High Power Cylinder:

A 1-B 1-C 2-A 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 2-B CE2 6 1/8, 1/4 1.5 500 0 1,000 2,000 3,000 ML2B Max. speed Vmax (mm/s) 6 1/4, 3/8 3 1000 Graph 3:25 ML1C 10 1/4, 3/8 20 (1/4) 4.5 1500 20 10 1/4, 3/8 REA Composed effective area So (mm2) Composed effective

VK300

Port size (A port) Rated voltage Option M5 M5 x 0.8 01 Rc 1 8 1 2 3 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz 110 VAC, 50/60 Hz 220 VAC, 50/60 Hz Nil None With bracket (Not assembled) P, R port: M5 4 5 6 24 VDC 12 VDC F Thread type 7 240 VAC, 50/60 Hz 9 Other Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800

MHL2

50 70 Note 1) J dimension is at fully closed.

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

, 63 CY1S, CY1L: 6 to 40 12, 16, 20 25, 32, 40 50, 63, 80 100 12, 16, 20 25, 32, 40 50, 63, 80 100 20, 25 32, 40 50, 63 32, 40 50, 63 80, 100 6, 10 16, 20 25, 32 10, 16 20 25, 32 12, 16 20, 25 32, 40 6, 10 15, 20 25, 32 6, 10 16 20, 25 32, 45 6, 10 16 20, 25, 32 40, 50 10, 15 25 12, 16 20, 25 Bore sizes (mm) 5 to 50mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50mm/s Piston speed Shock absorber (optional

Series 12-CY3B Magnetic rodless cylinder ø15, ø20, ø25, ø32, ø40

M20 x 1.5 M26 x 1.5 M26 x 1.5 M32 x 2 D 16.6 21.6 26.4 33.6 41.6 MM M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 B 35 36 46 60 70 N 11 18 18.5 20 26 ZZ 103 132 137 156 182 NA 17 24 30 36 46 R 28 34 40 50 S 83 106 111 124 150 W 35 50 50 50 60 X 19 25 30 40 40 Model 12-CY3B15 12-CY3B20 12-CY3B25 12-CY3B32 12-CY3B40 P (Piping port) Model Mounting nuts (2 pcs.) are shipped together.

99

Specifications FGH200 FGH300 Model FGH100 Number of built-in elements (element length) (mm) 1(125) 1(250) 1(500) Operating pressure MAX. 1 MPa MAX. 80C (Not above the boiling point) Operating temperature Each kind of fluid (See the table of applicable fluids on pages 63 and 64) Applicable fluid Port size (Rc) 3/8, 1/2, 3/4, 1 Housing Stainless steel 316 (Electrolytic polishing) Material Seals

ZCUK

(mm) 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 Pad type 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 Pressure gauge position Thread dia.

Series LX Acceleration Time Guide

F A A Lr Lr = 200mm L X S 400 8 60 Table displacement (m) LXSH-150 Table displacement (m) Table displacement (m) 350 7 LXSH-150 LXSH-150 50 300 6 LXSH-125 LXSH-125 250 5 40 LXSH-125 LXSH-100 LXSH-100 200 4 30 LXSH-75 LXSH-100 LXSH-75 3 150 20 LXSH-50 LXSH-75 2 100 LXSH-50 LXSH-50 10 1 50 1 2 3 4 5 6 8 9 7 0 0 0 1 2 3 4 5 6 8 9 10 10 10 7 1 2 3 4 5 6 8 9 7 Weight (kg) Weight (kg) Weight (kg

Speed Controller with Indicator

Metal parts material Applicable tubing material Metric size Inch size Seal method Body size Port size 2 3.2 4 6 8 10 12 16 1/8" 5/32" 1/4" 5/16" 3/8" 1/2" Note) Gasket seal 1 M5 x 0.8 Note) 10-32UNF Note) 1/8 2 Note) Note) 1/4 Sealant R 3 1/4 NPT Brass/ Steel wire 3/8 Nylon (Series T,TIA) Note) Stainless steel 4 1/2 Note) Soft nylon (Series TS,TISA) 1/8 2 Note) 1/4 Polyurethane (Series

VXF

Rated voltage Electrical entry 2 200 VAC 50/60 Hz 1 100 VAC 50/60 Hz G Grommet C Conduit 3 110 VAC 50/60 Hz D DIN terminal 4 220 VAC 50/60 Hz T Conduit terminal 5 24 VDC Refer to the table (1) given below for availability. 6 12 VDC 7 240 VAC 50/60 Hz 8 48 VAC 50/60 Hz 9 Other (Contact us for inquiry) Refer to the table (1) given below for availability.

Copper-free Actuators

Rotary Actuator Size (Torque) Name of CAD file Series Application Page in Vol.3 Standard Copperfree 1 3 7 10 20 30 50 70 100 200 Series/Variation Rotary table Series MSU Standard MSU 1.7-1 SMSUl MDSU With auto switch Rotary table Series MSQ MSQ Standard 1.6-1 SMSQl MSQ With auto switch MSQR With shock absorber 5.5-6 World Wide QS\E Support...

