Series AK1000

The connection M5 thread. Tighten thread to recommended torque value. 3. After installation, check internal leakage (leakage across seat) with inert gases. Perform a helium leak test depending on applications. Maintenance Warning 1.

PFxx-OMK0003CN

PF-OMK0003CN-E 11.5mm , , , , IN 500kPa /KQ2 mm KQ2H04-M5 KQ2S04-M5 4 M50.8 KQ2L04-M5 /KJ mm KJH04-M5 KJS04-M5 4 M50.8 KJL04-M5 /M mm 4 M-5AN-4 M50.8 6 M-5AN-6 -16No. PF-OMK0003CN-E FG DC(+) OUT() DC(-) 15V 1k -17No. PF-OMK0003CN-E DC(+)DC(+) (OUT1) IN (20 ) -18No.

New New Process Gas Diaphragm Valve For wide variety of applications from semiconductor to general. Multiple port available in various configurations Compression, Rc, R, NPT Cleaned for O2 service Air Operated Type Series AK3542/4542  Compact and light

The connection M5 thread. Tighten thread to recommended torque value. 3. After installation, check internal leakage (leakage across seat) with inert gases. Perform a helium leak test depending on applications. Maintenance Warning 1.

ZSP1

x 0.8 0XY: M6 x 1 Vacuum supply port 0X: M5 x 0.8 0XY: M6 x 1 58 51 50 PV 6.5 10.2 8 10 17.8 11 5.5 2-3.3 Mounting hole Connector type: ZSP10X C Adjusting needle ADJ Pressure sensor Vacuum supply port 20 08 Adsorption nozzle port 7 48.3 Lead wire length 600 (3000) Adsorption nozzle port 0X: M5 x 0.8 0XY: M6 x 1 Vacuum supply port 0X: M5 x 0.8 0XY: M6 x 1 59.5 50 PV 6.5 10.2 8 5.5 17.8 11

Series 11-CRA1-Z Rack & Pinion Type Rotary Actuator Size: 30, 50

Two switch spacers are included with the product with built-in magnet. 906 Rotary Actuator 11-CRA1-Z Dimensions: Basic Type, 11-CRA1S30 Size: 30 Single shaft Double shaft 75 10 8 6 0 0.2 8 (g6) 7.8 0 0.2 28 Auto switch 8 x M5 x 0.8 depth 6 (Opposite side 4 locations) 28 40 4 x 6 (Mounting hole) 9 16 0 0.1 8g6 9.2 14 3 M5 x 0.8 (Vacuum suction port) 0 0.025 3 2 x Cushion valve (Width across

ML1C

Range (mm) No. of auto switches mounted Applicable auto switch Bore size (mm) 25 6 4 D-M5, D-M5W, D-M5T D-E7A, D-E80A Auto switch model 40 6 4 D-M5, M5W, M5T D-E7A, E80A 32 6 4 10 15 5 10 1 pc. 2 pcs.

Series VC, Series VCL, Direct Operated 2 Port Solenoid Valve for Oil

8 1/4, 3/8 VCL31 104 24 25 59 46 57 60 54.5 48.5 101 57 68 30 50 84 36.5 13.5 15 32 25 23 M5 8 1/2 107 26 26.5 64.5 48 62.5 62 60 50.5 103 62.5 70 22 45 89 41 11 17 36 22.5 23 M5 8 1/4, 3/8 VCL41 111.5 26 26.5 66.5 48 64.5 62 62 50.5 103 64.5 70 30 50 93.5 41 13.5 17 36 25 23 M5 8 1/2 119 26 26.5 70 48 68 62 65.5 50.5 103 68 70 35 60 101 41 17.5 17 36 30 28.2 M5 8 3/4 Note) For class H 4

VFA3000

x 0.8 (Breathing port) 5 x , 14 38 (Piping port) 1769 Series VFA5000 Dimensions: Base Mounted 2 position single: VFA514402 03 04 2 x 5.3 (6.5) M5 x 0.8 (Pilot port) (Mounting hole) (Breathing port) Max. 2 5 x , , 38 14 12 (Piping port) ( ): Value for Rc 1/2 2 position double: VFA524402 03 04 2 x 5.3 (6.5) 2 x M5 x 0.8 (Mounting hole) (Breathing port) 2 x 18 (Pilot port) Max. 2 Max. 2 5 x

Manifold Regulator Modular Type ARM2500/3000 Series

x 1.5 14.5 x 10.5 x 2 Bracket A 2 Bracket KA00078 KA00083 2 1 set assembly Bracket B O-ring 136312 136412 NBR 7 13 JIS B 2401 P3 JIS B 2401 P5 Hex. socket head cap screw 2 KA00299 KA00961 O-ring NBR 8 How to order (1) When adding n stations to ARM Regulator n pcs.

