Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 20 (5 Port/Body Ported Common SUP Common EXH), Stations: 17 Stations

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Piping: 5 Port/Body Ported Common SUP Common EXH, Stations: 17 Stations, A B Port Size: -, P R Port Thread: -

Lubrication Equipment

Below this flow rate, the pressure differential cannot be set to 0.05MPa. 1.17-17 D.P.Lube ALD600/900 Construction Precautions ALD600 Be sure to read before handling. Refer to p.0-26 and 0-27 for Safety Instructions and common precautions on the products in this catalog, and refer to p.1.0-1 and 1.0-2 for precautions on every series.

Compact Hydraulic Cylinder Double Acting/Single Rod Series CH
QB ø 20, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100

(mm) U H I J K L O Z M N P S A C D E F B Bore size (mm) 32 31.5 M10 x 1.5 60 4.5 14 8.5 9 depth 7 14 34 5.5 Rc 1/8 58.5 73.5 12 16 45 20 65 40 35 M10 x 1.5 69 5 14 8.5 9 depth 7 14 40 5.5 Rc 1/8 66 75.5 12 16 52 22 67 50 41 M12 x 1.75 86 7 18 11 11 depth 8 19 50 6.6 Rc 1/4 80 87 15 20 64 25 76 63 47.5 M12 x 1.75 103 7 18 11 14 depth 10.5 19 60 9 Rc 1/4 93 91 15 20 77 27 80 80 57.5 M16 x 2

Low Profile Guide Type

9 34 32 17 41.5 50,100,150,200,250,300,350,400,450,500 CY1F25 70 13 17 10.5 8 22 40 10 12 33.5 22.5 12 46 44 23.5 55 100,150,200,250,300,350,400,450,500,550,600 CYP Model KC KA KB KH KW L LA LL LW LZ ML MM N PA PB PC Q QA QB QW CY1F10 6.5 44 8 19 59 38 58 20 86 19 5 M3 x 0.5 18.5 40 40 8.5 90 4 12 33 CY1F15 6.5 51 10 19 66 53 65 20 99 19 5 M3 x 0.5 18.5 50 50 7 97 4 12 40 CY1F25 7.5 66 13

CXT

2 117 29.5 9 5.5 25 M6 x 1 M14 x 1.5 10 12 50 60 100 130 105 50 RB1411 22 122 17 2 127 32.5 11 5.5 PA dimension is the center sorted factor of the L dimension.

MGQ

MGQM, MGQL Common Dimensions Bore size (mm) Standard stroke (mm) B Z G NN F MM ML DA L R C H K Q X GA GB J P PW S T TA TB V W YY YL 32 40 50 63 80 100 1/8 1/8 1/4 1/4 3/8 3/8 16 17 17 19 21 25 51 51 59 72 92 112 12.5 14 14 16.5 19 23 114 96 48 112 80 100 8 8 10 10 16 16 20 20 25 25 30 35 16 16 20 20 25 30 38 38 44 44 56 62 37.5 44 44 49 56.5 66 26 26 30 36.5 46.5 56.5 30 30 40 50 60 80 47.5

Line Filter Rated Pressure: 3.5, 7, 14, 21 MPa FH34/44/54/64 Series

20 20 12 12 17 17 20 20 27 27 12 12 17 17 20 20 22 22 22 22 30 30 56 65 73 36 40 48 56 65 73 92 103 36 40 48 56 65 73 36 40 48 56 65 73 4 x M12 x 1.75 4 x M16 x 2 4 x M16 x 2 0 50 342 87 435 255 100 56 4.6 106 150 4 x M10 x 1.5 23 40 (1 1/2B) 50 (2B) 0 60 450 94 545 356 120 70 6.4 120 155 4 x M12 x 1.75 28 0 219 62 285 157 60 45 4.5 80 100 2 x M8 x 1.25 14 0 1 0 1 0 1 0 1 0 1 15

Fluoropolymer Tubing Variations

For other precautions, refer to Fittings & Tubing Precautions on pages 13 to 17. When using the fluoropolymer fittings, refer to the precautions on pages 445 and 446. Note 3) The minimum bending radius is the representative value measured as shown in the left figure. Use a tube above the recommended minimum bending radius.

Environment

LEY -X5 LEFB/Belt Drive 11LEFS Horizontal 11LEJS 14 LEFB32 25A12 LEC 10 Work load: W [kg] LEC S 8 LEC SS-T LEFB25 6 LEC Y 4 Motorless LEFB16 2 0 LAT 0 500 1000 1500 2000 Speed: V [mm/s] LZ LC3F2 41 LEF Series Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Clean Room Specication SpeedWork Load Graph (Guide) Servo Motor (24 VDC) The following graph shows the values when moving force is 250%

