VFN2000N

) NPTF Nil F N Voltage 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz 110 to 120 VAC, 50/60 Hz 220 VAC, 50/60Hz 24 VDC 12 VDC 240 VAC, 50/60 Hz Other Manual override/Classification 1 2 3 4 5 6 7 9 Electrical entry Non-locking push type (Flush) Non-locking push type (Extended) Locking type (Tool required) Nil A B Grommet Grommet terminal Conduit terminal DIN terminal G E T D Light/Surge voltage suppressor

Electric Actuator / Slider type 《 Battery-less absolute encoder type (Step motor 24VDC) 》

This matches the controller. (1) LEKFS32EA-300 4 - 1.2 Specification Battery-less absolute encoder type (Step motor 24VDC) Model LEKFS25 LEKFS16 LEKFS40 LEKFS32 Stroke [mm] 50 to 800 50 to 1000 50 to 500 150 to 1200 Horizontal 14 15 12 25 30 20 45 50 25 55 65 Work load [kg] *1 Vertical 2 4 0.5 7.5 15 4 10 20 2 2 23 to 400 10 to 700 5 to 360 20 to 1100 12 to 750 6 to 400 24 to 1200 16 to 800

High Vacuum L Type Valve

Valve specifications Model XLF-16-2 XLF-25-2 XLF-40-2 XLF-50-2 XLF-63-2 XLF-80-2 Flange (valve) size 16 25 40 50 63 80 Actuating type Normally closed Fluid Vacuum of inert gas Operating temperature oC 5 to 60 (5 to 150 for high temperature type) Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-5 Conductance l/s Note 1) 5 14 45 80 160 200 Internal 1.3 x 10-10 for the standard material

High Vacuum L Type Valve

seal (5).

Cylinder with lock

Bore size (mm) Bolt Hexagon wrench size Tightening torque (Nm) 32, 40 MB-32-48-C1247 4 5.1 50, 63 MB-50-48-C1249 5 11 80, 100 Foot MB-80-48AC1251 6 25 Other MB-80-48BC1251 5) When replacing the support brackets, the tie-rod nuts on the cylinder body will be loosened.

COQ2BP

M1 0Xl.5 15 50 131 20 28 22 SO.6 44 B " M l 0)(1.5 M10)(I .S 63 138. 5 18 124 .5 SO.6 44 I. 8 Ml0Xl .5 15 20 30 22 " M12xl .75 M1 2x 1.75 lB 150 27 M1 6X2.0 21 80 168 22 38 28 64 56 18 10 10 0SM:: Series CDQ2BP High Magll8lic Field Resistance ," , [).P70 ' , D-~i4,,;'; ' ; ::~::Y_iidiz!C:::i Auto SWitch No.

5 Port Solenoid Valve

No.VP4*50*-OMC0001-B PRODUCT NAME 5 Port Solenoid Valve MODEL / Series / Product Number VP4*50/VP4*70/VVP4*0 Series Contents Safety Instructions -2,3 Design / Selection -4,5 Mounting -5 Piping -6 Wiring -6 Lubrication -6 Air Supply -6 Operating Environment -7 Maintenance -7 Specific Product Precautions -8 Trouble Shooting -9,10 1 VP4*50*-OMC0001-B Safety Instructions These safety instructions

Process Valve

6/7 SF4 5 D 23 Q VO307 5 D 1 Q CE-compliant CE-compliant Coil rated voltage Coil rated voltage CE-compliant Nil Q CE-compliant Nil Q 1 2 3 Note 1) 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz 1 2 3 Note 1) 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz Note) Electrical entry: D or DZ

Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

FU) Size (mm) (mm) FU 10 20 30 50 HD HC HB HA DF DC DB DA 10 20 30 50 HE 5 6 6 7 Size HC 20H8 28H8 32H8 35H8 63 73 76 87 9.5 13.5 13.5 15.5 35h8 40h8 48h8 54h8 31.5 34.7 34.7 51.7 46h8 61h8 67h8 77h8 24 30 30 34 45h8 60h8 65h8 75h8 15.5 19.5 19.5 21.5 DF (mm) A 50 65 70 80 DF 5 6 6 7 DG HC JB JA J H AY FB FA CB AX DE DD D AW CA AV BE BD BC BB BA AU AA Size 10 20 30 50 15.5 16 18.5 22 4 5

C92

Bore size (mm) Max. stroke Standard stroke (mm) MB1 32 1900 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 40 CP95 1900 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 50 1900 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 C95 63 1900 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 80 1900 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 C92 100 1900 25, 50, 80, 100, 125,

0.4

5 1 (P) 3 (R2) 3 position: SQ1 40 3 4 5 3 position: SQ1 41 3 4 5 r e e q r q e w e w SQ1441 SQ1541 SQ1340 SQ1440 SQ1540 SQ1341 2 (B) (A) 4 2 (B) (A) 4 2 (B) (A) 4 2 (B) (A) 4 2 (B) (A) 4 2 (B) (A) 4 (R1) 5 1 (P) 3 (R2) (R1) 5 1 (P) 3 (R2) (R1) 5 1 (P) 3 (R2) (R1) 5 1 (P) 3 (R2) (R1) 5 1 (P) 3 (R2) (R1) 5 1 (P) 3 (R2) Dual 3 port valve: SQ1 41 A B C Component Parts r e e q w w No.

