Fitting Type: T (Union Tee), Size Combination-A Side: 5A (Applicable Tubing Size 3/4" x 5/8", Flange 20A), Different Diameter-B Side: 5B (Applicable Tubing Size 1/2" x 3/8", Flange 20A)

Fitting Type: T (Union Tee), Size Combination-A Side: 5B (Applicable Tubing Size 1/2" x 3/8", Flange 20A), Different Diameter-B Side: 5A (Applicable Tubing Size 3/4" x 5/8", Flange 20A)

Fitting Type: U (Union), Size Combination-A Side: 5B (Applicable Tubing Size 1/2" x 3/8", Flange 20A), Different Diameter-B Side: 5A (Applicable Tubing Size 3/4" x 5/8", Flange 20A)

Fitting Type: L (Elbow), Size Combination: 5B (Tubing: 3/4" x 5/8"; Thread: 1/2"), Piping Type: M (Male), Thread: N (NPT)

Fitting Type: T (Union Tee), Size Combination-A Side: 5B (Applicable Tubing Size 1/2" x 3/8", Flange 20A)

Fitting Type: U (Union), Size Combination-A Side: 5A (Applicable Tubing Size 3/4" x 5/8", Flange 20A), Different Diameter-B Side: 5B (Applicable Tubing Size 1/2" x 3/8", Flange 20A)

Voltage: 5B (24VDC), 3 Port/5 Port: C (3 Port, Port #2 on Coil Side)

Voltage: 5B (24VDC), 3 Port/5 Port: B (5 Port, Port #2 on Coil Side)

Size: 5B (Tubing: 3/4" x 5/8", Piping: ø26.7 x ø20.5), Packaging: 2 (Packaging Equivalent to Class M3.5 w/PVDF Nut)

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Allowable load mass mv (kg) Maximum operating pressure Pv (MPa) Cushion Stroke Model Stroke (mm) 25 30 1 5 0.3 Model CYP15 CYP32 CYP15 CYP32 8-17-6 6 Clean Room Rodless Cylinder Series CYP 15, 32 How to Order MX CYP 15 Z73 200 MTS MY Number of auto switches Nil S n 2 pcs. 1 pc. n pcs.

Quick Exhaust Valve Series AQ 1

(Refer to pages 15-6-3 to 15-6-5 for details.) ASP ASN Model Applicable tubing O.D.

Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

4-J Depth JK Thread depth PC (from counterbore surface) 2-P 2-Counterbore dia.

Large blow and

48 4.5 56.5 29 21.6 Rc1/4 44 ZH30 40--X185 Without bracket Air pressure supply (P) port Thread size: Q 45 45 Fluid passage dia.: P R J K 2 x L H I O 4 x Sa Thread depth Sb G M N A D F Vacuum flow Dust bag When dust bag is mounted E T Suction air Suction air Discharge air B C C U Hose band V Note 1) (mm) A 158 B 70 C 50 D 20 E F 24.5 G 60.5 H 5 I 70 J 60 K 5.5 L 72 M 37 N 2 O 30 P Rc1/4 Q

VHS

0 q ! !2 o u i !8 !6 !5 SlA Installation !3 !1 VlA 1(P) 2(A) 1(P) 2(A) Warning 1 When exhaust piping is connected to 3(R) port,effective area should be larger than the specified value mentioned in the table below. If it is smaller, air leakage will occur due to back pressure. y q w !4 SlA !7 !4 3(R) VlA !

Soft Start-up Valve AV2000/3000/4000/5000

48 36 112 100 76 3/8 50.5 27.5 68.5 M5 x 0.8 Depth 5 24 28 2 43 48 36 132 76 3/8 27.5 85.5 16 70.5 3.5 M5 x 0.8 Depth 5 24 28 2 43 48 36 132 76 3/8 27.5 87.5 20.5 M6 x 1 Depth 6 32 42 3 57 52 47 127 98 115 1/2 62.5 37 80.5 M6 x 1 Depth 6 32 42 3 57 52 47 147 98 1/2 37 97.5 6 82.5 M6 x 1 Depth 6 32 42 3 57 52 47 147 98 1/2 37 99.5 10.5 06 10 M6 x 1 Depth 7.5 39 50 0 77

MGQ

2 !3 !4 !5 !6 !7 !8 !

MGC

2 !3 !4 !5 !6 !7 !8 !9 @0 @1 @2 Material Aluminum alloy Aluminum alloy Aluminum alloy Carbon steel Note Clear hard anodized Clear hard anodized Chromated No.

60

SUP. 3 1 2 3 1 2 3 1 2 E Padlock mounting position D C SUP J 2 2 x K A T IN OUT AA 3 L 2 x P1 (Port size) B V BB U Built-in silencer (Option) M (Width across flats) 3 N P2 (Port size) Q EXH Y Bracket (Option) R S X W Dimensions (mm) Standard specifications Model P1 P2 A B C D E F G H I J K L M 1/8, 1/4 1/4, 3/8 1/8 1/4 3/8 1/2 1/2 66.4 80.3 104.9 110.4 134.3 22.3 29.4 38.5 42 53 40 53 70

•

I '-1 'N . ,." " H1 H2 01 02 03 l1 M odel ~ T1 T2 ' ~ f . 9 4 ' 3 ~9 . 2~q .. ~ " 6 8" 41,-'1; " W }?'.." 48.7' 42.6, 10.9 46.4 2B,2 " . . '118:'7 ~7 .3 .70~ .2M .. Ii' .. , . t ~ .230 42.2 25.8 38.9 ' 39.5 33.9 44.7 28.2 35. 1 10.5 17 ~ 35 A SP330F-N01-07S 1/4" NPT1 /8 10-32UNF ASP330F-N01 -09$ 5/16" ~ 14.2 118 15.8 15 .2 :.g 1/2' 8 NP'W~ " ~ NE?'T, lta ".,I:SP'43oFi!

Electro-Pneumatic Proportional Valve Series VEF/VEP

99.7 VEX 21.5 SRH 28 SRP 25 13 50 SRF 122 3 x 1/4, 3/8 VCHR ITV Flow type: VEF2131 Flow type: VEF2141, VEF3141 Pressure type: VEP3141 IC 3 x 3/8, 1/2, 3/4 45 45 2 x 1/4, 3/8, 1/2 ITVX PVQ VEF VEP VEF VEP 129 Port 1 (P) VER 154.5 Port 1 (P) Port 2(A) Port 2 (A) Port 3 (R) P 95 120.5 Plug A VEA 65 P 36 35 51 35 VY1 9 53 12 R 64 64 VBA VBAT G1/2 Applicable cable O.D. 6 to 12 82 81 AP100 2 port