3

2 i t w q r w !0 3-Color Display Digital Flow Monitor for Water PF3W3 w w y e u w Component Parts No.

SFOD-OMT0009CN

/ CIR-L Step No. mm/s 1 2 2 2 mm mm/s mm/s / mm mm mm 1 CIR-R 100 100.00 1000 1000 0.0 0.0 0.5 2 CIR-R 100.00 0.0 0.0 0.5 0 1) 50.00 3 1) 50.00 4 1)CIR-R CIR-L 2 3 4 (5) SYN-I Step No. mm/s 1 2 2 2 mm mm/s mm/s / mm mm mm 1 SYNI 100 100.00 1000 1000 0.0 0.0 0.5 2 SYNI 0.0 0.0 0.5 0 3 SYNI 0.0 0.0 0.5 4 SYNI 0.0 0.0 0.5 55 No.SFOD-OMT0009CN-B 8. 8.1 () ... 1 ...(2) () M

JXCx-OMT0001CN

Axis Movement Speed Position Acceleration Deceleration Pushing Area 2 In-position 2) 2) mode (mm/s) (mm) (mm/s (mm/s Selection (mm) (mm) (mm) 1 CIR-R 100 100.00 1000 1000 0.0 0.0 0.5 2 CIR-R 100.00 0.0 0.0 0.5 0 1) 50.00 3 1) 50.00 4 () () 1) CIR-R CIR-L 1 2 34 (5) SYN-I Area 1 Step No.

Precision Regulator Series IR1000/2000/3000

X465 0.1 to 1 0.001 Specifications Set pressure range (MPa) Desolution of setting and display (MPa) Class 10 With M5 fitting (Applicable tubing O.D. 6) Cleanliness Bleed hole Pressure switch 12 to 24 VDC 10%, Ripple (p-p) 10% or less (With reverse connection protection) 40 mA or less Power supply voltage IR1000/2000: With M5 fitting (Applicable tubing O.D. 6) IR3000: Rc 1/2 female thread

Process Gas Diaphragm Valve

A Connections: TW Connections: TW 1.0 (25.4) 1.0 (25.4) 45 45 AP SL M5 x 0.8 depth 0.25 (6.4) (Mounting hole) M5 x 0.8 depth 0.25 (6.4) (Mounting hole) AZ AZ AK Note) MV6 is bar stock body.

GA342

Weight 1.2 kg Port size 04 06 10 1/2 3/4 1 JIS Symbol Dimensions PA R(3) P(1) (2)A 14 54 73.5 X 68 87.4 Rc 1 8 Rc 1 8 Max. 2 132.6 SYA (Pilot port) (Pilot EXH port) 62.3 Rc 1 8 (External pilot port) SYJA PA 2 x 8.4 VZA NO X (Mounting hole) X PE 30.5 30.5 NC VFA 116.1 98.6 91.6 91.6 3(R) 66.8 VFRA 57.6 2(A) 1(P) 43.8 43.8 VA 34 71 34 (P port) (R port) (A port) Rc 1 1 2, 3 4, Rc 1 1 2, 3 4,

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

For low speed control Port size 0 1 Port size Symbol M5 U10/32 01 02 Applicable series AS120M-M5 AS120M-U10/32 AS220M-01 AS220M-02 M5 x 0.8 10-32 UNF 1/8 1/4 Thread type Cylinder side R Tube side Rc Symbol Nil Metric thread (M5) Unified thread (10-32 UNF) NPT P . 15-11-3 N Needle Valve/Flow Characteristics AS120M AS220M-01 AS220M-02 0.8 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet

LEF-OM002xx

/See 3.3.Step data setting on p.23 3.4.Parameter setting on P .29 /Refer to the LEC controller operation manual. Input the RESET signal. 45 - No.

The ZSE/ISE20A/20B/20C series operation manual can be found here.

