5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

mounting hole Approx. 4 35 (L3) (5.2) 52 (L4) 73.5 Stations D side U side 1 2 3 4 5 6 7 8 n 2-C10 R(EXH) port DIN rail clamping screw EXH EXH SMC SMC SMC SMC SMC SMC SMC 2-C10 P(SUP) port R R X B B B B B B B B X P 49 P 31.6 9.5 24.5 16 A A A A A A A A (12) (7.5) 23 2n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 threads 41 P

Rotary Table/Vane Style Series MSU

Adjustment: Max.10.2 2 x M5 x 0.8 1.5 7 3 x 4H9 long groove depth 3 +0.030 0 B port A port 0.5 ( A , B , C ) 4 x M5 x 0.8 depth 10 6g6 0.004 0.012 14h9 0 0.043 42 0 0.062 48h9 41 158 Series MSUA Rotary Table: High Precision Type Vane Style These drawings indicate the condition when the B port is pressurized.

KS/KX

(mm) Applicable tubing KSH04-M5 KSH04-M6 KSH04-01S KSH06-M5 KSH06-M6 KSH06-01S KSH06-02S KSH08-01S KSH08-02S KSH08-03S KSH10-02S KSH10-03S KSH10-04S KSH12-03S KSH12-04S M5 x 0.8 M6 x 1 36.5 9 12 37 33 8 10.4 16 2.5 4.0 4.0 4 38 37.5 38 39.5 42.5 44 47 48 54 55 57.5 57 60 14 34 33.5 34 35.5 36.5 40 41 41.5 48 48.5 49.5 50.5 52 1 8 M5 x 0.8 M6 x 1 12 2.5 3 4.0 4.0 5.6 5.6 12 8 6 12.8 14 17

Rotary One-touch Fittings Series KS/KX

M D2 L A D1 NPT, R(PT) Nylon Urethane M5 0.8 M6 1.0 KSH04-M5 KSH04-M6 KSH04-01S KSH06-M5 KSH06-M6 KSH06-01S KSH06-02S KSH08-01S KSH08-02S KSH08-03S KSH10-02S KSH10-03S KSH10-04S KSH12-03S KSH12-04S 36.5 9 12 37 33 8 16 10.4 2.5 4.0 4.0 4 38 37.5 38 39.5 42.5 44 47 48 54 55 57.5 57 60 1 8 M5 0.8 M6 1.0 14 34 33.5 34 35.5 36.5 40 41 41.5 48 48.5 49.5 50.5 52 12 2.5 3 4.0 4.0 5.6 5.6 12 8 6

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

+0.052 0 26H9 36 3-4H9 depth 4 +0.030 0 4 3 ( A , B , C ) 3-R2 3-R2 2-5.5 through 4.5 19 10.5 13 48h9 0 0.062 36 7 6 22.3 10.5 44 3 11 10 58.5 2-5.5 through Angle adjustment bolt 6 Adjustment: Max.10.2 2-M5 x 0.8 1.5 7 +0.030 0 3-4H9 long groove depth 3 B port A port 0.5 ( A , B , C ) 4-M5 x 0.8 depth 10 6g6 0.004 0.012 14h9 0 0.043 42 0 0.062 48h9 41 11-5-12 These drawings indicate the

Electric Actuator with Integrated Guide

T-brackets T-nuts Model LC1-1-L5 (Weight: 16.0g) Model LC1-1-L3 (Weight: 15.5g) M (Weight: 10.0g) M5 M3 17.5 17.5 17.5 7.5 18 12 11 M Model 20 7.5 7.5 21 LC1-1-N3 M3 x 0.5 29 30 LC1-1-N5 M5 x 0.8 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Controller Connectors

