Aluminum High Vacuum Angle Valve

Rear flange surface M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) 3 Solid state auto switch Seal material changed part Flange: Reed auto switch Leakage (Pam3/s or less) Note) Internal 1.3 x 10-9 (FKM) 1.3 x 10-7 1.3 x 10-9 (FKM) 1.3 x 10-7 Symbol Changed part External Without auto switch (with built-in

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www.stevenengineering.com I 2.61 SOLENOID VALVES SERIES (N)VZ300 H O W T O O R D E R M A N I F O L D T Y P E 40 B O T T O M P O R T E D D I M E N S I O N S M A N I F O L D T Y P E 40 B O T T O M P O R T E D (N)VV3Z3 40 2 N U M B E R O F S TAT I O N S 02 2 stations to 20 20 stations S I Z E O F A, B P O R T M5 10-32Nom (P, R Port PT) M5T 10-32Nom (P, R Port NPTF) 01T 1/8 NPTF ACCESSORIES M

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4 3.2 4 M5x0.8 KJS04-M5 2.5 8 20.5 17 14.5 4 2.6 4 M5x0.8 KJF04-M5 8 8 20.5 7.5 14.5 4 3.8 4 R(PT)1/8 KJS04-01S 3 9.8 21.5 17.5 14.5 4 5.3 6 M5x0.8 KJF06-M5 10 10 20 7 15.5 10 5.1 6 M5x0.8 KJS06-M5 2.5 10 21.5 18 15.5 4 3.2 6 R(PT)1/8 KJS06-01S 4 10 22 18 15.5 10 5 Applicable Thread Model H D L A M Minimum Weight Tube O.D T (Hex) Hole (g) Applicable Thread Model H D L A M Minimum Weight

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M-5AU-6 D D C Width across flats 10 Model A B C D Vacuum inlet direction q Pad dia.

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

Pressure Switches/ Pressure Sensors 28 L plug connector (L): 10-SYJ3143-L-M5 M8 connector (WO): 10-SYJ3143-WO-M5 M plug connector (M): 10-SYJ3143-M-M5 Approx. 300 (Lead wire length) 41.5 [48.5] 26.1 46 M8 x 1 28.5 52.6 [59.6] Approx. 300 (Lead wire length) 64.3 [66.5] 54.5 [56.7] 63.4 56 49.5 R1 P R2 R1 P R2 R1 P R2 10 10 10 10 10 10 28 28 28 14 14 14 5 5 5 28.5 28.5 28.5 35.6 35.6 35.6

High Purity Fluoropolymer

M H L2 L1 A E M LQ1L12-M LQ1L11-M 3 4 11.5 1/8 11.5 10 15.5 18 1/8" R (NPT) Port size Class 1 LQ1L43-M LQ1L42-M LQ1L41-M LQ1L36-M LQ1L35-M LQ1L34-M LQ1L33-M LQ1L32-M LQ1L31-M LQ1L24-M LQ1L23-M LQ1L22-M LQ1L21-M 4 6 4 6 1/8" L1 16.5 14 14.5 15 20.5 27 1/4" 10 L2 M 1/4" 6 8 (A) 23 17 20 20 26.5 35 1/4 10 H 6 8 3/8" (E) Class 2 to 5 12 10 12 3/8" 28 21 25 24 33 45 1/2" LQ1L44-M 10 M LQ1L54-

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Basic Style A B 5 st 8.5 8.5 9.5 10 L Bore size (mm) 5 st 45.9 44 46 47.5 O N M K H E D Q V U S C 10 st 42.4 40.5 41.5 42.5 5 st 37.4 35.5 36.5 37.5 10 st 55.9 54 56 57.5 10 st 13.5 13.5 14.5 15 12 16 20 25 3.5 3.5 5.5 5.5 22 28 36 40 5 6 8 10 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1.0 32 38 47 52 6 8 10 12 6 8 7 12 11 10 10.5 11 25 29 36 40 19.5 22.5 24.5 27.5 35.5 41.5 48 53.5 6.5 depth 3.5 6.5

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

M L H A M W E LQ1H11-M LQ1H12-M LQ1H21-M LQ1H22-M LQ1H23-M LQ1H24-M LQ1H31-M LQ1H32-M LQ1H33-M LQ1H34-M LQ1H35-M LQ1H36-M LQ1H41-M LQ1H42-M LQ1H43-M LQ1H44-M LQ1H51-M LQ1H52-M LQ1H53-M LQ1H54-M LQ1H61-M LQ1H62-M LQ1H63-M LQ1H64-M 4 3 6 4 6 4 10 8 6 10 8 6 12 10 12 10 19 12 19 12 25 19 25 19 1/8 21 1/8" 25 10 11.5 10 Class 1 31.5 1/8" 15 35 16.5 14 14 H (A) L 29 1/4" W M 36.5 1/4" 20 42.5

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Suffix of how to order () U2: M-3AU-2,U4: M-3AU-4-X83 02: KJH02-M3,04: KJH04-M3-X83 Pad diameter: 10 to 16 Model Pad unit part no. Adapter part no. ZP3-Y (10/13/16)UM;-B5-@ ZP3-Y (10/13/16)B;-B5-@ ZP3-(10/13/16)UM ZP3-(10/13/16)B ZP3A-Y1-B3 ZP3A-Y3-B5 Note 1) in the table indicates the pad material. Note 2) in the table indicates the vacuum inlet.

