IC

0 q CONTROLLER PRESSURE OUT w e w r RUN 4 3 2 1 F.R.L. CH kPa 4 3 2 1 SW t e AV y D-IN RUN UP SET P-ON AU DOWN STOP READ r u AF i AR o Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com t y u i o IR !

IDUS/IDFS

(C) 50 55 60 65 70 80 15 15 15 15 15 15 10 10 10 10 10 10 5 5 5 5 5 5 1.64 1.37 1.30 1.23 1.16 1.09 1.26 1.05 1.00 0.95 0.89 0.84 0.88 0.74 0.70 0.66 0.62 0.59 30 1.56 1.30 1.24 1.17 1.11 1.04 1.20 1.00 0.95 0.90 0.85 0.80 0.84 0.70 0.67 0.63 0.60 0.56 32 1.50 1.25 1.19 1.12 1.06 1.00 1.15 0.96 0.91 0.86 0.82 0.77 0.81 0.67 0.64 0.60 0.57 0.54 35 1.40 1.17 1.11 1.05 0.99 0.94 1.08 0.90 0.86

Stainless Steel Heat

(C) 50 55 60 65 70 80 15 15 15 15 15 15 10 10 10 10 10 10 5 5 5 5 5 5 1.64 1.37 1.30 1.23 1.16 1.09 1.26 1.05 1.00 0.95 0.89 0.84 0.88 0.74 0.70 0.66 0.62 0.59 30 1.56 1.30 1.24 1.17 1.11 1.04 1.20 1.00 0.95 0.90 0.85 0.80 0.84 0.70 0.67 0.63 0.60 0.56 32 1.50 1.25 1.19 1.12 1.06 1.00 1.15 0.96 0.91 0.86 0.82 0.77 0.81 0.67 0.64 0.60 0.57 0.54 35 1.40 1.17 1.11 1.05 0.99 0.94 1.08 0.90 0.86

Stainless Steel Heat Exchanger Type Air Dryer Series IDUS/IDFS

Condition Condition Inlet air temperature 35 C Outlet air pressure dew point 10 C Ambient temperature 35 C Inlet air pressure 0.5MPa Air flow 1200 l/min (ANR) Inlet air temperature 55 C Outlet air pressure dew point 10 C Ambient temperature 35 C Inlet air pressure 0.7MPa Air flow 350 l/min (ANR) A = 0.75 based on conditions q, w and e 1 B = 0.95 based on conditions q, w and e 1 C = 1.00 based

Compact

0.06 ST 15, 20 0.04 0.04 ST 15, 20 0.04 ST 5, 10 0.02 0.02 0.02 ST 5, 10 0.00 0 5 10 15 0.00 0 5 10 15 0.00 0 5 10 15 Load [N] Load [N] Load [N] MXZ16 MXZ16 MXZ16 0.15 0.15 0.15 Table displacement [mm] Table displacement [mm] Table displacement [mm] ST 25, 30 ST 25, 30 ST 25, 30 ST 15, 20 0.10 0.10 0.10 ST 15, 20 ST 15, 20 ST 5, 10 0.05 0.05 0.05 ST 5, 10 ST 5, 10 0.00 0 5 10 15 20 25 0.00

Air Cylinder Series MB

30 + 55 n = 2,4,6,8... 15 + 55 n = 2,4,6,8... 25 + 55 n = 2,4,6,8... n (same side) 1 30 10 25 2 (different side or same side) 1 D-Z7 D-Z80 D-Y59 D-Y7P D-Y7 W 15 (n2) 2 15 + 40 n = 2,4,6,8... n side 2 (different side or same side) 1 10 D-Y69 D-Y7PV D-Y7 WV (n2) 2 10 + 30 n = 2,4,6,8... n 2 (different side or same side) 1 20 D-Y7BAL (n2) 2 20 + 45 n = 2,4,6,8... n 2 (different side or same

Transfer

Bore size (mm) Tightening torque 3 25 5 32 10 40 Tightening Torque for Stroke Adjusting Unit Lock Plate Holding Bolts (Nm) Bore size (mm) Bore size (mm) Tightening torque Shock absorber model 25 1.2 25 RB1007 D32 3.3 32 RB1412 40 3.3 40 RB1412 -X 713 ML2B Series Construction @0 i !9 !8 !7 !1 r #5 @3 @8 #6 y u t !5 #7 #8 @6 w !6 e &0 q &0 #4 #3 $8 $0 %9 ^0 #9 $6 $7 %9 !2 #1 !3 $9 %0 %1 !

AC Servo Motor Driver (SSCNET Type)

5 2.86 20 10 5 Parameter *1,*2 Para.

PF2D

2 w y r !0 e New PFA q Body New PFA w Sensor Super PFA e Tube PPS r Housing A PPS t Housing B PPS y Housing C POM u Bushing PPS i Cap FKM o Gasket FKM !0 O-ring Stainless steel 304 !1 Thread PVC !2 Lead wire !1 q t i PF2D540 o !0 u !0 !2ywr e !

CRB2-OM00001

speed and seconds of arc are found as follows. x t (1) t d t 1 / 2 t + C (2) C is integration constant.

Centering Unit

PE Q S T U W MACM2 X114 68 74 76 10 27.4 12 34 X115 52 6 62 X116 50 4 30 46 60 64 22.5 MACM4 X114 86 90 90 72 78 32.5 50 19 32 20 33 X115 56 6 78 40 X116 54 4 40 6.6 12 19 17 18 M5 7 MACM6 X114 118 125 125 97 113 33.8 53 28 33.3 30 43 X115 59 6 98 60 X116 57 4 60 MACM10 X114 185 197 198 11 152 182 18 53.8 77 31 24 13 0 53.3 50 70 X115 83 6 108 X116 81 4 5 Centering Unit MACM Series

Vacuum Pad: Ball Joint Type

Parts ZPT Series ZPR Series Pad Diameter: 10 to 32 Pad Diameter: 10 to 32 r Buffer r Buffer t Adapter e Adapter q Pad q Pad With buffer With buffer Pad Diameter: 40, 50 Pad Diameter: 40, 50 r Buffer r Buffer e Adapter t Adapter Lock ring Lock ring q Pad q Pad With Buffer With Buffer Description Material Note Compornent Parts No.

AMH

Option J: With drain guide Bracket (Option) female thread T: With element service indicator Maintenance space Drain Element service indicator Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G H 10 10 10 10 10 10 10 10 10 I 56 66 66 80 80 90 90 100 150 J 15 20 17 22 19 25 21 30 40 K 5 8 8 8 8 10 10 10 15 L 9 12 12 14 14 14 14 16 20 M 5.5 6 6 7 7 9 9 9 11 N 35

MHK2

7 w o Open condition Normally open !9 t y !5 !6 i u q r !1 !0 Closed condition Normally closed !2 !3 !4 Component Parts Material Material Note Note No. q w e No. i o !0 !1 !2 !3 !4 !

MHK2

10 MHW 0.3 MPa 0 0 MRHQ 10 20 30 40 50 10 20 30 40 50 60 60 Gripping point L (mm) Gripping point L (mm) Misc.

Series 12-REA Sine rodless cylinder

N K W N S + Stroke F F NA R ZZ + Stroke 43 35 29 22 20.5 27.8 D Model Port size K NN B L MM x J N NA H 16 15 10 I 46 36 30 NB 19 17 17 T S 11 9 8 G ZZ 10 8 8 R 60 50 50 W 16 16 13 F 40 40 30 X 12-REA40 12-REA32 12-REA25 Rc, NPT, G 1/8 Rc, NPT, G 1/8 Rc, NPT, G 1/4 70 60 46 M26 x 1.5 M26 x 1.5 M32 x 2.0 21 17 15 50 40 34 19 15 13 150 124 111 182 156 137 92 80 70 M5 x 0.8 x 8 M6 x 1.0 x8 M6

Wedge Cam Operation Provides

7 e w o Fingers open Normally open !9 t y !5 i u !6 q r !0 !1 !2 Fingers closed Normally closed !4 !3 Component Parts Component Parts Note Material Material Note No. q w e t y u No. i o !0 !1 !2 !3 !4 !

Series KDM Rectangular Multi-connector

Two types, with 10 and 20 connector tubes, are available. Usable from vacuum (10 torr) to 145psi {1MPa} Irregular shape permits engagement in a proper position. One-touch tube connection One-touch fittings substantially cuts down man-hour for piping. Model . o N t r a P h c n I . o N t r a P c i r t e M e b u T . D .

Round Type Hydraulic Cylinder

1 u t w y CHK CHN CHM CHM CHS CH2 o !

4 Port Direct Operated Poppet Solenoid Valve Series VQ D1000

/W valve for vacuum applications.