Fieldbus System

Note 2) Only direct mounting is available for Type 11 (Bottom ported). * Bottom ported type of the SY3000 uses the manifold base of the SY5000.

Title not found

13 7 6 9 8 11 10 3 Connector B terminal no.

Step Motor Controller (Servo / 24 VDC)

Setting Data Entry . 35 7.1 Step data . 35 7.2 Basic parameter . 38 7.3 Return to origin parameter . 40 8.

Series VQ Metal Seal/Rubber Seal Body Ported

L 11 12 13 14 15 16 17 18 19 20 148 160.5 173 185.5 198 210.5 223 235.5 248 260.5 No. L 21 22 23 24 25 26 27 28 29 30 273 285.5 298 310.5 323 335.5 348 360.5 373 385.5 No. L 31 32 33 34 35 36 37 38 39 40 398 410.5 423 435.5 448 460.5 473 485.5 498 510.5 No.

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

AS22l1FG-02-03(S)A 5/32" 8.2 AS22l1FG-02-07(S)A 1/4" 11.2 23.4 32.7 (32.8) 18 (18) AS22l1FG-02-09(S)A 5/16" 13.2 23.9 33.2 (33.3) 14.2 18 (19) AS22l1FG-02-11(S)A 3/8" 15.5 26.4 35.7 (35.8) 15.6 19 (20) AS32l1FG-02-07(S)A 1/4" 1/4 19 11.2 16.6 21.8 32.1 36.4 50 48.4 44.5 42.9 13.3 40 (40) AS32l1FG-02-09(S)A 5/16" 13.2 22.7 33 14.2 41 (41) AS32l1FG-02-11(S)A 3/8" 15.5 26.7 37 35.9 15.6 AS32l1FG

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

Refer to page 8-8-11 for details of the traveling parallelism. MX MTS 0 10 20 30 40 50 60 70 80 90 100 110 120 130 140 150 160 170 180 190 MY With stroke adjuster for auto switches Stroke adjuster CY 10 Three types (rubber stopper, metal stopper, shock absorber) are available.

Compact Cylinder

-45 -50 -60 -80 -100 -125 -150 C(D)55B25-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B80-10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 C(D)55B40-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B50-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B63-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 7.2 11 9 Fix the

Rotary Actuator Ｃ ( Ｄ ) ＲＡ１＊＊＊３０～１００－＊＊Ｚ

Loosen the hexagon nut 41 of right cover 34 to remove the seal washer 40 and hexagon nut with the hexagon socket set screw 37 from the angle adjustment collar 39 . 17 15 10 3 14 11 5 12 19 9 14 12 1 4 11 6 34 35 37 40 41 15 39 45 - Assembly procedure 1. Apply the grease provided in the seal kit to parts shown in Table (20). Table (20) Parts where grease is to be applied 2.

Auto Switch Guide Reed Switches/Solid State Switches For Air Grippers (Rotary Actuators) 1

1 Auto Switch Guide Reed Switches/Solid State Switches For Air Grippers (Rotary Actuators) Applicable Auto Switch Auto switch mounting Applicable rotary actuators Applicable air grippers MHZ Auto switch model Electrical entry Size Page Type Size MHF 30 50-100 10/15 20-100 10/15 20-40 32/40 1/3 7/20 10-200 10-25 10-25 10-25 10-40 10-30 16-25 32-125 10-25 32-63 20-50 CDRA1 CDRB CDRQ2 MRQ MDSUB

Auto Switch Guide Reed Switches/Solid State Switches For Air Grippers (Rotary Actuators) 1

1 Auto Switch Guide Reed Switches/Solid State Switches For Air Grippers (Rotary Actuators) Applicable Auto Switch Auto switch mounting Applicable rotary actuators Applicable air grippers MHZ Auto switch model Electrical entry Size Page Type Size MHF 30 50-100 10/15 20-100 10/15 20-40 32/40 1/3 7/20 10-200 10-25 10-25 10-25 10-40 10-30 16-25 32-125 10-25 32-63 20-50 CDRA1 CDRB CDRQ2 MRQ MDSUB

CE2

800 25 to 650 50 35 80.5 27 70 46 21 52 24 20 28.5 10 40 10 12 162.5 17 27 59 13 11 M8 x 1.25 9 11 32 25 to 800 25 to 650 60 35 98.5 27 85 48.5 23 64 24 20 28.5 13 40 10 15 174 17 26 67 18 11 M10 x 1.25 9 13.5 32 25 to 750 25 to 600 70 40 117.5 32 102 55 23 78 26.5 25 36 15 52 14 17 189 21 30 72 23 13 M12 x 1.75 11 16.5 37 25 to 750 25 to 600 80 40 131.5 41 116 56.5 25 92 35.5 30 36 15 52

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

Applicable Auto Switch/Refer to page 11-11-1 for further information on auto swiches.