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

L1 L2 L3 L4 L5 L6 L7 (1) L8 D Model Bore size VCHC AS2000-01 AS2000-02 AS3000-02, 03 1 8 Rc Rc Rc , 40 5 17 54.5 16 15.5 50 30 10 4.5 ASS 1 4 1 4 2 x M4 x 0.7 11.5 17 56 51.5 40 5 23 20 30 4.5 Effective thread depth 6 Reference dimensions 8 3 45.5 5.25 20.6 61 13.2 68 56 25 26 5.5 ASR ASQ Note 1) L7: Reference dimensions Dimensions: AS5000 2 x 1/4 to 1/2 2-1/4 to 1/2 74.9 (Max. 82.9) 2

PFxx-OMO0004CN

[cm] -70No.PF-OMO0004CN-E PFMB7201-02 PFMB7201-N02 17 2x Rc1/4 NPT1/4 -71No.PF-OMO0004CN-E PFMB7201-02L PFMB7201-N02L 2x Rc1/4 NPT1/4 17 -72No.PF-OMO0004CN-E PFMB7201S-02 PFMB7201S-N02 2x Rc1/4 NPT1/4 -73No.PF-OMO0004CN-E PFMB7201S-02L PFMB7201S-N02L 2x Rc1/4 NPT1/4 17 -74No.PF-OMO0004CN-E PFMB7201-F02 21 2x G1/4 -75No.PF-OMO0004CN-E PFMB7201-F02L 2x G1/4 21 -76No.PF-OMO0004CN-E PFMB7201S-F02

CEx-OMI0064

NO. 19 NO. , 26 , 41 - 10-2 CEU5 , ROM , , ,SMC RAM , ,SMC 2ROM E ,, , , 2ROM E 2ROM 80 E , , ,SMC , 42 -

MRQB-OM0002

No.MRQB-OM02 / / / / / / / / MRQ MRQ MRQ MRQ 1 1. 1. 1. 1. 11 1-1. 11 1-2. 11 1-3. 11 2. 2. 2. 2. 12 3. 3. 3. 3. 14 3-1. 14 3-2. 14 4. 4. 4. 4. 15 4-1. 15 4-2. 16 4-3. 17 4-4. 17 4-5. 18 4-6. 18 5. 5. 5. 5. 19 5-1. 19 5-2. 21 5-3. 22 6. 6. 6. 6. 24 6-1. 24 6-2. 24 6-3. 25 7. 7. 7. 7. 26 8. 8. 8. 8. 27 9. 9. 9. 9. 28 (ISO/IEC)(JIS) *1) *2) *1) ISO 4414: Pneumatic fluid power

CXT

2 117 29.5 9 5.5 25 M6 X 1 M14 X 1.5 10 12 50 60 100 130 105 50 RB1411 22 122 17 2 127 32.5 11 5.5 * PA dimension is the center sorted factor of the L dimension.

MHZ2/MHZJ2

Models Symbols Gripping force Note 1) Double acting type Closing stroke (both sides) mm Model Cylinder bore (mm) Note 2) Weight g Gripping force per finger Effective value N Action Internal gripping force External gripping force 4 55 9.8 10 MHZ2-10D (N) 17 Double acting Single acting 6 115 30 16 40 MHZ2-16D (N) 10 235 42 20 66 MHZ2-20D (N) Single acting type, normally open 14 430 65 25 104

Compact Electric Actuator Series LG1

Refer to page 41 for further details.

Mechanical Valves Series NVM, NVFM, NVZNI

{kq) 4.41(2\ P.T. ln(mm) 0.06 (1.s) O.T. ln(mm) 0.06 (1 .5) T.T. ln(mm) 0.12 (8) '7s PS|G (5 2Npr th DIMENSIONS Model# A B c o E F G H J K NVM 120t130 1.73 (44) 1.00 '25.411.28 32.5) 1 0 c o.22 (5.5) 0.30 (7.5) 0.67 (17) 0.57 14.s) 1.06 (27) (4) ). t 1 (25) NVM 121t131 1.73 (44\ 1.00 25 4l 1 . 1 2 tn 5t ).9 (2s) 0.22 (5.5) 0 . 1 4 (3.s) 1.67 (17) o.57 14.51 1.06 Q7l ).1 t (4) Millimeters

Series VQ Metal Seal/Rubber Seal Body Ported

See Options on p.1.10-67 for parts nos. 1.10-41 VQ0/1000/2000 T Kit (Terminal Block) Manifold Specifications VV5Q04 VV5Q14 VV5Q24 It is a standerd terminal block style.

IIIIIII

{kq) 4.41(2\ P.T. ln(mm) 0.06 (1.s) O.T. ln(mm) 0.06 (1 .5) T.T. ln(mm) 0.12 (8) '7s PS|G (5 2Npr th DIMENSIONS Model# A B c o E F G H J K NVM 120t130 1.73 (44) 1.00 '25.411.28 32.5) 1 0 c o.22 (5.5) 0.30 (7.5) 0.67 (17) 0.57 14.s) 1.06 (27) (4) ). t 1 (25) NVM 121t131 1.73 (44\ 1.00 25 4l 1 . 1 2 tn 5t ).9 (2s) 0.22 (5.5) 0 . 1 4 (3.s) 1.67 (17) o.57 14.51 1.06 Q7l ).1 t (4) Millimeters