CU

2 Carbon steel 9 Steel ball 1 Magnetic material 10 Magnet A F D9 type (2) 11 Auto switch 1 NBR 12 Piston gasket 2 NBR 13 Piston seal 1 NBR 14 Rod seal 1 NBR 15 Gasket 3 Free-Mounting Cylinder with Air Cushion Series CU Dimensions 2-cushion needle 2-port 2-P through Q R E GB GA 4-NN MM D CB CA C K J JA E H A' A 2-P through KA B 4-T counterbore Width across flats L S + Stroke Z + Stroke (mm

Compact Guide Cylinder

R T XA H VA VB 3 U X PW 6 Section XX details XAH9 depth 6 S Q GC GA GB 2 x P PB XAH9 depth 6 2 x P (Plug) G J K b a PA + Stroke E FB FA e c d A + Stroke B + Stroke C + Stroke T-slot dimensions [mm] [mm] Bore size [mm] a b c d e Bore size [mm] f f 12 3.3 5.8 2.6 1.6 4.8 16 3.7 6.2 3 2.5 6.5 20 5.4 8.4 4.5 2.8 7.8 25 5.4 8.4 4.5 3 8.2 12 7 16 2.5 20 8.5 25 6 50 mm stroke or less Top-ported

CRQ2

Sizes 10, 15 TA 0.6 30 BU 2-M5 x 0.8 through (Opposite side 7.6 counter bore depth 4.2) B With double shaft DD W D H 2 10 2-M5 x 0.8 (port size) (US) M (UW) BD Q BC ab BA BB BA D (AU) Max.

VHK

(mm) M5 M5 4 4 Port size R Port size R 1 8 1 8 6 6 1 4 1 4 8 8 3 8 3 8 10 10 1 2 1 2 12 12 Flame Resistant Type (UL-94 Standard V-0 equivalent) 1(P): One-touch fitting 2(A): One-touch fitting 1(P): Male thread 2(A): Male thread 2(A) 2(A) Port size R Applicable tubing O.D. (mm) 1 8 1 4 3 8 1 2 1(P) 1(P) 4 6 8 10 12 Applicable tubing O.D.

Compact Cylinder with Lock Series CLQ

Series CLQ Dimensions/20, 25 Standard type (through hole/double end tapped): CLQB20/25 Extension locking LOCK M5 x 0.8 Front cylinder port VH Q 2 x 2-9 counter bore depth 7 H effective thread depth C 2-5.4 through M5 x 0.8 unlocking port 5.5 (unlocks when pressurized) U I 6.5 VV D M E M5 x 0.8 Rear cylinder port K M E S 3.2 2 x 2-M5 x 0.8 3.2 16 16 Dust cover (manual unlocking unit) W L

Vacuum Unit Series ZK2

type Exhaust type Symbol Symbol Note 1) Note 6) K N.C.

2.0

Pinch Valve Solenoid Type RoHS Power consumption Applicable tubing 2.0 W 2 Silicone PharMedBPT 1, Tygon 1 2 Built-in power saving circuit (Refer to page 2.) 2 Excludes 6 and 1/4" Size (O.D.) Metric 3, 4, 6 Inch 1/8", 5/32", 1/4" Compact 20 mm Valve width Valve type N.C. (Normally in clamping position) N.O.

Series 10-VQD1000 4 Port Direct Operated Poppet Solenoid Valve

Series 10-VQD1000 [Option] 4 Port Direct Operated Poppet Solenoid Valve How to Order Valve Clean series Valve option Nil Standard (2 W) V Vacuum (2 W) U For large flow (3.2 W) W For large flow, Vacuum (3.2 W) Energy saving type Rated voltage 5 24 VDC 6 12 VDC Body type 2 Body ported (Single unit) 3 Body ported (Manifold) 5 Base mounted 10 V Q D 1 1 5 1 U 5 L M5 Electrical entry

Clamp Cylinder Series CK1

9 @0 t q @2 w @3 e @4 @1 !5 !4 !6 y !7 !0 i u !8 MK CKQ CLKQ o CK1 !3 CLK2 !1 !2 @1 @4 Component Parts No.

