The VM series is a mechanical, poppet valve. Their compact size requires little mounting space. The VM series offers a wide variety of actuator styles and flow capacity up to 1.0 Cv.Fluid: air, Operating pressure: -100kPa to 1.0MPa, Effective area (Cv): 6mm 2 (0.33), Ambient and fluid temperature: -5 to 60 C (no freezing), Port size (nominal size): Rc(PT) 1/8 (6A), VALVE, MECHL, VALVE

Brake mechanism added

15 14 9 9 10 10 11 D-B59W 14 14 17 16 18 D-A9 and D-A9V cannot be mounted on 50.

ZP3

Form w 1 Material e r Vacuum inlet Flat Type with Groove C2 Connection thread 04 20 12 1.2 M10 x 1 3 Width across flats 7 06 08 1.8 10 13 16 A12 30 18 M12 x 1 2 Width across flats 14 N S U F GN GS HS Pad diameter: 10 to 16 A10 ZP3 T UM B5 M5 0.8 Width across flats 14 D 5 E E B A Dimensions Per Vacuum Inlet: One-touch Fitting Model A B Fitting part min. hole size Fitting part no.

MQQ

RB A + Stroke FZ J Double clevis style: MQQLD Bore size (mm) Stroke range (mm) A B CL CD CT CU D10 CU 10 to 40 61.5 90.5 5 84.5 4 10 CD hole H10 Shaft d9 Cap bolt 16 10 to 60 70.5 107.5 8 98.5 5 12 -X 20 10 to 60 79 119 10 109 5 14 25 10 to 50, 75, 100 84.5 126.5 10 116.5 5 14 2028 10 to 50, 75, 100 104 148 10 138 6 14 CX +0.4 +0.2 CT Data CZ 0.1 0.3 CW B + Stroke L Bore size (mm) CW CX CZ

Environment

1000 1000 1000 1000 X Motorless 500 500 500 500 LAT 0 0 0 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 16 0 4 8 12 16 20 24 0 10 20 30 40 50 60 LZ Work load [kg] Work load [kg] Work load [kg] Work load [kg] 2000 2000 2000 2000 LC3F2 Mey 1500 1500 1500 1500 L5 [mm] L5 [mm] L5 [mm] L5 [mm] m 1000 1000 1000 1000 Wall L5 Y 500 500 500 500 0 0 0 0 4 8 12 16 20 24 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14

MQQ

RB A + Stroke FZ J Double clevis style: MQQLD Bore size (mm) Stroke range (mm) A B CL CD CT CU D10 CU 10 to 40 61.5 90.5 5 84.5 4 10 CD hole H10 Shaft d9 Cap bolt 16 10 to 60 70.5 107.5 8 98.5 5 12 -X 20 10 to 60 79 119 10 109 5 14 25 10 to 50, 75, 100 84.5 126.5 10 116.5 5 14 2028 10 to 50, 75, 100 104 148 10 138 6 14 CX +0.4 +0.2 CT Data CZ 0.1 0.3 CW B + Stroke L Bore size (mm) CW CX CZ

Series CQ2

(between lead wire and case) Ambient temperature ... 10 to 60C (14 to 140F) Enclosure . IEC529 standard IP67, watertight (JISC0920) Weight Table Unit: g (oz.)

LJ1H

: Transfer load (kg) a : Work piece acceleration (mm/s) Me: Dynamic moment L : Overhang to work piece center of gravity (mm) Pitching m a = 2000 1000 L1 a = 3000 0 10 20 30 Transfer load m (kg) 600 L2 400 Mer m Rolling Yawing 200 L2 Mer 0 10 20 30 m Transfer load m (kg) 2000 a = 1000 L3 1000 a = 2000 m a = 3000 Mey a 0 10 20 30 Transfer load m (kg) Refer to page 145 for deflection data. 14

Large Bore Compact Cylinder Series CQ2

(between lead wire and case) Ambient temperature ... 10 to 60C (14 to 140F) Enclosure . IEC529 standard IP67, watertight (JISC0920) Weight Table Unit: g (oz.)

