Adsorption Plate

Adsorption surface size 9 SP1130 SP1230 50 x 50 80 110 20 50 65 95 70 5 100 x 100 130 160 20 100 115 145 95 A D Rc 1/8 (Suction port) C F F B D G E E 8 x 5.5 drill Element fixing nut N pcs. 9.5 depth of counter bore 7 (mounting hole) A B C D E F G N Part no.

Round Type Low Pressure Hydraulic Cylinder Series CH
M

HS Auto switch 36 12 24.5 SMC SMC A 33 B Auto switch 49.5 A B G 1/2 (applicable cable O.D. 6.8 to 11.5) Proper auto switch mounting positions (mm) D-H7 D-H7C D-H7W D-H7BAL D-C7 D-C8 D-C73C D-C80C D-G39 D-K39 D-A33, D-A34 D-A44 D-B5 D-B6 D-G5NTL D-H7F D-B59W Bore size (mm) A A B A A A A B A B B B B B 20 14 10 8.5 12 10.5 14 9 15 13 12 6.5 8.5 12 7 25 14.5 12.5 9.5 9 11 14.5 9.5 12.5 15.5 11.5

MHS

/ MHSH3-32DA MHSH3-40DA MHSH3-50DA MHSH3-63DA MHSH3-80DA mm 12 20 25 32 40 MPa 0.20.6 0.10.6 -1060 c.p.m. 60 30 mm 5 5 10 10 15 N 1 45 130 204 335 524 g 530 770 1,330 2,300 4,000 1) 0.5MPa MHSH3-32DB MHSH3-40DB MHSH3-50 DB MHSH3-63 DB MHSH3-80 DB mm 5 5 10 10 15 N 6~10 11~15 20~25 29~34 49~59 g 500 740 1,290 2,250 4,000 g 32 40 50 63 80 MHSHJ3-D 430 600 1,020 1,710 3,040 MHSHJ3

Compact

SMC'S LC6 ddver does not have Open Loop Control q/stem open loop control system is a positioning There is no positlr confrmatlr feedback from the rnotor itseli See also Ctosed L@g Contol Svstem. servo sy$em E a A servo mechanism will delect and attempt to correct devialions from the desid outsut.

125

How to Order Sub-plate and Base Gasket Body size 22 42 VEX VEX VEX1 2 9 A VEX4 2A 1 A Port size Thread type Port size Thread type Symbol Port size A 1/8 B 1/4 Symbol Thread type Nil Rc F G N NPT T NPTF Symbol Port size A 1/4 B 3/8 C 1/2 Symbol Thread type Nil Rc F G N NPT T NPTF Sub-plate Base gasket VEX1 11 2 VEX4 4 Options/Part Number Description Part number VEX312-01 02 VEX322-01 02 VEX33202

EXxx-OMN0035CN

0 V ) 8 () DC24 V Class22 A 0.5 A/ 2 A/ 0.081.5 mm 2(AWG1628) 50 mA 60 mA IP40() -1050 1 -2060 3585RH() AC500 V1 FE DC500 V10 M FE 3(UL508) CE UL(CSA)RoHS 300 g 300 g 1UL 050 -54No.EX-OMN0035CN-A (EX600-DME) 1 2 3 4 5 6 7 8 0 1 2 3 4 5 6 7 Bit 0 Bit 1 Bit 2 Bit 3 Bit 4 Bit 5 Bit 6 Bit 7 14 15 16 17 18 19 20 21 0 1 2 3 4 5 6 7 Bit 0 Bit 1 Bit 2 Bit 3 Bit 4 Bit 5

V100

0.8 2 port M5 x 0.8 Note) V114(A) and V124(A) cannot be mounted to the same manifold.

Flow Rate Range: 11 [2 to 100 (50 for CO2) ℓ/min], Flow Adjustment Valve: Yes, Port Size: Rc1/4, Piping Entry Direction: Straight, Output Specification: G [1 NPN Outputs + External Input], Unit Specification: Unit Switching Function, Instruction Manual: With Instruction Manual, Calibration Certificate: w/Calibration Certificate, Connector: w/o Lead Wire w/Connector, Option: Panel Mount Adapter

Valve; w/Stop Valve), Supply/Return Port Size: 04 (1/2), Return Unit Flow Switch Output Specifications: A (Out 1: NPN; Out 2: Flow Rate: NPN; Temp.: None; Temperature Sensor: None), Lead Wire: w/Lead Wire and M8 Connector, 3 m, Return Unit Flow Switch Unit Specifications: G (Remote Sensor: L/min/gal/min; °C; Integrated Display: gal/min; Accumulated Flow: gal; Temp.: °C)

Rated Flow Range: 20 (2 to 16 L/min), Flow Adjustment Valve: None, Thread: Rc, Port Size: 03 (3/8), Output Specification: A (OUT1: NPN; OUT2: NPN), Temperature Sensor: None, Lead Wire: Lead Wire w/M8 Connector, 3m, Unit Specification: G (Instantaneous Flow Rate: Gal/min; Accumulated Flow: Gal; Temp: °C), Bracket: None, Calibration Certificate: None, Made to Order: X109 (EPDM Seal Material