Manifold Specifications

.: 6 VP4 U D U side D side 2 to 8 2 to 8 9 to 16 D-sub connector cable assembly Symbol VZS B Both sides Passage Porting specifications 4(A), 2(B) Side 5(R1), 3(R2) 1(P) Common Common Stations Symbol VFS 02 2 stations 1 D side VS4 16 stations 16 Max. 16 stations. VQ7 Refer to page 3-7-4 for wiring specifications.

VNC/VNH Series

Wiring 1) Insert cable gland (4), washer (5) and rubber seal (6) into cable (7) in order, and insert it into housing (2). 2) Loosen screws (11) on terminal (3). Insert lead wires (10) and tighten screws (11) again. Note 1) The tightening torque should be 0.5 Nm +/15%. Note 2) The applicable outside diameter of cable (7) is 6 to 8 mm.

CV/MVGQ

wire Connector 24 V Diagnostic indication (2-color indication) Grommet 3-wire (PNP) 3-wire (NPN) IC circuit 5 V, 12 V Grommet 12 V 2-wire Connector Relay, PLC Yes 24 V 3-wire (NPN) 5 V, 12 V Diagnostic indication (2-color indication) IC circuit 3-wire (PNP) Grommet 12 V 2-wire With diagnostic output (2-color indication) 4-wire (NPN) IC circuit 5 V, 12 V Lead wire length symbols: 0.5

Speed Controller with One-touch Fittings

2 w y r u e ASN !2 t AQ ASV AK VCHC ASR ASQ i q o !0 !1 i q o !0 !

Flow Sensor Series PFMV

(mm) Type Port size Model 4 M5 x 0.8 M-5AN-4 Barb fitting for nylon tube 6 M-5AN-6 Internal Construction Component Parts q w e r t y e w q Material No.

Micro Mist Separator Series AMD Model Series AMD can separate and Model AMD450 AMD550 AMD650 AMD850 AMD150 AMD250 AMD350 remove aerosol state oil mist in Rated flow (l/min (ANR))(1) 2000 3500 6000 12000 200 500 1000 compressed air and remove Port size

M Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G S 6 11/2 , 2 H 463.5 I 180 J 30 K 15 L 24 N 120 O 184 P 220 Q 110 R 18 460.5 AMD850 13 42 348 220 57.5 220 10 AMD850SAM, #7 4.6-12 Series AMD Precautions Dimensions: AMD801/901/800/900/1000 AMD801/901 Be sure to read before handling.

q"s

0.1 o -1 2 4 6 a 1 0 0.0 0 25 50 75 lnputsignal (%F.S.) 1 . 0 1 0 25 50 75 Inputsignal (%F.S.) 500 1000 1500 Flow rale (l/min (ANR)) :':i ::l Relief flow characterjslics supp y pressure: 0.7 Mpa Flow characteristics suppty pressure: 0.7 Moa Pressufe chafaCtgristics set oressue: 0 2 MHa 0.8 0-7 t'. I { 0 s l I l 6 l ; D.0 t' 6 l 0.6 0.5 o.4 0.3 6 ' ) !

AMF

R 88 S 3.2 Related poroducts 36 9 205 19 100 106 3 106 10 1 2 3 4 , AMF450 1 212 22 107 106 3 106 10 36 221 21 10 14 9 90 55 110 50 88 3.2 , , , 1 1 3 4 44 66 96 257 314 406 30 40 30 10 15 15 16 20 24 9 11 13 100 150 180 65 85 120 130 180 220 60 76 110 102 136 184 4.5 4.5 6 239 291 403 22 32 42 128 167 235 122 160 220 3 122 160 220 10 10 10 AMF550 AMF650 AMF850 1 2 1 2 1 2 1 AMF450SAME,

VQZ100/200/300

VZ (A) 2 (A) 2 VS 3 (R) 1 (P) 3 (R) 1 (P) r e w q r e w q N.O. N.O. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Component Parts Material Description Notes No. Aluminum die cast Body q Stainless steel Spool/Sleeve Metal seal w Aluminum/NBR Spool valve Rubber seal Resin Piston e Pilot valve r 2.10-7

ZPT/ZPX

6 Misc.

VXR21/22/23

# $ VXR215 VXR226 VXR227 VXR238 2 0 Material 2 0 2 0 . ' + . / . 01$ 2 0 VXR239 2 0 17-3-53 2 The VX series will be revised shortly. Series VXR21/22/23 Normally Closed (N.C.)