VHS20/30/40/50

Port size Body size Thread size Thread type Symbol N F Rc NPT G 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 1 An interface part is required if a spacer or spacer with bracket shown in the table below is attached to a modular FRL.

1 D. P. Lube (Unit) Series ALD(U)600/900 F.R.L. Standard Specifications  Centralized control of multi-point (1) D.P . Lube D.P . Lube Unit Model name lubrication AV ALDU600 ALDU900 ALD900 ALD600 Model  Low oil consumption volume 1 1 1 4 1 4 3 4

164.5 170 180 230 251 15 15 15 20 22 22 8 3 , , 8 3 4 1 2 1 Bracket dimensions E D C B A Model Port size 4 3 F 345 419.2 K 57 49.6 J 14 14 H 95 120 G 32.5 0 1 1 , 87.5 125 4 3 ALD600-06 to 10 ALD900-12 to 20 , 1 4 3 175 250 135 209 460 613 175 250 2 1 1 1 4 1 2 , , ALDU600-06 to 10, ALDU900-12 to 20 D.P.

Safety Speed Control Valve (SSC Valve) Series ASS 1

1 Safety Speed Control Valve (SSC Valve) Series ASS Model Meter-out control type: A control valve with cylinder speed control function, fixed throttle, and rapid air supply function Port size Effective area (mm2) Weight (g) Free flow Controlled flow Style Model ASS100 2.4 1/8 9.5 97 ASS300 14.5 1/4, 3/8 22.0 220 Meter-in control type: A control valve with cylinder speed control function and

Pressure Relief 3 Port Valve with Locking Holes VHS20/30/40/50

Port size Body size Thread size Port thread Symbol N F Rc NPT G 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 1 An interface part is required if a spacer or spacer with bracket shown in the table below is attached to a modular FRL.

Nozzle Diameter: 07 (ø0.7mm), Vacuum Pressure: S (-90 kPa), SUP: 01 (Screw-in Rc 1/8), VAC: 01 (Screw-in Rc 1/8), EXH: 01 (Screw-in Rc 1/8), Accessories: N (w/o Bracket, w/o Silencer)

Nozzle Diameter: 10 (ø1.0mm), Vacuum Pressure: S (-90 kPa), SUP: 01 (Screw-in Rc 1/8), VAC: 01 (Screw-in Rc 1/8), EXH: 01 (Screw-in Rc 1/8), Accessories: N (w/o Bracket, w/o Silencer)

Nozzle Diameter: 05 (ø0.5mm), Vacuum Pressure: S (-90 kPa), SUP: 01 (Screw-in Rc 1/8), VAC: 01 (Screw-in Rc 1/8), EXH: 01 (Screw-in Rc 1/8)

Nozzle Diameter: 10 (ø1.0mm), Vacuum Pressure: S (-90 kPa), SUP: 01 (Screw-in Rc 1/8), VAC: 01 (Screw-in Rc 1/8), EXH: 01 (Screw-in Rc 1/8)

Nozzle Diameter: 07 (ø0.7mm), Vacuum Pressure: S (-90 kPa), SUP: 01 (Screw-in Rc 1/8), VAC: 01 (Screw-in Rc 1/8), EXH: 01 (Screw-in Rc 1/8)

Nozzle Diameter: 05 (ø0.5mm), Vacuum Pressure: S (-90 kPa), SUP: 01 (Screw-in Rc 1/8), VAC: 01 (Screw-in Rc 1/8), EXH: 01 (Screw-in Rc 1/8), Accessories: N (w/o Bracket, w/o Silencer)

VFS4000-OMY0001

(1) 5 No.VFS4000-OMY0001 (2) 6 No.VFS4000-OMY0001 3 VF4000-9A B 4 () () 7 No.VFS4000-OMY0001 5 1) DIN DIN (+,-) AC DC100V DC24V 810 3 1.25Y-3L1.25-3.5S1.25-4M 0.6Nm 0.6Nm COM (DIN No.3), 8 No.VFS4000-OMY0001 2) , , 1.25-3.5M1.25Y-3L1.25-3M +0.6Nm 3) 1.25-31.25-3S1.25Y-3N1.25Y-3S +0.6Nm 9 No.VFS4000-OMY0001 /01 A+ AB+ BVFS4100 A A VFS4200 A A B

Stainless Steel Regulator Series NSR

Fftdd/Diapnr.gm Malerbl (NSR1O0O) 0Deionized water, Watsr, Air, N2gas, O2gas Fluoro rubber & Fluoro resin lining 1-Deionized water, Water, N2gas, 02gas Fluoro rubber S_tting Prr&9ure 0-Lov,/ Pressure Model (1.5-3op.sig) 1-Hish Pressure Model (7 ' 1 oopsig) ( sR3O00,4000) 0Pure water, Water/Fluoro rubber A Fluoro resin lining 1-Air, N2gas, 02$s/Fluoro rubber 2-Air, N2gas, 02gas/nuoro rubber

Control Method: S (Meter-in, Light Blue), Stud Position: A (Right Side), Tube Diameter: 07 (ø1/4"), Thread Type: N (NPT), Port Size: 01 (1/8), Sealing Method: S (w/Sealant)

Control Method: S (Meter-in, Light Blue), Stud Position: A (Right Side), Tube Diameter: 03 (ø5/32"), Thread Type: N (NPT), Port Size: 01 (1/8), Sealing Method: S (w/Sealant)

Control Method: S (Meter-in, Light Blue), Stud Position: A (Right Side), Tube Diameter: 04 (ø4), Thread Type: R, Port Size: 01 (1/8), Sealing Method: S (w/Sealant)

Control Method: S (Meter-in, Light Blue), Stud Position: A (Right Side), Tube Diameter: 06 (ø6), Thread Type: R, Port Size: 01 (1/8), Sealing Method: S (w/Sealant)

Indicator: S, Control Method: E (Meter-out), Stud Position: A (Right Side), Tube Diameter: 07 (ø1/4"), Thread: N (NPT), Port Size: 01 (1/8), Seal Method: S (w/Sealant)

Indicator: S, Control Method: E (Meter-out), Stud Position: A (Right Side), Tube Diameter: 06 (ø6), Thread: R, Port Size: 01 (1/8), Seal Method: S (w/Sealant)

Indicator: S, Control Method: E (Meter-out), Stud Position: A (Right Side), Tube Diameter: 04 (ø4), Thread: R, Port Size: 01 (1/8), Seal Method: S (w/Sealant)

Rated Flow Range: 50 (0.5 to 50 L/min), Flow Adjustment Valve: S (With Flow Adjustment Valve, Straight), Port Size: 01 (Rc1/8), Output Specification: F (Out 1: PNP; Out 2: Analog 4 to 20 mA), Lead Wire: W (Lead Wire w/Connector + Rubber Cover for Connector), Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: S (Bracket, w/Flow Adjustment Valve), Calibration Certificate