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And How To Order Aoolicable valves N\|z3120-OOO-M5 N\r23220-OOO-M5 N\r23320-OOO-M5 Nllz3{20-ooo-M5 N\1z3520-OOO-U5 Ootions Blank plate ass'y: DXTl92-13-1A EXH Relocation Spacer ass'y: DXr192-21-'1A Applicable valves N\rz3r40-ooo N\rel2'lO-OOO l{ }340-ooo Nv4ttt40-coo N\rz9540-OOO Options Blank plate ass'y: DXTl9213-1A EXH Relocation Spacer ass'y: DXT192-21 -1A SUP Relocation Spacer ass'y:

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

A Note 1) 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12

NVZ1000//3000/5000 4,5 Port Solenoid Valve/Rubber Seal Type

And How To Order Aoolicable valves N\|z3120-OOO-M5 N\r23220-OOO-M5 N\r23320-OOO-M5 Nllz3{20-ooo-M5 N\1z3520-OOO-U5 Ootions Blank plate ass'y: DXTl92-13-1A EXH Relocation Spacer ass'y: DXr192-21-'1A Applicable valves N\rz3r40-ooo N\rel2'lO-OOO l{ }340-ooo Nv4ttt40-coo N\rz9540-OOO Options Blank plate ass'y: DXTl9213-1A EXH Relocation Spacer ass'y: DXT192-21 -1A SUP Relocation Spacer ass'y:

Angular Style Air Gripper Series MHC2/MHCA2/MHCM2

M5 x 0.8 (Finger closing port) When auto switches are used, through hole mounting is not available. 637 Series MHC2 Double Acting: Size 20, 25 MHC2-20 2 x M5 x 0.8 thread depth 8 (Mounting thread) 4 x M5 x 0.8 thread depth 10 (Mounting thread) Bottom hole dia. 4.3 through (Mounting hole) 2 x M5 x 0.8 thread depth 10 (Mounting thread) Auto switch mounting groove (Both sides) 4 x M4 x 0.7

48

(M3, M5, and G threads) Use SMCs recommended grease. Grease pack part number: GR-S-010 (10 g) M3, M5, Rc port, NPT port Use the correct tightening torques listed below.

Series CXS 10-/11-/12- Dual rod cylinder 21-/22- ø6, ø10, ø15, ø20, ø25, ø32

size Model 11-/22-CXS6 6 11-/22-CXS10 11-/22-CXS15 11-/22-CXS20 11-/22-CXS25 11-/22-CXS32 10 15 20 25 32 10, 20, 30, 40, 50 Vacuum suction type Relief type M5 x 0.8 10, 20, 30, 40, 50, 75, 100 1/8 Double acting (Both sides) Non-lube 10-/12-/21-CXS6 6 single rod 10-/12-/21-CXS10 10-/12-/21-CXS15 10-/12-/21-CXS20 10-/12-/21-CXS25 10-/12-/21-CXS32 10, 20, 30, 40, 50 10 15 20 25 32 M5 x 0.8

Plug-in/Plug Lead: Single Unit

Series Number of solenoids Weight (kg) Model Port size 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) Standard 1 W AC Low wattage 0.5 W b Cv b C[dm3/(s.bar)] C[dm3/(s.bar)] Cv 0 5 0 5 0 5 0 5 0 5 0 5 0 5 0 5 0 5 0 5 0 5 0 5 Single VQ51 0 12 35 or less 0.59 (0.67) 0.14 38 or less 2.9 38 or less 14 0.18 3.4 Metal seal 2 position 3 position VQ51 1 16 40 or less 0.58 (0.66) 0.33 43 or less 4.4 43 or less 17

IZS30_eng

Tap M5 thread on the brackets mounting positions at the installation side, and fix the ionizer body and brackets with M5 threads. M5 tap M5 threads 4. Adjust angle of the ionizer body to ensure proper static charge elimination, and fix it with detent threads (M5) of brackets.

Rotary Actuator Ｃ ( Ｄ ) ＲＡ１＊＊＊３０～１００－＊＊Ｚ

After assembly is completed, perform an operation test and check that there is no air leakage. 17 10 14 15 3 5 27 11 12 6 9 14 1 4 11 9 27 2 4 19 15 Cushion seal 8 Body Left cover Rack 18 Direction of the shaft(key) About10 Fig. (17) Direction of assembly of the shaft 42 - . Size 50 to 100 Disassembly procedure 1.

SFOD-OMT0009CN

*ALARM3 17 1) 7 N.C. *ALARM4 37 1) 27 N.C. -COM3 18 1) 8 N.C. -COM3 19 -COM3 38 1) 28 N.C. -COM4 20 1) 9 N.C. -COM4 39 1) 29 N.C.

