2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

Output impedance: 1 k F: Analog output: 4 to 20 mA Load impedance: 50 to 600 Max. applied voltage: 28 V, Max. load current: 80 mA, Internal voltage drop: 1 V or less C: Analog output: 1 to 5 V or 0 to 10 V can be selected.

ZQ-OM01401

SY100-30-A A X T6 61 -12 A *x2 23 - No.ZQ-OM01401-B 2 () ZQ-ZSEA M G K-2-A (1) (2) (3)(4) (5) (1) [kPa] EA NPN2 EB PNP2 0 to -100 EC NPN1 + EE PNP1 + FA NPN2 FB PNP2 FC NPN1 + -100 to 100 FE PNP1 + 1) NPN1 + VA 1) PNP1 + VB 1 2) 2) M SI (kPa) 2) 3) (:psi) P 2) (99 10 ) 3) (1) VAVB (3) G 2m) W (2m) 4) (4) (5) (V ) 0 (M5x0.8) 5) K 1 3.2 () 4) 5) (1) VAVB 2 4 () 3 6 (

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

DIN terminal with light/surge voltage suppressor DIN terminal with surge voltage suppressor DIN terminal with surge voltage suppressor Without connector AC (1) Nil Standard type (1) High pressure type Sub-plate Part No. (1) (1.0 W) K (1) (Metal seal, VQZ100 only) Model Sub-plate part no. (1) (0.5 W) Y Low wattage type (2) Note) VQZ100 VQZ100-S-01(R) Note 1) Option Note 2) When two or

VQC

COM External pilot Low wattage type (0.5 W) Nil K N R Y (A) 4 (B) 2 Note 1) C Note) 5 (R1) 3 (R2) 1 (P) Seal type 5 (R1) 3 (R2) 1 (P) Note 2) 0 1 N.C N.O Metal seal Rubber seal 3 position closed center Note) For rubber seal type only.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

VQZ (A) 2 (A) 2 VZ 3 (R) 1 (P) 3 (R) 1 (P) VS VFN r e w q r e w q N.O. N.O. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Component Parts No.

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

6.5 4 0.5 10.5 0 8 4.5 2 7 4.5 12 9.5 0.5 0 4 1.5 3.5 1 7 4.5 1 11 0 8.5 5 2.5 7.5 5 12.5 10 1 0 4.5 2 4 1.5 7 4.5 1 11 0 8.5 5 2.5 7.5 5 12.5 10 1 0 4.5 2 4 1.5 10 8.5 4 14 2.5 12.5 8 6.5 10.5 9 15.5 14 4 2.5 7.5 6 7 5.5 10 8.5 4 14 2.5 12.5 8 6.5 10.5 9 15.5 14 4 2.5 7.5 6 7 5.5 12 12 6 16 6 16 10 10 12.5 12.5 17.5 17.5 6 6 9.5 9.5 9 9 Note) Adjust the auto switch after confirming the operating

CE

9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5 @6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 CX CY 40 to 63 MQQ M @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3 #3 r !4 e !6 @6 RHC MK(2) #7 #6 !5 RS Q G RS H A !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 RZQ MI W S CEP1 Component Parts CE1 No. No.

CE

9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5 @6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 CX CY 40 to 63 MQQ M Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3 #3 r !4 e !6 @6 RHC MK(2) #7 #6 !5 RS Q G RS H A !9 @5 t @6 y #0 w @1 #0 #5 !

Stroke Reading Cylinder and Counter

9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5@6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 ML2B #8 12 40 to 63 @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3#3 r !4 e !6 @6 #7 #6 !5 !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 Component Parts Component Parts Material Note No. Description Material Note No.

-fl Seies

3100-5FZ Sta. 2) NVFR3200-5FZ NARBF3000-00-P-1 wFs3000-20A-1 r\)(T636-1A (P Sallery) Sta.3-4) NVFR3100-5Fz NW5FR3-01T-041-037 See Note 1) Mixed Contiguration Maniiold: 1 LINE ITEM '1 DESCRIPIION OTY Four Station Manifold Ass'y as lollows: Sta. 1-4) NVFF4100-3FZB NW5FR4-01T-041-M Mixr sta. 1-2) 3/8 side sta. 3-4) 1/2 side See Note 3) Note 1) Indicate gallery tor all blocking discs (P EA, or

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

3100-5FZ Sta. 2) NVFR3200-5FZ NARBF3000-00-P-1 wFs3000-20A-1 r\)(T636-1A (P Sallery) Sta.3-4) NVFR3100-5Fz NW5FR3-01T-041-037 See Note 1) Mixed Contiguration Maniiold: 1 LINE ITEM '1 DESCRIPIION OTY Four Station Manifold Ass'y as lollows: Sta. 1-4) NVFF4100-3FZB NW5FR4-01T-041-M Mixr sta. 1-2) 3/8 side sta. 3-4) 1/2 side See Note 3) Note 1) Indicate gallery tor all blocking discs (P EA, or

PSxx-OMU0002CN

DC(+) 5 OUT1 4 OUT2 3 FUNC 2 DC(-) 1 -19No.PS-OMU0002CN-D Z/ISE20A(F)-S/-R () DC(+) NPN 2 Max.28 V80 mA 1 V R15 V OUT1 1 k OUT2 S420 mA DC(-) 12 V 300 24 V 600 50 DC(+) -S/-R () OUT1 NPN 2 OUT2 Max.28 V80 mA 1 V DC(-) DC(+) -X () -S/-R () OUT1 NPN 2 OUT2 Max.28 V80 mA 1 V DC(-) -20No.PS-OMU0002CN-D -V/-T () DC(+) PNP 2 Max.80 mA 1 V T15 V OUT1 1 k OUT2 V420 mA DC(

