Series VQ4000 Base Mounted Plug-in/Plug Lead Single Unit For details about certified products conforming to international standards, visit us at www.smcworld.com.

VQ4 Release valve SOL.A 1A () (+) 1A SOL.B 1B (+) () 1 station 1A COM 2A 3A 4A 5A 6A 7A 8A 9A 10A VQ5 1B 1B 2B 3B 4B 5B 6B 7B 8B 9B 10B 1B 1A 2B 2A 3B 3A 4B 4A 5B 5A 6B 6A 7B 7A 8B 8A 9B 9A Pressure switch SOL.A 2A () (+) 2A SOL.B 2B (+) () 2 stations 1.

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

M3 3B = M3E/M3E max = 1.8/10 = 0.18 L2 M3E m x g FE From above, n = 1 + 2a + 2b + 3A + 3B = 0.25 + 0.105 + 0.084 + 0.225 + 0.18 = 0.844 From n = 0.844 1, it is applicable. 8-16-10 10 MX MTS MY CY MG CX D-X 20Data 8-16-11 11 Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F 10, 15, 25 How to Order CY1F R 10 300 F9BW Number of auto switches Magnetically coupled rodless

Low Profile Guide Type

M3 3B = M3E/M3E max = 1.8/10 = 0.18 L2 M3E m x g FE From above, n = 1 + 2a + 2b + 3A + 3B = 0.25 + 0.105 + 0.084 + 0.225 + 0.18 = 0.844 From n = 0.844 1, it is applicable. 1550 Magnetically Coupled Rodless Cylinder: Low Profile Guide Type 10, 15, 25 CY1F Series How to Order CY1F R 10 300 M9BW Made to Order Refer to page 1552 for details.

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

MSUA7-180 P402060-3B MSUA2090 P402080-3A MSUA20-180 P402080-3B Note 1) Note that the rotation angle should not be changed even though the rotary unit has been changed. For maintenance, order units with a part number suitable for the model being used.

Refrigerated Air dryer Series IDU/IDF

flange 16 to 18 38000 IDF190D 32000 190 4B flange 50 IDF240D 43000 240 Medium Large 13 to 15 75 IDF75C 10500 12400 R22 R 2 40C Water cooled 20 2 1/2B flange IDF120D 23000 120 25000 IDF150D 30 150 3B flange R407C 40C 16 to 18 32000 IDF190D 38000 190 4B flange 6B flange 43000 IDF240D 50 240 35C R22 54000 IDF370B 65000 370 With motor operated auto drain.

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

M3 3B = M3E/M3E max = 1.8/10 = 0.18 L2 M3E m x g FE From above, n = 1 + 2a + 2b + 3A + 3B = 0.25 + 0.105 + 0.084 + 0.225 + 0.18 = 0.844 From n = 0.844 1, it is applicable. 8-16-10 10 MX MTS MY CY MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX D-X 20Data 8-

Rodless Cylinder for Vacuum Series CYV ø15, ø32

. = 1/3 14.7 (50 + 27) 103 = 0.38 [Nm] 3a = Me3/Me3 max = 0.38/3 = 0.13 Central axis of guide A Me1 Me1 = 1/3 We(L1 + B) 103 W We = 1/3 14.7 (50 + 48) 103 L1 B = 0.48 [Nm] 3b = Me1/Me1 max = 0.48/3 = 0.16 Review Me1.

Exhaust Cleaner Series AMC

Port size Standard size Option Exhaust cleaner for clean room VEX Model Model AN Port size Max. air flow (l/min (ANR)) Accessory Option 1 4 3 8 1 2 3 4 Port size Max. air flow (l /min (ANR)) Standard size Thread type Standard size 360 650 1,500 3,700 7,500 16,000 2 3 4 3 6 15 37 75 160 Rc NPT G 200 500 1,000 Bracket Flow direction (Right Down) With element service indicator 1 1 2 2 3B

AFF

AFF220A Applicable model Auto drain (2 pcs. each) Pressure gauge (2 pcs. each) Companion flange (2 pcs. each) Anchor bolt (3 pcs. each) AI-2S 2BJIS 10KFF 3BJIS 10KFF 4BJIS 10KFF Model AFF2B AFF4B AFF8B AFF11B AFF22B AFF37B AFF75B AFF75A AFF125A AFF150A AFF220A Model Note) Rated flow (l/min (ANR)) 300 750 1500 2200 3500 6000 12000 12000 22000 28000 42000 AFFB AFFA , , , , , , , , , , , flange 3B

Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

. = 1/3 14.7 (50 + 27) 103 = 0.38 [Nm] 3a = Me3/Me3 max = 0.38/3 = 0.13 Central axis of guide A Me1 Me1 = 1/3 We(L1 + B) 103 W We = 1/3 14.7 (50 + 48) 103 L1 B = 0.48 [Nm] 3b = Me1/Me1 max = 0.48/3 = 0.16 Review Me1.

