Piping: Base Mounted Common SUP Common EXH, Stations: 8 Stations, A B Port Size: NPTF 1/8

Piping: Base Mounted Common SUP Common EXH, Stations: 10 Stations, A B Port Size: NPTF 1/8

Piping: Base Mounted Common SUP Common EXH, Stations: 14 Stations, A B Port Size: NPT 1/8

ITV

VBA VBAT AP100 841 Series ITV009 Dimensions Manifold 27.5 40 40 27.5 4 x M3 x 0.5 thread depth 3.5 Mounting hole 11 11 25 L1 L2 Port Location z x c 8 No.

Air Suction Filter With One-touch Fittings ZFB Series

ZFA Symbol ZFB ZFB ZFC How to Order Metric size Applicable tubing size Metric size (Release button: Light gray) Symbol Bore size Applicable model ZFB 0 04 10 Metric size ZFB10 ZFB20 ZFB30 04 06 08 10 4 6 8 10 ZFB 1 10 05 Inch size Inch size Symbol Bore size Applicable model Body type ZFB10 ZFB20 ZFB30 ZFB40 Symbol Filtration area (mm2) 05 07 11 13 3 16 1 4 " " 10 20 30 40 1037 1584 1980

10

For Saturated Steam (664)(183) Upstream pressure of valve P1 1.0 MPa 1.0 Downstream pressure of valve (P2) [MPa] (663)(179) 0.8 (662)(174) (661)(170) Subsonic Critical pressure 0.9 0.6 (660)(164) 0.7 0.8 (658)(158) Sonic 0.4 0.6 (656)(151) 0.5 (654)(143) 0.4 (650)(133) 0.2 0.3 0.2 (646)(120) 0 0.1 2 5 10 15 25 20 3 10 15 20 25 45 40 35 30 4 20 10 30 40 50 60 5 30 40 50 60 70 80 20 7 20 30

Ejector Valve Unit Series ZYY/ZYX

-40 Air consumption -40 40 -40 40 Suction flow rate Suction flow rate -20 20 -20 -20 20 -20 0 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0 0 10 20 30 40 50 5 10 15 20 25 0 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0 0 Supply pressure (MPa) Suction flow rate (l/min(ANR)) Supply pressure (MPa) Suction flow rate (l/min(ANR)) How to Read Flow Characteristics Graph The flow rate characteristics indicate the relationship

Ejector Valve Unit Series ZYY/ZYX 1

40 40 40 40 40 Suction flow rate Suction flow rate 20 20 20 20 20 20 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0 0 0 0 0 0 10 20 30 40 50 5 10 15 20 25 Supply pressure (MPa) Suction flow rate (l/min(ANR)) Supply pressure (MPa) Suction flow rate (l/min(ANR)) How to Read Flow Characteristics Graph The flow rate characteristics indicate the relationship between the vacuum pressure

Ejector Valve Unit, Series ZYY/ZYX

-40 40 40 -40 -40 Suction flow rate Suction flow rate 20 20 -20 -20 -20 -20 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0 0 0 0 10 20 30 40 50 5 10 15 20 25 0 0 Supply pressure MPa Suction flow rate l/min (ANR) Supply pressure MPa Suction flow rate l/min (ANR) Viewing the flow rate characteristic graphs The flow rate characteristics indicate the relationship between the vacuum

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

Note2) ( ): Without sub-plate Note3) Model number for 5 port base mounted type without sub-plate is SYJA3 40. With Bracket Air operated valve part No. SYJA3 20-M3-F The mounting bracket for the 2 position double solenoid and 3 position is supplied unattached.

IP8101 Series

Mode button 1s Set button 1s or Mode button 1s Set button 1s B D C Fig. 40 No.DIG-31900-OM002 49 B Mode button 1s Set button 1s or Mode button 1s Set button 1s P constant I constant D constant Fig. 40-1 C Mode button 1s Set button 1s or Mode button 1s Set button 1s P constant I constant D constant Fig. 40-2 D Mode button 1s Set button 1s or Mode button 1s Set button 1s P constant

VVXA21/22

Port R Operating Fluid and Ambient Temperature Operating fluid temperature (C) (3) Vacuum Ambient temperature (C) Temperature conditions Air (Standard) Oil (Standard) (V) Port P Port A Maximum Minimum 60 5 (1) 40 5 40 40 5 5 (2) Note 1) Dew point: 5C or less Note 2) 500 cSt or less Note 3) V in parentheses is option symbol. Option Material No.

Body ported, base mounted manifolds old style See replacement series SS5YJ7 New Style , Manifold style: single base/B mount , Valve stations: 2 to 20 , One-touch fittings available, D/R MFLD, 4 STA, N.P.I. *LQA, VALVE, VV4Z/VV5Z MANIFOLD VZ 4/5 PORT, WJ, VV4/5Z* BUILT IN FITTING >1/4, 1.12680 lb

Body ported, base mounted manifolds old style See replacement series SS5YJ7 New Style , Manifold style: single base/B mount , Thread type: North American , Valve stations: 2 to 20 , One-touch fittings available, MANIFOLD, NVZ 5-STA *LQA, VALVE, VV4Z/VV5Z MANIFOLD VZ 4/5 PORT, 1J, VV4/5Z* OTHER SIZE RATING, 1.57080 lb

Body ported, base mounted manifolds old style See replacement series SS5YJ7 New Style , Manifold style: single base/B mount , Thread type: North American , Valve stations: 2 to 20 , One-touch fittings available, MANIFOLD, NVZ 10-STA *LQA, VALVE, VV4Z/VV5Z MANIFOLD VZ 4/5 PORT, PJ, VV4/5Z* BASE MT 1/4, 2.64000 lb

Body ported, base mounted manifolds old style See replacement series SS5YJ7 New Style , Manifold style: single base/B mount , Thread type: North American , Valve stations: 2 to 20 , One-touch fittings available, MFLD., NVZ5000 8-STA. *LQA, VALVE, VV4Z/VV5Z MANIFOLD VZ 4/5 PORT, NJ, VV4/5Z* BASE MT 1/8, 1.23200 lb

Body ported, base mounted manifolds old style See replacement series SS5YJ7 New Style , Manifold style: single base/B mount , Thread type: North American , Valve stations: 2 to 20 , One-touch fittings available, MANIFOLD, NVZ 3-STA *LQA, VALVE, VV4Z/VV5Z MANIFOLD VZ 4/5 PORT, PJ, VV4/5Z* BASE MT 1/4, 1.10000 lb

Body ported, base mounted manifolds old style See replacement series SS5YJ7 New Style , Manifold style: single base/B mount , Valve stations: 2 to 20 , One-touch fittings available, VV4/5Z* BASE MT 1/8, VALVE, VV4Z/VV5Z MANIFOLD VZ 4/5 PORT, NJ, VV4/5Z* BASE MT 1/8, 2.36209 lb

Body ported, base mounted manifolds old style See replacement series SS5YJ7 New Style , Manifold style: single base/B mount , Thread type: North American , Valve stations: 2 to 20 , One-touch fittings available, MANIFOLD, NVZ 3-STA *LQA, VALVE, VV4Z/VV5Z MANIFOLD VZ 4/5 PORT, NJ, VV4/5Z* BASE MT 1/8, .44092 lb

Body ported, base mounted manifolds old style See replacement series SS5YJ7 New Style , Manifold style: single base/B mount , Thread type: North American , Valve stations: 2 to 20 , One-touch fittings available, MANIFOLD, NVZ 8-STA *LQA, VALVE, VV4Z/VV5Z MANIFOLD VZ 4/5 PORT, PJ, VV4/5Z* BASE MT 1/4, 2.24400 lb