Auto Switch Guide

Auto Switch Specifications Grommet Electrical entry: In-line PLC: Abbreviation of Programmable Logic Controller D-A7H (With indicator light) D-A72H D-A73H D-A76H Auto switch model Applicable load Relay, PLC Relay, PLC IC circuit Load voltage 200 VAC 24 VDC 4 to 8 VDC 100 VAC Max. load voltage/Load current range(3) 5 to 10 mA 5 to 40 mA 20 mA 5 to 20 mA Contact protection circuit 2.4 V or

Auto Switch Guide

Auto Switch Specifications Grommet Electrical entry: In-line PLC: Abbreviation of Programmable Logic Controller D-A7H (With indicator light) D-A72H D-A73H D-A76H Auto switch model Applicable load Relay, PLC Relay, PLC IC circuit Load voltage 200 VAC 24 VDC 4 to 8 VDC 100 VAC Max. load voltage/Load current range(3) 5 to 10 mA 5 to 40 mA 20 mA 5 to 20 mA Contact protection circuit 2.4 V or

Fieldbus System

V, 1 to 5 V, 0 to 5 V 0 to 20 mA, 4 to 20 mA 12 bit resolution Input signal range 10 to 10 V, 5 to 5 V 20 to 20 mA 16 bit resolution EX600-AXA 15 V 22 mA Note 2) Max. rated input signal 50 100 k Input impedance 0.05% F .S.

3

of product Measurable Range for Ethylene Glycol Aqueous Solution (Reference Value) 3-Color Display Digital Flow Switch for PVC Piping 100 Aqueous solution concentration [%] (Weight) 90 80 70 60 50 40 30 20 10 Measurable within this range PF3W 0 0 10 20 30 40 50 60 70 80 90 Aqueous solution temperature [oC] Wetted Parts Construction o !

Compact and Lightweight

40 40 40 40 20 Suction flow rate 10 20 20 20 20 10 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0 5 10 15 20 25 0 0 0 0 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0 2 4 6 8 10 12 14 Supply pressure [MPa] Suction flow rate [L/min (ANR)] Supply pressure [MPa] Suction flow rate [L/min (ANR)] ZH10SA ZH10LA Exhaust Characteristics Flow Rate Characteristics Exhaust Characteristics Flow Rate Characteristics 100 100 100

HRX-OM-R005

0.5 50 Pump head[m] Availavel area 0.4 40 Outlet60Hz 0.3 30 Outlet50Hz 0.2 20 0.1 10 Return port Availavel area 0.0 0 10 20 30 40 Circulating fluid flow[L/min] Fig. 9-7 Pump capacity(HRS060--20-(BJM)) 9.7 Required facility water flow (For water-cooled type) 30 Facility water flow rate[L/min] 25 20 15 10 5 0 0 10 20 30 40 50 Facility water inlet temperature[] *The amount of the facility water

Round Type Hydraulic Cylinder

A1 L1 R1 U1 NDH10 E1 MM NX Applicable bore size (mm) I-020B I-032B I-04A IA-04 A B C D E F M R Size Tolerance Note +0.027 0 +0.027 0 +0.027 0 +0.027 0 +0.058 0 +0.058 0 +0.070 0 +0.070 0 0.1 0.2 0.1 0.2 0.1 0.3 0.1 0.3 AD-FI-20 AD-FI-25 AD-FI-32 AD-FI-40 9 9 16 16 16 18 22 22 36 38 55 55 9 9 12 12 10 10 15.5 15.5 20 25 32 40 20 20 24 24 14 14 20 20 30 10 16 22 60 20 25 32 40 46 28 M8 x 1.25

Valve Single Unit

20 00N 20 stations NPT SS5X3-20-05 (5 stations) NPTF 00T Stations3 2 1 Connector assembly for L and M types Refer to page 1-6-8.

5 Port Solenoid Valve, Series VQC

For example, changing from F Kit (D-sub connector) to S Kit (serial transmission) is achieved by simply changing the kit piece. 19 20 19 20 19 20 19 20 19 20 19 20 19 20 19 20 COM Station 1 Double wiring Station 2 Single wiring Station 3 Double wiring Station 4 Single wiring (Refer to the connector wiring diagram) Printed circuit board patterns between connectors are shifted at every station

HRX-OM-Z002

. 9-1 9.1.2 HRLE090-A-20. 9-2 9.1.3 HRLE050-W-20. 9-3 9.1.4 HRLE090-W-20. 9-4 9.1.5 HRLE090-A-40. 9-5 9.1.6 HRLE090-W-40. 9-6 9.2 REFRIGERANT AND GWP VALUE . 9-7 9.3 DIMENSIONS . 9-8 9.3.1 HRLE050-A-20. 9-8 9.3.2 HRLE050-W-20. 9-9 9.3.3 HRLE090-A-20/40. 9-10 9.3.4 HRLE090-W-20/40. 9-11 9.4 FLOW DIAGRAM . 9-12 9.4.1 HRLE050-A-20-*,HRLE090-A-20/40. 9-12 9.4.2 HRLE050-W-20-*,HRLE090-W-20/40.

