101 kPa?1 to ?100 kPa2 l/min (ANR) (Supply pressure: ?101 kPa)24 VDC ?10%, 12 to 15 VDCPower supply voltage 24 VDC type: 0.12 A or less Power supply voltage 12 to 15 VDC type: 0.18 A or less0 to 5 VDC, 0 to 10 VDC4 to 20 mA DC, 0 to 20 mA DCApproximately 10 k Approximately 250 1 to 5 VDC (Load impedance: 1 k or more) Output accuracy: Within ?6% (Full span)Within ?

101 kPa?1 to ?100 kPa2 l/min (ANR) (Supply pressure: ?101 kPa)24 VDC ?10%, 12 to 15 VDCPower supply voltage 24 VDC type: 0.12 A or less Power supply voltage 12 to 15 VDC type: 0.18 A or less0 to 5 VDC, 0 to 10 VDC4 to 20 mA DC, 0 to 20 mA DCApproximately 10 k Approximately 250 1 to 5 VDC (Load impedance: 1 k or more) Output accuracy: Within ?6% (Full span)Within ?

8)W = 61n + 101, .49604 lb, ModelApplicable valveManifold typeP(SUP)/R(EXH)Valve stations Note)A, B Porting specificationsPort sizeManifold base weight W (g) n: StationsP, EA, EB portA, B portSS5X5-41SX5 40Single base/B mountCommon SUP/Common EXH2 to 20 stationsBaseSideRc 1 4Rc 1 8C6 (One-touch fitting for ?6)C8 (One-touch fitting for ?8)W = 61n + 101

Paddle Style Flow Switch Series IF3 For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

Port size A B Port size A B C D E F 28 3/4 1 37 62 89 28 188 28 3/4 31 34 22 137 101 IF300 IF310 31 34 22 137 101 IF 98 98 IF301 IF303 IF311 IF313 1 37 62 89 28 188 98 1 29 39 56 28 155 98 1 29 39 56 28 155 Data Splashproof/Low jetproof type: 320/321/323 G1/2 depth 17 Regular hexagon For wiring width across flats 36 A: Paddle short B: Paddle middle Port size C: Paddle long Dimensions Part

ZSE30/ISE30

Switch 100 kPa 0 100 kPa 500 kPa 1 MPa Pressure range 100 kPa 100 kPa For vacuum/ low pressure ZSE30 101 kPa 101 kPa 1 MPa 0 For positive pressure ISE30 100 kPa (0.1 MPa) 1 MPa Rated pressure range of switch Regulating pressure range of switch 16-2-14

VNB

PB 101 to 47.9 kPa Pilot Solenoid Valve Specifications JIS Symbol (Vacuum pilot type) Valve type Type 6A to 25A 32A to 50A, 32F to 50F V0301-00 Port size Pilot solenoid valve SF4--23 N.C. Normally closed N.O.

VXR21/22/23

(112) 119 (136) 126 (143) 18 32.5 36.5 43.5 46.5 52 36 36 42 53 39 41 20 30 35 35 23 39 47 48 48 92 95 95 59 62 62 1 2 3 4 21 40 45 45 23 25.5 41.5 VXR2260-10 VXR2270-12 26.5 51.5 67.5 57.5 23 25.5 41.5 1 4 1 2 62 97 64 50 93 (103) 44.5 93 (103) 28 101 (111) 93 (103) 60 25.5 40 132 142 (157) 54.5 60 72 VXR2380-14 1 VXR2382-14 30 62 97 64 50 98 (108) 44.5 98 (108) 28 106 (116) 98 (108) 69

Interface Regulator for VQ4000 5 Port Solenoid Valve

l/min (ANR) Flow rate l/min (ANR) ARBQ4000-00-P (PA) ARBQ4000-00-P (PB) 0.7 0.7 0.6 0.6 Downstream pressure MPa Downstream pressure MPa 0.5 0.5 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 0 0 200 400 600 800 1000 1200 1400 1400 0 0 200 400 600 800 1000 1200 Flow rate l/min (ANR) Flow rate l/min (ANR) 1MPa = 145 psi Nl/min X 0.035 = SCFM Pressure Characteristics Conditions Upstream pressure: 0.7MPa (101

Vacuum Equipment

3.06 2.88 2.70 2.52 2.34 2.16 1.98 1.80 1.62 1.44 0.503 4.28 4.02 3.77 3.52 3.27 3.02 2.77 2.52 2.26 2.01 0.785 6.67 6.28 5.89 5.50 5.10 4.71 4.32 3.93 3.53 3.14 2.01 17.1 16.1 15.1 14.1 13.1 12.1 11.1 10.1 9.05 8.04 4.91 41.7 39.3 36.8 34.4 31.9 29.5 27.0 24.6 22.1 19.6 8.04 68.3 64.3 60.3 56.3 52.3 48.2 44.2 40.2 36.2 32.2 1.33 11.3 10.6 9.98 9.31 8.65 7.98 7.32 6.65 5.99 5.32 12.6 107 101

Series SY100 3 Port Solenoid Valve Rubber Seal

Station L1 L2 2 33.5 27.5 11 128 122 12 13 149 143 14 15 170 164 16 17 191 185 18 19 212 206 3 44 38 20 4 54.5 48.5 5 65 59 6 75.5 69.5 7 86 80 8 96.5 90.5 9 107 101 10 117.5 138.5 159.5 180.5 201.5 222.5 111.5 132.5 153.5 174.5 195.5 216.5 2.1-14 Series SY Made to Order (Contact SMC for further specifications, dimensions and delivery lead time.)

