0.4

C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 thread Stations 1 2 3 D side U side 2n x C3, C4, C6, M5 C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 thread Dimensions Formula L1 = 11n + 20 n: Station (Maximum 24) n L 1 2 3 4 5 6 7 8 9 10 11 12 L1 L2 L3 152 141 130 119 108 64 97 53 86 31 42 75 175 162.5 150 137.5 125

0.4

C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 thread 2n x C3, C4, C6, M5 C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 thread Dimensions Formula L1 = 11n + 20 n: Station (Maximum 24) n L 1 2 3 4 5 6 7 8 9 10 11 12 L1 L2 L3 75 64 53 97 130 152 31 42 86 108 119 141 100 87.5 75 125 150 175 50 62.5 125 112.5 137.5 162.5 98

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note 4) M5 fittings for M5 thread are attached without being incorporated.

Dedicated Controller Series LC1 Uniaxial Type

T-nuts (weight 10.0g) Dedicated communication cable (IBM PC/AT compatible computer) M Model LC1-1-RC M Model 17.5 LC1-1-N3 M3 x 0.5 Cable length 02 2m 04 4m 03 3m 05 5m LC1-1-N5 M5 x 0.8 18 7.5 PC Controller T-brackets Model LC1-1-L5 (weight 16.0g) Model LC1-1-L3 (weight 15.5g) Cable length: 2 to 5m M5 M3 17.5 17.5 11 Dedicated communication cable (D-Sub) (for NEC PC-98 Series) Model LC1-

Shock Absorbers and Rate Controls

Usable Adjustment Settings HP 110 MF/MC-2 60 80 100 r 20 140 TOTAL ENERGY/CYCLE (Nm) I @g{c^ Adjustable Hydraulic Series Clevis Mounting oEM 1.O 0 S r A \F( lmperial OEM :7a -r OEM 4.OtVl oElvl 1.15 + OEM 1.25 (otoloq No. ( oJell (s) Sfroke (id.l frt ll P u R I U v w x (t ilodel Wei.qftl oEilt|.ocms 1.0 6.38 .l4l +.00t/..000 .251 + m5/.00{ , J t ) + 000/..010 t(t +.000/..03 .500 +.000/..010

ITV

(Maximum 10 stations) Example) IITV00-05-07 02 03 2 stations 3 stations Indicate part numbers in order starting from the first station on the D side. 10 10 stations Note) Combination with having different pressure ranges is not available due to common supply/exhaust features. Note) A DIN rail with the length specified by the number of stations is attached to the manifold.

VCB

19 20 32 15 11 36.5 81.5 40 8 22 99 68 66.5 101 66.5 46 76 24 1/4, 3/8 VCB31 M5 23 25 32 15 13.5 36.5 86 50 8 30 104 68 71 101 71 46 80 24 1/2 M5 23 22.5 36 17 11 41 90 45 8 22 107 70 74.5 103 74.5 48 84 26 1/4, 3/8 VCB41 M5 23 25 36 17 13.5 41 94 50 8 30 111.5 70 78.5 103 78.5 48 88 26 1/2 M5 28.2 30 36 17 17.5 41 102 60 8 35 119 70 86.5 103 86.5 48 96 26 3/4 4 Series VCB Model Selection

3 Port Solenoid Valve Series SYJ300/500/700

20 SYJ32 M5 x 0.8 Type SS3YJ341 S41 SYJ34 M5 x 0.8 M3 x 0.5 1.5 0.17 0.36 0.3 0.17 Type SS3YJ3-42-M5 Base mounted for internal pilot 0.31 0.33 0.32 0.35 0.075 0.086 0.079 0.082 0.32 0.33 0.33 0.35 0.11 0.2 0.35 0.26 0.072 0.082 0.086 0.086 M5 x 0.8 SYJ34 1/8 Type SS3YJ3-42-C4 C4 Type SS3YJ3-S42-M5 Type SS3YJ3-S42-C4 M5 x 0.8 C4 SYJ34 1/8 Body ported for external pilot Type SS3YJ3-20R 0.9

CXS

x 0.8 with depth 8 2-M6 x 1.0 (Through) 4-M5 x 0.8 with depth 7.5 30 (Z) 19 11.5 T 20 9 (30) (Z) 8 2-M5 x 0.8 with depth 8 2-M8 x 1.25 with depth 12 0.2 75 16 S SS ZZ Z Part no.

