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-BU-50-MW 3/8" Polyurethane Tubing 50 ft. - Clear Blue TIUB-11-BU-100-MW 3/8" Polyurethane Tubing 100 ft. - Clear Blue

-BU-50-MW 3/8" Polyurethane Tubing 50 ft. - Clear Blue TIUB-11-BU-100-MW 3/8" Polyurethane Tubing 100 ft. - Clear Blue

-BU-50-MW 3/8" Polyurethane Tubing 50 ft. - Clear Blue TIUB-11-BU-100-MW 3/8" Polyurethane Tubing 100 ft. - Clear Blue

-BU-50-MW 3/8" Polyurethane Tubing 50 ft. - Clear Blue TIUB-11-BU-100-MW 3/8" Polyurethane Tubing 100 ft. - Clear Blue

Pneumatic Circuit 24 11. Exhaust Characteristics,Flow Characteristics, And Time required to reach the specified vacuum 25 11.1. Exhaust Characteristics 25 11.2. Flow Characteristics 26 11.3. Time required to reach the specified vacuum 26 12. Handling Precautions 27 13. Trouble shooting 28 1 - Doc.

No 1 2)3) 4) 5)6) 6) 5)6) 7) O 8) 9) 10) 11) 12) 13) 1 2)3) 4) 14) 15) 10) 11)16) 28 No.ZL3-OM00801-A No 1 ON 10 2) 3) 4) 5) 6) 7) 8) O O 9) 10) 11) 12) 13) 14) 15) ON/OFF 16) 29 No.ZL3-OM00801-A Revision history AUKCA marking added 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com

Option R .11-1 11.1 SAFETY INSTRUCTIONS FOR USE . 11-1 11.2 EARTH LEAKAGE BREAKER SPECIFICATION . 11-1 11.3 CONNECTION OF POWER SUPPLY . 11-2 Chapter 12 Option T . 12-1 12.1 SAFETY INSTRUCTIONS FOR USE . 12-1 12.2 OPERATION / ERROR SIGNAL OUTPUT . 12-1 12.3 REMOTE OPERATION . 12-2 12.4 CONNECT THE POWER CABLE AND SIGNAL CABLE . 12-3 12.5 ELECTRIC CIRCUIT . 12-4 Chapter 13 Option V . 13-1

Option R .11-1 11.1 SAFETY INSTRUCTIONS FOR USE . 11-1 11.2 EARTH LEAKAGE BREAKER SPECIFICATION . 11-1 11.3 CONNECTION OF POWER SUPPLY . 11-2 Chapter 12 Option T . 12-1 12.1 SAFETY INSTRUCTIONS FOR USE . 12-1 12.2 OPERATION / ERROR SIGNAL OUTPUT . 12-1 12.3 REMOTE OPERATION . 12-2 12.4 CONNECT THE POWER CABLE AND SIGNAL CABLE . 12-3 12.5 ELECTRIC CIRCUIT . 12-4 Chapter 13 Option V . 13-1

Air leaks. -18- 11. Dimensions 11-1. PRESSURE SWITCHIS10M-20-D to IS10M-60-D Model IS10M-20-D IS10M-30-D IS10M-40-D IS10M-50-D IS10M-60-D A B C D 28 77.6 60.1 42 31 85.6 64.1 53 39 93.6 68.1 71 47 96.6 69.6 71 62 106.6 74.6 90 11-2.

No.PS-OMX0002-A PRODUCT NAME Digital Pressure Switch ( compatible) MODEL / Series / Product Number ZSE20C(F)-L ISE20C(H)-L Table of Contents Safety Instructions 2 Model Indication and How to Order 9 Summary of Product parts 11 Definition and terminology 13 Mounting and Installation 17 Installation 17 Piping 20 Wiring 22 Outline of Settings [Measurement mode] 24 Pressure Setting 25 3 Step

8.5 13 12.7 2-2.6 (For manifold mounting) 28.1 [35.1] (Light/surge voltage suppressor) 2-2.6 (For mounting) + 14.5 3 23 20 2.3 55.6 [57.8] 12.7 28.1 [35.1] 8 9 M5 x 0.8 (P, R port) 23 7 (Bracket) R P 11 11.5 1.4 (PE port) L plug connector (L): SYJ52-L-M5 (-F) M plug connector (M): SYJ52-M-M5 (-F) DIN terminal (D): SYJ52-D-M5 (-F) M8 connector (M0): SYJ52-W0-M5 (-F) Applicable cable O.D.

