smcmaintenancepartslist

P.287 P.289 P.290 P.290 P.290 P.290 P.290 P.297 P.297 P.301 P.304 P.306 P.306 P.306 P.310 P.311 P.311 P.312 P.312 P.312 P.315 P.316 P.316 P.316 P.317 P.318 P.319 P.319 P.319 P.324 P.325 P.326 P.329 P.333 P.333 P.333 P.337 P.339 P.340 P.343 P.348 P.351 P.351 P.356 P.358 P.361 P.362 P.364 P.367 P.371 P.371 P.374 P.385 P.385 P.387 P.387 P.390 P.392 P.393 P.394 P.395 P.396 CJP2 MGPW Pin Cylinder

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M9 M9V F9W(V) B Electrical entry is in the direction C (mm) Proper mounting position Proper mounting position Proper mounting position D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV D-M9 D-F9W D-M9V D-F9WV Model Model Model A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C D E A B C

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Model ZX1 J1 E P F Nil Vacuum switch (E) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Vacuum switch (ZSE2) ZX1-J1-E Adsorption confirmation switch (P) (Release to atmospheric pressure) Pressure sensor Spacer 1 (For side mounting) Manual override (Non-locking)

SY

ARBY3000 Series SY3000 Series SY5000 00 2 P ARBY5000 Regulated port Regulated port Pressure gauge connecting port Pressure gauge connecting port P port A port (P port control type A port regulated) B port (P port control type B port regulated) P port A port (P port control type A port regulated) B port (P port control type B port regulated) P A1 B1 P A1 B1 Pressure gauge (G15-10-01) Plug

Made to Order

P.1729 P.1731 P.1732 P.1733 P.1738 P.1739 P.1742 P.1743 P.1744 P.1747 P.1748 P.1752 P.1755 P.1756 P.1760 P.1765 P.1766 P.1769 P.1770 P.1776 P.1781 P.1786 P.1794 P.1796 P.1801 P.1802 P.1803 P.1804 P.1806 P.1806 P.1807 P.1809 P.1817 P.1818 P.1819 P.1820 P.1822 P.1823 P.1829 P.1829 P.1830 P.1831 P.1832 P.1832 P.1833 P.1836 P.1838 P.1839 P.1839 P.1841 P.1844 P.1844 P.1845 P.1848 P.1849 P.1850

SQ1000/2000

R1) (P)(R2) (R1) (P)(R2) Double (double solenoid): SQ1230D Double (double solenoid): SQ1231D y e e q w y e e q w SQ1231D SQ1230D (A)(B) (A) (B) 4 2 4 2 5 13 5 1 3 (R1) (P)(R2) (R1)(P)(R2) u u 3 position: SQ1 30 3 4 5 3 position: SQ1 31 3 4 5 SQ1331 SQ1330 (A)(B) (A)(B) y e e q y e e q w w 4 2 4 2 5 1 3 5 1 3 (R1) (P)(R2) (R1) (P)(R2) SQ1431 SQ1430 (A)(B) (A)(B) 4 2 4 2 5 1 3 (R1) (P)(R2)

Battery-less

0 L = 100 mm Max. speed = Over 200 mm/s 10 10 LEYG25L E LEYG32L E/40L E LEYG32L E/40L E LEYG25L E LEYG32L E/40L E LEYG32L E/40L E Load mass m [kg] Load mass m [kg] LEYG25L E LEYG25L E LEYG16L E LEYG16L E 1 1 LEYG16L E LEYG16L E 120 125 120 125 0.1 0.1 10 100 1000 35 40 10 100 1000 35 40 Stroke [mm] Stroke [mm] Operating Range when Used as a Stopper LEYGM (Sliding bearing) Caution 100 LEYG32M

High Vacuum Angle Valve

XLS-16XLS-16-P XLS-25XLS-25-P Description w y r e-1 e-2 XLS16-20G, C, T, D XLS16-20-P G XLS25-20G, C, T, D XLS25-20-P G Coil assembly Core assembly Armature assembly O-ring O-ring XLS16-30-1 XLS16-30-2 AS568-018V AS568-025V XLS25-30-1 XLS25-30-2 AS568-018V AS568-030V Note 1) In case of coil assembly, please enter voltage symbol in .