PSxx-OMT0005CN

No.PS-OMT0005CN-A // PSE575/576/577 2 8 9 10 10 12 13 13 15 -1No.PS-OMT0005CN-A (ISO/IEC)(JIS) 1) 2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines (Part 1: General requirements) ISO 10218: Manipulating industrial robots-Safety

XL-OMY0001

XL-OMY0001 L // XLA-2 2 11 4 , 2.2 5 , , , , 33 7 4. 9 5 11 6. 13 7 14 1 XL-OMY0001 *1) *2) (ISO/IEC) (JIS) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines (Part 1: General requirements) ISO 10218: Manipulating

XLC-25,40 ∗ -F7NJ ∗ - ∗ Series

(Refer to Section 6 Parts Replacement Procedure (pages 10 to 13) for details.) Piping Caution Maintenance Warning Caution 4 XL-OMO0001-A 2. Product Specific Precautions 2 Common Precautions 2 Be sure to read before handling Maintenance Parts Caution The bonnet assembly should also be replaced when changing the seal material.

XL-OMY0002

No.XL-OMY0002 L // XLD XL-OMY0002 2 11 4 , 2. 2 5 , , , , 33 7 4 9 5 11 6 12 7 13 8 14 9 15 10 16 1 XL-OMY0002 *1) (ISO/IEC)(JIS) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines (Part 1: General requirements

MH-OMY0004

AS1200-M5 AS1000 AS1001F 5. M2.5X4L 56mm 0.050.15Nm 10 6. MHY2-10D 4 MHY2-16D 3 MHY2-20D 2 MHY2-25D 2 (ON) (OFF) 7.

Guide Table Series MGF

Nickel plated Clear anodized 1 Carbon steel Body Aluminum alloy Hexagon socket head cap screw B 13 Nickel plated Hard anodized 2 Tube Hexagon socket head cap screw C Carbon steel Aluminum alloy 14 Clear anodized 3 Rod cover Magnet Magnet Aluminum alloy 15 Chromated 4 Piston Plug Carbon steel Aluminum alloy 16 Electroless nickel plated 5 Piston rod Element Resin Carbon steel 17 Anodized 6

Vacuum Ejector with Solid State Timer, Series ZMA

x 0.8 through (PE port) Release flow adjustment screw 3-Rc 1/8 SUP 112 97.5 97.5 85.5 26 30 VAC 62 10 20 8 30 2-4.5 Mounting hole 15.5 103 13 VAC Specific Product Precautions Be sure to read before handling.

SY3000/5000/7000 Series Plug-in Type

M5 types After tightening the fitting by hand, use a wrench to tighten the fitting an additional approximately 1/6 to 1/4 turn. As a reference value, tightening torque is 1 to 1.5 Nm. Note) If tightened excessively, the thread of the product may break or the gasket may deform. If tightened insufficiently, the thread of the product may become loose.

VFR5000-OMN0001

No.VFR5000-OMN0001 VFR5000 / -2,3 -4,5 -4,5 -5 -5 -6 -6 -6 -6 -7 -8,9,10,11 -12 -13 -1VFR5000-OMN0001 ISO/IEC) (JIS) 1) 2 *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines (Part 1: General requirements) ISO 10218-1992: Manipulating

VEX-OMV0001

-2VEX-OMV0001 / *3) 1 1.5 *3)1 1 () [] -3VEX-OMV0001 VEX1 Series / / C-R ( )C-R SDS DC VEX1101, VEX1201, VEX1301 2% () VEX1501, VEX1701, VEX1901 3% AC VEX1101, VEX1201, VEX1301 20% VEX1501, VEX1701, VEX1901 15% (SSR)AC 1) (C-R ) OFF () 2)() P2 N.O.() ZNR 1V 0C () 4 VEX-OMV0001 VEX1 Series / () DC 1(P)2(A) 1 ()ISO VG32 1) 2 ( )ISO VG32 (SDS) M5 1/61/4 11.5Nm ) 2)R,

Vacuum Ejector with Solid State Timer

Dimensions 111 S: Vacuum pressure switch trimmer Pilot valve for air supply T: Release period adjustment trimmer Pilot valve for vacuum release M5 x 0.8 through (PE port) Release flow adjustment screw 3-Rc 1/8 SUP 112 97.5 97.5 85.5 26 30 VAC 62 10 20 8 30 2-4.5 Mounting hole 15.5 103 13 VAC Specific Product Precautions Be sure to read before handling.