P and EA,EB: Common, Port A,B: Bottom), Port Size: 01 (1/8), Thread: T (NPTF)

Base Mounted Wiring: 01 (Plug-in, Insert Plug w/Lead Wire), Pilot Type: Internal Pilot or None, Junction Cover: Separate Junction Cover or None, Stations: 3 Stations, Passage: 2 (P and EA,EB: Common, Port A,B: Bottom), Port Size: 01 (1/8), Thread: T (NPTF)

Base Mounted Wiring: 01 (Plug-in, Insert Plug w/Lead Wire), Pilot Type: Internal Pilot or None, Junction Cover: Separate Junction Cover or None, Stations: 3 Stations, Passage: 7 (P: Individual, EA,EB: Individual, Port A,B: Side), Port Size: 01 (1/8), Thread: N (NPT)

Size: 20, Backflow Function: K (Backflow Function), Thread: Rc, Port Size: 01 (1/8), Accessory: BE3 (B+E3), Specifications: 1Y (1 + Y)

Size: 20, Backflow Function: K (Backflow Function), Thread: Rc, Port Size: 01 (1/8), Accessory: BG (B+G), Specifications: 1Y (1 + Y)

Size: 20, Backflow Function: None, Thread: Rc, Port Size: 01 (1/8), Accessory: B (Bracket), Specifications: 1 (0.005 to 0.2 MPa Setting)

Size: 20, Backflow Function: None, Thread: F (G), Port Size: 01 (1/8), Accessory: None, Specifications: 1 (0.005 to 0.2 MPa Setting)

Size: 20, Backflow Function: K (Backflow Function), Thread: F (G), Port Size: 01 (1/8), Accessory: B (Bracket), Specifications: 1Y (1 + Y)

Body Size: 3 (1/8 Basis), Port Size: 01 [Cylinder Side (R(PT)1/8) Pilot Port (M5X0.8)], Applicable Tube OD: Ø6

Body Size: 3 (1/8 Basis), Port Size: 01 [Cylinder Side (R(PT)1/8) Pilot Port (M5X0.8)], Applicable Tube OD: Ø8

Pressure Range: 0~1MPa, Port Size: 01 (Single Unit Mounting R(PT) 1/8), Output Specification: 55 (PNP Open Collector 1 Output)

Pressure Range: 0~1MPa, Port Size: 01 (Single Unit Mounting R(PT) 1/8), Output Specification: 15 (NPN Open Collector 1 Output)

Sensor Range: 3 [For Compound Pressure (-100~100kPa)], Accuracy: A (±1%F.S.), Port Size: 01 [R 1/8(w/M5 Female)]

Size: 22, Type: Q (Rapid Supply and Exhaust Function), Thread: N (NPT), Port Size: 01 (1/8), Tubing O.D: 07 (1/4")