Clean Room Regulator/Fluoro Resin Type Series SRF30

1 2 SMC 4-5.5 41.7 Integral fittings/SRF30-S IN OUT 67.7 32.3 52 (112) Pilot port identification symbols and port types (marking) Symbol R N Port type Rc 1/8 NPT 1/8 12 R 75 52 64 1 2 SMC 4-5.5 41.7

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

(3.6Cv) 33 (1.8Cv) 28 (1.6Cv) PB 36 (2.0Cv) 75 (4.2Cv) 78 (4.3Cv) AEA Exhaust side effective area (mm) when P2 = 0.5MPa (72.5psi) 68 (3.8Cv) 38 (2.1Cv) 69 (3.8Cv) BEB Dimensions (mm) 1in=25.4mm SMC 64 181 2 B SMC D 68.5 P 1 X 12 5 R1 3 R2 PE T A 4 41 103 282 40 Base Mounted Type Series VQ5000 Flow Characteristics Conditions Upstream pressure: 0.7MPa ARBQ5000-00-A (PA) ARBQ5000-00-B (PB)

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

(Initial value) Note 3) Value for high pressure type (1.5W) specifications Note 4) Value for low power consumption (0.5W) specifications 64 Series VQ1000/2000 VQ1000/Flat Cable Kit with Terminal Block Stations VV5Q11G0-(D) Broken lines and dimensions inside ( ) indicate type [-D] (with DIN rail mounting bracket).

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

95 110 Fd 34 70 114 Fc 17 26 41 52 70 83 G 40 39 63 68 69 96 H P.C.D L1 6-4.4 6-6.6 8-8.4 L2 XMA-16 XMA-25 XMA-40 XMA-50 XMA-63 XMA-80 40 50 65 70 88 90 P.C.D 27 P.C.D 58.7 P.C.D 92.1 XYA/In-line type C D G Fd C (K flange) B H 45 A E Fn (KF flange) (mm) Model A 79.5 106 119 149 178 B 48 66 79 100 117 C 1 2 2 3 3 D 23.5 38 53 61 80 E 40 55 75 87 114 Fn 95 110 Fd 26 41 52 70 83 G 64

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

PE port 3/8 NPTF P(SUP) port M5 x 0.8 External pilot port 21 18 (Only external pilot type (R)) 44.5 1/4 NPTF 11 50 R(EXH) port L type plug connector (L) DIN connector (Y) 92 300 (Lead wire length) 96 MAX.10 88.5 92.5 Indicator light Pg.7 Applicable cord O.D. 3.5 to 7 64 Cover diameter 1.5 Cross sectional area 0.23mm2 93.5 R P 86 3 1 R P 3 1 M type plug connector (M) 98.5 (Lead wire lengh)

LEFS16, 25, 32, 40 Series LEFS Electric Actuator/Slider Type Ball Screw Drive Step Motor (Servo/24 VDC) Servo Motor (24 VDC) ®

Refer to page 44 (For LECP6/LECA6), page 57 (For LECP1) or page 64 (For LECPA) if I/O cable is required. 2 When Pulse input type is selected for controller/driver types, pulse input usable only with differential. Only 1.5 m cables usable with open collector.

High Purity Chemical Valve

T) (mm) W Model LVC20 LVC30 LVC40 LVC50 LVC60 Dimensions 64 (mm) S T Model LVC3m LVC4m LVC5m 90 24 49.5 110.5 29 54.5 147 34.5 60.5 156 Suck back (Unit type) Suck back (Single type) 50 3.5 4.5 37 30 44 37 30 44 4 x 3.5 20 (Max. 11.5) (Max. 11.5) M5 x 0.8 M5 x 0.8 M5 x 0.8 51 51 45 12.5 45 30 SMC SMC SMC A B A B 12.5 61 4 4 30 (110) (78) 466 Series LVC Manifolds Manifold Specifications

KDM

Silao-Trejo K.M. 2.5 S/N, Predio San Jose del Duranzo C.P. 36100, Silao, Gto., Mexico TEL: 472-72-2-55-00 FAX: 472-72-2-59-44/2-59-46 FRANCE SMC Pneumatique S.A. 1 Boulevard de Strasbourg, Parc Gustave Eiffel, Bussy Saint Georges, F-77600 Marne La Vallee Cedex 3 France TEL: 01-64-76-10-00 FAX: 01-64-76-10-10 CHILE SMC Pneumatics (Chile) S.A. Av. La Montaa 1,115 km. 16,5 P.

LZ-OM003xx

the protection ground If required SMC can also supply the motor output terminal cable by the The P-clip and the motor output terminal cable to be supplied by the (44) 1908-56 38 88 Hungary (36) 1-371 1343 Turkey (90) 212 221 15 12 Finland (358) 9-859 580 Portugal (351) 22 610 89 22 Please refer to the manual of the directional control equipment Motor output terminal cable France (33) 1-64

LG1H

Note 3) Not compatible with 64-bit Windows XP and 64-bit Windows Vista. USB cable (3 m) for setup software LEC MR J3USB Battery LEC MR J3BAT 105 Series LECSA/LECSB Specific Product Precautions 1 Be sure to read before handling. Refer to back cover for Safety Instructions and the Operation Manual for Electric Actuator Precautions.

LJ1H

Refer to page 100 for part numbers. 63 64 Non-standard Motor Series LJ1H30 High Rigidity Direct Acting Guide Motor Output Slide Screw 200W 30mm/40mm lead Horizontal Mount How to Order Stroke 3 LJ1H30 F W X10 SE 1 G Cable entry direction Top entry Cable entry direction Power supply voltage Switch Motor specification Left entry Axial Right Left Top Bottom F R L T B None 100/115VAC (50/60Hz)

LJ1H

Note 3) Not compatible with 64-bit Windows XP and 64-bit Windows Vista. USB cable (3 m) for setup software LEC MR J3USB Battery LEC MR J3BAT 105 Series LECSA/LECSB Specific Product Precautions 1 Be sure to read before handling. Refer to back cover for Safety Instructions and the Operation Manual for Electric Actuator Precautions.