Fluoropolymer Piping Equipment

49 58 47 48 16 10 36 22 22 LQ3F63 69 55 56 LQ3F64 94.5 90.2 84 W M (R) Q P N (E, E) H L1, L1 T L2, L2 (E,E): Reference dimension for the inserted tubing from the end surface of the nut (E),L1,L2: Nut material PVDF dimensions W: Width across flats dimension (R): I.D. of JIS flange necessary to mount this product.

VFS

EZ VFS1320-E/EZ VFS1420-E/EZ VFS1520-E/EZ Lead wire O.D.

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Operating pressure P (MPa) P 0.7 MPa MTS 4.

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D D t D t t c e c c e e u u s u s s d i d i d i g g g o o o n n n r r r P P P A A A 1 1 9 9 9 9 9 9 w w 9 w 9 9 m I m I n n 9 9 9 u d u d a a a r u r u o s o F s tr F i e tr i e 9 9 9 D r r D r r r e e e e v v s 1 d d s 1 1 d o o i i n g n g n n n n a a H H n P n P g g r r o o i i s s d d e e u u D D c c t t d A d A r r w w a a 12-11-1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way,

VFR

Piping port 3 8 03 04 06 1 2 3 4 3-5-79 80 Series VFR5000 Construction 2 position single 2 position double VFR520 VFR510 (B) (A) 4 2 (B) (A) 4 2 (EA)(P)(EB) 5 1 3 (EA)(P)(EB) 5 1 3 r u e t r u q o e !

ZP3

ZP3 T 015 U N A3 With adapter From p. 137 p. 160 From p. 162 ZP3 T 015 U N J 3 B3 With buffer From p. 140 p. 161 p. 164 q w e r t y u Flat type q Vacuum inlet direction w Pad diameter e Material Nil Pad unit T Vertical Y Lateral 015 1.5 02 2 035 3.5 N NBR S Silicone rubber1 U Urethane rubber F FKM GN Conductive NBR GS Conductive silicone rubber r Buffer specification t Buffer stroke J Rotating

7

d E U 300 1.2 7.5 T 5.5 5.5 A b a IN OUT B 2 x P Port size 4.5 4.5 L K D f J I F C e d Grommet (with surge voltage suppressor) E U 300 1.2 7.5 A b a T IN OUT B 2 x P Port size L K D f J I F 4.5 4.5 e d DIN terminal C U V E Cable 6 to 12 G1/2 (44) T 7.5 31.5 1.2 5.5 A b a IN OUT B 2 x P Port size J I F L K D 4.5 4.5 f (mm) Electrical entry One-touch fitting P A B D E F I J K L Model

Hydraulic

Stainless steel With switch only 9 Magnet plate 10 Scraper 11 Rod seal NBR 12 Piston seal 13 Tube gasket 14 Piston gasket 6 Series CHKDB Dimensions 2-Rc P F with effective thread depth G F with effective thread depth G Q Q R D R H E E 4-K through 8-L counter bore 4-K through C B + Stroke J J 8-L counter bore A + Stroke M M CHKDB20 & 25 CHKDB32 to 100 Width across flats f c a b g e h + Stroke

Modular Design with Uniform Body Style

Series Body size Details 20 30 40 50 60 AF p. 61 AFM AFD p. 71 AR(K) p. 79 AW(K) p. 98 AL p. 89 2 A Modular F.R.L.

Fieldbus System

P LM Elbow port, mixed sizes (Including upward and downward piping) P P 5/16" 3/8" 3/8" P , E port size (One-touch fittings) 8 10 10 P , E port size (One-touch fittings) Indicate the sizes on the manifold specification sheet in the case of CM and LM.

Electric Actuators

Driver for Non-standard Motor Regenerative Absorption Unit Series LC7R Teaching Box Dedicated AC Servomotor Controller Series LC1 P. 205 P. 200 P. 185 P. 196 Features 5 Electric Actuator Line-up of Products Short Stroke Electric Actuator Series LX Series LX Stepper motor High Rigidity Slide Table Type Series LXS Low Profile Slide Table Series LXF Guide Rod Type Series LXP P. 250 P. 210 P

5 Port Solenoid Valve Series SY3000/5000/7000/9000

SY340 SY540 SY340 SY540 SY340 SY540 SY740 + + + + P. 198 EA P EB Type 41P P. 214 EA P EB In common Type 42 P. 198 + + + + + + + + EA P EB EA P EB SY340 SY540 SY740 Type 42P P. 214 EB P EA In common Type 43 SY940 + + + + P. 208 Base mounted Stacking type Flat ribbon cable Manifold stations can be increased or decreased.