Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Terminal block box 2 to 20 stations Note 2) V CC-Link Max. 16 stations Note 1) Besides the above, F/P kit with different number of pins are available.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Terminal block box 2 to 20 stations Note 2) V CC-Link Max. 16 stations Note 1) Besides the above, F/P kit with different number of pins are available.

45

Applicable up to 16 solenoids. 20 16 08 20 stations 16 stations 8 stations Type 45T (9 pins terminal block type) Type 45T1 (18 pins terminal block type) 45T1 SS5X 3 05 U C4 D 45T SS5X 3 05 U C4 D Series Series 3 SX3000 5 SX5000 3 SX3000 5 SX5000 Option Option Terminal block mounting position When a longer DIN rail is desired than the specified stations, specify the station number to be required

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

Fittings & Tubing Air Cylinders Rotary Actuators Without Power Supply Terminal With Power Supply Terminal Positive common Negative common Common 20 20 20 Positive pin (Common) Positive pin 19 19 19 18 18 Station 9 SOL.b Negative pin Negative pin (Common) 18 17 17 SOL.a Station 16 Station 16 17 16 16 Station 8 SOL.b 16 15 15 SOL.a 15 6 6 SOL.b Station 5 SOL.b Station 5 4 5 4 5 Station 2

Air Cylinder

8, 12, 16) (n = 4, 8, 12, 16) 2 (Different surfaces 20 90 100 110 120 and same surface) 1 20 + 55 (n 2) (n 4) 100 + 55 (n 4) 110 + 55 (n 4) 120 + 55 (n 4) D-A59W 90 + 55 2 2 2 2 2 n (Same surface) (n = 2, 4, 6, 8) (n = 4, 8, 12, 16) (n = 4, 8, 12, 16) (n = 4, 8, 12, 16) (n = 4, 8, 12, 16) 15 90 100 110 120 1 2 (Different surfaces and same surface) 1 25 110 120 130 140 D-F5NT 25 + 55

Table of Contents

Auto switches are shipped together but not assembled. 6 10 16 20 25 32 6 mm 10 mm 16 mm 20 mm 25 mm 32 mm Action D Double acting Port thread type Type M5 x 0.8 Rc1/8 NPT1/8 G1/8 Bore size 6, 10, 16, 20, 25 32 32 32 Symbol Standard stroke (mm) 6, 10, 16 20, 25, 32 5, 10, 15, 20, 25, 30, 40, 50, 60 5, 10, 15, 20, 25, 30, 40, 50, 60, 70, 80, 90, 100 Nil TN TF Applicable Auto Switches/Refer

ISO Standard Hydraulic Cylinder

CHQ (n = 2, 4, 6, 8) Note 3) (n = 4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) 2 (Different surfaces and same surface), 1 20 65 95 85 80 75 CHK (n 2) 2 (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 D-M9V/M9WV 20 + 30 65 + 30 75 + 30 80 + 30 85 + 30 95 + 30 "n" pcs.

Fieldbus system EtherNet/IP compatible SI Unit

Content (IO size at each port) IO-Link master size setting No Process data size at each communication port Port 1 Port 2 Port 3 Port 4 44 byte 70 byte 134 byte 1 2/2/2/2 byte 2 2 2 2 2 4/4/4/4 byte 4 4 4 4 Can be selected 3 8/8/8/8 byte 8 8 8 8 4 16/16/2/2 byte 16 16 2 2 Can be selected 5 32/2/2/2 byte 32 2 2 2 Can be selected 6 16/16/8/8 byte 16 16 8 8 7 16/16/16/16 byte 16 16 16 16 8 24

CJ5-S

-X Bore size (mm) W WA WB WH ZZ 2020 30 22 16 23 118 25 30 22 16 25 123 Data 32 25 22 16 28.5 125 40 20 22 16 33 143 50 20 25 18 40.5 167 63 20 25 18 47.5 167 80 20 30 22 60.5 201 100 20 31 22 71 202 10-14-13 14 Series CG5-S Dimensions R V Axial foot style (L): CG5LNS S + Stroke H GA GB Width across flats B1 2-Rc P H1 D B LH I AL A K KA MM Width across flats NA LT X Y X Y M 8-J 4-LD C 0.1

CJ5-S

-X Bore size (mm) W WA WB WH ZZ 2020 30 22 16 23 118 25 30 22 16 25 123 Data 32 25 22 16 28.5 125 40 20 22 16 33 143 50 20 25 18 40.5 167 63 20 25 18 47.5 167 80 20 30 22 60.5 201 100 20 31 22 71 202 10-14-13 14 Series CG5-S Dimensions R V Axial foot style (L): CG5LNS S + Stroke H GA GB Width across flats B1 2-Rc P H1 D B LH I AL A K KA MM Width across flats NA LT X Y X Y M 8-J 4-LD C 0.1

