Fieldbus system EtherNet/IP compatible SI Unit

Red ON The power supply voltage for control and input is below 19 VDC. (When diagnostic parameter is enabled) PWR(V)-LED LED display Content OFF The power supply voltage for output is below 19 VDC. (When diagnostic parameter is disabled) Green ON The power supply for output is correct. Red ON The power supply voltage for output is below 19 VDC.

CEx-OMQ0011

M10x1.5 R S T U V W X Y Z 22 63.5 23.5 22 41 16 9 30 34.5 26 77.5 32.5 27 56 19 10 37 42 37.5 95 50.5 35 68 23 23 45 51 I J K L M N O P Q 76.5 40 46 28 11 14.5 28 15 16 91 46.5 58 32 15 16 30.5 16 21.5 110 55 68 36 16.5 22 37.5 17.5 24.5 A B C D E F G H ML2B25 110 220 206 42 138 93.5 16 73 ML2B32 140 280 264 51 168 107.5 19 88 ML2B40 170 340 322 59 204 130.5 23 106 LD LL MM NN PP SS YY ZZ

Vacuum Unit Ejector / Vacuum Pump System

Maintenance 41 8.1. Maintenance 41 8.2. Replacement Procedure 42 9. Specifications 47 10. Port Layout 52 11. Exhaust/Flow Rate Characteristics 62 11.1. Ejector Exhaust Characteristics/Flow Rate Characteristics 62 11.2. Vacuum Pump Flow Rate Characteristics 64 11.3. Vacuum Release Flow Rate Characteristics 64 12. Limitations of Use 66 13. Troubleshooting 67 -1No.

VFS

Brown Brown White White Pink Pink Gray Gray Unused Unused Light green Light green 13 14 15 16 17 18 19 20 21 22 24 Yellow Pink Blue Purple Gray Orange Red Brown Pink 14 15 16 17 18 19 20 21 22 Gray Black White 23 24 25 23 Terminal no.

Table of Contents

Note 1) Note 2) 2-4-19 20 S VQ1000 Kit (Serial transmission unit) The serial transmission system reduces wiring work, while minimizing wiring and saving space.

VQ4000

Maximum stations are 18. 16 4 17 5 18 6 19 7 20 8 21 1.

Low Friction Cylinders Series MQ

38 SR3 4 9 22 3 16 3.2 M3 x 0.5 6 -X 6 18 3.2 M3 x 0.5 6 41 38 SR5 6 9 24 3 10 20 3.5 M4 x 0.7 6.5 7 4 46.5 41.5 SR8 10 29 5.5 38 5 Individual -X 16 25.5 5.4 M6 x 1.0 9 10 7 49 44 SR12 16 36 5.5 47 5 20 28 5.4 M6 x 1.0 9 10 7 52.5 47.5 SR15 20(19) 40 5.5 52 5 Note) ( ): Rod end dimensions 1193 Series MQP Specific Product Precautions Be sure to read before handling.

Non-rotating Double Double Power Power Cylinder Cylinder (without Series MGZ Series MGZR non-rotating mechanism)

50 59.5 79 6 7.5 9.5 11.5 14 11 14 19 24 30 11 13.5 16 20 22 22 27 32 41 46 0.75 1 1.25 2 2.5 6000 11000 18000 28000 54000 1300 3100 5000 7900 15300 Individual -X 443 Series MGZR Minimum Stroke for Mounting (mm) 20 25 32 40 50 63 80 Model No. of auto switches 2 pcs.

MTS

800 500 Stroke (mm) CX (1) (2) (3) 8 Selection graph D(4) (5) (6) (7) 12 to 40 -X Horizontal Mounting 20Data W W Mounting orientation L Direction for L can be up, down, left, right, or diagonal. 600 800 Maximum speed (mm/s) 300 500 30 (13) Stroke (mm) 10 (8) 100 50 150 200 50 100 150 200 20 (9) 30 (10) 10 (11) 20 (12) 8 Selection graph (15) (14) (16) (17) (18) (19

Cylinder with lock

Troubleshooting P. 41 6. Maintenance P. 43 6-1. Construction -2- 1. Product Specifications 1-1.

CEx-OMP0016

Bending performance: According to the drawing shown below, life span about 4 million cycle can be achieved. 200mm Reciprocating with R25 bending speed 100times/min. 41

MXW

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 6 4-M4 x 0.7 thread depth 6 (Helisert) 5H9 +0.030 depth 4.5 0 Operating port M5 x 0.8 Operating direction (A) (Plug: M-5P) 49 46 38 5 22 12 19 4 40 25 (Y) (Y) 5.5 Operating port M5 x 0.8 Operating direction (B) 24 84 (Plug: M-5P) Operating direction (

VK300

Base mounted VK300-41-2A Manifold gasket and screw assembly Note 1) Mounting direction is fixed, do not mount on opposite side.

ZQ-OM01301

ZQ-OM01301-A Maximum vacuum release flow rate Vacuum release flow rates in product specifications and according to the V port size [L/min (ANR) ] Supply pressure error V Port [MPa] ZQ05A ZQ07A ZQ10A ZQ000A Size Common Individual Common Individual Common Individual Common Individual PD PD PD PD PD PD PD PD 3.2 0.1 16 14 11 23 0.2 26 23 19 38 0.3 39 31 35 28 29 22 52 43 45 39 47 41 38 35 66

Air Slide Table Series MXQ

42 41 42 41 19 19 19 19 27 47 47 47 47 57 36 66 84 75 84 75 75 Note) Use the average speed when calculating static moment.

CE2

For details, refer to page 10-20-41. 5 6 6.5 6.5 7 Data 6 7 7.5 7.5 8 9 9 10 10 11 Since this is a guideline including hysteresis, not meant to be guaranteed. (Assuming approximately 30% dispersion.)

CE2

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com JIS B 1181 Class 3 M12 x 1.75 JIS B 4636 JIS B 4636 2 point angle socket 17 19 17 2 point angle socket 19 RHC Operating Cautions MK(2) Counting speed of the counter Be aware that if the speed of the stroke reading cylinder with brake is faster than the

MVGQ

For details, refer to page 10-20-41. 10-16-20

PF-OMM0004_C

/720/740/711/721() A AA PF3W704--T 81 50 PF3W720--T 89 54 PF3W740--T 109 71 PF3W711--T 135 92 PF3W721--T 115 74 PF3W721-F12-T 119 76 PF3W721-F14-T 123 78 -83No.PF-OMM0004-D PF3W704/720/740() A AA B D F K L N P Q Q PF3W704S 104 50 63.6(Max.68.6) 70.2 34 58.5 18 13.6 2.7 10 19 6 PF3W720S 112 54 63.6(Max.68.6) 74.2 34 62.5 18 13.6 2.7 10 19 6 PF3W740S 142 71 75.25(Max.81) 94.5 44 79

Series CE1

41 46 43.5 4.4-16