Air Slide Table Series MXS

(N) EPDM seal Bore size (mm) Rod size (mm) Piston area (mm2) Operating direction Operating pressure (MPa) For clean room specifications, refer to Pneumatic Clean Series catalog. 0.7 0.6 0.5 0.4 0.3 0.2 40 34 29 23 17 11 OUT IN 57 6 3 29 25 21 17 13 8 42 Standard Stroke 71 61 51 40 30 20 OUT IN 101 8 4 53 45 38 30 23 15 75 Model Standard stroke (mm) 158 136 113 90 68 45 OUT IN 226 12 6 10,

7.5

(Value in the initial state) Vibration resistance: No malfunction occurred in one sweep test between 45 and 2000Hz. Test was performed to axis and right angle directions of the main valve when pilot signal is ON and OFF.

Smooth Cylinder Series CQ2Y ø32, ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the anti-lateral load type of Series CQ2  S .

, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Replacement Parts: Seal Kits Theoretical Output Table OUT IN Unit: N Bore size (mm) Contents Kit No.

Rubber seal 5 Port Solenoid Valve Series SYJ7000

(Value in the initial state) Vibration resistance: No malfunction occurred in one sweep test between 45 and 2000 Hz. Test was performed to axis and right angle directions of the main valve and armature when pilot signal is ON and OFF.

Series SYJ700 Rubber seal 3 Port Pilot Solenoid Valve

(Value in the initial state) Vibration resistance: No malfunction occurred in one sweep test between 45 and 2000 Hz. Test was performed to axis and right angle directions of the main valve and armature when pilot signal is ON and OFF.

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Auto switches are not mounted, but rather packaged together with the cylinder for shipment. 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 12, 16 20 25 5, 10, 15, 20, 25, 30 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 32, 40 Manufacturing intermediate strokes Intermediate strokes can be manufactured in 1mm increments by installing spacers in a standard stroke cylinder.

Solenoid Valve (with M Connector) Conforming to ISO 15407-1 Series EVS1-01, 1-02

44 M12 connector 20 (12, 14 port) 10.5 (2, 4 port) 85.5 72.5 10.5 PE port 29 14 SMC M5-2 ports 12, 14 port 1/8, 1/4-2 ports 2, 4 port 1/8, 1/4-2 ports 3, 5 port 21 21 1/8, 1/4 1 port EVS1-01-F G-D-M0 H J I EVS1-01-FG-D-M0 151 166.5 75.5 75.5 27.5 (14 port) 27.5 (12 port) 27.5 (14 port) 27.5 (12 port) 10.5 (4 port) 10.5 (2 port) 10.5 (4 port) 10.5 (2 port) 14 12 2 4 12 14 4 2 12 12 26 35 45

Compact Electric Actuator Series LG1

(They can also be validated by parameters.) 6) A sequence should be implemented to turn ON the RDY relay after confirming that there is no trouble with the servo (ALM signal is ON). 13 Series LG1H Nonstandard Motors / Yaskawa Electric Corporation Drivers Dimensions 45 2-6 149 160 6 50 55 130 Summary of input/output signals (connector CN-1/F) Pin No. 1 2 3 4 5 6 7 8 10 13 Pin No. 14 15 16

One-touch Fittings Series KQ2

Universal male elbow allows thread connection by using a socket wrench for confined space. 45 male elbow Extended male elbow The most appropriate use is when the elbow extends over a standard elbow for ease of connection/ disconnection of tubing. P. 41 KQ2K used in applications where a 45 elbow or male connector stresses the tubing.

Electro-Pneumatic Valve NVEP/NVEF Series

UJ I 2-Forled \bBion DIMENSIONS A B c o E F G H J K M P R s T 1.57 (40) 2.52 (64) 2.20 (56) 1.77 (45) 4.80 (1221 1.97 {50} 0.98 (25) 1 . 1 0 (28) 0.51 (13) 4.45 (113) ?

Digital Flow Switches Series PF2A

l/min, CFM x 10-2 l/min, CFM x 10-1 Real-time flow rate Display units l, ft3 x 10-1 Accumulated flow Accumulated flow range Note 4) 0 to 9 l Linearity Note 5) 5% F.S. or less Repeatability Note 5) 1% F.S. or less 1% F.S. or less (15 to 35C, based on 25C) 2% F.S. or less (0 to 50C, based on 25C) Temperature characteristics Current consumption (No load) 50 mA or less 60 mA or less Weight 45

Heavy Duty Stopper Cylinder Series RSH/RS1H

45 D 32 40 50 E 64 77 98 FT 20 25 25 O A 221 243.5 299.5 B 93 99 128 CD 20 20 25 L 45 54 56 N 9 11 13 QA 10 12.5 12.5 QB 7 8.5 10 GB 16 24 35 Stroke 30 30 40 Bore size (mm) 50 63 80 14 depth 5 18 depth 6 20 depth 6 P (Piping port) TN NPT 1/8 NPT 1/4 NPT 1/4 R 40 47 54 S 21 24.5 31 T 2 3.5 3 U 5.5 6.4 6.7 V 15.5 16 19.4 W 72 87.5 109 WB 32 38.5 49 X 5 5 6 Y 10 10 12.5 Stroke 30 30 40 Bore