Modular Type Filter Regulator Series AW

38.5 42.5 42.5 V 30 31 35.5 37 U 2.3 2.3 2.3 2.3 T 55 53 70 70 S 15.4 8 10.5 10.5 Q 5.4 6.5 8.5 8.5 P 44 46 54 56 N 34 40 54 54 M 30 41 50 50 K 5 3.5 1.5 1.2 J 27 30.5 38.5 38.5 H 63 66 76 76 E 40 57 73 73 D 52 59 75 75 C 73 86 92 93 B 160 201 239 242 A 40 53 70 75 G 40 55 80 80 AW20K AW30K AW40K AW40K-06 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 Optional specification With barb fitting With drain

XL-OMY0003

XLH-25 XLH-40 XLH-50 AC90240V XLA25-60S-1 XLA25-60S-1 1 1 H4 AC100V 200/40 200/50 / AC200V 800/40 800/50 XLA25-60S-1 XLA25-60S-2 XLA25-60S-2 1 1 1 H5 AC100V 200/40 400/70 400/80 / AC200V 800/40 1600/80 1600/80 1 216 PTC 200V PTC 200 150 100V PTC 0 5 10 15 20 25 30 30 ( 7 XL-OMY0003 . <> 1 Ass 'y () ( ) < SUS304> 7 (SUS304) () () 3 < SUS316L> 6 (SUS316L) <

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported 1

T NPTF Coil rated Electrical entry 3 8 G F 1 100 VAC, 50/60 Hz Grommet Nil T Conduit terminal Standard 4 1 2 Option 2 200 VAC, 50/60 Hz Port size Manual override P None Nil Option WTB Dripproof conduit terminal 3 110 VAC, 50/60 Hz 1 4 Rc 3 8 Rc 1 2 Rc 3 4 Rc 02 03 04 06 TZ Conduit terminal w/ surge voltage suppressor 4 220 VAC, 50/60 Hz How to Calculate the Flow Rate 5 24 VDC 9 Other TL

44

KFG2L0425-01 KFG2L0425-02 KFG2L0403-01 KFG2L0403-02 KFG2L0604-01 KFG2L0604-02 KFG2L0806-01 KFG2L0806-02 KFG2L0806-03 KFG2L1075-02 KFG2L1075-03 KFG2L1075-04 KFG2L1008-02 KFG2L1008-03 KFG2L1008-04 KFG2L1209-02 KFG2L1209-03 KFG2L1209-04 KFG2L1210-02 KFG2L1210-03 KFG2L1210-04 KFG2L1613-03 KFG2L1613-04 1/8 1/4 1/8 1/4 1/8 1/4 1/8 1/4 3/8 1/4 3/8 1/2 1/4 3/8 1/2 1/4 3/8 1/2 1/4 3/8 1/2 3/8 1/2

AS-FG/ASD-FG

4 20, 25, 32, 40 AS221FG-02 AS331FG-02 R(PT) 1/4 40, 50, 63 AS321FG-02 AS331FG-03 R(PT) 3/8 40, 50, 63 AS321FG-03 AS431FG-04 R(PT) 1/2 63, 80, 100 AS421FG-04 AS131FG-U10/32 10-32UNF 6, 10, 16, 20 AS121FG-U10/32 AS231FG-N01 NPT1/8 20, 25, 32 AS221FG-N01 Elbow type AS231FG-N02 NPT1/4 20, 25, 32, 40 AS221FG-N02 AS331FG-N02 NPT1/4 40, 50, 63 AS321FG-N02 AS331FG-N03 NPT3/8 40, 50, 63 AS321FG-N03

7.4

Refer to back page 50 for Safety Instructions and pages 3 to 9 for 3/4/5 Port Solenoid Valve Precautions. One-touch Fittings Internal Wiring Specifications Caution SJ Tube attachment/detachment for One-touch fittings 1) Tube attachment 1. Take a tube having no flaws on its periphery and cut it off at a right angle. When cutting the tube, use tube cutters TK-1, 2 or 3.

CEU1

No.CE*-OMP0002-A 3 CEU1 SMC FG 0~50 35~85%RH 3 CEU1CE10.1mm 3 CE1-R** CE1** 3 CEU1** FG 3 DIN 3 2m/s 3 (100ms) 2 2 2 2-1 1 1 1 CEU1 4 2 2 2 2-2 2 2 2 3 3 3 3-1 1 1 1 : : 1 1 (mm) (mm) 25 25 25 25 50 50 50 50 75 75 75 75 100 100 100 100 125 125 125 125 150 150 150 150 175 175 175 175 200 200 200 200 250 250 250 250 300 300 300 300 400 400 400 400 500 500 500 500 12 12 12 12

PSxx-OMM0006CN

[F99] <> [F99] ON, 5 [oFF]() [F99] -48No.PS-OMM0006CN-E / ()() 1 "Hi" 1 1 "Lo" 1 1 () 7F.S.(3.5F.S.)0 (1F.S.) 1 [LoC]1 ( [LoC]) < -> 5 LoCUnL () / -49No.PS-OMM0006CN-E < -> 5 [UnL] [LoC] 5 [LoC] [UnL] 51/ [UnL], [FAL] 3[LoC] -50No.PS-OMM0006CN-E [000] <> (50)(50) [UnL] 5 [000] / 1 / ( ) 1 (/30 ) -51No.PS-OMM0006CN-E , (1015 ) <> 5 UnLLoC 5 5 (30) 5

Power Valve: Economy Valve Series VEX5

VEX5511-062EZ-BG Body size 5, Select, External pilot solenoid Port size 3/4 200 VAC, Grommet terminal, with light/surge voltage suppressor OptionBracket, with pressure gauge 5 3 4 200 VAC 50/60 Hz 1 1 1 110 VAC 50/60 Hz 4 7 220 VAC 50/60 Hz 24 VDC 12 VDC 11 4 11 4 5 6 11 2 9 2 2 7 240 VAC 50/60 Hz Other 9 Option Thread type Nil F N T Rc G(1) NPT NPTF Note 1) Not conforming to ISO1179-1.