Enclosure: IP67, SI Unit: CC-Link - 32 Outputs - Connector M12, SI Unit Output Polarity: +COM, Stations: 16 Stations, P, E Port Entry: Both Sides 2~16 Stations, SUP/EXH Block Assembly: Internal Pilot, Built-in Silencer, A, B Port: 1/8" One-touch Fitting, Mounting: -, DIN Rail Option: -

Enclosure: IP67, SI Unit: DeviceNetâ„¢ - 32 Outputs - Connector M12, SI Unit Output Polarity: -COM, Stations: 16 Stations, P, E Port Entry: Both Sides 2~16 Stations, SUP/EXH Block Assembly: Internal Pilot, A, B Port: 1/8" One-touch Fitting, Mounting: -, DIN Rail Option: -

Enclosure: IP67, SI Unit: EtherCAT - 16 Outputs - Connector M12, SI Unit Output Polarity: -COM, Stations: 6 Stations, P, E Port Entry: U Side 2~10 Stations, SUP/EXH Block Assembly: Internal Pilot, A, B Port: 1/8" One-touch Fitting, Mounting: -, DIN Rail Option: -

Enclosure: IP67, SI Unit: w/o SI Unit, End Plate Type: None, SI Unit Common: Positive Common, I/O Unit Stations: None, Valve Stations: 16 Stations, P, E Port Location: Both Sides, SUP/EXH Block Assy: Internal Pilot, A, B Port Size: 1/8" One-touch Fitting, Mounting: -, DIN Rail Option: -

Enclosure: IP67, SI Unit: w/o SI Unit, End Plate Type: None, SI Unit Common: Positive Common, I/O Unit Stations: None, Valve Stations: 16 Stations, P, E Port Location: Both Sides, SUP/EXH Block Assy: Internal Pilot, Built-in Silencer, A, B Port Size: 1/8" One-touch Fitting, Mounting: -, DIN Rail Option: -

Enclosure: IP67, SI Unit: для EtherNet/IP™, End Plate Type: Power Supply with M12 Connector, Max. Supplied Current 2 A, SI Unit Common: Negative Common, I/O Unit Stations: 2 Stations, Valve Stations: 7 Stations, P, E Port Location: D Side, SUP/EXH Block Assy: Internal Pilot, Built-in Silencer, A, B Port Size: 1/8" One-touch Fitting, Mounting: -, DIN Rail Option: -

SI Unit: MITSUBISHI CC-LINK, Stations: 4 Stations, P, E Port Location: Both Sides 2~16 Stations, SUP/EXH Block: Internal Pilot, Built-in Silencer, A, B Port: 1/8" One-touch Fitting

SI Unit: MITSUBISHI CC-LINK, Stations: 6 Stations, P, E Port Location: Both Sides 2~16 Stations, SUP/EXH Block: Internal Pilot, Built-in Silencer, A, B Port: 1/8" One-touch Fitting

SX

4, 6 n1: Number of SX3000s stations n2: Number of SX5000s stations (Station n) (Station 1) 2n2-One-touch fittings (A, B port) Applicable tubing O.D.: 4 6 8 Equivalent to applicable D-sub connector JIS-X-5101 MIL-C-24308 16 x n2 12.5 x n1 DIN rail DIN rail holding screw Manual override (Press and turn for the locking type.)

Compact Vacuum Ejector Series ZA

Vacuum (V) port Applicable tubing O.D.: 3.2 Vacuum (V) port Applicable tubing O.D.: 4 15.3 15.6 KJL04-M5 KJL23-M5 KJS04-M5 KJS23-M5 9.3 8.4 Applicable tubing O.D.: 3.2 Applicable tubing O.D.: 4 10.6 10 15.5 16.5 Vacuum (V) port Vacuum (V) port Q1 N1 ZA1 1 1 Q1 N1 ZA1 1 2 Q1 N1 ZA1 1 4 Q1 N1 ZA1 1 5 Dimensions of the vacuum (V) port fittings after installation 9.3 13.7 Air pressure supply

SZ3000

Switch (When equipped with switch) L n 2 5 6 7 8 9 10 4 3 Internal Pilot Manifold L Dimension n: Stations (n1 + n2) L n 2 5 6 7 8 9 10 4 3 External Pilot Manifold L Dimension n: Stations (n1 + n2) L1 L2 L3 L4 L1 L2 L3 L4 110.5 100 81 15 123 112.5 91.5 16 135.5 125 102 17 148 137.5 112.5 18 148 137.5 123 12.5 160.5 150 133.5 13.5 173 162.5 144 14.5 185.5 175 154.5 15.5 198 187.5 165 16.5 123