MK

Example) M5 x 75l (MK2B) MK232/40 10 2 ML2B 6 Moment of inertia (kgm2) C J G5-S 4 MK220/25 CV 2 Mounting bolt 10 3 MVGQ 6 CC 4 Flat washer Operating range RB 2 Note) Be sure to use a flat washer to mount cylinders via through-holes. 10 4 J Model C D 75 85 80 90 90 100 80 90 105 135 105 135 Mounting bolt M5 x 75l M5 x 85l M5 X 80l M5 x 90l M5 x 90l M5 x 100l M5 x 80l M5 x 90l M6 x 105l M6

SYJA300

) 2 x 3.2 (External pilot port) (For mounting) 17 3 (For solenoid valve) 2.5 M3 x 0.5 (Pilot port) A 11 17.5 1.5 21 27 30 28.5 P R 1 (Breathing hole) 13 5 8.6 10 (P, A, R port) M5 x 0.8 23 1794 3 Port Air Operated Valve Series SYJA500/700 How to Order Port size M5 x 0.8 M5 Symbol Bore size Applicable series SYJA500 SYJA700 01 1/8 Bracket With bracket F Nil Without bracket SYJA 2 5 1 M5 Body

3 Port Air Operated Valve Series SYJA300 1

Flow Characteristics/Weight Flow characteristics C [dm 3/(s bar)] b Cv C [dm 3/(s bar)] b Cv 1 2 (P A) 2 3 (A R) Valve model Weight (g) Pilot port size Type of actuation Port size SYJA512-M5 SYJA522-M5 0.12 0.18 0.39 0.45 0.47 0.66 0.14 0.18 0.45 0.45 N.C. 0.53 0.66 M5 x 0.8 Body ported 45 N.O. M5 x 0.8 SYJA514-01 0.32 0.46 1.1 0.32 0.41 1.2 75 (Without subplate 45) Rc 1/8 N.C.

AHC System Series MA

Disconnected state Disconnected state Disconnected state Connection/Operating port Disconnection/Operating port Operating port M5 x 0.8 M5 x 0.8 M5 x 0.8 Operating port (0.4 to 0.7 MPa) Positioning mark Positioning mark On the basis of the t dimension at the time of connection, move the AHC unit until the dimension becomes 0 to 2 mm larger.

MK

Mounting bolt M5 X 75l M5 X 85l M5 X 80l M5 X 90l M5 X 90l M5 X 100l M5 X 80l M5 X 90l M6 X 105l M6 X 135l M8 X 105l M8 X 135l D 75 85 80 90 90 100 80 90 105 135 105 135 Part No.

180 ° Angular Type Air Gripper Rack & Pinion Type MHW2 Series ø 20, ø 25, ø 32, ø 40, ø 50

x 0.7 thread depth 5 M5 x 0.8 (Finger closing port) (Thread for mounting attachment) Auto Switch Mounting Groove Dimensions 41 30 12 18 4 4 5 M5 x 0.8 (Finger opening port) 20 9 6.45 6 MHW2-20D1 Right angle finger type 31 15 10 11 14 5 28 16 41 4 x M4 x 0.7 through (Thread for mounting attachment) 714 MHW2 Series 180 Angular Type Air Gripper Rack & Pinion Type Dimensions MHW2-25D Flat finger

Compact

L L Model Screw size Maximum tightening torque [Nm] L (Maximum screw-in depth)[mm] LEMBl M5 x 0.8 3 8 LEMC25 LEMH25 M4 x 0.5 1.5 7 LEMC32 LEMH32 M5 x 0.8 3 9 6. Do not dent, scratch or cause other damage to the body and table mounting surfaces. This may cause unevenness in the mounting surface, play in the guide or an increase in the sliding resistance.