Precision Cylinder Series MTS

With end lock 3 124.5 + Stroke 145.5 + Stroke Basic type With end lock Accessories SMTS25, #1 (#1 + #2) SMTS25, #2 (#2 + #4) SMTS25, #3 8 Series MTS Dimensions/32 MTS32 73.5 18 14 69.5 2-cushion needle Basic type Width across flats 14 8 6 Rod cross section 2-Rc 1/8 (port size) 7 7.5 M8 x 1.25 38 0.2 17 20 +0.015 0 26 0.2 5 0 0.018 4-5.5 through 2 x 4-9, counter bore depth 5.5 (opposite

IDX-OM-O004C

T 14.1 . 14-1 14.2 . 14-1 14.3 . 14-1 14.4 . 14-2 14.5 . 14-3 i i i.1 () 3 i.1.1 3 i 1 i i.2 i 2 i i.2.1 i.2.2 i.2.3 50 i.2.4 i 3 i i.2.5 0 i.2.6 WARNING !

10

6 r RJ10, 14, 2015, 2725 w i !2 r !3 !1 q e t y u o !0 !6 Component Parts No. Material Treatment Description No.

VXP21/22/23

14 92 (102) 184 (199) 103 (113) 202.5(217.5) 114 (124) ( ): N.O. 17-3-52

Vacuum Equipment

Vacuum regulator 13-14-2 Series IRV 13-14-3 Controls the vacuum pressure in accordance with external electric signals.

Air Cooled Aftercooler Series HAA 1

Refer to pages 14-21-3 to 14-21-4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to pages 14-14-6 to 14-14-8 for precautions on every series. Suffix Basic size (Applicable compressor rating) T With terminal (Provided as standard for HAA37.)

Programless Controller (With Stroke Study) ® Specialized for Series LEM Series LECP2

NPN PNP Power supply 24 VDC for I/O signal CN4 Power supply 24 VDC for I/O signal CN4 1 COM+ COM+ 1 COM COM 2 2 Load Load 3 3 OUT0 OUT0 Load Load 4 4 OUT1 OUT1 Load Load 5 5 OUT2 OUT2 Load Load 6 6 OUT3 OUT3 Load Load 7 7 BUSY BUSY Load Load 8 8 ALARM ALARM 9 9 IN0 IN0 10 10 IN1 IN1 11 11 IN2 IN2 12 12 IN3 IN3 13 13 RESET RESET 14 14 STOP STOP Input Signal Output Signal Name Details Name

1

0 0.1 2 21 5 M4 x 0.7 depth 7 Width across flats 6 length 3.5 M8 x 1.25 24 20 8 6.5 M4 x 0.7 25 17.5 15 17 16.5 10 14 0 0.1 2 24 6 M5 x 0.8 depth 7.5 Width across flats 8 length 3.5 M10 x 1.25 27 25 8 6.5 M5 x 0.8 32 17.5 15 17 20 10 18 0 0.1 2 24 6 M5 x 0.8 depth 8 Width across flats 8 length 3.5 M10 x 1.25 34.5 32 12 6.5 M5 x 0.8 40 23.5 20.5 22 24 14 24 0 0.1 2 30 8 M6 x 1 depth 10 Width

33

14 Circulating fluid pressure [MPa] Circulating fluid pressure [MPa] Outlet: 60 Hz Outlet: 60 Hz 0.12 0.12 12 12 0.10 0.10 Pump head [m] Pump head [m] 10 10 0.08 0.08 8 8 Outlet: 50 Hz Outlet: 50 Hz 0.06 0.06 6 6 0.04 0.04 4 4 Allowable operating range Allowable operating range Return port Return port 0.02 0.02 2 2 0.00 0.00 0 2 4 6 8 10 12 14 16 0 2 4 6 8 10 12 14 16 Circulating fluid flow

10

For air gripper and auto switch precautions, refer to the Handling Precautions for SMC Products and the Operation Manual on the SMC website: http://www.smcworld.com Refer to pages 12 to 14 for cylinders with auto switches.

2–4

46 10 5 69 67.5 5 33 23.3 7 40 5.5 9 7 66 35 10 M5 x 0.8 10-32UNF M6 x 1.0 1/4-20UNC 14 58 12 6 86 84.5 7 42 29.7 8 50 6.6 11 14 8 80 41 M6 x 1.0 1/4-20UNC M8 x 1.25 5/16-18UNC 19 7 Compact Cylinder/Guide Rod Type Series CQM Auto Switches/Proper Mounting Positions and Height for Stroke End Detection Reed switch Solid state switch D-A9 A B W D-M9 D-F9BAL D-F9 W 12 A B W 16, 20, 25 W A B 32