Brake mechanism added

41 41 42.5 41 50.5 85 93 49 42 48 42 85.5 91 93.5 91 41 43.5 41 46 41 49.5 49.5 48.5 51 48.5 59 93.5 101.5 55.5 50 54 50 94 107 102 107 49 51.5 49 54 49 57 58.5 56 59 56 69.5 104 112 63 57.5 62 57.5 104 121 112 121 56 59.5 56 62.5 56 D-A9 and D-A9V cannot be mounted on 50.

Vacuum Pad

12 1.2 7 11 10 1.8 14 13 1.8 Dimensions (per stroke) Dimensions (per stroke) Weight (g) Weight (g) A A B D B D Rotating (K) Non-rotating (J) Rotating (K) Non-rotating (J) Model Model ZP3-Y10UM:3-B5 ZP3-Y10UM:6-B5 ZP3-Y10UM:10-B5 ZP3-Y13UM:3-B5 ZP3-Y13UM:6-B5 ZP3-Y13UM:10 -B5 13.0 14.2 16.1 13.1 14.3 16.2 23.5 26 30 41 47 57 11 14.5 20.5 13.6 14.9 17.3 23.5 26 30 41 47 57 11 14.5 20.5 13.7

Vacuum Pad

12 1.2 7 11 10 1.8 14 13 1.8 Dimensions (per stroke) Dimensions (per stroke) Weight (g) Weight (g) A A B D B D Rotating (K) Non-rotating (J) Rotating (K) Non-rotating (J) Model Model ZP3-Y10UM:3-B5 ZP3-Y10UM:6-B5 ZP3-Y10UM:10-B5 ZP3-Y13UM:3-B5 ZP3-Y13UM:6-B5 ZP3-Y13UM:10 -B5 13.0 14.2 16.1 13.1 14.3 16.2 23.5 26 30 41 47 57 11 14.5 20.5 13.6 14.9 17.3 23.5 26 30 41 47 57 11 14.5 20.5 13.7

Vacuum Pad

12 1.2 7 11 10 1.8 14 13 1.8 Dimensions (per stroke) Dimensions (per stroke) Weight (g) Weight (g) A A B D B D Rotating (K) Non-rotating (J) Rotating (K) Non-rotating (J) Model Model ZP3-Y10UM:3-B5 ZP3-Y10UM:6-B5 ZP3-Y10UM:10-B5 ZP3-Y13UM:3-B5 ZP3-Y13UM:6-B5 ZP3-Y13UM:10 -B5 13.0 14.2 16.1 13.1 14.3 16.2 23.5 26 30 41 47 57 11 14.5 20.5 13.6 14.9 17.3 23.5 26 30 41 47 57 11 14.5 20.5 13.7

Refrigerated Air Dryers Series IDF/IDU

Select accessories sold separately. 6 Refer to page 12.

Compact Cylinder

M6 M8 M8 M10 M10 20 25 32 40 50 63 80 100 20 25 32 40 50 63 80 100 Single clevis bracket Hexagon socket head cap screw (Accessory) CL CD hole H9 CZ M CX -0.2 -0.6 M CU CZ CW RR (mm) Hexagon socket head cap screw Bore size (mm) CDH9 CL CU CW CX CZ M RR 8 8 10 12 12 16 16 20 3 3 5.5 5.5 6.5 6.5 10 10 12 12 12 15 15 20 20 25 20 20 22 25 27 32 36 41 16 16 26 28 32 40 50 60 35 40 45 51 64 74

ZP

Form w 1 Material e Vacuum inlet r Connection Width across flats 12 thread A 10 A5 62 41 25 2.5 M5 x 0.8 21 8 4 16 63 42 26 10 N S U F GN GS 67 41 25 2.5 M6 x 1 26 8 4 16 68 42 26 25 74 48 30 3.5 40 83 57 39 6 25 A8 64 48 30 3.5 M8 x 1 16 12 4 40 73 57 39 6 N4 N6 U4 U6 C B Width across flats 7 ZP Y D A6 M5 x 0.8 Dimensions Per Vacuum Inlet D2 Model J K Fitting part min. hole size Vacuum inlet

