MLGC

e r t y u i o !

3

A B W A B W A B W 4.5 (2) 12 16 19 21 17 19 12 12 4 12 4 4 6 4 12 8 8 0 4.5 (2) 16 12 4 12 4 4 6 4 12 8 8 0 Note 1) ( ): D-A96, A9V Note 2) When setting an auto switch, confirm the operation and adjust its mounting position.

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

center line NX X 4 x 2square nut J NH NT LB NW PB PI NV LW T-slot for body mounting NC GB LE H7 depth R Cushion needle 2-P (Hexagon socket head taper plug) 2-P 2-P (Hexagon socket head taper plug) 2-P (Hexagon socket head taper plug) 1 XX SS NE PP QQ RR SS H SMC TT UU VV UU PH A G RW T-slot for body mounting N Z + stroke J M4 x 0.7 M6 x 1 M8 x 1.25 MM M5 x 0.8 M8 x 1.25 M10 x 1.5 Model MY2HT16G

C76

9 @0 q w e r t y u i o !

C76

9 @0 q w e r t y u i o !

FQ1

Filtration material: HEPO II (PP) w q e r w q er 0.1 0.1 0.05 0.05 Pressure drop MPa Pressure drop MPa Filtration accuracy (m) 2 4 6 13 Filtration accuracy (m) 0.5 1 5 10 20 50 75 100 No.

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

R.

HRX-OM-X071

HRR050-A-20/40.9-10 HRR Series HRX-OM-X071 Contents 9.3.2 HRR050-W-20/40. 9-10 9.4 Cooling capacity . 9-11 9.4.1 HRR050-A-20. 9-11 9.4.2 HRR050-W-20. 9-11 9.4.3 HRR050-A-40. 9-12 9.4.4 HRR050-W-40. 9-12 9.5 Heating capacity . 9-13 9.5.1 HRR050-A/W-20. 9-13 9.5.2 HRR050-A/W-40. 9-13 9.6 Pump capacity. 9-14 9.6.1 HRR050-A/W-20. 9-14 9.6.2 HRR050-A/W-40. 9-14 9.7 Required facility water flow

Electric Slide Table / High Precision Type 《 AC servo motor 》

rev) Encoder [LECSC-T]Absolute 18-bit encoder (Resolution: 262144 p/rev) Power Horizontal 45 65 consumption [W] *5 Vertical 145 175 Horizontal 2 Standby power consumption when operating [W] *6 Vertical 8 Max. instantaneous power consumption [W] *7 445 724 Type *8 Non-magnetizing lock specifications Lock unit Holding force[N] 131 255 157 308 197 385 Power consumption [W] at 20C *9 6.3 7.9

Mist Separator Series AM Model Series AM can separate and Model AM850 AM250 AM350 AM450 AM550 AM650 AM150 remove oil mist in compressed air Rated flow 750 1500 2200 3500 6000 12000 300 (1) (l/min (ANR)) which is difficult to remove by Port size ordin

(p.4.6-4 through p.4.6-5) w e Tempered glass Sight glass AM850 is aluminum cast. Replacement Parts AM450 Part No. No. Description Material AM150 AM250 AM350 AM550 AM650 AM850 Glass fiber NBR Element assembly AM-EL150 AM-EL250 AM-EL350 AM-EL550 AM-EL650 AM-EL850 AM-EL450 r With gasket and O ring Max. Flow Max.

Cylinder with Lock Series CLS

141 459 495 Packed with clevis pin, flat washer and cotter pin. 10 Series CLS Dimensions Center trunnion type/(T) BC CLS125 MODEL SMC FREE LOCK CHECK Cylinder With$ Locking Mechanism 5 30 Rc(PT) 1/4 Unlocking port (unlocked when pressurized) Z + 1/2 stroke Plug with breathing hole GC BB BA GA GA 2-Rc(PT) P 4-J Width across flats KA M MM BZ GB R TY TDe8 90 59 D W 14 AL C A K 43 N N TT B

Multistage Ejector Series ZL112/212 1

Front cover A w !0 Misc.

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

R.

3M/SMseries

Model Exhaust Piping/Port location Port size Applicable P R 1 A,B P It A,B Valve NWsF5-20Common Side /Base Side/Base fop/ Valve %NPrF I %flPlf LNPIF %NPIF NVFSO20 DXT 156-20-1TA EXH relocation spacer NVV5F5-20 156-19-14 NW5F5-20 " Spacer is used when it is nscessary to exhaust from certain valves individually.

PF2A/PF2W

Unit switching Real-time switch output ( ) ZSE ISE For Air Hysteresis mode Display Real-time flow rate l/min Accumulated flow l ON PSE YES CFM x 102, CFM x 101 ft3 x 101 OFF P-1 P-2 High flow rate Z I SE3 CFM = ft3/min P Window comparator mode H: Hysteresis High Flow Rate Type (For Air) PS H H Display Real-time flow rate l/min Accumulated flow l, m3, m3 x 103 ON Z I SE1 2 NO OFF P-1 P-

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

(port e)] [P (port c)] A A LW Plug Operating direction P (port a) P (port b) Auto switch mounting groove [P (port g)] 0.5 Note 2) 0.5 Note 2) Left Right Plug [P (port h)] HI HP H HL HG HT HS HB HA HB HA HG HT HI WB 4-J Depth JK Plug [P (port f)] WB WA TA TA WA R TB Plug TB R W [P (port d)] Inner cover Note 3) holding screw (mm) K 21 20 JK 10 12 J M6 x 1 M10 x 1.5 HT 19.5 39 HS 27 49.5 HP

KT10

P F H J L N P R Option Code Specification Standard (Cv: 0.06) High flow (Cv: 0.12) No code HF O-ring material 1) Not available for material code B.

Rotary Actuator NCRB1BW Series Single Vane / Double Shaft

Position of pivot:Axis , w P s 1 2 OSo||t dob. of pivot: Passes through the center ol gravity, parallel to Position of oivot: Diameter Position side b, s 1 2 ,_w 2f " s ' s oThh dhk Position of pivot: Passes through one end perpendicular to the plate. Position ot pivot:Diameter .r=W.ts s 4

CE

7 w @5 q y !3 @3 r t @5 e !1 @1 @1 @4 @6 !4 @6 !4 u @8 !5 @0 !8 !9 i Parts list Parts list Description Material Note Description Material Note No. No.

SMC Pneumatic Clean Series

Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust