S070 is extremely lightweight (5g for valve single unit type) and operation noise is 38dB(A) or less. It is easy to increase or decrease the number of stations (stacking base). Valve width is 7mm.

S070 is extremely lightweight (5g for valve single unit type) and operation noise is 38dB(A) or less. It is easy to increase or decrease the number of stations (stacking base). Valve width is 7mm.

S070 is extremely lightweight (5g for valve single unit type) and operation noise is 38dB(A) or less. It is easy to increase or decrease the number of stations (stacking base). Valve width is 7mm.

S070 is extremely lightweight (5g for valve single unit type) and operation noise is 38dB(A) or less. It is easy to increase or decrease the number of stations (stacking base). Valve width is 7mm.

S070 is extremely lightweight (5g for valve single unit type) and operation noise is 38dB(A) or less. It is easy to increase or decrease the number of stations (stacking base). Valve width is 7mm.

3-Position Rotary Table

x 0.5 M10 x 1 34 132.5 46 50 27.3 47 15 3H9 3.5 M5 x 0.8 8 32 27 3H9 3.5 19 3H9 3.5 M10 x 1.5 15 M6 x 1 M5 x 0.5 M12 x 1.25 37 168.5 58.5 63.5 39 54 20.5 4H9 4.5 M6 x 1 10 43 36 4H9 4.5 24 4H9 4.5 M10 x 1.5 15 M6 x 1 M5 x 0.5 M12 x 1.25 40 184 63.5 69 36.4 57 23 4H9 4.5 M6 x 1 10 48 39 4H9 4.5 28 4H9 4.5 M12 x 1.75 18 M8 x 1.25 M6 x 0.75 M14 x 1.5 46 214.5 76 78 42.4 66 26.5 5H9 5.5 M8 x

Pressure Gauge Guide

side thread Type Port size (1) R 1/8, R 1/4 (Option M: with M5 female thread) Air Fluid (2) 3% F.S.

Speed Controller with

Port size Body size 2 to 16 1 to 4 M5 to 1/2 1/8" to 1/2" Metric size Inch size 2 to 16 1 to 4 M5 to 1/2 1/8" to 1/2" Flow rate 0 5 10 Number of needle rotations Refer to the Web Catalog for details.

CG5-S

With auto switch (built-in magnet) Mounting B L F G E Basic type Axial foot type Front flange type Rear flange type Integral clevis type Number of auto switches Nil S n 2 pcs. 1 pc. "n" pcs.

Clean Rodless Cylinder Series CYP

g Nil Reed switch L R Solid state switch S h Nil L R S Operating direction Left Right a b h g d c f e Note) Lead wire length symbols 0.5m .

AS-FPQ/AS-FPG

Body size 1 2 3 4 M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard Applicable tubing O.D.

AS-FPQ/AS-FPG

Metric sizes Type 04 06 08 10 12 4 6 8 10 12 2 Elbow Control type 0 1 Meter-out Meter-in Port size M5 01 02 03 04 M5 x 0.8 1/8 1/4 3/8 1/2 With One-touch fitting Clean specifications Metal parts material Q G Brass (electoless nickel plated) Stainless steel 304 Needle Valve/Flow Characteristics AS121FP-M5 AS221FP-01 AS221FP-02 08,10 06,08 06 04 04 AS321FP-03 AS421FP-04 12 10 10,12 08 06 15

Air Cylinder

A AL B B1 C D E F G H H1 J K KA M MM N P S ZZ 32 Up to 300 22 19.5 42 17 31 10 24 8 9 38 6 M5 x 0.8 5.5 8 8 M10 x 1.25 18 1/8 63 109 40 Up to 300 24 21 48 22 37 14 32 9 9 44 8 M5 x 0.8 8 12 8 M14 x 1.5 18 1/8 62 114 45 Up to 300 24 21 52 22 41 14 32 9 9 44 8 M5 x 0.8 8 12 8 M14 x 1.5 18 1/8 62 114 50 Up to 400 35 32 60 27 45 18 38 10 9 55 11 M6 x 1 7 16 11 M18 x 1.5 18 1/8 63 129 56 Up to

Large Type Vacuum Unit Series ZR

SMC PRESSURE SWITCH PD PV 57 1 67 1 32.4 109 Approx. 300 Ejector RESET SET Supply valve Release valve V 21.2 Manual override Suction filter 1 2-4.6 (mounting hole) 1 5.6 1 8 1 10.2 123 1 4.6 1 8 SOL. c SOL. a Silencer SOL. b Interface A Light Suction filter Manual override Interface B Digital vacuum pressure switch M5 port PE (pilot valve exhaust port) M5 port PD (vacuum breaking pressure

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

Body size 1 2 3 4 M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard Applicable tubing O.D.

CLK1

Unclamp side lock (F) 3-Rc 1/4 Clamp side port 3-Rc 1/4 Unclamp side port 52 N L + Stroke Rear cushion valve Top width across flats 3 4-M6 x 1 Thread depth 12 17 1010 GA W GB 45 45 14 30 BX M 3 25 43 IA BY Max.Wc 40 30 D 13 35 36 Ws Width across flats K Width across flats 44 0.050 0.093 +0.027 0 +0.3 0 +0.4 0 F Shaft: 12d9 Clevis width CLK1A: 16.5 R15 Hole: 12H8 CLK1B: 19.5 S + Stroke 27

Filter Regulator AW30, 40

1/4 Non-relieving Flow direction: Right to left Drain cock with barb fitting: 6 x 4 nylon tube Note 1) Body size 3 8 30 40 1 2 Note 2) Thread type Metric thread (M5) Rc NPT G Nil Display units for product name plate, caution plate for bowl, and pressure gauge: PSI, F Note 3) Note 1) N F When more than one specification is required, indicate in ascending alphabetical order.

MLGC

RLQ MLU View A-A' ML1C DStandard Stroke B AF AP E A AA AB AC AD AE BP BZ C D F G GC Bore size (mm) 20 25 32 40 Stroke range (mm) -X 11 depth 8 26.5 73.5 6.8 75, 100, 125, 150, 200 M6 x 1 depth 12 13 94 16.5 70 32 35 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/8 50 28 135 118 12 14 depth 10 31.5 86.5 8.6 M8 x 1.25 depth 16 16 19 104 75 37 40 50 29 160 140 16 2075, 100, 125, 150, 200, 250, 300 14 depth 10 31.5

MLGC

RLQ MLU View A-A' ML1C DStandard Stroke BP BZ C D E F G GC A AA AB AC AD AE AF AP B Bore size (mm) 20 25 32 40 Stroke range (mm) -X 11 depth 8 26.5 73.5 6.8 75, 100, 125, 150, 200 M6 x 1 depth 12 13 94 16.5 70 135 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/8 50 118 28 35 32 12 14 depth 10 31.5 86.5 8.6 M8 x 1.25 depth 16 16 104 19 75 160 50 140 29 40 37 16 2075, 100, 125, 150, 200, 250, 300 14 depth 10 31.5

48

(M3, M5, and G threads) Use SMCs recommended grease. Grease pack part number: GR-S-010 (10 g) M3, M5, Rc port, NPT port Use the correct tightening torques listed below.