XLDV Series

Specifications Model XLDV-25 XLDV-40 XLDV-50 XLDV-63 XLDV-80 XLDV-100 XLDV-160 Flange (valve) size 25 40 50 63 80 100 160 Actuating type Normally closed Fluid Vacuum of inert gas Operating temperature oC 5 to 60 Operating pressure Pa Atmospheric pressure to 1 x 10-6 Main pumping 14 45 80 160 200 300 800 Conductance l/s Note 1 Initial pumping 0.53 28 2.511 48 418 6.531.5 6.531.5 Internal 1.3

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(DiH erEffl surfaces 110 100 105 15 Same surfOlce), W~h 1 pc D-A90 10 41 15+ 40 (0 2) 100 + 40(1\ 2 4) 110 -+ 40 1 05+40~ 2 2 2 With n pes. (n:: 4. 8, 12, 16 .j (n :: 4, 8, 12. 16 .. ) (n = 4, 8. 12. 16) (n:: 2, 4. 6. 8 ) W ith 2 pes. (Dilferem surfaces 85 75 80 ' 0 Same sunacg).

RSH/RS1H

load F [N] 500 500 50 400 400 RZQ RS1H50, 63, 80 300 300 1.0 RS1H80 MI W S RS1H50 200 200 RS1H63 0.9 Operating pressure P [MPa] 0.8 100 100 CEP1 0.7 10 20 30 40 10 20 30 40 0 0 0.6 CE1 Transfer speed [m/min] = 0 Transfer speed [m/min] = 0.1 0.5 0.4 CE2 Graph (3) Graph (4) Bore size 20, 32/ = 0 Bore size 20, 32/ = 0.1 0.3 ML2B 0.2 0.1 C J G5-S 80 80 1000 2000 3000 4000 0 5000 Lateral

RSH/RS1H

900 0.3 MK(2) 63 80 Load weight m [kg] Load weight m [kg] Load weight m [kg] Load weight m [kg] 0.2 800 800 50 0.1 700 700 RS Q G 600 600 0 500 100 200 300 400 RS H A 63 Lateral load F [N] 500 500 50 400 400 RZQ RS1H50, 63, 80 300 300 1.0 RS1H80 MI W S RS1H50 200 200 RS1H63 0.9 Operating pressure P [MPa] 0.8 100 100 CEP1 0.7 10 20 30 40 10 20 30 40 0 0 0.6 CE1 Transfer speed [m/min] =

air-filter-e

It does not mean that 100% of the particulates of the diameter shown can be filtered out.

Air Preparation Equipment

It does not mean that 100% of the particulates of the diameter shown can be filtered out.

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(Different surfaces, Same surface), With 1 pc. 100 15 105 110 D-A9 110 + 40(n 4) 2 15 + 40(n 2) 2 (n = 4, 8, 12, 16) 100 + 40(n 4) 2 105 + 40(n 4) 2 With n pcs. (n = 4, 8, 12, 16) (n = 2, 4, 6, 8) (n = 4, 8, 12, 16) With 2 pcs. (Different surfaces, Same surface), With 1 pc. 75 10 80 85 D-A9V 75 + 30(n 4) 2 85 + 30(n 4) 2 80 + 30(n 4) 2 10 + 30(n 2) 2 With n pcs.

Magnetically Coupled

32 1-1/4" 80 1-1/2" 40 80 2" 50 80 2-1/2" 63 80 Note) The longer the stroke, the larger the amount of deflection in a cylinder tube.

Ejector Valve Unit Series ZYY/ZYX 1

Y3 X3 ZY -07L Max. vacuum pressure: 53 kPa Y3 X3 ZY -07S Max. vacuum pressure: 84 kPa Exhaust Characteristics Flow Characteristics Exhaust Characteristics Flow Characteristics 50 50 100 100 100 100 Vacuum pressure Suction flow rate (l/min(ANR)) Air consumption flow rate (l/min(ANR)) Suction flow rate (l/min(ANR)) Air consumption flow rate (l/min(ANR)) 40 40 80 80 80 80 Vacuum pressure (kPa

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

, 100, 125, 160, 200, 250, 320, 400, 500 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 2000 2000 2000 2000 2000 2000 2000 32 40 50 63 80 100 125 Minimum Stroke for Auto Switch Mounting 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 25, 50, 80, 100, 125, 160

ISO Standard (15552) Air Cylinder: Standard Type Double Acting, Single/Double Rod ø 32, ø 40, ø 50, ø 63, ø 80, ø 100 CP96 Series

, 100, 125, 160, 200, 250, 320, 400, 500 2000 40 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 2000 50 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 2000 63 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 2000 80 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 2000 100 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 2000 Intermediate