VHK

VHKm-01S-01S 1 8 1 8 32.6 65.2 VHKm-02S-01S 18 41 71.6 39 32.6 39 78 16.5 3.5 11 9.0 9.7 1.2 39 13 47 62 66 17 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHKm-02S-02S 1 4 1 4 1 4 17 VHKm-03S-02S 22 46 85.1 44.3 40.8 44.3 88.6 21.5 4 14 13.7 16.1 3.2 65 17 72 73 76 19 VHK-B2A 49 17 1 30 25 21.5 31 VHKm-03S-03S 3 8 3 8 3 8 19 VHKm-04S-03S 22 46 93 48.7 44.3 48.7 97.4 21.5 4 14 15.1 17.5 3.2 90 19 22 101

Air Suction Filter With One-touch Fittings Series ZFB 1

Description ZFB100/101 ZFB200/201 ZFB300/301 ZFB401 q O-ring for clear cover S11.2 S12.5 S16 S18 Selection O-ring is a set with spare element (I-S-A). Warning 1. Do not use it in a line that is kept pressurized because it could cause the body to break. 13-10-5 3 Series ZFB Dimensions Element Replacement 1.

Multistage Ejector Series ZL112/212 1

Display LCD LED LCD with backlight 101 to 0 kPa 101 to 10 kPa Pressure setting range 200 kPa Maximum operating pressure Operation indicator light (Lights up when ON) OUT1: Green OUT2: Red Green Response frequency 200 Hz (5 ms) Hysteresis mode Variable (3 digits or more) Variable (can be set from 0) Hysteresis Fixed (3 digits) Window comparator mode Fluid Air, Non-corrosive gas Temperature

ZP

3 13 Dimensions by Stroke 16 18 12.5 21.5 1.2 3.5 30.4 46.5 10 16 J Model Dimensions by Stroke G H G H 10, 13 16 ZPRD10-0-A10 60 23 83 61 84 J Model G H G H ZPRD20-0-A10 70 132 71 133 51 U C ZPR 20-0-A10 U C ZPR 30-0-A10 U C ZPR 40-0-A10 U C ZPR 50-0-A10 U C ZPRD30-0-A10 ZPR 10-0-A10 80 142 81 143 57 91 23 57.5 91.5 ZPRD40-0-A10 90 178 91 179 67 129 67.5 129.5 77 51 ZPRD50-0-A10 100 188 101

ZPT/ZPX

ZQ Lifting force = Theoretical lifting force t ZF Theoretical Lifting Force (Theoretical lifting force = P x S x 0.1) (N) 40 50 63 80 100 78.5 125 Pad diameter (mm) ZP Adsorption area (cm2) 12.6 19.6 31.2 50.3 122.7 85 107 167 264.9 427 667.3 1042.6 ZCU 80 101 157 249.3 401.9 628 981.3 75 94.5 147 233.7 376.8 588.8 920 AMJ 70 88.2 137 218.1 351.7 549.5 858.6 Vacuum pressure (kPa) 65 81.9

Compact

= 2 m1: Cylinders moving parts weight kg m2: Load weight kg V: Piston speed at the end m/s * The piston speed when the piston (rod) of a cylinder is reached at the stroke end is calculated by multiplying the average speed by 1.4 Moving Parts Weight [g] Bore size [mm] Standard stroke [mm] 5 10 15 20 25 30 35 40 45 50 12 34 36 38 41 43 46 16 39 42 44 46 49 51 20 67 70 75 79 83 88 92 97 101

Clean Room Rodless Cylinder Series CYP ø15, ø32

Class M1.5 [Class 1] 101 Non-contact construction 100 0.01 0.1 1 10 There is no particulate generation from sliding, because the construction avoids contact between the cylinder tubes exterior surface and the slide tables interior surface. Particle diameter (m) Note 1) This chart indicates the level of cleanliness inside the measurement chamber.

3 Port Solenoid Valve Rubber Seal Series SY100

Other dimensions are same as grommet type. 10 117.5 111.5 9 107 101 8 96.5 90.5 7 86 80 6 75.5 69.5 5 65 59 4 54.5 48.5 3 44 38 20 222.5 216.5 2 33.5 27.5 11 128 122 12 138.5 132.5 13 149 143 14 159.5 153.5 15 170 164 16 180.5 174.5 17 191 185 18 201.5 195.5 19 212 206 Station L1 L2 4-3-13 Series SY100 Type S41 Manifold: Side Ported/SS3Y1-S41-M3/M5 Stations Grommet (G), (H) 11.5 P = 10.5

VHK

VHK-01S-01S 1 8 1 8 30 32.6 65.2 57 VHK-02S-01S 18 41 71.6 39 32.6 39 78 16.5 3.5 11 9.0 9.7 1.2 39 13 47 62 66 17 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHK-02S-02S 1 4 1 4 1 4 17 VHK-03S-02S 22 46 85.1 44.3 40.8 44.3 88.6 21.5 4 14 13.7 16.1 3.2 65 17 72 73 76 19 VHK-B2A 49 17 1 30 25 21.5 31 VHK-03S-03S 3 8 3 8 3 8 19 VHK-04S-03S 22 46 93 48.7 44.3 48.7 97.4 21.5 4 14 15.1 17.5 3.2 90 19 22 101

2-Color Display Digital Pressure Switch Series ZSE80(F)/ISE80(H)

Switch 100 kPa 0 100 kPa 1 MPa 2 MPa Pressure range 0 101 kPa For vacuum pressure ZSE80 111 kPa 10 kPa 100 kPa 100 kPa For compound pressure ZSE80F 110 kPa 110 kPa 1 MPa 0.1 MPa ISE80 0.105 MPa 1.1 MPa For positive pressure 2 MPa 0.1 MPa ISE80H 2.2 MPa 0.105 MPa Rated pressure range of switch Set pressure range of switch 745