Rated Flow Range: 04 (0.5 to 4L/min), Flow Adjustment Valve: None, Thread: Rc, Port Size: 03 (3/8), Output Specification: A (OUT1: NPN; OUT2: NPN), Temperature Sensor: None, Lead Wire: Lead Wire w/M8 Connector, 3m, Unit Specification: G (Instantaneous Flow Rate: Gal/min; Accumulated Flow: Gal; Temp: °C), Bracket: None, Calibration Certificate: None, Made to Order: X109 (EPDM Seal Material

Rated Flow Range: 20 (2 to 16 L/min), Flow Adjustment Valve: None, Thread: Rc, Port Size: 04 (1/2), Output Specification: A (OUT1: NPN; OUT2: NPN), Temperature Sensor: None, Lead Wire: Lead Wire w/M8 Connector, 3m, Unit Specification: G (Instantaneous Flow Rate: Gal/min; Accumulated Flow: Gal; Temp: °C), Bracket: None, Calibration Certificate: None, Made to Order: X109 (EPDM Seal Material

Rated Flow Range: 40 (5 to 40 L/min), Flow Adjustment Valve: None, Thread: Rc, Port Size: 04 (1/2), Output Specification: A (OUT1: NPN; OUT2: NPN), Temperature Sensor: None, Lead Wire: Lead Wire w/M8 Connector, 3m, Unit Specification: G (Instantaneous Flow Rate: Gal/min; Accumulated Flow: Gal; Temp: °C), Bracket: None, Calibration Certificate: None, Made to Order: X109 (EPDM Seal Material

Rated Flow Range: 40 (5 to 40 L/min), Flow Adjustment Valve: None, Thread: Rc, Port Size: 06 (3/4), Output Specification: A (OUT1: NPN; OUT2: NPN), Temperature Sensor: None, Lead Wire: Lead Wire w/M8 Connector, 3m, Unit Specification: G (Instantaneous Flow Rate: Gal/min; Accumulated Flow: Gal; Temp: °C), Bracket: None, Calibration Certificate: None, Made to Order: X109 (EPDM Seal Material

Stations: 5 Stations, Piping: U Side: Open; D Side: Open, Thread Type: NPT, Supply Unit Components: w/Flow Adj. Valve; Stop Valve: None, Return Unit Flow Switch: Integrated Display, Return Unit Flow Range: 2 to 16 L/min, Return Unit Components: w/o Flow Adj. Valve; w/Stop Valve, Supply/Return Port Size: 1/2, Return Unit Flow Switch Output Specifications: Out 1: NPN; Out 2: Flow Rate: NPN;

Rated Flow Range: 2 to 16 L/min, Flow Adjustment Valve: None, Thread: Rc, Port Size: 3/8, Output Specification: OUT1: NPN; OUT2: NPN, Temperature Sensor: None, Lead Wire: Lead Wire w/M8 Connector, 3m, Unit Specification: Instantaneous Flow Rate: Gal/min; Accumulated Flow: Gal; Temp: °C, Bracket: None, Calibration Certificate: None, Made to Order: EPDM Seal Material

Rated Flow Range: 0.5 to 4L/min, Flow Adjustment Valve: None, Thread: Rc, Port Size: 3/8, Output Specification: OUT1: NPN; OUT2: NPN, Temperature Sensor: None, Lead Wire: Lead Wire w/M8 Connector, 3m, Unit Specification: Instantaneous Flow Rate: Gal/min; Accumulated Flow: Gal; Temp: °C, Bracket: None, Calibration Certificate: None, Made to Order: EPDM Seal Material

Rated Flow Range: 2 to 16 L/min, Flow Adjustment Valve: None, Thread: Rc, Port Size: 1/2, Output Specification: OUT1: NPN; OUT2: NPN, Temperature Sensor: None, Lead Wire: Lead Wire w/M8 Connector, 3m, Unit Specification: Instantaneous Flow Rate: Gal/min; Accumulated Flow: Gal; Temp: °C, Bracket: None, Calibration Certificate: None, Made to Order: EPDM Seal Material

Rated Flow Range: 5 to 40 L/min, Flow Adjustment Valve: None, Thread: Rc, Port Size: 1/2, Output Specification: OUT1: NPN; OUT2: NPN, Temperature Sensor: None, Lead Wire: Lead Wire w/M8 Connector, 3m, Unit Specification: Instantaneous Flow Rate: Gal/min; Accumulated Flow: Gal; Temp: °C, Bracket: None, Calibration Certificate: None, Made to Order: EPDM Seal Material

Rated Flow Range: 5 to 40 L/min, Flow Adjustment Valve: None, Thread: Rc, Port Size: 3/4, Output Specification: OUT1: NPN; OUT2: NPN, Temperature Sensor: None, Lead Wire: Lead Wire w/M8 Connector, 3m, Unit Specification: Instantaneous Flow Rate: Gal/min; Accumulated Flow: Gal; Temp: °C, Bracket: None, Calibration Certificate: None, Made to Order: EPDM Seal Material