Hydraulic Filters

2 x M10 x 1.5 2.5 136 65 241 0 15 20 (3/4B) 141 120 100 330 69 268.5 2 x M10 x 1.5 23 4 x M10 x 1.5 4 x M12 x 1.75 4 x M12 x 1.75 4 x M16 x 2 4 x M16 x 2 40 48 56 65 73 36 40 48 56 65 73 92 103 36 40 48 56 65 73 36 40 48 56 65 73 12 17 17 20 20 12 12 17 17 20 20 27 27 12 12 17 17 20 20 22 22 22 22 30 30 20 25 32 36 46 16 20 25 32 36 46 60 70 16 20 25 32 36 46 16 20 25 32 36 46

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

10 to 16 20 to 50 Pad dia.

C95

MR 212 238 259 288 341 371 50 63 75 90 110 132 12 16 16 20 20 25 26 28 32 40 50 60 48 55 68 80 100 120 4 4 5 5 6 6 38 46 52 62 63 75 10 10 12 12 16 16 7 9 9 9 12 14 7 9 9 9 12 14 32 36 45 50 63 71 10 12 12 16 16 20 59 67.5 82.5 95 114 129 32 40 50 63 80 100 72 83 100 115 126 150 12 15 15 20 20 25 26 28 32 40 50 60 10 11 12 12 14 16 9.5 12 12 16 16 20 65 75 80 90 110 140 56 65 77 92 100 120

Basic type / Direct mount type Series CY3B/CY3R

C Q + Stroke Shock absorber Shock absorber (mm) d B A H G FB FA D C L JK J HI HG Model CY1L15 CY1L20 CY1L25 CY1L32 CY1L40 HB HA GP EB EA LD HT HS HP HO 12 9.5 7.5 40 6.5 6 3 16.6 5 75 9.5 M6 x 1.0 14 16 4 6.5 65 13 6 5.6 16 25 39 38 16 9.5 9.5 46 8.5 21.6 5.2 86 10 M6 x 1.0 16 18 10 9 80 5.6 20 31 45 44 16 11 9.5 54 8.5 7 4 26.4 6.5 86 10 M8 x 1.25 21 23 18 9 90 14 8 7 20 39 53 52 20

Floating Joint

JB140-22-250 JB160-24-300 12 16 20 25 32, 40 50, 63 80 100 125, 140 160 3 4 5 6 8 10 16 20 22 24 3 4.5 5 6 8.5 10 16 21 17 20 4 6 6.5 8 11 13 20 26 22 26 16 16 21 24 31 41 50 59.5 79 96 2 2 4.5 5 6 7.5 9.5 11.5 14 16 6 6 7 8 11 14 19 24 30 36 5 5 7 8 11 13.5 16 20 22 24 10 10 13 17 22 27 32 41 46 55 13 15 19.5 22.5 29 35.5 47.5 59 71.5 83 0.02 0.02 0.04 0.07 0.15 0.29 0.56 1.04 2.6 4.5 0.5

Electric Actuators

10 20 20 20 20 LG1H20 LG1H21 LG1H21 Without coupling 148 Standard motor High rigidity direct acting guide LG1H 10 20 10 20 Horizontal With coupling 158 Non-standard motor 10 20 10 20 With coupling 168 Options Page 178 Construction 179 Mounting 181 Non-standard Motor Mounting 182 Deflection Data 183 Part Number Designations F 2 G X10 1 P A 100 LG1 21 H Frame material Aluminium alloy

CG5-S

Bore size (mm) W P S WA WB WH ZZ 20 30 M5 x 0.8 83 22 16 23 118 25 30 M5 x 0.8 83 22 16 25 123 32 25 1/8 85 22 16 28.5 125 40 20 1/8 93 22 16 33 143 50 20 1/4 109 25 18 40.5 167 63 20 1/4 109 25 18 47.5 167 80 20 3/8 130 30 22 60.5 201 100 20 1/2 131 31 22 71 202 10 Series CG5-S Dimensions R V Axial foot type (L)/CG5LNS X165US inch rod option dimensional changes S + Stroke H GA GB Width across

0.4

.16 stations 16 Note) 16 stations With DIN rail bracket (Without DIN rail) Note 1) Refer to page 419 for details.

One-touch Fittings

Connection thread size (R, NPT) Tightening torque [Nm] 1/16, 1/8 3 to 5 1/4 8 to 12 3/8 15 to 20 1/2 20 to 25 2) If the fitting is tightened with excessive torque, a large amount of sealant will seep out.

Series VQ Metal Seal/Rubber Seal Body Ported

Note) Types with 10, 16, or 20 pins are also available. See p.1.10-67 for details.