thread (mm) A B C D E F G H J K M P Q R S L Bore size (mm) 20 9.5 depth 5.4 51 43 8 12 10 M8 x 1.25 10 6 30 5.5 43 1/8 16.5 6 11.5 25 9.5 depth 5.4 53 45 8 14 12 M10 x 1.5 12 6 36 5.5 49 1/8 17 8 12 32 11 depth 6.5 66 56 10 18 14 M12 x 1.75 15 7 47 6.6 63 1/4 19.5 10 19.5 40 14 depth 8.6 75 65 10 22.4 19 M16 x 2 20 7 52 9 71 1/4 21.5 10 21.5 50 17.5 depth 10.8 81 70 11 28 24 M20 x 2.5 24

SN-032B SN-040B Applicable bore size (mm) 25, 32 40 8 M26 x 1.5 32 37 11 M32 x 2.0 41 47.3 H B 6

I.D. 4 6 2.5 4 5 6 6.5 7.5 8 9 KFE04-00 KFE06-00 KFE08U-00 KFE08N-00 KFE10U-00 KFE10N-00 KFE12U-00 KFE12N-00 12 14 10 12 13 17 50.9 15.5 15.2 1.5 3 1.6 9 37.6 23 34 47 46 67 66 87 85 6 11 17 21 30 35 45 51.3 38 11 4 5 5.5 6.5 7 8 8 17 14 19 52.3 39 13 16.2 10 19 17 22 56.6 42 16 18.8 12 22 19 24 59.5 46 18 19.3 Male run tee: KFY Applicable tube (mm) A Effective orifice (mm 2) Weight (g) H1

M N C D 4-O T Q 2-P E B S K L U W AA A I AP R X AB Y + Stroke J V Z + Stroke AC AD 8-AF AE For standard stroke (mm) Bore size (mm) Stroke range (mm) AC E D AF G AE AD AB AA N M F L K B J AP C H I A 20 25 32 40 50 75, 100, 125, 150, 200 M5 x 0.8 depth 10 16.5 92 60 9.5 depth 6 30 75 11 12 45 25 5.5 80 60 55 108 M8 x 1.25 depth 14 25 24 30 99 M6 x 1 depth 12 16.5 113 65 11 depth 8 30 85 13

port side) / SS3YJ3-S41Stations -M3 26.1 L1 + + + + + 3.5 L2 (Light/surge voltage suppressor) 11 P R P R 26.6 22 48.8 [51] Approx. 300 (Lead wire length) L1 2-3.5 (For mounting) L2 3.5 Manual override Manual override (Pitch) P=10.5 12.5 Approx. 300 (Lead wire length) 5 M5 x 0.8 (P, R port) 2-3.5 (For mounting) 48.8 [51] P R 26.6 P R 13 22 (Station n) (Station 1) 11 (Pitch) P=10.5 12.5 4.5

The display accuracy Refer to Trouble No.11 does not meet the specifications. The Display Refer to Trouble No.12 measurement unit cannot be changed. Buttons do not work. Refer to Trouble No.13 Refer to Trouble No.14 -74No.PS-OMV0004-H Troubleshooting list Problem No.

SPECIFICATIONS OF BOWL ASSEMBLY 11-18 10. REPLACEMENT PROCEDURE 19-22 11. DISASSEMBLY DRAWING 23 12. DIMENSIONS 24 Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

I.D. 3 x Applicable tubing 1/8" (3.18) 0.086" (2.18) KFG2T0122-00 11 1.1 7 8 13.3 5 1.5 d H2 H2 H2 H1 0.098" (2.5) 5/32" (4) KFG2T0325-00 11 1.6 7 8 13.3 5 1.8 M 1/4" (6.35) 5/32" (3.95) d KFG2T0704-00 26 6 10 12 16.5 6 3.3 L 5/16" (8) 0.236" (6) KFG2T0906-00 39 17 12 14 18.7 6.6 5.3 M L M L 3/8" (9.53) 1/4" (6.35) KFG2T1163-00 70 19 15 17 22.2 7.6 5.6 1/2" (12.7) 3/8" (9.53) KFG2T1395-00

Note 11) If the product is used at altitude of 1000 m or higher, refer to Operating Environment/Storage Environment (page 210) Item 14 * For altitude of 1000 m or higher. 200 A Thermo-chiller Basic Type HRSE Series Note 1) If the product is used at altitude of 1000 m or higher, refer to Operating Environment/Storage Environment (page 210) Item 14 * For altitude of 1000 m or higher.