Mechanically Jointed Rodless Cylinder Series MY1

Operating range MY1MW (Slide bearing guide type) MY1CW (Cam follower guide type) (mm) (mm) Auto switch model Bore size Auto switch model Bore size 16 20 25 32 40 50 63 16 20 25 32 40 50 63 D-A9/A9V D-A9/A9V 11 7.5 11 7.5 D-M9/M9V D-M9W/M9WV D-M9AL/M9AVL D-M9/M9V D-M9W/M9WV D-M9AL/M9AVL 7.5 7.5 8.5 7 6 7.5 7.5 7 8 7 6 D-Z7/Z80 D-Z7/Z80 12 12 12 11.5 11.5 12 12 12 11.5 11.5 D-Y59/Y69

MXS Series Air Slide Table

With end lock (16) MXS16R With buffer (16) MXS16F 2-M6 X 1 thread 10 deep Operating port 2-M5 X 0.8 J 13 12 18 48 20 41 3 30 0.5 37.5 Dimensions not indicated are the same as basic type.

ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

E1 EW TG1 FL l1 L l2 d1 CD MR d2 R1 l2 32 C5032 45 260.2 0.6 32.5 22 5 12 5.5 30 10 9.5 6.6 6.5 40 C5040 51 280.2 0.6 38 25 5 15 5.5 35 12 12 6.6 6.5 50 C5050 64 320.2 0.6 46.5 27 5 15 6.5 40 12 12 9 8.5 63 C5063 74 400.2 0.6 56.5 32 5 20 6.5 45 16 16 9 8.5 80 C5080 94 500.2 0.6 72 36 5 20 10 45 16 16 11 11 100 C5100 113 600.2 0.6 89 41 5 25 10 55 20 20 11 12 CDH9 * Supplied with 4 mounting

ZP

32 40 50 ZP50U 53 7 0.8 0.8 0.8 1 3 3 3.5 4 4 4.5 6.5 7.5 Put in the symbol for material at the end of model no. 7 7 7 7 13 13 13 15 15 15 18 18 14.7 12 12 12 12 12 12 12.5 14 14 14.5 18.5 19.5 U04 ZP04U 4.8 1.6 U06 ZP06U 7 2.5 U08 ZP08U 9 2.5 U10 ZP10U 12 4 7.7 U13 ZP13U 15 4 7.7 U16 ZP16U 18 4 8.2 U20 ZP20U 23 4 9.5 U25 ZP25U 28 4 9.5 U32 ZP32U 35 4 10 Model Size D10 A 10 ZP10D B 12

Integrated Controller

Wiring Examples Operation Data Setting Options Specific Product Precautions EQFS25RH Motor option: With lock (132.5) (16) (2) 3 H9 (+0.025 0 ) depth 15 (Depth of counterbore 12) (172.5) (2) (16) Body mounting reference plane (B dimension range)1 4 x M5 x 0.8 thread depth 20.5 (Depth of counterbore 12) 128 38 3.5 50 22.5 (Depth of counterbore 12) 3 H9 (+0.025 0 ) depth 15 45 64 (102) L +

CJ5-S

35 5 31 M4 x 0.7 depth 7 5 6 3 M8 x 1.25 29 M5 x 0.8 83 25 CC Up to 400 22 19.5 17 8 M5 x 0.8 9.5 18.5 10 17 3 18 12 40 6 33 M5 x 0.8 depth 8 5.5 8 3.5 M10 x 1.25 29 M5 x 0.8 83 32 Up to 450 22 19.5 17 8 M5 x 0.8 9.5 20 12 19 3 18 12 40 6 38 M5 x 0.8 depth 8 5.5 10 3.5 M10 x 1.25 35.5 Rc 1/8 85 40 RB Up to 800 30 27 19 10 M6 x 1.0 12 26 16 23 3 19 13 50 8 47 M6 x 1.0 depth 12 6 14 4 M14 x