High Purity Chemical Valve/Air Operated/Compact Type Series LVD LVC LVA Space saving, compact type is available. Space saving, compact type is available. Space saving, compact type is available. LVH LVD Compact type is introduced as a new series to comple

Dimensions PB S Model LVD2m-Tm LVD3m-Tm LVD4m-Tm LVD5m-Tm PA 12.5 26 A B 26 29.5 Dimensions (mm) A B C D E F G H J K L M N P Q T U Model LVD2m-Tm LVD3m-Tm LVD4m-Tm LVD5m-Tm 30 30 61 56 14.5 104 35 13 4 20 44 7 30 6 31.5 17 M5 x 0.8 35 35 79.5 62 17.5 136 42.5 17.5 6 22 50 7 37 6 36 21 M5 x 0.8 35 35 82 62 20 137 45 17.5 6 22 50 7 39 6 36 21 M5 x 0.8 45 45 105.5 76 25 169.5 65 17.5 8 32 64

Paddle Style Flow Switch Series IF3 For details about certified products conforming to international standards, visit us at www.smcworld.com.

Silao-Trejo K.M. 2.5 S/N, Predio San Jose del Duranzo C.P. 36100, Silao, Gto., Mexico TEL: 472-72-2-55-00 FAX: 472-72-2-59-44/2-59-46 FRANCE SMC Pneumatique S.A. 1 Boulevard de Strasbourg, Parc Gustave Eiffel, Bussy Saint Georges, F-77600 Marne La Vallee Cedex 3 France TEL: 01-64-76-10-00 FAX: 01-64-76-10-10 CHILE SMC Pneumatics (Chile) S.A. Av. La Montaa 1,115 km. 16,5 P.

0.5

(144) 20.5 (40) 64 (40) (104) 20.5 153 113.4 (195) (155) With adjustable louver IZF21-m-mmWm IZF31-m-mmWm (60) (144) 14 (40) 127 (60) (104) 14 (40) 89 127 89 (195) (155) With filter IZF21-m-mmmU IZF31-m-mmmU (144) (45) 134 5 (40) (45) (104) 5 (40) 95.5 126 87 (195) (155) 18 IZF21/31 Series Dimensions Power supply cable IZS41-CP Part no.

48

x OB counterbore depth OL 4 x MM depth ML L 2 x P (Plug) (OL) 4 x NN through PW X U H VA PE T R 2 x P (Plug) 2 x P D 2 x P (Plug) GB GA S Q JC J K PD C + Stroke FB FA G A + Stroke [mm] Bore size Standard stroke A C D FA FB G GA GB H J JC K L MM ML NN 12 (10 x 2) 10, 20, 30, 50, 100 33 24.5 6 6.5 2 17 11 5.5 58 8.5 1.5 8.5 11 M3 x 0.5 7.5 M2.5 x 0.45 16 (12 x 2) 33 24.5 6 6.5 2 18 11 5.5 64

KN Series Nozzles for Blowing

Weight (g) KNK-10-400 KNK-10-600 KNK-12-400 KNK-12-600 KNK-16-400 KNK-16-600 KNK-20-400 KNK-20-600 44 44 44 44 64 64 77 77 17 17 17 17 17 17 17 17 41.7 41.7 41.2 41.2 41.8 41.8 43.8 43.8 17 17 19 19 24 24 27 27 17 17 17 17 17 17 17 17 10 10 12 12 16 16 20 20 4 6 4 6 4 6 4 6 35 D 8.5 H2 H1 L1 M Pivoting nozzle with male thread/KNK (mm) Model Nozzle size D Connection thread L1 A Width across

KRM

Silao-Trejo K.M. 2.5 S/N, Predio San Jose del Duranzo C.P. 36100, Silao, Gto., Mexico TEL: 472-72-2-55-00 FAX: 472-72-2-59-44/2-59-46 FRANCE SMC Pneumatique S.A. 1 Boulevard de Strasbourg, Parc Gustave Eiffel, Bussy Saint Georges, F-77600 Marne La Vallee Cedex 3 France TEL: 01-64-76-10-00 FAX: 01-64-76-10-10 CHILE SMC Pneumatics (Chile) S.A. Av. La Montaa 1,115 km. 16,5 P.

KT10

The AP 64 is a unique design with only one moving part in the gas stream, an O-ring. It is a springless design, free of springs and poppets. [Vacuum generator] A venturi device that creates vacuum by flowing gas through a nozzle. The AP 71 and 72 are module devices which combine a supply valve and check valve with the venturi.

Series KV2 Fittings

33.4 33.4 33.4 44.1 44.1 23.4 27.4 23.4 27.4 29.4 33.4 26.6 29.6 31.6 35.6 31.5 33.5 37.5 40.7 37.8 40.8 44.1 45.5 48.7 25.9 28.2 25.9 28.2 29.9 31.9 31.5 32.8 34.5 36.5 36.6 38.3 40.3 42.9 45.0 46.0 48.8 53.7 56.3 16 16 17 17 17 17 21 21 21 21 22 22 22 22 25 25 25 33 33 1.6 1.6 3.5 3.5 3.5 3.5 5.4 5.4 5.4 5.4 8.5 8.5 8.5 8.5 9.8 9.8 9.8 12.8 12.8 13 20 13 20 34 65 30 28 37 63 32 41 65 70 64