Digital Pressure Switch

Otherwise, chattering will occur. 2: If analogue voltage output is selected, the analogue current output cannot be selected. 3: If analogue current output is selected, the analogue voltage output cannot be selected. -61No.PS-OMM0007-I Piping specifications Model No. 01 N01 W1 WF1 M5 C4 C6 NPT1/8 R1/8 Rc1/8 G1/8 M50.8 One-touch fitting 4 One-touch fitting 6 (with M5 female thread) (with M5

Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

M6 x 1 M5 x 0.8 45 + Stroke 9 50 + Stroke 7.5 16 to 22 M8 x 1.25 M6 x 1 50 + Stroke 6 M4 x 0.7 8 to 11 M3 x 0.5 65 + Stroke 7 5.5 70 + Stroke Lateral load resisting type MQQL (Built-in ball bushing) 8 80 + Stroke M5 x 0.8 M6 x 1 13 to 17 6.5 85 + Stroke 7 105 + Stroke M6 x 1 M8 x 1.25 16 to 22 7 105 + Stroke : Stroke 4 Series MQQ Dimensions Standard/Basic type (Through hole & Double end

Non-contact Gripper

P PL M ML C H D L XT661-4C-X321 M5 x 0.8 5 M4 x 0.7 8 32 6 39 XT661-6C-X321 M5 x 0.8 6 M4 x 0.7 6 47 11 59 XT661-8C-X321 M5 x 0.8 6 M4 x 0.7 6 47 17 79 XT661-10C-X321 Rc 1/8 M4 x 0.7 6 47 23 99 XT661-120E-X322 Rc 1/8 M5 x 0.8 7 72 30.5 120 XT661-150E-X322 Rc 1/8 M5 x 0.8 7 72 37.5 150 744 Non-contact Gripper XT661 Series Dimensions [Bernoulli Type] With guide assembly Size: 120 Size

RHC

23 15.5 26.5 19 21.5 14 13.5 27.5 21 CX 50 50 43 43.5 40.5 88 78 18 28.5 15 23.5 13.5 27 17 22 12 11.5 28 21.5 63 63 50.5 50.5 47.5 95 85 18 28.5 15 23.5 13.5 27 17 22 12 11.5 28 21.5 CY 13 80 80 59 103.5 93.5 30.5 16.5 29 15 27.5 13.5 27 15 100 100 69.5 114 104 32.5 18.5 31 17 29.5 15.5 29 MQQ M Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080

rep-modular-e

AW20(K) AW30(K) AW40(K) AW20(K) AW30(K) AW40(K) 7 17 21 427 Series AW10 to 60/AW20K to 60K Replacement Procedure of Diaphragm 3 Procedure Tools Check item Process Applicable model Disassembly 2) Remove the valve spring. 3) Remove the valve assembly. Assembly 4) Mount the valve assembly. Mate the stem convex and the valve center hole.

Series VCL

8 1/4, 3/8 VCL31 104 24 25 59 46 57 60 54.5 48.5 101 57 68 30 50 84 36.5 13.5 15 32 25 23 M5 8 1/2 107 26 26.5 64.5 48 62.5 62 60 50.5 103 62.5 70 22 45 89 41 11 17 36 22.5 23 M5 8 1/4, 3/8 VCL41 111.5 26 26.5 66.5 48 64.5 62 62 50.5 103 64.5 70 30 50 93.5 41 13.5 17 36 25 23 M5 8 1/2 119 26 26.5 70 48 68 62 65.5 50.5 103 68 70 35 60 101 41 17.5 17 36 30 28.2 M5 8 3/4 Note) For class H

ZQ-OM01301

Refer to the Operation Manual of the V100 Series for details. 17 - Doc. No. ZQ-OM01301-A .

Modular Pressure Control Equipment F.R.L. Replacement Procedure

AW20(K) AW30(K) AW40(K) AW20(K) AW30(K) AW40(K) 7 17 21 427 Series AW10 to 60/AW20K to 60K Replacement Procedure of Diaphragm 3 Procedure Tools Check item Process Applicable model Disassembly 2) Remove the valve spring. 3) Remove the valve assembly. Assembly 4) Mount the valve assembly. Mate the stem convex and the valve center hole.

Series VC, Series VCB, Direct Operated 2 Port Solenoid Valve for Heated Water

19 20 32 15 11 36.5 81.5 40 8 22 99 68 66.5 101 66.5 46 76 24 1/4, 3/8 VCB31 M5 23 25 32 15 13.5 36.5 86 50 8 30 104 68 71 101 71 46 80 24 1/2 M5 23 22.5 36 17 11 41 90 45 8 22 107 70 74.5 103 74.5 48 84 26 1/4, 3/8 VCB41 M5 23 25 36 17 13.5 41 94 50 8 30 111.5 70 78.5 103 78.5 48 88 26 1/2 M5 28.2 30 36 17 17.5 41 102 60 8 35 119 70 86.5 103 86.5 48 96 26 3/4 4 Direct Operated 2 Port for

Series VC, Series VCL, Direct Operated 2 Port Solenoid Valve for Oil

8 1/4, 3/8 VCL31 104 24 25 59 46 57 60 54.5 48.5 101 57 68 30 50 84 36.5 13.5 15 32 25 23 M5 8 1/2 107 26 26.5 64.5 48 62.5 62 60 50.5 103 62.5 70 22 45 89 41 11 17 36 22.5 23 M5 8 1/4, 3/8 VCL41 111.5 26 26.5 66.5 48 64.5 62 62 50.5 103 64.5 70 30 50 93.5 41 13.5 17 36 25 23 M5 8 1/2 119 26 26.5 70 48 68 62 65.5 50.5 103 68 70 35 60 101 41 17.5 17 36 30 28.2 M5 8 3/4 Note) For class H 4