Air Cylinder/Low Friction Series MB l Q ø32, ø40, ø50, ø63, ø80, ø100

7. * The seal kit includes 2 cushion seals, 1 rod seal, 1 piston seal, and 2 tube gaskets. 1.7-27 Series MBlQ Basic/(B) G G Cushion valve W V Port 2-Rc(PT)P MM D E MB Effective thread 2 X 4-J lC lB MA A K F N N S + Stroke H ZZ + Stroke (mm) Stroke range Width across flats Bore (mm) Effective thread length A D Ee11 F N G P MA S MB V J W K H ZZ MM lC lB 32 40 50 63 80 100 22 30 35 35 40 40

Digital Flow Switch ( compatible)

Symbol Model S T U V W PF2MC7501/7102 24 22 32 40 50 PF2MC7202 30 30 42 48 58 -99No.PF-OMZ0002-A Lead wire with M8 connector (ZS-40-A) M12-M8 conversion lead wire (ZS-40-M12M8-A) -100No.PF-OMZ0002-A Revision history A: Contents revised in several places.

Series VCL

2 Port for Oil Dimensions (mm) (N.C.) 1in = 25.4mm Grommet: G Conduit: C Approx. 300 V D Approx. 280 D F Approx. 300 F Q Q Class H coil Broken line section C C G 1/2 R R E E A H A H B B 2-P Port size 2-P Port size 2-M, thread depth N 2-M, thread depth N L L K K DIN terminal: D Conduit terminal: T Cable 6.8 to 10 F S Q 27.5 (Q) D F 25 C R C (44) R R E G 1/2 E G 1/2 A H D (S) B B A H 2-P Port

PSE200

Ltd. 1-16-4 Shimbashi, Minato-ku, Tokyo 105-0004, JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 URL http://www.smcworld.com 2001 SMC CORPORATION All Rights Reserved 1st printing August, 2001 D-SMC.L.A. P-90 (YG) All specifications in this catalog are subject to change without notice. Printed in Japan. This catalog is printed on recycled paper with concern for the global environment.

The multi-pin connectors replace the

Connector type Connector type SMC Corporation 1-16-4 Shimbashi, Minato-ku, Tokyo 105-8659, JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 URL http://www.smcworld.com 2001 SMC CORPORATION All Rights Reserved 1st printing December, 2001 D-Export dept. P-100(D) Printed in Japan. This pamphlet is printed on recycled paper with concern for the global environment.

•

Tokyo 105 JAPAN Te/:03-3502-2740 Fax:03-3508-2480 1st pnnhng February 1995.D-036,P-53{M) November 1997, 67 5(RP) SpeclilCatlons are subject to change without pnor notICe Printed In Smgapore and any obltgaltOn on the pa r1 01 the manifacture.

Series VC, Direct Operated, 2 Port Solenoid Valve for Water, Series VCW

Grommet: G Conduit: C Approx. 300 Approx. 280 D D Q F Q F C C G (PF) 1/2 R R E E A H 2-P Port size 2-M B B A H 2-P Port size 2-M L L K K DIN connector: D Conduit terminal: T Cable 6.8 to 10 27.5 F F Q (Q) S 34 25 U R C R C (44) G (PF) 1/2 E B A H D 2-P Port size (S) E G (PF) 1/2 B A H D 2-M 2-P Port size 2-M L L K K N.C.

VFR3000-OMJ0001

Series Series Series Series 2 2 2 2 3 3 3 3 (A,B) ( ( ( (VFR3 VFR3 VFR3 VFR3 00 00 00 00) ) ) ) ( ( ( (VFR3 VFR3 VFR3 VFR3 10 10 10 10) ) ) ) ( ( ( (VFR3 VFR3 VFR3 VFR3 40) 40) 40) 40) VFR3 VFR3 VFR3 VFR3 00,VFR3 00,VFR3 00,VFR3 00,VFR3 10 10 10 10 VFR3 VFR3 VFR3 VFR3 40 40 40 40 (N.C.)N.O.3 3 B A N.C.

PFxx-OMX0002

A to B C to D 3,000 L 30 to 3000 30 to 3150 40 to 4000 40 to 4200 L/min 6,000 L 60 to 6000 60 to 6300 40 to 4000 40 to 4200 12,000 L 120 to 12000 120 to 12600 40 to 4000 40 to 4200 PF3A7#H 3,000 L 1.1 to 105.9 1.1 to 111.2 40 to 4000 40 to 4200 cfm 6,000 L 2.2 to 211.9 2.2 to 222.4 40 to 4000 40 to 4200 12,000 L 4.0 to 424.0 4.0 to 445.0 40 to 4000 40 to 4200 : The flow ranges and relationship