Series VCL

size 2-P Port size 2-M, thread depth N 2-M L L K K N.C. dimensions (mm) Grommet: G Conduit: C DIN terminal: D Conduit terminal: T P Port size Rc A B C D E F H K L M N Model Note) U Q V R Q R Q R S Q R S 83 22 23 45 44 43 58 40.5 46.5 99 43 66 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 4.5 1/8 VCL21 86 22 23 46 44 44 58 41.5 46.5 99 44 66 18 36 67 31 8.5 12.5 28 18 12.8 M4 6 1/4 99 24 25 56.5 46

PSxx-OMU0008CN

DC(+) 5 OUT1 4 OUT2 3 FUNC 2 DC(-) 1 -21No.PS-OMU0008CN-D ZSE20C(F)/ISE20C(H)-S/-R () NPN 2 DC(+) Max.28 V80 mA 1 V R15 V OUT1 1 k S420 mA OUT2 12 V 300 24 V 600 DC(-) 50 DC(+) -S/-R () OUT1 NPN 2 OUT2 Max.28 V80 mA 1 V DC(-) DC(+) -X () -S/-R () OUT1 NPN 2 OUT2 Max.28 V80 mA 1 V DC(-) -22No.PS-OMU0008CN-D -V/-T () PNP 2 DC(+) Max.80 mA 1 V T15 V OUT1 1 k V420 mA OUT2

PF-OMN0011_C

DC(+) DC(+) OUT1 OUT1 DC(-) DC(-) / / Max.80 mA 1.5 V E 15 V 1 k F420 mA 12 V 300 24 V 600 Max.28 V80 mA 1 V C 15 V 1 k D420 mA 12 V 300 24 V 600 -18No.PF-OMN0011CN-C NPN PF3W30G PNP PF3W30H DC(+) DC(+) OUT1 OUT1 DC(-) DC(-) / / Max.80 mA 1.5 V 30 ms Max.28 V80 mA 1 V 30 ms 2 PF3W30J/PF3W30K DC(+) DC(-) / J15 V 1 k K420 mA 12 V 300 24 V 600 -19No.PF-OMN0011CN-C

PSxx-OMU0005CN

-15No.PS-OMU0005CN-C (a)(a) (b) (ZS-46-B) +(ZS-46-D) 90 -16No.PS-OMU0005CN-C (-M5) 1/6~1/4 1~1.5Nm (ZS-46-N) -01-N01 23 3~5 Nm -C4L-C6L 1/61/4 1~1.5Nm -17No.PS-OMU0005CN-C -18No.PS-OMU0005CN-C () TU0425( 42.5) -19No.PS-OMU0005CN-C FG -20No.PS-OMU0005CN-C Z/ISE20B(F)-S/-R () NPN 2 Max.28 V80 mA 1 V R15 V 1 k S420 mA 12 V 300 24 V 600 50 -S/-R () NPN 2 Max.28 V80 mA 1 V -X () -S/-

Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

Fittings & Tubing Air Cylinders Rotary Actuators 11-/22-MXP6-5 W AA H 7 4 depth 2.5 2.5 11.2 2.3 3.5 1 3 4 x M3 x 0.5 depth 3 +0.030 0 D B 0.05 9.5 1 3.5 20 14 13 18 C 6 +0.030 0 depth 2.5 2.5 Width across flats 6 E 5 6 5 Prepared hole diameter 3.3 2 x M4 x 0.7 Piping port 2 x M3 x 0.5 (Plug: M-3P) F QL 6 13.5 17 Stroke: S M 2 0.05 M4 x 0.7 Mounting base side B D 7 5 2 x M3 x 0.5 Piping

CQS

5 5 1 Made to Order Note 1) Consult SMC for shorter stroke length than indicated in the table.

PSxx-OMM0002CN

P PNP Max.80 mA 1 V -S/-R () NPN 2 Max.28 V80 mA 1 V R15 V 1 k S420 mA 12 V 300 24 V 600 50 -S/-R () NPN 2 Max.28 V80 mA 1 V -17No.PS-OMM0002CN-F -V/-T () PNP 2 Max.80 mA 1 V T15 V 1 k V420 mA 12 V 300 24 V 600 50 -V/-T () PNP 2 Max.80 mA 1 V -A NPN2 Max.28 V80 mA 1 V -B PNP2 Max.80 mA 1 V -18No.PS-OMM0002CN-F ONOFF () ON OFF ON5OFF 20 P 1 H_1 [Pa] ON OFF [s] -19No.PS-OMM0002CN-F

MU

, #4 (#1+#4+#11) Front flange MUF25SMU25, #3 (#1+#3+#11) MUF32SMU32, #3 (#1+#3+#11) MUF40SMU40, #3 (#1+#3+#11) MUF50SMU50, #3 (#1+#3+#11) MUF63SMU63, #3 (#1+#3+#11) Single clevis Double clevis Double clevis Single clevis Double clevis MUD25SMU25, #6 (#1+#6+#11) MUD32SMU32, #6 (#1+#6+#11) MUD40SMU40, #6 (#1+#6+#11) MUD50SMU50, #6 (#1+#6+#11) MUD63SMU63, #6 (#1+#6+#11) (mm) Rotation() 100 90