ISA2

2.5 10 m 1.2 Response time (sec) Response time (sec) 8 m 2 0.9 5 m 8 m 1.5 0.6 5 m 1 3 m 3 m 0.3 0.5 1 m 0 0.02 0.04 0.06 0.08 0.1 0.12 0.14 0.16 1 m 0 0 0 0.05 0.1 0.15 0.2 0.25 0.3 0.35 Detection distance (mm) Detection distance (mm) Piping tubing lengthResponse time Piping tubing lengthResponse time Nozzle Shape Please keep the nozzle shape as illustrated below.

Bag Filter

B to Nominal filtration accuracy of 5, 10, 25, 50, 100 m can be selected.

CEx-OMQ0011

100 100 50 50 0 0 0 5 m/s m/s 19 4-3.

Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

H MM NN MQ10-M MQ16-M MQ20-M MQ25-M MQ28-M 10 M5 x 0.8 M3 x 0.5 10.5 16 M6 x 1.0 M4 x 0.7 11.5 20 M8 x 1.25 M5 x 0.8 13.5 25 M10 x 1.25 M6 x 1.0 16.5 30, 40 M14 x 1.5 M8 x 1.25 22.5 Clevis pin d Dd9 m m l t L t Applicable bore size (mm) Applicable snap ring Part no.

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

(25P) kit, with 3.0 m cable D-sub connector (25P) kit, with 5.0 m cable Flat ribbon cable (26P) kit, without cable Flat ribbon cable (26P) kit, with 1.5 m cable Flat ribbon cable (26P) kit, with 3.0 m cable Flat ribbon cable (26P) kit, with 5.0 m cable Flat ribbon cable (20P) kit, without cable F kit U side D side 16 stations 1 to 12 stations 24 D side D-sub connector kit P kit Note 1)

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

0.39 0.45 0.46 0.48 0.47 0.66 1.1 1.2 0.14 0.18 0.32 0.33 0.45 0.45 0.41 0.37 47 51 M5 x 0.8 46 68 N.O.

240

Lead wire length symbols: 0.5 m Nil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ Refer to page 28 for applicable auto switches other than listed above. For details about auto switches with pre-wired connector, refer to pages 1192 and 1193. Auto switches are shipped together, (but not assembled).

IDU/IDF

Note 4) Combinations of M and H, H and M, R and S, S and T, L and M are not available.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

Content 10 MXP10-PS No. 19 above (2 sets) 12 MXP12-PS 16 MXP16-PS 6 Series MXP Dimensions MXPJ6 4-M3 x 0.5 depth 3 7 5 H 3 D B 18 1 0.05 3.5 16.5 14 13 20 6 F 6 6 5 2-M4 x 0.7 Piping port 13.5 Prepared hole dia. 3.3 2-M3 x 0.5 (Plug: M-3P) 17 0.05 Mounting reference planes B D M Stroke: S 1 5 J Z 2.4 Piping port 2-M3 x 0.5 (mm) MXPJ65 MXPJ6-10 SMXPJ6, #1 SMXPJ6, #2 F H J M S Z Model 25 38

OMR0032

Specifications LAT3-10 Stroke 10 mm, Resolution 30 m LAT3-20 Stroke 20 mm, Resolution 30 m Card Motor 8 options LAT3-30 Stroke 30 mm, Resolution 30 m (Refer to the table Product LAT3M-50 Stroke 50 mm, Resolution 5 m Number on the right) LAT3F-10 Stroke 10 mm, Resolution 1.25 m LAT3F-20 Stroke 20 mm, Resolution 1.25 m LAT3F-30 Stroke 30 mm, Resolution 1.25 m LAT3F-50 Stroke 50 mm, Resolution

Pin Clamp Cylinder Series CKQ/CLKQ

(Example) Nil Lead wire length 0.5 m 3 m L 5 m Z None N Applicable for the connector type (D-C) only. Note 1) Applicable auto switch with 5 m lead wire (Z) Reed switch: D-A73(C)(H)/A80C Solid state switch: Manufactured upon receipt of order as standard.

AC Servo Motor Driver (CC-Link Type)

/speed specifying system selection 0h PC31 LMPL Software limit 0 10STM m PC32 LMPH 0 10STM m PC33 LMNL Software limit PC34 LMNH (3) [I/O setting parameters (No.

NVZ1000//3000/5000 4,5 Port Solenoid Valve/Rubber Seal Type

) Lz @ NVZ5000 Type 41 Manifold.,/ Side Ported inch (mm crommEt (c) (H) L typ plug connsctor (L) : M type plug connector (M) ., I : With indicator lignt and surge voltage suppresso 17.24 (438) L1 Lz i6.14 (410) @ NVZ5000 inch (mm) Tgpe 42 ilIanifold,l Side Ported Grommet (G) (H) Examde pneumalic cirEuit diagram L typs plug connector (L) M type plug connector (M) with filter lll : With indicator

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) Lz @ NVZ5000 Type 41 Manifold.,/ Side Ported inch (mm crommEt (c) (H) L typ plug connsctor (L) : M type plug connector (M) ., I : With indicator lignt and surge voltage suppresso 17.24 (438) L1 Lz i6.14 (410) @ NVZ5000 inch (mm) Tgpe 42 ilIanifold,l Side Ported Grommet (G) (H) Examde pneumalic cirEuit diagram L typs plug connector (L) M type plug connector (M) with filter lll : With indicator

1

Lead wire length symbols: 0.5 m Nil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ The auto switch is shipped together, but not assembled.

AC Servo Motor Driver (CC-Link Type)

Symbol Name PA06 CMX Electronic gear numerator 1 0 to 65535 PA07 CDV Electronic gear denominator 1 1 to 65535 Set the values as follows. 1 [PA06] M = 1000 [PA07] Actuator lead (L) [mm] n1/n2 M : [Servo motor resolution : 262144(Pulse/rev)] n1/n2: Pulley ratio *1 EX.)

Series MXP Precision Air Slide Table

Lead wire length(m) 0.5 (Nil) Auto switch part no.

Compact

Please contact SMC for water resistant products. * Lead wire length symbols: 0.5 m Nil (Example) M9NW 1 m M (Example) M9NWM Water resistant (2-color indicator) 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ * Solid state auto switches marked with are produced upon receipt of order. * There are other applicable auto switches than listed above.

3-Position Rotary Table

Lead wire length symbols: 0.5 m Nil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ Refer to pages 837 and 838 for the details of solid state auto switch with pre-wired connector. Auto switches are shipped together, (but not assembled).

Compact Vacuum Ejector Series ZQ

Left Right 15 -60 -60 10 -40 -40 Air consumption -20 -20 5 S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H S 1 S 2 R U NL HL H S 1 S 2 R U NL HL H S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H S 1 S 2 R U N L HL H kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE SET1 SET2 kP a M O DE