High Purity Fluoropolymer

Printed in Japan. 1st printing June, 1999 D-SMC.L.A. P-100 (YG) 4th printing April, 2002 D-DN P-80 (DN)

AIR COMBINATION

AC-OMQ0008-D PRODUCT NAME AIR COMBINATION MODEL/ Series AC10(A,B)-A AC20(A,B,C,D)-A AC25(B,C)-A AC30(A,B,C,D)-A AC40(A,B,C,D)-A Contents PAGE 1. PRECAUTION FOR SAFETY 18 2. APPLICATION 9 3. SPECIFICATIONS. . . 9 4. SERIESMAP AND COMBINATION OF EQUIPMENT. . . 10 5. HOW TO ORDER 1115 6. ATTACHMENTS / ACCESSORIESOPTIONSPART NUMBER 16 7. TROUBLE SHOOTING 16 8. SPARE PARTS LIST 16 9.

IDG

Note) When the symbol C or D is designated, the same part number of an auto-drain listed on page 14-19-33 will come together.

EXxx-OMN0037CN

5 -20 F 8000 -32767 -10.5 -5.25 -21 Byte0 Byte1 CH0 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 MSB AD LSB Byte2 Byte3 CH1 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 MSB AD LSB -23No.EX-OMN0037CN-A -24No.EX-OMN0037CN-A EX600-AY A M12 (5 )2 2 M12 (4 ) No. 1 LED 2 () 3 4 5 () -25No.EX-OMN0037CN-A 1 24 V() 2 3 0 V() 4 0 V() 5 FE M12 (4 ) 1 24 V 2 D/A DC24 V 34 0 V 5 FE FE 1 k 600

HRX-OM-R026

Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-17 Connection of RS-232C HRSH Series 3.3Installation 3-25 HRX-OM-R026 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

17

Confirm the Coordinates and Moments in Model Selection on page 1229 for details of floating Y and Z axes. 1196 MY1B Series Auto Switch Mounting Auto Switch Proper Mounting Position (Detection at Stroke End) MY1B (Basic type) 25 to 40 Auto Switch Proper Mounting Position (mm) D-M9 D-M9V D-M9W D-M9WV D-M9A D-M9AV Auto switch model D-A9 D-A9V A A Bore size A 25 32 40 79 83 112.5 116.5 133.5

Secondary Batteries

-900, D-M9BWSDPC-900 and D-A90L-900.

HRX-OM-W038

Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Fig. 3-11 Connection of RS-232C 3.3 Installation HRS Series 3-16 HRX-OM-W038 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly. Incorrect piping might cause leakage of supplied or drained leakage and wet surrounding area and facility.

7

Auto switch model Symbol Auto switch set value and its height Hs 63 50 40 A B Hs A B Hs A B Hs A B Hs A B Hs 6 6 8.5 D-P3DWA 29 29 23.5 59 52 46.5 3.5 3.5 6 A B D-P4DW 26.5 26.5 21 58.5 51 45.5 D-P4DW 0.5 0.5 3 A 32 4 B D-P79WSE D-P74 23.5 23.5 18 Hs 57.5 51 47.5 D-M9 D-M9W D-M9A 10.5 10.5 13 33.5 33.5 28 51.5 44.5 39 6.5 6.5 9 D-A9 29.5 29.5 24 51.5 44.5 39 Note) The above drawing is the

Platform Cylinder Series CXT

/Standard Stroke D-A72/A7H D-A80H/A73C D-A80C/F7/J79 D-F7W/J79W D-F7V/F7WV D-F79F/J79C D-F7BAL/F7BAVL Auto switch model D-A73 D-A80 D-A79W D-F7NTL Bore size A B 9.5 13.5 6.5 9 A B 6.5 10.5 3.5 6 A B 14.5 18.5 10.5 13 A B 32 40 9 13 6 8.5 (mm) Auto Switch Proper Mounting Position/Long Stroke D-A72/A7H D-A80H/A73C D-A80C/F7/J79 D-F7W/J79W D-F7V/F7WV D-F79F/J79C D-F7BAL/F7BAVL Auto switch model