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

20 0.7 MPa 0.7 MPa 10 10 0 20 40 60 80 100 0 0 0 50 100 150 200 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] ZFC74 6 ZFC75 8 0.1 MPa 0.3 MPa 0.5 MPa 0.1 MPa 0.3 MPa 30 30 Differential pressure [kPa] Differential pressure [kPa] 0.5 MPa 0.7 MPa 20 20 0.7 MPa 10 10 0 50 100 150 250 200 0 0 0 100 200 300 400 500 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] ZFC76 10 ZFC77 12 0.1 MPa 0.3

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

(up to 24 solenoids possible) D side 20 20 20 stations 20 stations Connector entry direction PG: Flat cable connector (20 pins) PH: Flat cable connector (10 pins) 1: Perpendicular connector 2: Lateral connector Note Symbol 02 Note Symbol 02 Stations Stations 2 stations 2 stations Double wiring specification Double wiring specification ... ... ... ... 09 10 04 05 9 stations 4 stations 10 stations

RSH/RS1H

9 19 109 49 5 12.5 10-9-20

RSH/RS1H

20 30 40 10 20 30 40 0 0 0.6 CE1 Transfer speed [m/min] = 0 Transfer speed [m/min] = 0.1 0.5 0.4 CE2 Graph (3) Graph (4) Bore size 20, 32/ = 0 Bore size 20, 32/ = 0.1 0.3 ML2B 0.2 0.1 C J G5-S 80 80 1000 2000 3000 4000 0 5000 Lateral load F [N] 32 CV 70 70 MVGQ 60 60 CC 50 50 32 RB 40 40 30 30 J 20 20 20 D20 10 10 -X 200 0 10 20 30 40 10 20 30 40 Transfer speed [m/min] = 0 Transfer

Thermo-con

L/min) Facility water flow rate: 2.6 gpm (10 L/min) 0 0 0 10 20 30 40 50 60 70 0 10 20 30 40 50 60 70 Circulating fluid temperature (C) Circulating fluid temperature (C) 148 Series HEC-W Peltier-Type Chiller Thermo-con (Water-cooled) The values shown on the performance chart are not guaranteed, but typical.

CRQ2

CAT.ES20-147 A Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2 Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2 Piping can be installed from one end Body can be used as a flange Compact design saves mounting space Uses internal cushioning 10, 15 : Rubber bumper 20, 30, 40: Air cushion 10: 17mm 15: 20mm 20: 29mm 30: 33mm

Series CXS 10-/11-/12- Dual rod cylinder 21-/22- ø6, ø10, ø15, ø20, ø25, ø32

size Model 11-/22-CXS6 6 11-/22-CXS10 11-/22-CXS15 11-/22-CXS20 11-/22-CXS25 11-/22-CXS32 10 15 20 25 32 10, 20, 30, 40, 50 Vacuum suction type Relief type M5 x 0.8 10, 20, 30, 40, 50, 75, 100 1/8 Double acting (Both sides) Non-lube 10-/12-/21-CXS6 6 single rod 10-/12-/21-CXS10 10-/12-/21-CXS15 10-/12-/21-CXS20 10-/12-/21-CXS25 10-/12-/21-CXS32 10, 20, 30, 40, 50 10 15 20 25 32 M5 x 0.8

CE

151 14 20 18 36 10 57.5 7 11.2 6.6 33 158.4 64 79.5 78 5.5 76.5 8 54 62 72 40 185 209 10 199 14 22 18 36 10 64.5 195.2 59 71.5 65.5 215.7 8 14.7 9 71 39 173.4 83.5 79 94 95 6.6 91 9 78 67 76 89 50 202 235 14 221 20 28 22 44 14 76.5 219.2 9 16.2 11 46 177.4 95 9 9 91 80 92 60 203 238 14 224 20 30 22 44 14 89.5 84.5 97 109.5 113 107 108 Dimensions for auto switch model D-F79W. 16 Series CEU

HRX-OM-W058

-R . 9-6 9.4 Cooling capacity . 9-7 9.4.1 HRS018-A-20--R . 9-7 9.4.2 HRS030-A-20--R . 9-7 9.5 Heating capacity . 9-8 9.5.1 HRS018-A-20-R, HRS030-A-20-R . 9-8 9.6 Pump capacity. 9-9 9.6.1 HRS018-A-20-R, HRS030-A-20-R . 9-9 9.6.2 HRS018-A-20-T-R, HRS030-A-20-T-R . 9-9 9.7 Compliance . 9-10 9.8 Sample DoC. . 9-11 9.9 Daily Check Sheet . 9-12 Chapter 10 Product Warranty . 10-1 HRS-R Series HRX-OM-W058

SMC Pneumatic Clean Series

WW WW WA WB D NDh8 MM NN GA GC Piping port 3-M5 x 0.8 GB Piping port M5 x 0.8 C A F NA NB B 0 -0.3 Head cover port location Axial direction (R) S + Stroke H Z + Stroke (mm) M4 x 0.7 D GC B F H MM GB GA C A S NN NDh8 Z WW WA WB 28 28 NA 102.5 101.5 5.5 4.5 20 20 NB Bore size M10 x 1.0 12-0.027 10-0.022 23 23 13.5 0 29.5 29.5 4 5 74.5 73.5 16 10 15 15 18.3 15 20 17 8 8 5 5 6.5 6.5 11 11 13.5