Compact Cylinder with Lock Series CLQ

107.5 117.5 126 136 10 to 50 75, 100 10 to 50 75, 100 10 to 50 75, 100 FV 63 101 46 9 9 M 80 117.5 53.5 11 11 4 x FD G B + Stroke L FT FX FZ A + Stroke 100 136 63 11 11 Bore size (mm) FV FX FZ G L L1 M 63 80 100 80 99 117 92 116 136 108 134 154 38 43 50 8 10 12 33.5 43.5 43.5 60 77 94 Rod end nut L1 Double clevis style: CLQD/CDLQD 4 x N Cap bolt CT Head Side Flange Style (mm) CD hole H10

Process Valve Series VNA

Note 1) Note 2) Note 3) Note 4) Specifications (Vacuum pilot type) Fluid Vacuum 101 kPa to Atmospheric pressure Pilot pressure range Operating pressure range VNA Note 5) 101 to 47.9 kPa Pilot Solenoid Valve Specifications VNB JIS Symbol (Vacuum pilot type) Port size Pilot solenoid valve SF4--23 6A to 25A 32A to 50A, 32F to 50F VO301-00 Grommet, Grommet terminal, Conduit terminal, DIN terminal

PSxx-OMR0001CN

5No.PS-OMR0001CN-J 1 41 LCD VX2 (2 )AR20 () -6No.PS-OMR0001CN-J 2 (0.01 mm0.03 mm0.02 mm0.15 mm0.05 mm0.30 mm) ON()/OFF()() (A)() (B)() (C)(B)() -7No.PS-OMR0001CN-J 2 2 9 0.010.03mm 0.020.15mm 0.050.30mm DIN F G H 7 10 B Rc1/8 4 1 C 6 2 1 3 G1/8 F 3 G1/8 7 NPN1 PNP1 N P L 4 7 5 M SI N 1 2 3 4 5 6 1 2 S 6 7 8 3 4 5 6 6 7 8 T 1F 2GH 3ISO1179-1 4 5kPa 61 7 88 (10 ) 9DIN 101

PSxx-OMT0001CN

5No.PS-OMT0001CN-E 1 42 LCD VX2 (2 )AR20 () -6No.PS-OMT0001CN-E 2 (0.01mm0.03mm0.02 mm0.15 mm0.05 mm0.30 mm) ON()/OFF()() (A)() (B)() (C)(B)() -7No.PS-OMT0001CN-E 2 2 DIN 9 F 0.010.03mm 0.020.15mm 0.050.30mm G H 7 10 B Rc1/8 4 1 6 2 1 3 G1/8 G1/8 3 7 NPN2 PNP2 A B 4 L 7 5 SI N 1 2 3 1 2 3 4 5 6 S 6 7 8 4 5 6 6 7 8 T 1F 2GH 3ISO1179-1 4 5kPa 61 7 88 (10 ) 9DIN 101

Compact Cylinder with Lock Series CLQ

46 9 9 80 92 108 38 8 33.5 60 46 101 75, 100 43.5 107.5 10 to 50 80 117.5 53.5 11 11 99 116 134 43 10 43.5 77 53.5 117.5 75, 100 53 126 10 to 50 Rod end nut L1 100 136 63 11 11 117 136 154 50 12 43.5 94 63 136 75, 100 Double clevis type: CLQD/CDLQD Double clevis type (mm) CT 4-N Cap bolt Stroke range Without auto switch With auto switch Bore size (mm) CD CT A A B CL B CL 10 to 50 75, 100

Series AP3500

Vespel is a registered trademark of DuPont. 101 Air operated type (For low pressure) Diaphragm Valve for Ultra High Purity Series AP4500 Suitable for UHP gas supply line Body material: 316L SS secondary remelt Pneumatically actuated normally closed or normally open LOTO option available as an option (AP4540) Indicator switch available as an option (AP4550) How to Order (Inlet) (Outlet) AP

Rotary Cylinder Series MRQ Size: 32, 40 1

Long Stroke (101 to 200 mm) -X10 4 Refer to the table of number of the auto switches mounted below.

CLQ

9 9 80 92 108 38 8 33.5 60 Data 101 46 75, 100 107.5 43.5 10 to 50 80 53.5 117.5 11 11 99 116 134 43 10 43.5 77 117.5 53.5 75, 100 126 53 10 to 50 Rod end nut L1 100 63 136 11 11 117 136 154 50 12 43.5 94 136 63 75, 100 Double Clevis Style Double clevis style: CLQD/CDLQD Stroke range Without auto switch With auto switch Bore size (mm) CT 4-N Cap bolt CD CT A CL A B CL B 126 36 112 10 to

Series 12-REA Sine rodless cylinder

Model Elbow type Straight type In-line type 12-REA25 10-AS2001F-06-X214 10-AS2201F-01-06-X214 10-AS2301F-01-06-X214 12-REA32 10-AS2001F-06-X214 10-AS2201F-02-06-X214 10-AS2301F-02-06-X214 6. Do not use the cylinder with its body fixed. Be sure to secure both head covers (or end covers in case of CY1R) before using the cylinder.