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Bore size (mm) 20 25 32 40 20 25 32 40 Clean room series Standard strokes (mm) Auto switches are not mounted, but rather packaged together with the cylinder for shipment. 10(Relieving type) 25, 50, 75, 100, 125, 150, 175, 200, 250, 300 11(Vacuum type) Specifications Bore size (mm) 10(Relieving type) 11(Vacuum type) 20 20 25 32 40 25 32 40 Fluid Proof pressure Maximum operating pressure Minimum

EX510

7 6 5 4 4 5 6 7 1 1 to to to to to to to to 5 5 11 10 9 8 8 9 10 11 1 + 2 + 3 + 4 + 5 + + 5 + 4 + 3 + 2 + 1 6 6 12 13 14 15 15 14 13 12 10 10 6 + 7 + 8 + 9 + 10 + + 10 + 9 + 8 + 7 + 6 PWR PWR 11 11 COM COM 15 15 11 + 12 + 13 + 14 + 15 + + 15 + 14 + 13 + 12 + 11 5A 5A 0V +24V +24V 0V 2 x M4 Mounting hole Shown with cover removed. 60 1711 Series EX510 Parts Description i w t Output Unit No

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

and switch rail 2-M2 x 0.4 depth 3 8 5.7 3.5 L 6-M4 x 0.7 depth 4.5 20 20 2-M3 x 0.5 depth 3.5 (mm) G H J K L M Q QL S V W Z Model 10 40 68 22 24 29 40 18 15 59 55 76 11-/22-MXP12-15 30 60 98 40 42 49 60 23 25 89 75 106 11-/22-MXP12-25 103 Precision air slide table MXP/MXPJ6 11221122Dimensions: MXP16 3 Z V K Metal stopper C 6.5 C Max. 4 25 5 Without stroke adjuster G M 11 Max. 4 C 2-M5 x

Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

10 40 68 22 24 29 40 18 15 59 55 76 11-/22-MXP12-25 30 60 98 40 42 49 60 23 25 89 75 106 836 Air Slide Table MXP/MXPJ6 1122Dimensions: MXP16 11223 Z V K Metal stopper C 6.5 C Max. 4 25 5 Without stroke adjuster G M 11 Max. 4 C 2 x M5 x 0.8 depth 8 Stroke: S 2 x M4 x 0.7 depth 6 11-/22-MXP16-20 A 4 x M5 x 0.8 depth 7 (Plug: MGP12-08-CA001-R) 2 x M5 x 0.8 Piping port H Width across flats 8

30

(mm) 3.2 4 6 8 10 12 16 H (Width across flat) 12 12 17 19 21 24 30 T (M) 2 x Applicable tube Mounting hole M Weight (g) L Model KQB2E23-00 KQB2E04-00 KQB2E06-00 KQB2E08-00 KQB2E10-00 KQB2E12-00 KQB2E16-00 3.4 5.6 13.1 26.1 41.5 58.3 113 14.8 14.7 29.2 34.9 47.1 58.7 107.2 11 11 15 16 19 21 28 M10 x 1 M10 x 1 M14 x 1 M15 x 1 M18 x 1 M20 x 1 M27 x 1 32.2 32.4 35.4 38.8 40 42.4 46.8 12 12.6

ZP

3 e r w 11 Nut Steel (Zinc chromated) M10 x 1 M14 x 1 12 Fitting q 13 Lock ring Aluminum (Clear anodized) Pad diameter: 40, 50 10 to 32 40, 50 Vacuum inlet direction Lateral R Type/ZPRmF ZPRmFm-(04/06/08)-(A10/A14) !0 Construction !1 o Component Parts i No.

39

port Nil TN 90 G 105 NPT 120 135 A015 C S CKZT Clamp Arm 40 Mounting hole Bore size 40 80 Equivalent Power clamp cylinder European type D1 H D2 D1 D2 H symbol S B 6 7 16 6 9 25 8 20 8 10.2 10.2 25 Bore size Only S type is available for A015 of 40. 40 80 40 Arm mounting position 80 Equivalent Right D1 D2 Offset H R A015 A045 Offset 15 Offset 45 Center D1 D2 C H Left D1 D2 L H Cylinder Specifications

F

35.3 13.2 27.8 17 1/4 19.4 39.3 NAS321F-U03-07 53.9 37.6 32.6 45 40 15.2 29.5 18.5 5/16 41 NAS321F-U03-09 54.9 21 17.9 31.8 3/8 43.3 NAS321F-U03-11 56.6 24 17.9 33.6 21 1/2 3/8 28.6 22.4 47.9 NAS421F-U04-11 93.6 44.5 37 54.6 47.1 21.7 35.2 22 1/2 49.5 NAS421F-U04-13 95.4 Courtesy of Steven Engineering, Inc. !