CLS

] 100 100 100 500 400 300 200 100 500 400 300 200 Data Maximum speed: V (mm/s) Maximum speed: V (mm/s) Graph (7) Graph (4) 0.5 MPa ) P 0.5 MPa ) P 250 4000 4000 3000 3000 200 180 2000 2000 160 250 140 Load weight: m (kg) Load weight: m (kg) 125 200 1000 1000 700 800 900 700 800 900 180 160 600 600 140 500 500 125 400 400 300 300 200 200 100 100 100 500 400 300 200 100 500 400 300 200 Maximum

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W Fulcrum L Front matter 5 Series CKZ3 Model Selection Model Selection CKZ3N North American Type Made to Order European Type CKZ3T 3 Clamp arm 50 63 300 150 280 140 Distance from pivot point L(mm) Distance from pivot point L(mm) 260 130 240 120 220 110 200 100 180 90 160 80 140 70 120 60 100 0 0.5 1.0 1.5 2.0 2.5 3.0 3.5 4.0 4.5 5.0 5.5 6.0 6.5 7.0 7.5 8.0 50 0 0.5 1.0 1.5 2.0 2.5 3.0 3.5

CKZ2N

Clamp Arm Tightening Torque Bore size (mm) Tightening torque Nm Ibfin 50 63 80 12 to 15 15 to 20 18 to 24 106 to 133 133 to 177 159 to 212 Bore size (mm) Tightening torque Description Nm Ibfin 50 63 80 50 63 80 50 63 80 50 63 80 44 to 62 44 to 62 44 to 62 27 to 35 27 to 35 27 to 35 1150 to 1327 1416 to 1770 4248 to 4600 22 to 27 22 to 27 27 to 44 5.0 to 7.0 5.0 to 7.0 5.0 to 7.0 3.0 to 4.0

Air Catch Sensor Series ISA

mA 12 to 24 VDC ZNR ZNR 12 to 24 VDC SOL DC () 100 to 200 VAC SOL 2 DC () 2 ( ) PNP open collector output Conduit terminal DIN type connector With indicator light AC Circuit Conduit terminal With indicator light DC circuit DC (+) 1 ( ) 1 DC (+) MAX 80 mA Rectifying device OUT Load 12 to 24 VDC ZNR ZNR 100 to 200 VAC 12 to 24 VDC SOL SOL DC () 2 ( ) 2 DC () LED indicator light ZSE ISE DIN

Multi-channel Digital Sensor Monitor ( compatible)

V, 80 mA Residual voltage 1.5 V or less When used as a switch output device Max. 80 mA Residual voltage 1.5 V or less -19No.PS-OMW0012-C Pressure Setting Default settings When the pressure exceeds the set value, the switch will be turned on.

PF-OMM0004_C

( 100 ) 1 (/30 LOC ) [FAL] 3 [UnLoC] LoC [000] ((58 )) [UnLoC] 5 [000] 59 1 1 [UnLoC][LoC] -59No.PF-OMM0004-D , -60No.PF-OMM0004-D PF3W7 , ,, (), DC(+) DC(-) 40 40 -61No.PF-OMM0004-D ) DC(+) DC(-) (OUT1) (OUT2) 40 LoC(58 ) -62No.PF-OMM0004-D DC(+) DC(-) (OUT1) (OUT2) ( ) GND 30 ms GND 30ms ( 20 ) -63No.PF-OMM0004-D OUT1 (OUT1)80 mA OUT2 (OUT2)80 mA 140 ( (

Electric Actuator

Stroke [mm] 100 to 1000 100 to 1000 Refer to the applicable stroke table.

SX

Body Ported Bore size Series CJ2 Pressure 0.5 MPa Load factor 50% Stroke 60 mm Series MB/CA1 Pressure 0.5 MPa Load factor 50% Stroke 500 mm Series CM2 Pressure 0.5 MPa Load factor 50% Stroke 300 mm Average speed (mm/s) Series 6 10 16 20 25 32 40 40 50 63 80 100 800 700 600 500 400 300 200 100 Perpendicular, upward actuation Horizontal actuation SX3120-C6 0 800 700 600 500 400 300 200 100

CG1 Series ø 20, ø 25, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100 Air Cylinder: Standard Type Double Acting, Single Rod

Air Cylinder: Standard Type Double Acting, Single Rod CG1 Series 20, 25, 32, 40, 50, 63, 80, 100 RoHS How to Order 100 CG1 20 N B Z N B 20 Z Bore size 100 CDG1 M9BW With auto switch With auto switch (Built-in magnet) Pivot bracket Made to Order Mounting Nil None For details, refer to page 293. 20 20 mm 25 25 mm 32 32 mm 40 40 mm 50 50 mm 63 63 mm 80 80 mm 100 100 mm N Pivot bracket is shipped