LMU100/200 Series Mist Spray Unit

6ON/OFF valve for oil mist 190 190 t y q t y q 6 6 !0Supply pressure gauge !0Supply pressure gauge R3.5 R3.5 OIL, AIR OIL, AIR Rc1/4 Rc1/4 L L K K C C O O AIR BLOW SUP SUP !1Tank pressure gauge !1Tank pressure gauge 272 272 153 238 153 238 e e 189.5 153 2 189.5 2 u u w r i w r i o o Material Note Main Parts List Part no. Spare Parts/Replacement Parts Part No. No. Description No. Qty.

Cylinder Positioner IP200 Series

./0.05 MPa Ambient and fluid temperature 5C to 60C Port size Rc1/4 (Gauge port Rc1/8) Weight Approx. 700 g (at 100 mm stroke) Construction/Principle of Operation When signal pressure enters input chamber q, the input diaphragm e is deflected left. Clearance of the nozzle y is reduced causing higher back pressure at diaphragm A u.

Ionizer Nozzle type IZN10 Series IZS

Z direction for 2 hrs. each (De-energized) Vibration resistance IZE110-X238 N P N C JQ/T G Impact resistance 100 m/s2 in X, Y, Z directions 3 times each (De-energized) +24 VDC Valve (+) 1 5 Main circuit Material Front case: PBT, Rear case: Denaturated PPE Valve () Not connected 6 2 Weight 50 g OUT 0 V 7 3 Note) Do not use a load that generates surge voltage.

MHK2

9 t y !5 !6 i u q r !1 !0 Closed condition Normally closed !2 !3 !4 Component Parts Material Material Note Note No. q w e No. i o !0 !1 !2 !3 !4 !

MHK2

9 t y !5 !6 i u q r !1 !0 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Closed condition Normally closed !2 !3 !4 Component Parts Material Material Note Note No. q w e No. i o !0 !1 !2 !3 !4 !

Wedge Cam Operation Provides

9 t y !5 i u !6 q r !0 !1 !2 Fingers closed Normally closed !4 !3 Component Parts Component Parts Note Material Material Note No. q w e t y u No. i o !0 !1 !2 !3 !4 !

3 Port Solenoid Valve Rubber Seal Series SY100 1

Material Replacement Parts Material Note Component Parts VQZ No. q w e r t y No. !0 !

Clean Rodless Cylinder Series CYP

P (port f)] WB WA R 4-J Depth JK Inner cover holding screw TA TA WB WA TB TB R W (mm) C ED A EK B F E G H HA HB HG HI HL HP HS HT J JK K Model +0.030 0 CYP15 5.4 9.5 8 4 9.5 12.5 4H9 6.5 45 19.5 8.5 8.5 23 38.6 44 27 19.5 M6 x 1 10 21 +0.030 0 CYP32 8.6 6H9 13 12 14 6 25 8.5 75 39 19 19 39 64.9 73.5 49.5 39 M10 x 1.5 12 20 LD LW MM M N L P PA PB Q QW R T TA TB W WA WB Y Z Model CYP15 5.6

Self-seal Fittings Series KC

Nylon Urethane M Q L D KCT04-00 KCT06-00 KCT08-00 KCT10-00 KCT12-00 4 6 8 10 12 2.8 2.8 7.6 7.6 13.7 11.1 21.1 19.0 28.3 24.3 18 19 21.5 24 25.5 5.3 6.1 7.1 7.9 8.6 28.6 32.7 39.2 45.5 49.2 10.4 12.8 15.2 18.5 20.9 9 16 24 39 52 Note) D: max. diameter Union Y: KCU Effective orifice(mm 2) Weight (g) Applicable tube O.D. (mm) Part No.

Clean Room Regulator/Fluoro Resin Type Series SRF30

Construction Tubing Integral fittings e y t e t i r y !6 r u i u q o q !0 o !1 !0 w !1 !2 w !2 Parts list !3 No.

3 Port Solenoid Valve, VQ100 Series, Base Mounted Type

How to Calculate Flow (At an air temperature 20C) 1P1+0.1013<1.89(P2+0.1013) Q=226S P(P2+0.1013) Piping 2P1+0.10131.89(P2+0.1013) 1Completely flush (air blow) pipes before plumbing to remove dust. 2Clamping torgue: Q=113S(P1+0.1013) Q:Flow rate under standard conditions [ /min (ANR)] P1:Upstream pressure (MPa) P2:Downstream pressure(MPa) P:Pressure differential(P1-P2)(MPa) S:Effective area

25

From the point just found, draw a line to the Y-axis to find the air consumption. The result is approximately 10 L/min (ANR). Air consumption (L/min [ANR]) SUP = 0.7 MPa 40 35 30 SUP = 0.5 MPa 25 20 SUP = 0.35 MPa Caution 15 SUP = 0.2 MPa 10 1.

VDW30/40-XF

Description Material 1 2 3 4 5 6 7 8 9 10 Body PPS Tube assembly Stainless steel Coil assembly i Armature assembly Stainless steel, NBR, FKM, EPDM r y u q o !0 Return spring Stainless steel Flame Iron O-ring NBR, FKM, EPDM Round head combination screw Iron Cassette POM, Stainless steel OUT IN Seal NBR, FKM, EPDM q Do not disassemble.

AC Servo Motor Electric Actuator/Slider Type Ball Screw Drive LEFS Series LEFS25, 32, 40

How to Order w e q r t y u i o !0 !

IS3000

No. q w e r t y u Description Adjusting screw Setting spring Lever Piston Micro switch Bottom cover O-ring Material Rolled steel Rolled steel Rolled steel Polyacetal Aluminum die-cast NBR IN Ex. 3) + u Plug PLC 3. Thread using for the terminal is M3. Only for gasket mounting style Mounting/Piping Dimensions Caution 1. Allow the space required for maintenance.

VNC

Component Parts Note No. q Description Material Plated Cast iron Cover assembly Body assembly Platinum silver painted Valve composition, NBR, FKM Aluminum alloy Iron N.O.

VND

Material Bronze Note Clear coated q Description Cover assembly Body Aluminum alloy Brass Platinum silver painted PTFE, EPR, FKM w e Plate assembly Valve element Piston assembly Return spring Second plate assembly r Brass, PTFE t Aluminum alloy y Piano wire u Aluminum alloy Body option S is made of stainless steel. 17-4-42

Series SY100 3 Port Solenoid Valve Rubber Seal

SY114/SY124, SY114A/SY124A only. 2.1-6 Series SY100 Construction SY114, SY114A (A) 2 3 (R) 1 (P) q y e r w i SY SYJ VK VZ VT VT VP A R P o u t !0 !1 VG VP VQ VQZ Part No.

4 Port Direct Operated Poppet Solenoid Valve Series VQ D1000

Note 2) 1 (P) 3 (R) Note 3) 1.13-4 Series VQD1000 Construction JIS Symbol (A) 4 (B) 2 Part name Component Parts Note Material No. q w e r t y u i o !0 Solenoid coil assembly Sub-plate Body Spool valve Poppet Guide ring Return spring Manual override Gasket Round head screw VQD1000-S-M5(Base mounted only) Aluminum ZDC 1 (P) 3 (R) q u e !

Pilot: R (External Pilot), Voltage: 5 (24VDC), Lead Wire: D (DIN Connector), Surge Suppressor: Z (Light & Surge Suppressor), Port Size: 10 (1), Thread: N (NPT)