VXD21/22/23 80 60 10(1) 60 40 40 60 Maximum Minimum 10 5(2) Note 1) Dew point: 10C or less Note 2) 50 cSt or less Note 3) D, E, N, P etc. in parentheses are option symbols.
0.3 1.0 0.3 0.8 0.3 Actuation pressure difference MPaNote 1) 0.5 0.25 0.4 0.2 0.2 0.15 Reverse pressure potential MPa Note 2) 1 x 10 -6 Port A pressure Pa 1.3 x 10 -9 {1 x 10 -8} at ordinary temperatures, excluding gas permeation Internal External 1.3 x 10 -11 {1 x 10 -10} at ordinary temperatures, excluding gas permeation Leakage Pa m 3/s {Torr l/s} VCR 1.3 x 10 -11 {1 x 10 -10} Fitting
Light load Motor load Voltage IFW510 1 to 10 20 1 or less N.C.
Refer to page 41 for how to return to the locked state. 10 MWB Series Construction io w er uy q !3 !4 !2 !8!5!6 !0!1 !7 @1@0 @2 @6 @3 @5@8 @4@9 #5 #7 #9 #8#6#4 #0#1 $1 $0 t !9 #3 #2 @7 Component Parts Component Parts No. Description Material Qty.
(mm) 2(A) Port size R(PT) 2(A) Port size R(PT) 1(P) 1(P) 1(P) 4 6 8 10 12 M5 1 8 1 4 3 8 1 2 1 8 1 4 3 8 1 2 4 6 8 10 12 1(P) M5 M5 4 M5 4 Tube O.D. (mm) Tube O.D.
N Model P 255 276 Q 241 262 275 270 80 185 365 288 286 90 188 368 241 262 16 19 129 147 7 9 22 25 95 108 50 55 IDG60V, 60HV IDG75V, 75HV, 100V, 100HV 3/8, 1/2 1/2 31 Membrane Air Dryer Series IDG Dimensions (mm) 1in = 25.4mm IDG60LV, 75LV, 100LV IDG60SV, 75SV, 100SV 91 Port size 3/8, 1/2 334 77 180 50 Purge air for dew point indicator 18 13 22 IN OUT 40 10 165 (B) Drain Drain 9 Purge air
M 0.2 D E K B + Stroke L M 0.2 A + Stroke E 25, 28 H effective thread depth C 2-Rc 1/8 2 x 4-OA effective depth RA Y Q F 2 x 4-OB Depth of counter bore RB E J I 4-N through M 0.2 D W B + Stroke K L M 0.2 A + Stroke E (mm) Bore size (mm) Stroke range (mm) A B F H C D E Y OA I J K L M N OB Q RA W RB 10 to 40 M3 x 0.5 M4 x 0.7 69.5 61.5 6 6 29 9 38 5 8 20 10 3.5 6.5 39.5 7 5 4 10 to 60 M4
NBR JIS B 2401.P12 q Seal 10 x t1 Fluororesin NBR Fluororesin Nylon Fluororesin Fluororesin (Antistatic specifications) Nylon Fluororesin Nylon Fluororesin 101 x t2 98 x t5 w Gasket e Seal Note 3) 23 x t1 r Seal 10 x t1 t Seal 20 x t1 Note 1) The quantity used for 1 filter is 1 each for the following seals, gaskets and O-rings.
NBR JIS B 2401.P12 q Seal 10 x t1 Fluororesin NBR Fluororesin Nylon Fluororesin Fluororesin (Antistatic specifications) Nylon Fluororesin Nylon Fluororesin 101 x t2 98 x t5 w Gasket e Seal Note 3) 23 x t1 r Seal 10 x t1 t Seal 20 x t1 Note 1) The quantity used for 1 filter is 1 each for the following seals, gaskets and O-rings.
Metric size Inch size 100 200 205 300 400 M5 standard 3.2 1/8 standard 23 04 06 08 10 12 01 03 05 07 09 11 13 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 1/4 standard 4 6 8 10 12 3/8 standard 1/2 standard With One-touch fittings Use 1/8" tube.
Metric size Inch size 100 200 205 300 400 M5 standard 3.2 1/8 standard 23 04 06 08 10 12 01 03 05 07 09 11 13 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 1/4 standard 4 6 8 10 12 3/8 standard 1/2 standard With One-touch fittings Use 1/8" tube.