Compact Vacuum Unit

kPa Option Note 12) Lead Wire with Connector for Vacuum Pressure Switch Nil Without option Nil G Without lead wire with connector (No need to specify for pressure sensor type. ) Lead wire with connector and connector cover, Lead wire length 78.7 inch (2 m) With bracket for single unit (Enclosed with the product for shipment without being assembled) B Vacuum (V) Port Note 11) Bracket C2 C4 N1

SZ3000

Switch (When equipped with switch) L n 2 5 6 7 8 9 10 4 3 Internal Pilot Manifold L Dimension n: Stations (n1 + n2) L n 2 5 6 7 8 9 10 4 3 External Pilot Manifold L Dimension n: Stations (n1 + n2) L1 L2 L3 L4 L1 L2 L3 L4 110.5 100 81 15 123 112.5 91.5 16 135.5 125 102 17 148 137.5 112.5 18 148 137.5 123 12.5 160.5 150 133.5 13.5 173 162.5 144 14.5 185.5 175 154.5 15.5 198 187.5 165 16.5 123

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

Description Material Note 1 Body Spool Sleeve Spool valve Piston Pilot valve Aluminum die cast / Metal seal Stainless steel 2 Rubber seal / Aluminum NBR 3 4 Resin 33 Series VQZ Body Ported Type Dimensions: VQZ100 Dimensions: VQZ100 (mm) Valve Scale: 65% Grommet (G): VQZ115G -N1, N3, N7, M5 2-N1, N3, N7, M5 N1: One-touch fittings for 1/8" N3: One-touch fittings for 5/32" N7: One-touch fittings

CM2

I Bore size (mm) -X 20 41 8 75 60 4 34 7 15.5 13 18 8 28 13 26 30 5 8 0 0.033 20 25 45 8 75 60 4 40 7 19.5 13 22 10 33.5 17 32 37 6 8 0 0.033 26 2032 45 8 75 60 4 40 7 19.5 13 22 12 37.5 17 32 37 6 8 0 0.033 26 40 50 11 82 36 66 5 52 7 21 16 24 14 46.5 22 41 47.3 8 10 0 0.039 32 Data With Air Cushion Built-in One-touch Fittings Bore size (mm) Bore size (mm) MM K NN ZZ NA Z N P S Q WB N1

CATALOG

C3 One Touch Fittings for 3.2 C4 One Touch Fittings for 4 C6 One Touch Fittings for 6 M5 M5 (10-32Nom) N1 One Touch Fittings 1/8 N3 One Touch Fittings 5/32 N7 One Touch Fittings 1/4 * Mixed Ports Available N o t e 4 ) Contact SMC for details of vacuum ejector unit. Combination of ejector option J and nameplate N is not possible.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

Please be sure to fill in the blank referring to page 340. 329 SY3000/5000 M45 Type Dimensions: Mixed Mounting [ ]: AC SS5Y5-M45Stations U Pitch SY5000 Pitch SY3000 16.9 15.5 26 17 P=16 P=12.5 23.3 Button for DIN rail release L dimension: Formulae for L1 to L4 L3 = 12.5 x n1 + 16 x n2 + 52 14.5 31.5 71.1 [78.1] 71.5 [78.5] 32 R A A A A A A L3 12.5 M = ( + 1) Omit decimals B P B B B B B A,

PSE200

Supply pressure verification Leak test P2(n1) > P1(n2) P2(n2) P1(n1) 10.0 to 101.0kPa CH Increases the set value 1 2 3 4 PRESSURE For normally closed P2(n1) > P1(n2) P2(n2) P1(n1) 0.1 to 1000.0MPa Decreases the set value SET P3(n3) and P4(n4) are the same as P1(n1) and P2(n2).

PSE530/200

OUT2 P2(n2) P1(n1) Supply pressure verification Leak test CH P2(n1) > P1(n2) 10.0 to 101.0 kPa Increases the set value 1 2 3 4 PRESSURE For normally closed P2(n2) P1(n1) P2(n1) > P1(n2) 0.1 to 1000.0 MPa Decreases the set value SET P3(n3) and P4(n4) are the same as P1(n1) and P2(n2).

Valve Single Unit

4, 6 n1: Number of SX3000s stations n2: Number of SX5000s stations (Station n) (Station 1) 2n2-One-touch fittings (A, B port) Applicable tubing O.D.: 4 6 8 Equivalent to applicable D-sub connector JIS-X-5101 MIL-C-24308 16 x n2 12.5 x n1 DIN rail DIN rail holding screw Manual override (Press and turn for the locking type.)