MHZ2/MHZJ2

27.6 0.05 84.8 2-M5 x 0.8 thread depth 10 (mounting thread) M5 x 0.8 4-M4 x 0.7 (finger closing port) (attachment mounting thread) M5 x 0.8 (finger opening port) Auto switch mounting groove dimensions 15 10 0 -0.05 5 9 6.2 10 5 Auto switch mounting groove (for D-Y) 23 In the case of single action, the port on one side is a breathing hole. 4 9 Finger position/Narrow type MHZ2-20 N 14 Auto

REA/REB

Speed 600 mm/s (mm) Model A HP MM HT J LW LL L M HG HC HB HA H EB EA REAH15 REAH20 REAH25 42 8 19 M5 x 0.8 71.5 44 106 M5 x 0.8 17 45 33.5 33.5 46 21 26.5 97 50 8 23.5 M5 x 0.8 75.5 48.5 108 M5 x 0.8 16 53 41.5 42.5 54 22 26.5 102.5 58.5 10 28 M6 x 1.0 86 56 138 M6 x 1.0 25 61.5 46 46 63 24 29 125 Model N TW S ZZ Z XB W PP PB PA P NT NL REAH15 REAH20 REAH25 65 161 17.5 194 88.5 21 62 50

MHF2

MHF2-16D1 Scale: 50% 4H9 +0.030 0 depth 3 60 4H9 +0.030 0 depth 3 2-M5 x 0.8 thread depth 12 Mounting thread 6 79.5 5 M5 x 0.8 2-M5 x 0.8 thread depth 5.5 50 94 Mounting thread Finger closing port 26 74 10.6 E 20 20 24 33 E 0 -0.1 1.2 2-4.3 through (mounting hole) 27 29 1.2 29 M5 x 0.8 2-7.5 +0.1 0 Close: 0 Finger opening port E-E Open: 321 58 4-M5 x 0.8 thread depth 5.5 8-M4 x 0.7 thread

ARJ1020F

0.8 VEX NPT 1/8 NPT 1/8, M5 x 0.8 4 One-touch fitting AMR R 1/8, M5 x 0.8 6 One-touch fitting 5/32" One-touch fitting NPT 1/8, M5 x 0.8 ITV 1/4" One-touch fitting JIS Symbol M5 x 0.8 female thread is cut inside the pipe.

SZ3000

x 0.8 Mixed C4 C6 M5 M Without light/surge voltage suppressor Indicate in the station table below.

CY1

x 0.8 M5 x 0.8 M6 x 1.0 LW 71.5 75.5 86 LL 44 48.5 56 L 106 108 138 J M5 x 0.8 M5 x 0.8 M6 x 1.0 HT 19 23.5 28 HP 42 50 58.5 HG 17 16 25 HC 45 53 61.5 HB 33.5 41.5 46 HA 33.5 42.5 46 H 46 54 63 EB 21 22 24 EA 26.5 26.5 29 CY1H15 CY1H20 CY1H25 Model P M5 x 0.8 Rc(PT)1/8 Rc(PT)1/8 Z 194 205 250 XB 9.5 XA 11.3 W 88.5 92.5 103 TW 65 70 75 S 161 169 209 PP 21 23 27 PB 62 65 75 PA 50 50 65

High Vacuum Angle Valve

Rc1/8 XLAV M5: Port 1(P), 3(R) Rc1/8: Port 1(P), M5: Port 3(R) Weight [kg] XLA 0.28 0.47 1.1 1.7 3.1 5.1 XLAV 0.33 0.52 1.2 1.8 3.2 5.2 *1 Conductance is the value for the elbow with the same dimensions.

Speed Controller with Pilot Check Valve with One-touch Fitting Series ASP 1

Metric size Inch size Model Port size Pilot port 6 8 10 12 1/4" 5/16" 3/8" 1/2" ASP330F-01 ASP430F-02 ASP530F-03 ASP630F-04 ASP430F-F02 ASP530F-F03 ASP630F-F04 ASP330F-N01 ASP430F-N02 ASP530F-N03 ASP630F-N04 R 1/8 M5 x 0.8 R 1/4 Rc 1/8 R 3/8 Rc 1/8 R 1/2 Rc 1/4 R 1/4 G 1/8 R 3/8 G 1/8 R 1/2 G 1/4 NPT 1/8 10-32 UNF NPT 1/4 NPT 1/8 NPT 3/8 NPT 1/8 AS NPT 1/2 NPT 1/4 Note

Electro-Pneumatic Proportional Valve

: 0.12 10% or less 3% or less 1MPa 12, 24VDC 0 to 2W 0 to 4W Class B Series PVQ How to Order P V Q 13 5 L 03 M5 Valve type Body materials Symbol A Nil Body Brass C37 Note for PVQ13 for PVQ31, 33 13 31 33 N.C.

VCA

M5 M5 1/4 1/4, 3/8 3/8, 1/2 3/4 VCA41 17-2-13 8 Series VCA How to Order Manifold (VCA20) How to Order Manifold Assembly VV2C A 2 02 02 Enter the mounting valve and option part numbers under the manifold base part number.

SMC

x 0.8 thread depth 5.5 Operating port 2-M5 x 0.8 11 3 Vacuum sunction port M5 x 0.8 J 10 Maximum 13.5 (With stroke adjuster at retraction end) I 5.5 12 6 12 12 9.5 10 5.5 10 5.5 21 K 5.5 KA 21 NA-M5 x 0.8 thread depth 5.5 Stroke adjuster at extension end 37.5 (With stroke adjuster at extension end) Stroke adjuster at retraction end 12 6 N-M5 x 0.8 thread depth 6 (Insert) 6 4-M5 x 0.8 thread