VQ5000

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com SOL.B 1B () (+) 1 station 1A COM 2A 3A 4A 5A 6A 7A 8A 9A 10A 1B 2B 3B 4B 5B 6B 7B 8B 9B 10B 1B 1A 2B 2A 3B 3A 4B 4A 5B 5A 6B 6A 7B 7A 8B 8A 9B 9A SOL.A 2A () (+) VQZ SOL.B 2B () (+) 2 stations 1.

HEC-OM-S008

32 3C 0D Answer 25.0 deg.C 31 Temperature setting (without writing FRAM) 2 01 32 02 31 32 35 30 30 03 32 3C 0D 06 32 OD Set at 25.0 deg.C 32 Reading internal sensor 2 01 32 05 32 36 39 0D 01 32 02 32 32 35 30 32 03 32 3F 0D Answer 25.02 deg.C 33 Reading external sensor 2 01 32 05 33 36 3A 0D 01 32 02 33 33 30 30 32 03 32 3C 0D Answer 30.02 deg.C 34 Reading alarm status 2 01 32 05 34 36 3B

Plug-in Unit

B 8B () (+) Station 8 1A COM 2A 3A 4A 5A 6A 7A 8A 9A 10A 1B 1A 2B 2A 3B 3A 4B 4A 5B 5A 6B 6A 7B 7A 8B 8A 9B 9A 10B 10A COM 1B 2B 3B 4B 5B 6B 7B 8B 9B 10B SOL. A 9A () (+) SOL. B 9B () (+) Station 9 SOL. A 10A () (+) SOL. B 10B () (+) Station 10 Note) When using the negative COM. specification for VQC1000/2000, use valves for negative COM. (+) () COM. Positive COM.

Plug-in/Plug Lead: Single Unit

Polarity SOL.A 1A () (+) VQ5 SOL.B 1B () (+) 1 station 1A COM 2A 3A 4A 5A 6A 7A 8A 9A 10A 1B 2B 3B 4B 5B 6B 7B 8B 9B 10B 1B 1A 2B 2A 3B 3A 4B 4A 5B 5A 6B 6A 7B 7A 8B 8A 9B 9A SOL.A 2A () (+) VQZ SOL.B 2B () (+) 2 stations 1.

15

M3E = 1/3 x FE x Y = 1/3 x 188.7 x 25/1000 = 1.6 [Nm] 3B = M3E/M3max = 1.6/17.1 = 0.09 M3 Refer to [3] Calculation for Overall Center of Gravity in the Y-axis on front matter 7.

IDU/IDF

Flange IDF150D 750 1510 1320 375 480 600 700 800 355 427 880 JIS 10K 3B Flange IDF190D 770 1550 1640 385 703 730 700 800 355 592 900 JIS 10K 4B Flange IDF240D Auto drain is packed together with air dryer.

CYV

. = 1/3 14.7 (50 + 27) 103 = 0.38 [Nm] 3a = Me3/Me3 max = 0.38/3 = 0.13 Central axis of guide A Me1 W We Me1 = 1/3 We(L1 + B) 103 = 1/3 14.7 (50 + 48) 103 L1 B = 0.48 [Nm] 3b = Me1/Me1 max = 0.48/3 = 0.16 Review Me1.

5 Port Pilot Operated Solenoid Valve Metal Seal, Plug-in/Non Plug-in Series VZS3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

2 position single Plug-in F Note) A Single/ Double A side 5 24 VDC 2 2 position double 6 12 VDC G Grommet Grommet, With surge voltage suppressor 3 3 position closed center B Double B side 9 Other Option 4 3 position exhaust center GS 3A 3 position A side Option Electrical entry, Light/Surge voltage suppressor 5 3 position pressure center L L plug connector 6 3 position double check 3B

VNC

(16) 4 Valve size 2 to 9 1 1 1 4 32 (22) 5 1 B 1 4 Flange 32F 40A 1 1 2 40 (28) 6 1 B 1 2 Flange 40F Electrical entry/With light/surge voltage suppressor 50A Nil Air operated 2 50 (33) 7 GS Grommet with surge voltage suppressor G Grommet 2B Flange 50F E Grommet terminal 2 B 1 2 Flange 65 (45) 8 65F Valve size 1 EZ Grommet terminal with light/surge voltage suppressor T Conduit terminal 3B

VZS2000

Applicable model F Note) Plug-in A Single/ Double, A side 1 2 position single 2 2 position double G Grommet Grommet/With surge voltage suppressor 6 12 VDC B Double, B side 3 3 position closed center 9 Other GS 3A 3 position A side 4 3 position exhaust center Option 5 3 position pressure center Option L L plug connector Manual override Electrical entry, Light/Surge voltage suppressor 3B