MK

D-A7lH, A80H D-A73C, A80C D-F7l, J79 D-F7lV, J79C D-A79W D-F9l D-F9lV D-F9lWV D-F9lW D-F9BAL D-P5DW D-A9l D-A9lV D-A7, A8 Model B 6.5 7 6 8.5 11.5 14.5 A 28.5 29 33 24 28.5 28.5 B 7 7.5 6.5 9 12 15 B 4 4.5 3.5 6 9 12 B 11 11.5 10.5 13 16 19 B 4.5 7.5 10.5 B 5 7.5 10.5 13.5 B 9 11.5 14.5 17.5 A 34.5 25.5 30 30 B 8 10.5 13.5 16.5 A 19.5 24 24 A 28 28.5 32.5 23.5 28 28 A 25.5 26 30 21

RLQ

50 63 D-F7WV D-F9WV D-F7BAVL D-F7V D-J79C D-M9V Number of auto switches D-A7, A7H D-A73C D-A80, A80H D-A80C 11 10 12 12 D-A79W D-A9, A9V 13 14 14 16 CL 1 pc. 2 pcs. 20 20 20 20 20 20 20 20 9.5 9.5 9.5 11.5 D-F7, F7V D-J79, J79C D-F7W, F7WV D-J79W D-F7BAL, F7BAVL D-F7NTL, F79F CL1 D-F7W D-J79W D-F7BAL D-F79F D-F9BAL 6 6 6 6.5 MLGC Number of auto switches D-A9 D-M9 D-A79W CNG D-M9, M9V 3.5

IP8001 Series

KFD2-SR2-Ex2.W Relay output No.IP8S-OM09 17 Description of Components Fig. 13 shows a description of each component.

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

55) 26 56 (63) 0 0 (17) D-A9, D-A9V 0 (15) 0 40 40 (55) 32 32 (47) 0 0 (15) 25 D-M9,D-M9V D-M9W, D-M9WV 40 (42) 0 40 50 (57) 47 72 (74) 15 10 (17) D-A9, D-A9V 0 (15) 0 50 50 (61) 38 38 (53) 0 0 (11) 32 D-M9, D-M9V D-M9W, D-M9WV 10 (17) 0 50 55 (63) 38 48 (55) 0 5 (13) D-A9, D-A9V 0 (15) 0 54 54 (64) 48 48 (63) 0 0 (10) 40 D-M9, D-M9V D-M9W, D-M9WV 15 (22) 0 54 59 (66) 48 63 (70) 0 5 (12)

Rotary Table/

D. (mm) I. D.

CXT

Reed switch Solid state switch A B HS D-F7 D-J79 D-F7W D-J79W D-F7BAL D-F79F D-F7NTL D-A7H D-A80H 32, 40 D-F7, D-J79W D-J79, D-F7BAL D-F7W, D-F79F D-F7NTL Auto switch model D-A7H D-A80H A B Hs A B Hs A B Hs Symbol Standard Stroke Bore size (mm) 32 40 9.5 13.5 32.5 36 6.5 9 6.5 9 32.5 36 9.5 13.5 10.5 13 32.5 36 14.5 18.5 Long Stroke Bore size (mm) 32 40 10 13.5 32.5 36 18 24 10 13.5 18 24

Compressed Air Cleaning Filter Series

D: With auto drain (N.O.) P Q S R Drain cock Gray: N.C.

OMR0031

Product Overview . 8 2.1 Features . 8 2.2 How to order . 11 2.3 Structure of the product . 12 2.4 Start up procedure . 13 (1) Check the contents of the package . 13 (2) Mounting the controller . 13 (3) Wiring and connection . 13 (4) Power supply ON and alarm check . 14 (5) Basic parameter setup and Step Data setup . 14 (6) Test operation . 14 3.

MXW Series Long Stroke Slide Table

A Shock absorber and urethane bumper side Dimensions (mm) B A Adjuster bolt D Lock nut C M Adjustment range (mm) 5 Applicable size B A C Model D M 1mm 1mm 21 MXW-A812 8 2.5 6 M5x0.5 MXW 8 15 31 MXW-A812-X11 5 23.5 MXW-A1212 8 2.5 6 M5x0.8 MXW12 15 33.5 MXW-A1212-X11 5 28.5 MXW-A1612 10 3 8 M6x1 MXW16 15 38.5 MXW-A1612-X11 5 34.5 MXW-A2012 13 4 10 M8x1.25 MXW20 15 44.5 MXW-A2012-X11 5 40 MXW-A2512

HRX-OM-Q026

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-15 Connection of RS-232C HRSH Series 3.3 Installation 3-27 HRX-OM-Q026 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.