Vacuum Unit Ejector / Vacuum Pump System

ZK2-OM01301 2.

Electric Actuator / Guide rod Slider

JOG Drive c. Driving stop: Servo Off Select test Select OK (2) (1) (1)SVRE lighting is confirmed (2) Select Return to ORIG End side Motor side Clicking arrow button Operation End Side Motor side Caution If an alarm is generated When (1)ALARM is generated, release it by selecting (2)Reset.

ZR

Rc 1/8 P port (Air supply port) 2 2 1 Ejector Bracket B Bracket B Note) 1 Dimensions for mounting bracket B 2 2 2 Dimensions for mounting spacer B Spacer B is used to leave space for maintenance (for replacement of silencer etc.) on side mounting.

Guide Cylinder Series MGG

-X Stainless steel Holder Type C retaining ring for hole Nickel plated Carbon tool steel Individual -X Bracket Stainless steel Shock absorber 369 Series MGG Construction 63 to 100/MGGB #3 !5 #6 q t #8 !4 !7 @2 @3 @4 r y e #7 u o !1 i w !8 #4 !6 A #2 !0 !9 @0 @1 #1 A' Ball bushing bearing #5 @5 #0 @8 !7 @6 !3 #8 !2 @1 !

Round Type Hydraulic Cylinder

(n 2) 2 20 + 35 55 + 35 (n 2) (n = 2, 3, 4, 5) D-M9 5 20 CHQ 55 (n = 2, 4, 6) Note 3) (n 2) 2 55 + 35 (n 2) (n = 2, 3, 4, 5) 20 + 35 D-M9W 10 20 55 CHK (n = 2, 4, 6) Note 3) (n 2) 2 60 + 35 (n 2) (n = 2, 3, 4, 5) 25 + 35 D-M9A 10 25 60 CHN (n = 2, 4, 6) Note 3) (n 2) 2 50 + 35 (n 2) (n = 2, 3, 4, 5) 15 + 35 D-A9 5 15 50 CHM CHM (n = 2, 4, 6) Note 3) (n 2) 2 35 + 35 (n 2) (n = 2,

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

How to Order Applicable Valves VQ 2 0 5 0 Y 1 B Series VQ2000 A B C D Type of actuation Function Manual override Non-locking push type (tool required) Slotted locking type (tool required) Knob locking type (manual type) C D A Specifications Symbol 1 2 3 4 5 2 position single 2 position double 3 position closed center 3 position exhaust center 3 position pressure center DC Nil B C Nil Standard

Profi-E

Pow er suppl y G N D Bl ue connect or ( Pl ug) 2 N . C. N . C. 3 Com m uni cat i on connect or ( Socket ) ( N ot e 2) RXD /TXD _N A G reen 4 5 N . C. 2 RXD /TXD _PB Red N . C. N ot e 1. W i re col or w hen SM C cabl e i s used. N ot e 2. SM C s PCA1557691 ( cabl e w i t h shi el d) i s recom m ended as t he com m uni cat i on cabl e.

One-touch Fittings Series KQ2

1 S 2 0 3 1 T 2 Q K 7 1 7 . 1 2 7 1 8 2 5 . 1 3 5 . 6 3 2 2 9 4 3 2 / 1 8 / 3 S 3 0 3 1 T 2 Q K 5 . 3 3 5 . 8 3 6 . 9 3 4 2 / 1 S 4 0 3 1 T 2 Q K 2 2 5 . 7 3 0 4 9 6 32 Series KQ2 One-touch Fittings Union tee: KQ2T Inch e l b a c i l p p A .

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

N.O. 1 (P) 5 (R1) 3 (R2) 3 position exhaust center 4 position dual 3 port valve (A) 4 position dual 3 port valve (C) (A) 4 (B) 2 4 2 4 2 5 3 1 5 3 1 1 (P) 5 (R1) 3 (R2) N.C. N.O. N.C.

Title not found

(n-2) Same 5s+50(n-2) n=1,2,3,4,, 75+so(n-2) n=2,4,6,8.., B0+50(n-2) 1=2,4,6,4... s0+50(n-2) n=2.4.6.8... with 1 1 0 80 90 40 rr3.5 49 55.5 42 50 B I (O) 10(6.5 7 1 . 5 84.1 92.5 't!

CC-Link-E

C.

Plug-in/Plug Lead: Single Unit

VQ0 Flow Characteristics at the Number of Manifold Stations (Operated individually) VQ4 Model Passage/Stations Station 5 Station 1 Station 10 VQ5 11 11 11 C [dm3/(sbar)] 0.24 0.24 0.24 1 4/2 (P A/B) b VQZ 2 position metal seal VQ5 00 2.7 2.7 2.7 Cv 1 2 12 12 12 C [dm3/(sbar)] VQD 0.14 0.14 0.14 4/2 5/3 (A/B EA/EB) b 2.9 2.9 2.9 Cv 12 12 12 C [dm3/(sbar)] 0.33 0.33 0.33 1 4/2 ( RA/B)

Air Cylinder CLA Series Fine Lock Model

(n-2) Same 5s+50(n-2) n=1,2,3,4,, 75+so(n-2) n=2,4,6,8.., B0+50(n-2) 1=2,4,6,4... s0+50(n-2) n=2.4.6.8... with 1 1 0 80 90 40 rr3.5 49 55.5 42 50 B I (O) 10(6.5 7 1 . 5 84.1 92.5 't!

Vacuum Unit Ejector / Vacuum Pump System

ZK2-OM00201 2.

COQ2BP

When disassembling, remove C type snap ring USing snap ring pliers (tool with C type snap ring) How to install I Mounting and Adjustment 1. The minimum stroke required for high magnetic field resistance auto switch is 2Smm. 2.

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Rolled steel Nickel plated Not required for 100 @0 Flat washer Nickel plated Steel wire @1 Spring washer Felt @2 Felt Nickel plated Rolled steel @3 Holder Nickel plated Carbon tool steel @4 Type C snap ring for hole 8-21-20 20 Guide Cylinder Series MGG 63 to 100/MGGF #3 !5 #9 #6 q t #8 !4 !7 @2 @3 @4 r y e #7 u o !1 i w !8 #4 !6 A MX @1 @0 !9 MTS !

Digital Flow Switch (Remote type monitor unit)

Option Part number Remarks Panel mount adapter ZS-26-B Waterproof seal with screws Front protective cover + Panel mount adapter ZS-26-C Waterproof seal with screws Protective cover only ZS-26-01 Please order panel mount adapters etc. separately. Power supply/output lead wire ZS-40-W Lead wire length 2 m Sensor connector (e-con) ZS-28-CA-4 1 pc.

IZx-OMP0064

IZ*-OMP0064 E P r o d u c t Ionizer Model/Series IZS4 Series Contents Safety Instructions . 1. How to Order . 1-1. Ionizer . 1-2. Accessories . 1-3. Option . 2. Installation . 2-1. Installation of ionizer . 2-1-1. Selection of piping port size . 2-1-2. Distance for installation . 2-1-3. Mounting and installation of the bracket . 2-2. Installation of the external sensor. 2-3.

3M/SMseries

Pod NVF3000 NVF5000 Supply SUP Cylindet cYL.1, CYL.2 A , B Exhaust EXH.1, EXH.2 Rl, R2 Symbol (SirEle solenoid) l c 1 : c Y L . 1 l IC2:CYL.2 lEl :EXH.r I {E2:EXH.2] Lubricant 1.

LFE-OMZ0013

Note Panel mount adapter ZS-26-B Waterproof seal with screw Front protective cover Panel mount adapter ZS-26-C Waterproof seal with screw Protective cover only ZS-26-01 Please order panel mount adapters etc. separately Power supply/output lead wire ZS-40-W Lead wire length: 2 m Sensor connector (e-con) ZS-28-C-5 1 pcs Copy lead wire ZS-40-Y Connect up to 10 copy destination units -9No.LFE