Controller Mounting: Screw Mounting, Cable Length: 1 m, Inlet Port Silencer: AN10-01, 62 dB, Digital Pressure Switch: ISE20A-Y-01-J-X603, Exhaust Check Valve: AKH06-00, for 6mm tubing, Exhaust Solenoid Valve: -

ITV

Rc(PT) 3/8 03 P P Connection Rc(PT) 1/2 04 P Bracket B p p Accessories 178 Bracket C p p Connection NPT1/4 N02 p p qAF3000 wAFM3000 eITV2000 Connection NPT3/8 N03 p p Connection NPT1/2 N04 p Connection G(PF) 1/4 F02 p p REGULATOR Connection G(PF) 3/8 F03 ITV3000 p p Connection G(PF) 1/2 F04 p Approx. 243 Modular Connection Part Numbers Approx. 172 ITV20ll ITV30ll Description AF3000 AF4000

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

30 50 Lead 8: LEKFS32(L/R)EB Lead 8: LEKFS32(L/R)EB 40 Work load: W [kg] Work load: W [kg] 20 30 Lead 16: LEKFS32(L/R)EA Lead 16: LEKFS32(L/R)EA 20 10 Lead 24: LEKFS32(L/R)EH Lead 24: LEKFS32(L/R)EH 10 0 0 0 200 400 600 800 1000 1200 0 100 200 300 400 500 600 Speed: V [mm/s] Speed: V [mm/s] Vertical LEKFS40(L/R)/Ball Screw Drive Horizontal 70 60 30 Lead 10: LEKFS40(L/R)EB Lead 10: LEKFS40

SYJ300-OMU0003

No.SYJ300-OMU0003 -2- / *3) 1 1.5 *3)1 1 () No.SYJ300-OMU0003 -3- SYJ Series 3 / 1 DC () () () () EXH () () 4 No.SYJ300-OMU0003 SYJ Series 3 / ( ) 1 ( ),COMCOM 2 C-R () C-R Sol.1: DC 3% AC 8% Sol.2: (SSR)AC 1) (C-R) OFF 2) () 1.NPN 3) AC,, , SSR SSR 1) Sol.1: Sol.2: 2) ,1V + 2.NPN 5 No.SYJ300-OMU0003 SYJ Series 3 / 1 -10 1)M5 M3 1/4 0.4~0.5Nm M5 1/6~1/4 1~1.5Nm ()

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

For low speed control Port size 0 1 Port size Symbol M5 U10/32 01 02 Applicable series AS120M-M5 AS120M-U10/32 AS220M-01 AS220M-02 M5 x 0.8 10-32 UNF 1/8 1/4 Thread type Cylinder side R Tube side Rc Symbol Nil Metric thread (M5) Unified thread (10-32 UNF) NPT P . 15-11-3 N Needle Valve/Flow Characteristics AS120M AS220M-01 AS220M-02 0.8 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

of M5 x 0.8, R threads after installation.

VP300-OMP0001

Z DIN Z DIN 2 1 1 2 11 No.VP300-OMP0001 VP Series VP Series VP Series VP Series/ / / / VP KQ2HKQ2S 12 No.VP300-OMP0001 O [3(R)*] O *N . O. 1( P) () O PE ( AC 13 No.VP300-OMP0001 N o. 1ISO VG 32 [ 3(R)PE] N .

ZMA

Supply pressure (MPa) Flow rate (l/min (ANR)) 13-4-27 8 Series ZMA Dimensions 111 S: Vacuum pressure switch trimmer Pilot valve for vacuum pressure T: Release period adjustment trimmer Pilot valve for vacuum release M5 x 0.8 through (P, E port) Release flow adjustment screw 3-Rc 1/8 SUP.

ZB-OM00301

FA 3m 27 (M230) 2 O 1 No.ZB-OM00301 Assy ZB1ZS A M G A E 0.0~-101.0KPa G (2m) F -100.0~100KPa ZS-39-5G A NPN2 B PNP2 1) M SI2) P (psi)1) 1) (M230) 2 2)kPa O 1 V Assy 45 2 V Assy 45 (V Assy ) A ) 28 - No.ZB-OM00301 A R R Nm 0.0540.08 R R ON OFF R 29 - No.ZB-OM00301 3 P911 Nm 0.075~0.096 M2 / 3 Assy Assy / / O (/) O 30 - No.ZB-OM00301 [L/min(ANR)] V

180

For details, refer to the IDK series in the Best Pneumatics No.6. 705 MHY2 Series Construction Closed condition 10 16 20, 25 r o !8 e w !7 t !5 r o !8 e !6 w @0 !7 t !5 r o !8 e !6 w @0 !7 t !5 !0 u !2 i q !1 !4 y !9 !0 u !2 i q !1 !4 y !9 !0 u !3 !2 i q !1 !4 y !9 Open condition Component Parts Note No.

VFN2000N

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com d n i n i W g c e t i r o i d n e p a t e p i P Leakage Voltage It must be noted that when connecting C-R element parallel to switching element, leakage current flows through C-R element and the leak voltage increases