PF-OMN0009_C

* , *PVC PVC PVC () PVC PVC , -10No.PF-OMN0009CN-F PF3W5 48 () 3 A : 04 20 40 11 21 0.5~4 L/min 2~16 L/min 5~40 L/min 10~100 L/min 50~250 L/min 2 04 20 40 11 21 R 04 20 40 11 21 S 250L/min G L/min(gal/min) / : SI : G : 1[L/min]=0.2642[gal/min] 1[gal/min]=3.785[L/min] 1=9/5+32 L/min 100L/min250L/min Rc N NPT F G IS0228 1 N M8(3m) 04 20 40 11 21 03 3/8 04 1/2 06 3/4 10 1/1 12

New

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 http://www.smcworld.com 2012 SMC Corporation All Rights Reserved 1st printing QT printing QT 8100SZ Printed in Japan. D-DN Specifications are subject to change without prior notice and any obligation on the part of the manufacturer.

Process Valve

H (Conduit terminal: T) I (DIN terminal: D) Main port 1(A), 2(B) A B C D E F G H I J K L M N P Q R S T U Model VNA2-10A VNA2-15A VNA3-20A VNA4-25A 3 8 1 2 3 4 63 144.5 55 125.5 52 42 26 29 4.5 14 24.3 72.5 2.3 80.5 25 75 34 80 84.5 124 135.5 151.5 137 153 156 172 60.5 73 1 80 90 62 72 50 60 31 36 35 40 5.5 6.5 17.5 20 28.3 33.3 84 100 2.3 2.3 92 108 30 35 84 90 43 49 89 95 93.5 99.5 Port

Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

20 10 0 100 Suction flow [L/min(ANR)] Air consumption [L/min(ANR)] Vacuum pressure Vacuum pressure [kPa] Vacuum pressure [kPa] 80 60 Suction flow 40 20 Air consumption 0 0 10 20 30 40 Supply pressure [MPa] Suction flow [L/min(ANR)] ZHP-10 ZHP-10 (Supply pressure: 0.35 MPa) 100 90 80 70 60 50 40 30 20 10 0 0 0.1 0.2 0.3 0.4 0.5 0.6 100 90 80 70 60 50 40 30 20 10 0 100 Suction flow [L/min(

VK300

Surge voltage suppressor (Built-in terminal) Marking AC, 12 VDC or less for DC For 24 V or more NL: Neon bulb R: Resister LED: Light emitting diode R: Resister D: Protective diode LED: Light emitting diode R: Resister 4-5-10

VK300

Surge voltage suppressor LED R D LED R R NL (Built-in terminal) Marking AC, 12 VDC or less for DC For 24 V or more 1 2 + 1 2 1 2 NL: Neon bulb R: Resister LED: Light emitting diode R: Resister D: Protective diode LED: Light emitting diode R: Resister 1418 A

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

System construction status No.0 No.1 No.2 No.3 No.4 No.5 No.6 No.7 No.8 No.9 End EX600 EX600 EX600 EX600 EX600 -DX#D EX600 -DX#D EX600 -DX#D EX600 -DX#D EX600 -DX#D EX600 -SEN3 plate -LAB1 -LAB1 -LBB1 -LBB1 -127No.EX-OMX1011 (6) When unit diagnostics is generated, the diagnostic information is displayed on the [SYSTEM CONFIGURATION STATUS] screen.

Process Pump

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 URL http://www.smcworld.com 2010 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing OY printing OY 7150SZ Printed in Japan. D-DN

Series ARP20 to ARP40 10- 10- 21- 21- Direct฀Operated฀Precision฀Regulator Series ARP20K to ARP40K 10- 10- Direct฀Operated฀Precision 21- 21- Regulator฀with฀Backflow฀Function

Example) 10-ARP30K-03BG-1RY Clean room compliant, copperfree, fluorine-free, silicone-free Clean room compliant Symbol Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without mounting option With bracket With set nut (For

Series ARP20 to ARP40 10- 10- 21- 21- Direct฀Operated฀Precision฀Regulator Series ARP20K to ARP40K 10- 10- Direct฀Operated฀Precision 21- 21- Regulator฀with฀Backflow฀Function

Example) 10-ARP30K-03BG-1RY Clean room compliant, copperfree, fluorine-free, silicone-free Clean room compliant Symbol Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without mounting option With bracket With set nut (For

3 Port Solenoid Valve Metal Seal Series VZ200 1

DXT170-176-2-01 DXT170-176-2-02 100V 200V 100 VAC 200 VAC DXT170-176-2-03 110V 110 VAC DXT170-176-2-04 220V 220 VAC DXT170-176-2-07 DXT170-176-3-51 DXT170-176-3-06 DXT170-176-3-05 DXT170-176-3-53 240V 6VD 12VD 24VD 48VD 240 VAC 6 VDC 12 VDC 24 VDC 48 VDC Circuit with Indicator Light AC circuit DC circuit NL: Neon bulb R: Resister D: Protective diode LED: Light emitting diode R: Resistor 4