Series 12-REA ø25, ø32, ø40, ø50, ø63 Sine Rodless Cylinder

Recommended speed controller Model Elbow type 10-AS2201F-01-06-X214 10-AS2201F-02-06-X214 10-AS2201F-02-06-X214 10-AS3201F-02-08-X214 10-AS3201F-02-08-X214 Model Straight type 10-AS2301F-01-06-X214 10-AS2301F-02-06-X214 10-AS2301F-02-06-X214 10-AS3301F-02-08-X214 10-AS3301F-02-08-X214 In-line type 10-AS2001F-06-X214 10-AS2001F-06-X214 10-AS2001F-06-X214 10-AS3001F-08-X214 10-AS3001F-08-X214

Series REC 10- ø20, ø25, ø32, ø40 11- Sine Cylinder

Caution REC25 101110-AS2001F-06-X214 10-AS2301F-01-06-X214 10-AS2201F-01-06-X214 REC32 101110-AS3001F-08-X214 10-AS2301F-01-06-X214 10-AS2201F-01-06-X214 REC40 101110-AS3001F-08-X214 10-AS3301F-02-08-X214 10-AS3201F-02-08-X214 2. Speed control is possible with meter-in and meter-out types of speed controllers.

ISA2

Example) G36-P4-01-X30 Regulator 2 Port Solenoid Valve AR 20 E 02 1 VCA27A S 5 DL 02 4 Q Port size Thread type Voltage CE marked 02 02N 02F Rc 1/4 NPT 1/4 G 1/4 Rc NPT G Nil N F 1 2 3 4 5 6 36 100 VAC 200 VAC 110 VAC 220 VAC 24 VDC 12 VDC 230 VAC Throttle Option (The shape of pressure gauge) Note 2) Nil S B K Without throttle and manual lock With throttle With manual lock With manual lock

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th the regulalor a a a a a a a a a a a a a a a a a a o a a a r t a a a a a a a o a a AW With digital pressure switch with display fitf"r r.gut"t;f outDut specificalions (tsE30-01-!!

VX31/32/33

Table (1) Model Orifice Diameter Port Size Table (3) Rated Voltage Electrical Option Solenoid valve model Orifice symbol (diameter) 1 (1.5 mm) 2 (2.2 mm) 3 (3 mm) 4 (4 mm) Class B Rated voltage Z S L VX31 Model VX32 VX33 With light and surge voltage suppressor Voltage With surge voltage suppressor AC/ DC Voltage symbol With light 01 (1/8) 02 (1/4) Port symbol (Port size) 1 2 3 4 7 8 J

PSE57  Series Pressure Sensor for General Fluids

Port size Symbol Port size Model PSE570 PSE573 PSE574 PSE575 PSE576 PSE577 01 R1/8 (with M5 female thread) 02 R1/4 (with M5 female thread) For pressure switch precautions and specic product precautions, refer to the Operation Manual on the SMC website.

PSE57  Series Pressure Sensor for General Fluids

PSE570/573/574-01 PSE570/573/574-02 PSE575/576/577-02 Port size R1/8 M5 x 0.8 R1/4 M5 x 0.8 R1/4 M5 x 0.8 Piping port: C3604 + Nickel plating Pressure sensor: Al2O3 (Alumina 96%) Square ring: FKM Piping port: C3604 + Nickel plating Pressure sensor: Al2O3 (Alumina 96%) O-ring: FKM + Grease Materials of parts in contact with uid Without lead wire and M12 connector 88 g 95 g 103 g Weight With

VXA31/32

LVQ 1 (1.5 mm) 2 (2.2 mm) 3 (3 mm) 4 (4 mm) VXA31 VXA32 LQ 01 ( ) 1 8 02 ( ) 1 4 02 ( ) 1 4 03 ( ) 3 8 LVN TI/ TIL Ordering example (Example) Series VXA31, Orifice size 1.5 mm, Rc 1/8 (Part no.) VXA3114-01 PA PAX PB 17-3-103

5 Port Solenoid Valve Series SQ1000/2000

How to Order Manifolds SS5Q J 2 3 08 D0 N ( 00T) D For P, R port inch sizes Kit designation Plug-in Series VQ2000 1 2 4 3 Option 4 Nil Electrical entry/Cable length Stations 1 2 Note 2) 01 Kit designation Entry direction Standard stations Kit, Cable length 1 station None Specifies DIN rail length Note 2) 02 to 24 B K N R S With back pressure check valve on all stations Special wiring specifications

Speed Controller with One-touch Fitting Series AS Elbow Type (Metal Body) 1

1 Thread size M5 01 02 03 04 M5 x 0.8 R R R R 1 8 1 4 3 8 1 2 M5 port only Note 1) AS221: Electroless nickel plated Note 2) AS221: Steel Note 3) Meter-in type: Black zinc chromated 15-9-8

ZSE5/ISE5

1.02kgf/cm2j -O.1MPa 1MPa 11 O.2kgf/cm2j MPa, PSI kgflcm2. bar Unit setting mmHg, kPa, PSI kgflcm2 , bar MPa:O.01, PSI:1 kgf/cm2:O.1, bar:O.1 Min. setting range mmHg:10, kPa:2, PSI:O.2 kgf/cm2:O.02, bar:O.02 A variety of switch output modes Note1) J HysteresIs mode Adjustable (2digit or more) Adjustable (3digit or more) Applicable to a hysteresis mode, window comparator mode.and reversed