Millimeter Inch With One-touch fittings 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 01 03 05 07 09 11 4 6 8 10 12 04 06 08 10 12 Thread _ Meter thread (M5) Unified thread (10-32 UNF) R(PT) N NPT Port size M5 X 0.8 10-32UNF 1/8 1/4 3/8 1/2 M5 U10/32 01 02 03 04 AS ASN AQ ASV Needle Valve/Flow Characteristics AK ASD230F ASD330F ASD430F ASS 100 200 400 1.5 6 3 07, 08, 09, 10, 11 Effective area (mm2) Flow
purge N2 gas 2 1 Packaging Clean gas filter Class 10,000 Class 10,000 870 Precision Clean Regulator SRP Series ARJ How to Order AR425 to 935 ARX SRP 1 1 0 1 01 AMR Made to Order (Refer to page 874 for details.)
depth 4 6.4 12 18.35 Atmospheric release port Lead wire length 600 (3000) 3.5 12.4 7 7.8 2.5 2.6 30 14 15.2 10.7 4.5 * For splash proof use (IP65), insert an air tube into the atmospheric release port. 1.5 01: R 1/8 T1: NPT 1/8 (Refer to Specific Product Precautions 4 on the back cover for details.)
0.00 to 14.69 psi 14.50 to 14.50 psi Symbol Nil K Calibration certificate Piping specifications X531 R1/8, NPT1/8 R1/8 (With M5 female thread) 01 Option 1 Refer to page 17 for details.
600 (3000) 3.5 12.4 7 7.8 2.5 2.6 30 14 15.2 10.7 4.5 For splash proof use (IP65), insert an air tube into the atmospheric release port. 1.5 01: R 1/8 T1: NPT 1/8 (Refer to Specific Product Precautions 4 on the back cover for details.)
Inch size Metric size 01 02 23 2 3.2 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 03 05 07 09 11 13 Control type 04 06 08 10 12 0 1 Meter-out Meter-in Use 1/8" tube.
Series AS Speed Controller with One-touch Fitting Elbow Type/Universal Type How to Order 2 2 0 01 06 S AS 1F Hexagon lock nut Round lock nut J Nil Lock nut option Body size AS AS 1 2 3 4 M3, M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard Made to Order (Refer to page 490 for details.)
1 A Q a q 0 0 1 0 2 STX DC2 2 B R b r 0 0 1 1 3 ETX DC3 # 3 C S c s 0 1 0 0 4 $ 4 D T d t 0 1 0 1 5 5 E U e u 0 1 1 0 6 & 6 F V f v 0 1 1 1 7 7 G W g w 1 0 0 0 8 ( 8 H X h x 1 0 0 1 9 ) 9 I Y i y 1 0 1 0 10 : J Z j z 1 0 1 1 11 ; K [ k { 1 1 0 0 12 , L l | 1 1 0 1 13 M ] m } 1 1 1 0 14 . N ^ n 1 1 1 1 15 / ?
AS-FM Series Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) How to Order AS 2 2 0 1 F M 01 06 Lock nut option Nil J Hexagon lock nut Round lock nut AS-F Body size TMH 1 2 M5 standard 1/8, 1/4 standard Made to Order Refer to the below for details.
Auto switch model Bore size (mm) 25 32 40 20 D-M9m D-M9mW D-A9m D-H7m/H7mW/H7NF D-H7BAL/C7m/C80 D-C73C/C80C D-G5m/G5mW/G59F D-G5BAL/G5NTL D-B5m/B64/B59W D-G39/K39 = A3m/A44 Note 1) qBMA2-020 wBJ3-1 Note 1) qBMA2-025 wBJ3-1 Note 1) qBMA2-032 wBJ3-1 Note 1) qBMA2-040 wBJ3-1 BMA2-025 BMA2-032 BMA2-040 BMA2-020 BA-02 BA-32 BA-04 BA-01 BD1-02M BD1-02 BD1-04M BD1-01M Note 1) Two types of auto switch
types of piping, option installed Enclosure: Dust-tight, Water-jet-proof (IP65) 01 1 station Note 1) Insert L (Top ported) or B (Bottom ported) for elbow type.
types of piping, option installed Enclosure: Dust-tight, Water-jet-proof (IP65) 01 1 station Note 1) Insert L (Top ported) or B (Bottom ported) for elbow type.
specification (Except double wiring) Valve stations Note) When single wiring and double wiring are mixed, specify wiring type of each station on the manifold specification sheet. 01 1 station 12 12 stations I/O Unit stations Cylinder port size Nil None 1 1 station 03 3/8 04 1/2 B Bottom ported Rc1/4 CM Mixed sizes 9 9 stations Note 1) Without SI Unit, the symbol is nil.
K SD SU Stations (2) (3) 01 1 station (2) (3) 16 16 stations (2) (3) (2) (3) Cylinder ports Note 1) When two or more symbols are specified, indicate them alphabetically.
Width across flats(M6.8 MS :1 2) ~' " ,,"/ 1 w Width across flats 12 Width across flats 8 o'S '" ,..,LHb;,.,,= . ~ ; I ~ -... 1 ",1 0'3 -1 . ~=~~ rOW I '" ,] " 1 ~ I >/ ! 1 "'---+-+~_ . LI __ "2.5 ~ ft<-I IK _ '-L o s_ .I ~_ !f L (mm) (mm) :.~: ,;..
P. 82 P. 83 ZPB-X3 (J/JB/JF)01 68 Vacuum Equipment Precautions 1 Be sure to read this before handling.
98 DC 96 Dimensions (mm) Standard specifications Model Port size A C D E1 E2 G H J 1(P) 2(A) 3(R) AV2000-02-1 to 4G(Z)-A 1/4 1/4 1/4 66 47 24.5 20 20 33 Width across flats 22 30 AV2000-02-5 to 6G(Z)-A 1/4 1/4 1/4 AV3000-03-1 to 4G(Z)-A 3/8 3/8 3/8 76 50 29.5 20 20 38 Width across flats 24 35 AV3000-03-5 to 6G(Z)-A 3/8 3/8 3/8 AV4000-04-1 to 4G(Z)-A 1/2 1/2 1/2 98 56 39.5 26 26 49 Width across
Interface Speed Controls Cylinder speed can be controlled by throttling exhaust air. 20 Comforming to ISO 15407-2 Series VSR/VSS8-4 How to Order Manifold (ISO15407-2) 03 SDQ VV8 01 N 1 1 N 5 W1 Option Note 1) Size Nil None 01 Size 01 Special wiring specifications (Except double wiring) K Number of stations External pilot R 1 1 station Direct exhaust with built in silencer S 16 16 stations
-41 Common EXH 1(P) port 1/2 3(R) port 1/2 2(A) port 1/2 2 to 20 stations VPA700 VV3PA7-42 Individual EXH 1(P) port 1/2 2(A) port 1/2 3(R) port 1/2 Note) Supply pressure to 1(P) ports and exhaust air from 3(R) ports on both sides for 10 stations or more. 1557 3 Port/Air Operated Valve Body Ported/Single Unit How to Order VPA300/500/700 Series VPA 3 4 2 1 01 A Series 3 5 7 VPA300 series VPA300