CJ5-S

35 5 31 M4 x 0.7 depth 7 5 6 3 M8 x 1.25 29 M5 x 0.8 83 25 CC Up to 400 22 19.5 17 8 M5 x 0.8 9.5 18.5 10 17 3 18 12 40 6 33 M5 x 0.8 depth 8 5.5 8 3.5 M10 x 1.25 29 M5 x 0.8 83 32 Up to 450 22 19.5 17 8 M5 x 0.8 9.5 20 12 19 3 18 12 40 6 38 M5 x 0.8 depth 8 5.5 10 3.5 M10 x 1.25 35.5 Rc 1/8 85 40 RB Up to 800 30 27 19 10 M6 x 1.0 12 26 16 23 3 19 13 50 8 47 M6 x 1.0 depth 12 6 14 4 M14 x

21

Integral Clevis (E) (mm) A 14.5 AL 12 B1 13 CD 8 CI 20 CX 12 D 8 E 20 F 13 FL 10.5 G 6 H 31 H1 5 I 27.9 KA L 12 Bore size 0 0.033 0 0.033 0 0.033 0 0.039 20 25 32 40 Width across flats 6 length 3.5 17.5 15 17 8 22 12 10 26 13 10.5 6 34 6 33.4 Width across flats 8 length 3.5 12 17.5 15 17 10 27 20 12 26 13 10.5 8 34 6 37.4 Width across flats 10 length 3.5 15 23.5 20.5 22 10 33 20 14 32 16

Industrial Filters

Note) For a comparison with the nominal filtration accuracy according to the element category, refer to pages 41 and 42.

Cylinder with Lock Series MNB

8 52 104 38 16 13 31 9 3 10 83 46 101 91 1/8 40 14 65 63 14 27 to 1000 35 27 11 65 120.5 46.5 20 14 38.5 9 2 12 100 52 120 104.5 1/4 50 15.5 77 75 18 32 to 1000 35 27 11 75 134.5 56.5 20 14 39.5 9 2 12 115 62 135 119.5 1/4 63 16.5 92 90 18 32 to 1000 40 32 13 95 169 72 25 20 45.5 12 4 16 126 63 153 150 1/4 80 19 100 102 22 37 to 1000 40 41 16 114 189 89 30 20 54 14 4 16 150 75 178 170 1/

CG5-S

14 41 10.5 20 25.6 30 20 12.8 14 IY-G03SUS +0.5 +0.3 +0.058 0 +0.070 0 10 10 18 18 I-G04SUS Y-G04SUS 40 40 M14 x 1.5 42 14 22 30 M14 x 1.5 12 14 42 16 22 41.6 30 36 12 14 IY-G04SUS +0.5 +0.3 +0.5 +0.3 14 14 22 22 I-G05SUS Y-G05SUS 50, 63 50,63 M18 x 1.5 56 18 28 40 M18 x 1.5 16 20 56 20 25 50.6 40 44 16 20 IY-G05SUS +0.070 0 18 18 28 28 I-G08SUS Y-G08SUS 80 80 M22 x 1.5 71 21 38 50 M22 x

Basic Type/Direct Mount Type

Yes Grommet Diagnostic indication (2-color display) 5 V, 12 V IC circuit Relay, PLC 24 V 12 V 5 V, 12 V Water resistant (2-color display) IC circuit M9PA1 M9BA1 12 V 3-wire (NPN equiv.)

Compact Cylinder Series CQS

10.5 12 14 17.5 M8 x 1.25 M10 x 1.25 Basic Style Bore size (mm) Stroke range (mm) Without auto switch With auto switch C D E F H I K1 K2 L M N OA OB Q RA RB T A 34 34 40 44 B 27 27 31 34 A 39 39 50 54 B 32 32 41 44 12 16 20 25 6 8 7 12 6 8 10 12 25 29 36 40 7.5 7.5 9 11 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1.0 32 38 47 52 5.2 6.2 8.2 10.2 5 6 8 10 3.5 3.5 4.5 5 15.5 20 25.5 28 3.5 3.5 5.4 5.4