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Suffix of how to order () U2: M-3AU-2,U4: M-3AU-4-X83 02: KJH02-M3,04: KJH04-M3-X83 Pad diameter: 10 to 16 Model Pad unit part no. Adapter part no. ZP3-Y (10/13/16)UM;-B5-@ ZP3-Y (10/13/16)B;-B5-@ ZP3-(10/13/16)UM ZP3-(10/13/16)B ZP3A-Y1-B3 ZP3A-Y3-B5 Note 1) in the table indicates the pad material. Note 2) in the table indicates the vacuum inlet.

Table of Contents

amount (10 6 Pam 3/s) of V, M options are values when differential pressure is 0.1 MPa.

SX

Speed controller Silencer Tube x Length Speed controller Silencer SX3140-01 SX3120-C6 AS3001F-06 AN110-01 AS2051F-06 AN120-M5 T0604 x 1 m T0806 x 1 m AS3001F-08 T0604 x 1 m T0806 x 1 m AS3001F-08 SX5140-02 SX5120-01 AS3001F-06 AS3001F-06 AN101-01 AN101-01 AS4001F-10 T0604 x 1 m T1075 x 1 m T1209 x 1 m AS3001F-06 T0604 x 1 m AS3001F-06 T1075 x 1 m AS4001F-10 SX7140-03 SX7120-02 SV AS200-02

ISO Cylinder

5 5 10 + 10 (n 2) (n = 4, 6) D-F7l D-J79 5 5 15 + 15 (n 2) (n = 4, 6) D-A9lV*2 5 10 10 + 15 (n 2) (n = 4, 6) D-A7l D-A80 D-A73C D-A80C Rail mounting 5 10 15 + 10 (n 2) (n = 4, 6) 5 10 15 + 10 (n 2) (n = 4, 6) D-A7lH D-A80H 5 10 15 + 15 (n 2) (n = 4, 6) D-F7lWV D-F7BAV D-A79W 10 15 10 + 15 (n 2) (n = 4, 6) D-A7lH D-A80H 5 10 15 + 15 (n 2) (n = 4, 6) D-M9l D-A9l*2 10

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Applicable shaft type: W (mm) Y L2 max Q2 Size (mm) L1 = Q2 = M Q1 = M 10 X L1 max Q1 Size Y 3 M4 7 to 8 Y = 10 15 M4 7 to 14 X 3 Y 3.5 M5 8.5 to 9 L2 = 15 20 M5 8.5 to 18 X 3.5 Y 4 M6 10 X = 20 30 M6 10 to 20 X 4 Y 5 M8 13 30 40 M8 13 to 22 X 5 Y 6 M10 15 Symbol: A5 The long shaft can be further shortened by machining it into a stepped round shaft.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Fig. a 50 40 30 20 m Work load m [kg] m LEYG25M 10 5 4 3 2 Fig. b 1 50 40 20 30 10 5 Transfer speed [m/min] 747 LEYG Series AC Servo Motor * These graphs show the work load when the external guide is used together. When using the LEYG alone, refer to pages 746 and 747.

smcmaintenancepartslist

How to Order N M X0 149 FND100 10 Nominal filtration rating Seal material Material t Symbol 149 149 m Nominal filtration rating Symbol N V NBR FKM 150 Element type Type 188 Symbol M Gold mesh Port size r Symbol 10 R1 Port size OUT IN Note Replacement Parts Specifications FND100V-10-M149X0 Model FND100N-10-M149X0 R1 Stainless steel 304 No. Description Element Material Kit No.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Applicable shaft type: W (mm) Y L2 max Q2 Size (mm) L1 = Q2 = M Q1 = M 10 X L1 max Q1 Size Y 3 M4 7 to 8 Y = 10 15 M4 7 to 14 X 3 Y 3.5 M5 8.5 to 9 L2 = 15 20 M5 8.5 to 18 X 3.5 Y 4 M6 10 X = 20 30 M6 10 to 20 X 4 Y 5 M8 13 30 40 M8 13 to 22 X 5 Y 6 M10 15 Symbol: A5 The long shaft can be further shortened by machining it into a stepped round shaft.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Applicable shaft type: W (mm) Y L2 max Q2 Size (mm) L1 = Q2 = M Q1 = M 10 X L1 max Q1 Size Y 3 M4 7 to 8 Y = 10 15 M4 7 to 14 X 3 Y 3.5 M5 8.5 to 9 L2 = 15 20 M5 8.5 to 18 X 3.5 Y 4 M6 10 X = 20 30 M6 10 to 20 X 4 Y 5 M8 13 30 40 M8 13 to 22 X 5 Y 6 M10 15 Symbol: A5 The long shaft can be further shortened by machining it into a stepped round shaft.

Electric Actuator with Integrated Guide

point distance mm LTF8 Horizontal Lateral 10 10 Load 100% Load 100% Load 50% 1000 Load 50% 10 Amount of deflection m Amount of deflection m 100 1000 10 100 1 No load 10 No load 0.1 1 0.01 100 1000 100 1000 Load point distance mm Load point distance mm w w With single end support and table moved to the end of the stroke Load point distance Load point distance Figure 2.

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to 8E-10 IDU3E-10, 4E-10 500 VA IDF-TR500-2 Output sealing C A Output outlet Input fuse 5A Voltage selector B 220V INPUT 200V 230V 240V E D 4-5.5 x 10 long hole F Input cord 2 m Transformer part no.