REFRIGERATION AIR DRYERS, AIR COOLING SYSTEM, Series PDE

[F/C] +100 (+115) / +37.8 (+45) Nominal inlet air pressure [psig / bar] 34 / 7 Max. inlet air pressure [psig / bar] 232 / 16 Exit pressure drop p [psig / bar] 2.9 / 0.2 Inlet outlet connections NPT-F 1/2 3/4 1 Type of refrigerant HFA 134.a Refrigerant loading [oz / gr] 7.1 / 200 9.7 / 7.1 / 11.5 / 325 275 200 Nominal electric absorption [A / W] 2.2 / 170 2.7 / 210 3.3 / 250 4.3 / 330 5.9

3 Position Cylinder Series RZQ

size) FA H effective thread depth C Q FB G I D M K E Z a a L B + Full stroke M K A + Full stroke J E 4-O1 effective thread depth RB RA W 4-O1 T Section a-a Standard type (Through hole type)/RZQB 2-RR 50, 63 Flat washer (Included) 4-HR 2-RR Flat washer (Included) b 2-N 4-O 4-N b Section b-b (mm) Bore size (mm) A B C D E FA FB G H I J K L M N O1 O P Q RA RB RR RH T W Z 100.5 82.5 14 22.4 45

Swivels

Pressure 50 45 40 3/8" 45 40 35 40 35 Pressure Drop (psid) 30 1" 3/4" 35 Torque (in-lbs) 30 25 30 1" 1/2" 25 1/4" 1/4" RPM 25 20 1/2" 3/8" 20 3/4" 20 15 3/4" 15 15 1/2" 3/8" 10 1" 10 10 2" 1/4" 5 5 5 1-1/2" 0 0 0 0 2000 1000 3000 4000 5000 1000 0 2000 3000 4000 5000 0 10 20 30 40 50 60 70 80 90 Pressure (PSI) Pressure (PSI) Flow (USGPM) Quick Coupling Division 8145 Lewis Road Minneapolis

Series VC, Direct Operated, 2 Port Solenoid Valve for Water, Series VCW

36.5 13.5 15 32 25 23 M5 24 59 46 57 60 54.5 48.5 101 57 68 1/2 22 45 89 41 11 17 36 22.5 23 M5 26 64.5 48 62.5 62 60 50.5 103 62.5 70 1/4, 3/8 VCW41 30 50 93.5 41 13.5 17 36 25 23 M5 26 66.5 48 64.5 62 62 50.5 103 64.5 70 1/2 35 60 101 41 17.5 17 36 30 28.2 M5 26 70 48 68 62 65.5 50.5 103 68 70 3/4 4 Direct Operated 2Port for Water Series VCW Dimensions (N.O.)

VDW Series, Compact Direct Operated 2/3 Port Solenoid Valve for Water and Air

VDW21 22 20 Lead wire l approx. 300 Lead wire l approx. 300 21 27 20 27 Rectifying device AC type 20 27 Rectifying device 14 2 3.2 23.5 20 AC type 20.5 17 54 48 5 11 1 1 6 8 5 M5, 1/8 M5 1 (IN) port 1 (IN) port M5, 1/8 M5 2 (OUT) port 2 (OUT) port 15 2-M2.5 x 0.45 Thread depth 3.5 2-M3 x 0.5 Thread depth 5 VDW31 36 (27.6) Lead wire l approx. 300 SMC SMC 30 40 1 1 Rectifying device AC type 45

Series VC, Series VCL, Direct Operated 2 Port Solenoid Valve for Oil

(with oil pressure) Valve leakage cm3/min Unrestricted Mounting position 24VDC, 12VDC, 100VAC, 110VAC, 200VAC, 220VAC, 230VAC (50/60Hz) 100VAC, 200VAC, 220VAC, 230VAC (50/60Hz) Rated voltage 10% of rated voltage Allowable voltage fluctuation Class B Class H Coil insulation type VCL20: 6W, VCL30: 8W, VCL40: 11.5W DC Power consumption Note 2) Inrush VCL20: 22/19VA, VCL30: 36/30VA, VCL40: 45

IC

RUN 4 3 2 1 CH kPa 4 3 2 1 SW D-IN RUN UP SET P-ON READ DOWN STOP 105.5 M5 x 0.8 x 5 (Sensor pressure port) External sensor type 123 100.5 70 M3 x 0.5 x 9.5 48 6 (Sensor breathing port) PRESSURE OUT CONTOROLLER 45 RUN 4 3 2 1 CH kPa 4 3 2 1 SW D-IN RUN UP SET P-ON READ DOWN STOP Option Panel mount adapter Panel fitting dimensions 65 or more 45 +0.5 +0.2 2 x M3 x 8 47.4 55 12 62 15 65 or

LZ-OM003xx

F G H J Trunnion m ounting torque L[]ZB[]3L:13 15Nm /L[]ZB[]5L:20 22Nm tube as in drawing below. 0. 025 0. 061 0. 025 0. 061 Caution Trunnion pin Auto switch mount range 45 Mounting trunnion 44 Mounting foot D o Do not install the cylinder only by mounting it to 17 12.5 15 17.5 11 14 L[]ZB[]3 50 34 41 20 44.5 Model no. A C D E L[]ZB[]5 82 52 66 36 47 Model no.