TI/ TIL 0.54 4 0.8 13 1/4 (8A) 3/8(10A) 1/2(15A) 1/4 : 0.42 3/8 : 0.40 1/2 : 0.49 VCB3 3 PA 0.80 5 0.5 19 3.0 1.4 7 0.2 33 PAX 2.1 10 0.1 50 0.35 3 3.0 8.4 PB 1/4 (8A) 3/8(10A) 1/2(15A) 3/4(20A) 1/4 : 0.58 3/8 : 0.55 1/2 : 0.62 3/4 : 0.78 0.60 4 1.3 14 0.85 5 0.7 20 VCB4 3.0 4 1.4 7 0.3 33 2.1 10 0.12 50 Note 1) Refer to model selection on page 17-2-24 regarding port size and orifice size
(mm) With auto switch B Without auto switch Stroke range (mm) A Bore size (mm) BP C OA Rc NPT G D E F G H I J K L M N O OB P Q RA RB T V Z B A 10 to 50 82 36 15.6 14 63 92 46 1/8 M5 x 0.8 15 20 77 10.5 38 M10 x 1.5 103 7 17 8 60 9 M8 x 1.25 1/4 53 16 4.2 1.6 16.5 19 depth 12 depth 10.5 75, 100 92 46 10 to 50 96.5 43.5 19.6 17.5 80 106.5 53.5 1/8 1/8 21 25 98 12.5 43 M16 x 2.0 132 6 22 10
Direct mount type End lock Standard 1 3 3 1 2 Double rod Air Cylinder Direct mount type 10-/1121-/221 3 3 1 2 CA2 Air Cylinder Standard 10113 1 2 CUJ Mini-free Mount Cylinder 10-/1121-/221 3 3 1 2 CDU Free Mount Cylinder 10-/1121-/221 2 3 1 2 CQS Compact Cylinder 10-/1121-/221 2 3 1 2 CQ2 10113 1 2 REC Sine Cylinder Note) 11-/1221-/221 3 1 2 CXSJ 3, 4 Dual Rod Cylinder Note) 10-/11-/1221
-X Technical Data 1501 A CY1S Series Construction CY1S/Bilateral piping type For 6 #8 For 6 For 10 23a 29a o !5 !1 @4 !2 !3 @1 !8 !7 !6 $4 !9 @0 @7 @2 #1 r q w e y t i u !5 !1 !4 #2 #0 !
M8 x 1.25 depth 11 M10 x 1.5 depth 15 M12 x 1.75 depth 15 EY 26 42 54 64 72 GX 10 8.5 9 11.5 11.5 GY 5 5.5 7 8 10 H 36 40 45 53 56 K 5.5 5.5 6 7 7 KA 10 12 14 18 18 Model MUB25 MUB32 MUB40 MUB50 MUB63 Standard stroke (mm) 5, 10 5, 10 5, 10, 15, 20 5, 10, 15, 20 5, 10, 15, 20 (mm) (mm) Rod End Female Thread P TN TF NY NX NS NE ND NC N MM Model S ZZ MM M6 x 1 depth 12 ZZ 74 77 85 102 106
Material Number Gasket 10 SS070M-80A-1 FKM Clip 10 SS070M-80A-2 Stainless steel 4-11-16 17 Series S070 Specific Product Precautions 1 Be sure to read before handling. Valve Mounting/Removal Screwing in M5/M3 Thread Caution Caution 1.
set unit Note 1) Accumulated pulse flow rate exchange value (Pulse width: 50 ms) Note 1) 0.1 l/pulse 0.5 l/pulse 1 l/pulse 2 l/pulse 5 l/pulse l/min, CFM x 10-2 l, ft3 x 10-2 l/min, CFM x 10-1 l, ft3 x 10-1 Display units Real-time flow rate Accumulated flow Note 1, 2) 0 to 9 l, 0 to 9 ft3 x 10-2 0 to 9 l, 0 to 9 ft3 x 10-1 Accumulated flow range Note 1) Power supply voltage Current consumption
D-M9W 10 2 pcs. D-M9WV D-M9AV 5 Note 2) 1 pc. 10 2 pcs. 5 Note 2) 1 pc. D-M9A 10 Note 2) 2 pcs. 5 1 pc. D-M9V 5 2 pcs. 5 1 pc. D-A9V 10 2 pcs. 5 1 pc. D-A9 10 2 pcs. 1 pc. 15 D-P3DWA 2 pcs. 15 Note 1) Confirm that it is possible to secure the minimum bending radius of 10 mm of the auto switch lead wire before use.
ZF Left Right 15 -60 -60 ZP 10 -40 -40 Air consumption ZCU -20 -20 5 S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H S 1 S 2 R U NL HL H S 1 S 2 R U NL HL H S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP