LEH_C

1 1.5 1 40 40 3 3 3 3 5 5 5 K K 5 (mm) NPN NPN 10 LECP6 ( PNP PNP 4 4 10 LECP1 1 LECP1 ( 1 NPN NPN 6 6 16 16 1P 1P PNP PNP 20 10 20 10 25 14 25 14 AN LECPA ( AP AN LECPA NPN NPN A A 32 22 32 22 AP PNP PNP B B (m) 40 30 40 30 C C 8 8 8 8 A A 1.5 1 1.5 1 10 10 B B 3 3 3 3 15 15 ( C C 5 5 5 20 20 F F 5 () () R R S S A B C / P.42 7.3 (NPNPNP) 12 - 2.1.3 3 10 2 5 1 4 7 6

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

-M9NL 7.

RB/RBL/RBQ

RB(C)0805 RB(C)0806 RB(C)1006 RB(C)1007 RB(C)1411 RB(C)1412 Model RB(C)2015 RB(C)2725 O.D. thread (mm) M8 x 1.0 M10 x 1.0 M14 x 1.5 M20 x 1.5 M27 x 1.5 Thread prepared bore (mm) 9.1 + 0.1 0 18.7 + 0.1 0 7.1 + 0.1 0 12.7 + 0.1 0 25.7 + 0.1 0 Tightening torque (Nm) 1.67 3.14 10.8 23.5 62.8 Operating Environment 2.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

Connector block assembly 7 Connector block assembly part numbers Connector specifications Part no.

Multi-Axis Step Motor Controller

5 ENC c Encoder connector (16 pins) Axis 3: Connect the actuator cable. !6 MOT c Motor power connector (6 pins) !7 ENC v Encoder connector (16 pins) Axis 4: Connect the actuator cable. !8 MOT v Motor power connector (6 pins) !

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

37.5 32 32 39.5 42.5 5.4 5.4 7 10 6 8 10 12 25 29 36 40 5 5 5.5 5.5 32 38 47 52 5 6 8 10 3.5 3.5 4.5 5 15.5 20 25.5 28 6.5 6.5 9 9 7 7 10 10 4 4 7 7 0.5 0.5 1 1 3.5 3.5 5.4 5.4 5, 10 For the following bore/stroke sizes, through-hole is threaded over the entire length.

MK

7 !8 !

•

j A AulO switch o o c: C' iii' JJ o Q, .J!

MLGP

9 @7 #9 #5 i o @5 #5 #9 @7 !9 i @5 o Section B-B' Section B-B' @5 !8@6!7 @5@6!7 !

MLGP

7 !8 !

MHZ2/MHZJ2

A C width across flats D Model A B C MHZ2-10D-X46 MHZ2-16D-X46 MHZ2-20D-X46 MHZ2-25D-X46 9 11 4.5 5.2 7.5 13 7 5.8 10 15 7 6 10.7 20 7 6.2 Refer to pages 4 through 7 for the standard type dimensions, which are the same except for those shown above. Reference value to establish criteria for needle adjustment.

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

L2 + 2 3 to 4 15 4.5 to 18 X-3 L1 + 1.5 D2 = E2 = E4 = C2 = C 30 L3 = X = 3 to 6 7 to 13 Y 5 L2 + 3 3 to 5 20 5 to 20 X-3.5 L1 + 2 CRJ L1 = 40 3 to 6 8 to 15 Y 5.5 L2 + 3 3 to 6 30 7 to 22 X-5 L1 + 3 CRA1 CRQ2 Double Shaft MSQ Symbol: A13 Applicable to single vane type only Symbol: A16 Applicable to single vane type only MSZ Shaft with through-hole Not available for size 10.

3 Port Solenoid Valve

wire AWG#26) 3.5 27 6 26 23.5 20.5 3 9.5 28.5 3.5 4 Series S070 Dimensions Base mounted with screws S070B-G-M5 Grommet type 16.5 3 7 15 21 2-3.4 Mounting hole 150 (lead wire AWG#26) 22 5 6 22 20.5 3 2 1 11 7 6 5 12 12.3 12 25 M5 0.8 3 (EXH) port M5 0.8 2 (OUT) port M5 0.8 1 (SUP) port S070B-C-M5 Plug lead type 0.1 W with power saving circuit 6 150 (lead wire AWG#26) 3.5 27 27.5 25 22

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

Cord O.D.: 3.5 to 7 (Reference) 0.5 mm2, 2-core or 3-core, equivalent to JIS C 3306 Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors Ground nut Tightening torque 1.65 to 2.5 Nm Holding screw Tightening torque 0.4 Nm DIN Terminal Type Y Washer DIN connector type Y is a DIN connector that conforms to the DIN pitch 8-mm standard.

High Power Cylinder Series RHC

2-A 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 2-B 6 1/8,1/4 500 1.5 0 1,000 2,000 3,000 6 1/4, 3/8 10 1/4, 3/8 Maximum speed Vmax [mm/s] 1000 3 25 20 1500 4.5 Composite effective area So [mm] Composite effective area So [mm] Composite effective area So [mm] 10 1/4,3

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

+ Stroke Relief port With air cushion Cushion valve (Width across flats WH) WA GA RA Relief port M5 x 0.8 WB 20 10 S + Stroke ZZ + Stroke (mm) AL Bore size Stroke range 1 2 A GB I J MM P S ZZ K NA C H RA B1 KA D H1 E F GA Standard Long 20 25 32 40 50 63 80 100 35 40 40 50 58 58 71 71 5 5.5 5.5 6 7 7 10 10 24 29 35.5 44 55 69 86 106 7 7 7 9 10 10 10 10 0 0 0 10 10 10 10 10 15.5 19.5 19.5

rep-filter-e

Pressure Control Equipment (c) Good condition (d) Bad condition (e) Good condition (f) Bad condition Fig. 5 Tightening condition 7. Adjustment Method for Mounting Other Elements 7-1.

Industrial Filters Replacement Procedure

Pressure Control Equipment (c) Good condition (d) Bad condition (e) Good condition (f) Bad condition Fig. 5 Tightening condition 7. Adjustment Method for Mounting Other Elements 7-1.

energy saving effect

Q = qm x C x (T2 T1) x qv x C x iT 60 1 x 70 x 4.186 x 103 x 4.0 60 = = qm x C x (T2 T1) 860 Q = = 19535 [J/s] 19535 [W] = 19.5 [kW] x qv x 60 x C x iT 860 = Cooling capacity = Considering a safety factor of 20%, 19.5 [kW] x 1.2 = 23.4 [kW] 1 x 70 x 60 x 1.0 x 103 x 4.0 860 = Thermo-chiller T1: Outlet temperature Q: Heat generation amount 1680 [cal/h] 860 Users equipment = T = T2 T1

ITV

P3020114 Flat bracket INI-398-0-6 L-bracket Straight type 100 TM-4DSX3HG4 Right angle type Cable connector 15 25 TM-4DLX3HG4 7 R 3.5 (10) 30 2.3 40 52 (7) 36 F.R.L. 50 36 84 4 5.5 4 7 50 AV 36 7 AU 36 7 70 20 60 AF 12 4 5.5 AR Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com