AIR COMBINATION

30.5 41 57.2 35 7 14 4 41 1/43/8 1/43/8 AC30C-A 1/8 167.4 115.1 27 30 55.1 50 30.5 41 57.2 35 7 14 4 41 AC40C-A 1/8 220.4 147.1 33.5 38.4 72.6 75 36.1 50 75.2 40 9 18 5 48 1/43/81/2 AC40C-06-A 1/8 235.4 149.1 33.5 38.4 77.6 75 39.6 50 80.2 40 9 18 5 48 3/4 Optional specifications Semi-standard specifications Round type Metal bowl With Round type With With auto drain Metal bowl Metal

Ionizer Nozzle type IZN10 Series IZS

DIN rail mounting bracket/IZN10-B3 (Mounting angle adjustable range) 40 17 50 Internal mounting 2 x 3.4 33 20.5 30 30 44 70 61 70 55 26 17 11 8 x 3.4 9 (7.5) 40 5 2 x Hexagon socket head cap screw M3 x 6 20 26 12 (Accessory) Internal mounting Pivot mounting 33 21 (Mounting angle adjustable range) (99) 30 Power supply cable/IZN10-CP 5.8 5 9 20 1 60 L Cable Specifications No. of cable wire

Vacuum Regulator

16.5 S T 35 R 10.5 R 5 Elbow fitting Panel cut Panel plate thickness: Max. 3 34 15.4 x 5.4 One-touch fitting 83 Air 63 15.5 4.5 (mm) Fitting Part Dimensions 14.5 22 Fitting size VAC/SET Straight R Elbow S Elbow T Elbow U 11 14 Elbow V Rc 1/8 Pressure gauge port 50 19.1 33.1 6, 1/4" 8, 5/16" 10 12 19 20 26 28 7.5 10.5 Pressure switch 5 Series IRV10/20 Dimensions/IRV20: Standard Connections

Regulator

Note 3) : Select with an option E1, E2, E3 or E4. -8- 5.

Electric Actuators

to 80 304 280 5 phase to 200 264 2 phase to 200 286 278 5 phase to 100 262 2 phase to 100 274 5 phase to 30 258 2 phase to 30 294 276 5 phase to 80 260 2 phase to 80 Page Standard stroke (mm) and 25 50 75 100 125 150 175 200 Model Maximum speed (mm/s) Capacity Standard Deflection LXFHABC LXFHABD to 50 288 304 to 100 LXPBABC LXPBABD LXPBABC-B LXPBABD-B to 50 to 100 290 304 to 50 30W

Rotary Actuator with Solenoid valve Ｃ ( Ｄ ) ＶＲＡ１＊＊＊３０～１００－＊＊Ｚ

0.12 1.50 0.2 to 3 Cushion angle 35 80 0.16 2.00 0.2 to 4 100 0.54 2.90 0.2 to 5 Mass Mass of product=Table (4)Standard Mass + Table(5)Mass of the solenoid valves + Table(6)Additional mass Table (4) Standard Mass (Kg) Standard Type Size 90 180 50 1.3 1.5 63 2.2 2.6 80 3.9 4.4 Table(5) Mass of the solenoid valves (Solenoid valve unit + accessory parts.)

Compact Cylinder: Standard Double Acting, Single Rod Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100

Cold resistant cylinder (40 to 70C) w/o auto switch only Low-speed cylinder (10 to 50 mm/s) Standard Strokes Intermediate stroke (Exclusive body type) Pneumatic type Intermediate stroke (Spacer-installed type) (mm) Bore size 12, 16 20, 25 32, 40 50 to 100 Standard stroke Long stroke (Air-hydro type only) 5, 10, 15, 20, 25, 30 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 5, 10, 15, 20, 25, 30, 35

E-MY2B_E_A

Heavy load Standard load Midium load Light load 1 10 50 100 1 0.25 0.49 0.98 1.96 2 20 75 200 2 0.49 0.74 1.47 2.94 3 30 100 300 3 0.74 0.98 1.96 3.92 4 40 125 400 4 0.98 1.23 2.45 4.90 5 50 150 500 5 1.23 1.47 2.94 5.88 6 75 200 600 6 1.47 1.96 3.92 7.84 7 100 250 700 7 1.72 2.45 4.90 9.80 8 300 300 800 8 1.96 2.94 5.88 11.76 9 500 500 900 9 2.21 3.92 7.84 15.68 10 1000 1000 1000 10 2.45

Smooth Cylinder Series CQ2Y ø32, ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the anti-lateral load type of Series CQ2  S .

5 to 50 46.5 39.5 9 depth 7 40 56.5 49.5 13 16 52 8 M8 x 1.25 69 5 14 7 40 5.5 1/8 11 66 35 14 75, 100 56.5 49.5 10 to 50 48.5 40.5 11 depth 8 50 58.5 50.5 15 20 64 10.5 M10 x 1.5 86 7 17 8 50 6.6 1/4 10.5 80 41 19 75, 100 58.5 50.5 6 Series CQ2Y Mounting bracket dimensions are the same as those of the anti-lateral load type of Series CQ2S.