PSxx-OMM0006CN

) NPT1/8 (M5 ) C3602() O HNBR 45 g 46 g -62No.PS-OMM0006CN-E (M8(3 )71 ) 01/N01 5 4 M5/C4/C6 M5 5 -63No.PS-OMM0006CN-E W1/WF1 4 ( ISO228-1) -64No.PS-OMM0006CN-E A 01/N01 W1/WF1 -65No.PS-OMM0006CN-E B W1/WF1 -66No.PS-OMM0006CN-E D 01/N01 W1/WF1 -67No.PS-OMM0006CN-E 01/N01 W1/WF1/M5/C4/C6 -68No.PS-OMM0006CN-E + 01/N01 W1/WF1/M5/C4/C6 -69No.PS-OMM0006CN-E 36n +4n -1 -70No.PS-OMM0006CN-E

Series SYJA300 3 Port Air Operated Valve

M3 X 0.5 SYJA314-M5 N.C. 39 (Without sub-plate 18) Base mounted (With sub-plate) M5 X 0.8 1.8 (0.1) SYJA324-M5 N.O.

MY1

M5 x 0.8 (Port) M5 x 0.8 (Hexagon socket head plug) PP TT UU GB TT UU G NW GB 10 N A Z + Stroke M5 x 0.8 (Port) M5 x 0.8 (Hexagon socket head plug) (WW) QQ M5 x 0.8 (Hexagon socket head plug) M5 x 0.8 (Port) (WW) GB PP XX XX G Centralized piping Centralized piping 2-M5 x 0.8 (Hexagon socket head plug) 2-M5 x 0.8 (Hexagon socket head plug) VV VV 1.1 S WX 8.4 2-4 Bottom port (Applicable O-ring

17

MGPM, MGPL, MGPA Common Dimensions (mm) P Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB H HA J K L MM ML NN OA OB OL Nil TN TF 42 46 53 53.5 G1/8 G1/8 29 33 37 37.5 6 8 10 10 7 7 8 9 6 6 8 7 26 30 36 42 10 10.5 11.5 11.5 7 7.5 9 10 58 64 83 93 12 16 20 25 M4 M4 M5 M5 13 15 18 21 13 15 18 21 18 22 24 30 M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1.0 10 12 13 15 M4 x 0.7 M5 x 0.8 M5 x 0.8

CV/MVGQ

A B C D F H HX MM NA NB ND S Z 90 [91] NN Bore size (mm) 10 8 0 0.022 10 0 0.022 15 12 14 4 8 28 35 M4 x 0.7 12.5 9.5 46 M8 x 1 91 [92] 16 15 18 20 5 8 28 41 M5 x 0.8 12.5 9.5 47 M10 x 1 10-15-7 Series CVJ5 Axial Foot Style (L) CVJ5L M5 x 0.8 M5 x 0.8 53.5 [54.5] 28 [34.5] M5 x 0.8 Manual override Width across flats B1 16 [17] S + Stroke Z + Stroke Mounting hole Rod End Nut H1 B1 Bore

ZSE2/ISE2

Easy and simple wiring Connector type 16-6-7 2 Series ZSE2/ISE2 How to Order Operating pressure range/ Setting pressure range Piping specifications Single mounting R 1/8, M5 x 0.8 01 T1 Single mounting NPTF 1/8, M5 x 0.8 Nil L 0 to 1 MPa 0 to 100 kPa Note) M5 x 0.8 (female) thread.

High Vacuum L Type Valve

XLAV-25-2 50 121 48 40 26 46 XLAV-40-2 65 171 66 55 41 54.5 XLAV-50-2 70 185 79 75 52 61 XLAV-63-2 88 212 100 87 95 70 80.5 XLAV-80-2 90 257 117 114 110 83 90.5 Model K L M N S T XLAV-16-2 17.2 10.2 3.6 3.6 M5 M5 XLAV-25-2 21.4 10.2 3.6 3.6 M5 M5 XLAV-40-2 33.9 10.2 3.6 3.6 M5 M5 XLAV-50-2 38.2 10.2 3.6 3.6 M5 M5 XLAV-63-2 43.8 12 4 2 Rc1/8 M5 XLAV-80-2 59.8 12 4 2 Rc1/8 M5 11 XL-OMV0016